Filtering and cleaning device for treating high-temperature gas

Abstract

The utility model discloses a filtering and cleaning device for treating high-temperature gas, which comprises a filtering tank and a washer, the filtering tank comprises a filtering bag and a waste water area, the filtering bag is arranged at the upper part of the filtering tank, and the waste water area is arranged at the bottom of the filtering tank; the filtering tank further comprises an air inlet, an air outlet and a water outlet, the air inlet is located below the filtering bag and above the waste water area, the air outlet is located above the filtering bag, the water outlet is communicated with the waste water area, and an outlet of the washer is connected with the air inlet. According to the utility model, the working efficiency of argon recovery of the single crystal furnace is improved, the safety of recovery work is guaranteed, and the difficulty of recovery work is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of argon recovery of single crystal furnaces, and in particular to a filtering and cleaning device for processing high-temperature gas. Background Art

[0002] In the process of producing single crystal silicon by the Czochralski method, negative pressure argon gas is used in the single crystal furnace to remove volatiles to ensure the cleanliness of the main chamber. The circulating argon gas needs to be purified and recovered by the filter tank. Figure 1 As shown, the filtering and cleaning device currently used for the single crystal furnace is mainly composed of a filter tank 6, a filter bag 11 arranged in the filter tank 6, an air inlet pipe 21 and an air outlet pipe 23 connected to the filter tank 6, and a dust cleaning device. The volatiles generated during the operation of the single crystal furnace enter the filter tank 6 through the air inlet pipe 21, and the filter bag 11 in the filter tank 6 will separate the gas and the solid. The gas is discharged from the air outlet pipe 23, and the solid falls to the bottom 6 of the filter tank. After the single crystal furnace is stopped, the cleaning personnel will open the filter tank 6 and use the dust cleaning device to clean the volatiles at the bottom of the filter tank 6. The disadvantages of the existing technology are: 1) The high-temperature volatiles generated are directly bonded to the filter bag, and the high-temperature volatiles will cause the filter bag to be burned through; 2) Excessive bonding of volatiles to the filter bag will cause the furnace pressure to increase and shorten the operating time; 3) When the cleaning personnel clean the filter tank, the volatiles will burn when they encounter oxygen, which poses a greater safety hazard; 4) The filter tank can only be manually cleaned after the furnace is stopped, and the cleaning efficiency and effect are poor. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model aims to provide a filtering and cleaning device for treating high-temperature gases, so as to improve the efficiency of argon gas recovery in a single crystal furnace, ensure the safety of the recovery work, and reduce the difficulty of the recovery work.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A filtering and cleaning device for treating high-temperature gas, comprising: a filter tank and a scrubber, the filter tank comprising a filter bag and a wastewater area, the filter bag is arranged on the upper part of the filter tank, and the wastewater area is arranged at the bottom of the filter tank; the filter tank also comprises an air inlet, an air outlet and a water outlet, the air inlet is arranged on one side of the filter tank and is located below the filter bag and above the wastewater area, the air outlet is located above the filter bag, the water outlet is connected to the wastewater area, the outlet of the scrubber is connected to the air inlet, the inlet of the scrubber is connected to an air intake treatment device, the air intake treatment device comprises an air intake pipe and a water inlet pipe, the outlet of the air intake pipe and the outlet of the water inlet pipe are jointly connected to the inlet of the scrubber.

[0006] Furthermore, a demister is provided at the lower end of the filter bag, and the demister is located above the air inlet.

[0007] Furthermore, the demister comprises a wire mesh, which is formed by a plurality of filaments connected in an interlaced manner.

[0008] Furthermore, a capillary is attached to the filament, and the filament is wettable.

[0009] Furthermore, the scrubber is a Venturi scrubber.

[0010] Furthermore, a flow meter is connected to the middle of the air inlet pipe, a first flow control valve is arranged in the middle of the water inlet pipe, and both the flow meter and the first flow control valve are connected to a flow controller.

[0011] Furthermore, the air outlet is connected to an air outlet pipe, a second flow control valve is arranged in the middle of the air outlet pipe, a pressure measuring gauge is arranged on the upper part of the filter tank, and the pressure measuring gauge and the second flow control valve are both connected to a pressure controller.

[0012] Furthermore, the filter tank also includes a water inlet, and the water inlet is connected to the wastewater area.

[0013] Furthermore, the water inlet is connected to a second water inlet pipe, the second water inlet pipe is provided with a filter and a fourth flow control valve, the wastewater area of ​​the filter tank is also connected to a temperature measuring meter, and the temperature measuring meter and the fourth flow control valve are both connected to a temperature controller.

[0014] Furthermore, the water outlet is connected to a water outlet pipe, the wastewater area of ​​the filter tank is connected to a liquid level meter, a third flow control valve is arranged in the middle of the water outlet pipe, and the liquid level meter and the third flow control valve are both connected to a liquid level controller.

[0015] The beneficial effects of the utility model are:

[0016] 1) In the utility model, after the gas passing through the scrubber is cooled, when the solid particles in the gas adhere to the filter bag, the filter bag is not easily burned through, thereby extending the service life of the filter bag. In addition, the solid particles in the gas passing through the scrubber are separated in advance in the scrubber, reducing the amount of solid particles adhering to the filter bag, and there is no need to frequently clean or replace the filter bag, which is conducive to extending the operating time of the filter tank cleaning device.

[0017] 2) The liquid separated by the gas flowing into the filter tank and the liquid droplets carried by the gas separated by the demister all drip into the wastewater area 26 at the bottom of the filter tank. By regularly draining the wastewater, the filter tank can be cleaned without manual cleaning of the filter tank, and full automatic cleaning can be achieved.

[0018] 3) The cleaning work of the filter tank of the utility model uses water as a medium to clean the dust particles in the gas. The argon gas filtered by the scrubber, demister and filter bag of the utility model is cleaner, which reduces the difficulty of argon gas purification in the back-end process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0020] Figure 1 A schematic diagram of the structure of a filtering and cleaning device for a single crystal furnace in the prior art

[0021] Figure 2 The utility model is a schematic diagram of the structure of a filtering and cleaning device for treating high-temperature gas.

[0022] Figure numerals: 1. flow meter; 2. flow controller; 3. first flow control valve; 4. scrubber 5. demister; 6. filter tank; 7. pressure meter; 8. pressure controller; 9. air outlet; 10. second flow control valve; 11. filter bag; 12. temperature meter; 13. temperature controller; 14. filter; 15. fourth flow control valve; 16. water inlet; 17. water outlet; 18. liquid level meter; 19. liquid level controller; 20. third flow control valve; 21. air inlet pipe; 22. first water inlet pipe; 23. air outlet pipe; 24. second water inlet pipe; 25. water outlet pipe; 26. wastewater area. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0024] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In the description of the utility model, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0026] Embodiment 1:

[0027] The present embodiment provides a filter tank cleaning device, comprising: a filter tank 6 and a scrubber 4, the filter tank 6 comprising a filter bag 11 and a wastewater area 26, the filter bag 11 is arranged on the upper part of the filter tank 6, and the wastewater area 26 is arranged at the bottom of the filter tank 6; the filter tank 6 also comprises an air inlet, an air outlet 9 and a water outlet 17, the air inlet is arranged on one side of the filter tank 6 and is located below the filter bag 11 and above the wastewater area 26, the air outlet 9 is located above the filter bag 11, the water outlet 17 is connected to the wastewater area 26, the outlet of the scrubber 4 is connected to the air inlet, and the inlet of the scrubber is connected to an air intake treatment device, the air intake treatment device comprises an air intake pipe 21 and a water inlet pipe 22, and the outlet of the air intake pipe 21 and the outlet of the water inlet pipe 22 are commonly connected to the inlet of the scrubber 4.

[0028] Example 1 Overall process:

[0029] When the single crystal furnace is working, volatile gas is generated. The gas is mixed with water and passes through the scrubber 4 before entering the filter tank 6 for separation. After entering the filter tank 6, the gas moves upward and passes through the filter bag 11. The gas enters the filter bag 11 to further filter the solid particles entrained in the gas. The gas after filtering the solid particles is finally discharged from the gas outlet 9. The liquid separated from the gas entering the filter tank 6 drips into the wastewater area 26 at the bottom of the filter tank 6.

[0030] The technical effects of the first embodiment are as follows:

[0031] In this embodiment, after the gas passing through the scrubber is cooled, when the solid particles in the gas adhere to the filter bag 11, it is not easy to burn through the filter bag 11. The solid particles in the gas passing through the scrubber are separated in advance in the scrubber, which reduces the amount of solid particles adhering to the filter bag 11, and does not need to frequently clean or replace the filter bag 11, which is conducive to extending the operation time of the filter tank 6 cleaning device.

[0032] Embodiment 2:

[0033] The present embodiment provides a filtering and cleaning device for treating high-temperature gas, comprising: a filter tank 6 and a scrubber 4, the filter tank 6 comprising a filter bag 11 and a wastewater area 26, the filter bag 11 being arranged at the upper part of the filter tank 6, and the wastewater area 26 being arranged at the bottom of the filter tank 6; the filter tank 6 further comprising an air inlet, an air outlet 9 and a water outlet 17, the air inlet being located below the filter bag 11 and above the wastewater area 26, the air outlet 9 being located above the filter bag 11, the water outlet 17 being connected to the wastewater area 26, the outlet of the scrubber 4 being connected to the air inlet, the inlet of the scrubber being connected to an air intake treatment device, the air intake treatment device comprising an air intake pipe 21 and a water intake pipe 22, the outlet of the air intake pipe 21 and the outlet of the water intake pipe 22 being connected to the inlet of the scrubber 4. A demister 5 is also arranged at the lower end of the filter bag 11, and the demister 5 is located above the air inlet.

[0034] Embodiment 2 Overall process:

[0035] When the single crystal furnace is working, volatile gas will be generated. After being washed 4, the gas enters the filter tank 6 for separation. After entering the filter tank 6, the gas moves upward and passes through the demister 5 and the filter bag 11 in sequence. The gas contains mist. After the mist is removed by the demister 11, the gas without mist enters the filter bag 11 to further filter the solid particles entrained in the gas. The gas after filtering the solid particles is finally discharged from the gas outlet 9. The liquid separated by the gas entering the filter tank 6 during its own flow and the droplets entrained by the gas separated by the demister 11 all drip into the wastewater area 26 at the bottom of the filter tank 6.

[0036] The technical effects of the second embodiment are as follows:

[0037] On the basis of the first embodiment, the present embodiment further includes a demister 5. After the gas in the present embodiment passes through the demister 5, it is substantially free of mist.

[0038] Embodiment three:

[0039] The present embodiment provides a filter tank cleaning device, comprising: a filter tank 6 and a scrubber 4, the filter tank 6 comprising a filter bag 11 and a wastewater area 26, the filter bag 11 being arranged at the upper part of the filter tank 6, and the wastewater area 26 being arranged at the bottom of the filter tank 6; the filter tank 6 further comprising an air inlet, an air outlet 9, a water inlet 16 and a water outlet 17, the air inlet being arranged at one side of the filter tank 6 and being located below the filter bag 11 and above the wastewater area 26, the air outlet 9 being located above the filter bag 11, and the water inlet 16 and the water outlet 17 being connected to the wastewater area 26. The outlet of the scrubber 4 is connected to the air inlet, and the inlet of the scrubber is connected to an air intake treatment device, the air intake treatment device comprising an air intake pipe 21 and a water intake pipe 22, and the outlet of the air intake pipe 21 and the outlet of the water intake pipe 22 are connected to the inlet of the scrubber 4 together.

[0040] The technical effects of the third embodiment are as follows:

[0041] In the third embodiment, on the basis of the first embodiment, a water inlet 16 is additionally provided in the wastewater area 26. The inlet water is cold water, which can effectively reduce the temperature in the filter tank and dilute the wastewater concentration to prevent it from reaching saturation and thus gasification.

[0042] The details of the devices and working principles involved in the above process are as follows:

[0043] Intake air treatment:

[0044] One end of the scrubber 4 is connected to the filter tank 6, and the other end is connected to the air intake treatment device. The air intake treatment device is provided with a measuring device and a quantity control device at the air inlet. The air intake treatment device includes an air intake pipe 21 and a first water inlet pipe 22. One end of the air intake pipe 21 and one end of the first water inlet pipe 22 are commonly connected to the other end of the scrubber. A flow meter 1 is connected to the middle of the air intake pipe 21, and a first flow control valve 3 is connected to the middle of the first water inlet pipe 22. The flow meter 1 and the first flow control valve 3 are both connected to the flow controller 2.

[0045] After the gas exhausted from the single crystal furnace enters from the air inlet pipe 21 and is measured by the flow meter 1, the flow controller 2 will control the flow of the first flow control valve 3 according to the value of the flow meter 1, so that the gas in the air inlet pipe 21 and the raw water in the first water inlet pipe 22 are fully mixed and enter the scrubber.

[0046] washing:

[0047] The gas produced by the single crystal furnace has high temperature characteristics. The gas first passes through the scrubber 4 for cooling and washing, and then further enters the filter bag 11 in the filter tank 6. The installation of the scrubber 4 has the following advantages:

[0048] (1) After the washed gas is cooled, when the solid particles in the gas adhere to the filter bag 11, it is not easy for the filter bag 11 to burn through.

[0049] (2) After the gas is washed, the solid particles in the gas are separated in advance in the scrubber, which reduces the amount of solid particles adhering to the filter bag 11. There is no need to frequently clean or replace the filter bag 11, which is beneficial to extend the operating time of the cleaning device of the filter tank 6.

[0050] The scrubber of this embodiment is a Venturi scrubber. The Venturi scrubber is composed of an internal air intake pipe, a contraction pipe, a nozzle, a throat pipe, and a diffusion pipe, and is used to remove dust and cool the gas. The air intake pipe 21 is connected to the internal air intake pipe, and the nozzle is connected to the first water inlet pipe 22. The working principle of the gas entering the Venturi scrubber is as follows:

[0051] After the dust-containing gas enters the contraction tube, the gas velocity gradually increases, and the pressure energy of the airflow gradually changes into kinetic energy. The gas velocity reaches the maximum at the throat, and the relative velocity of gas and liquid is very high. Under the impact of high-speed airflow, the water droplets sprayed from the nozzle are highly atomized. The high speed and low pressure at the throat make the gas humidity reach a supersaturated state, the air film attached to the surface of the dust particles is broken, and the dust particles are wetted by water. Fierce inertial collisions and condensation occur between the dust particles and the droplets or dust particles. The temperature of the droplets rises and evaporates, and the high-temperature gas cools down sharply. The cooling of the Venturi scrubber is almost carried out under adiabatic conditions. After entering the diffusion tube, the gas velocity decreases, the pressure rises, and the condensation of the supersaturated steam with dust particles as condensation nuclei accelerates. The particles condensed with water continue to collide and condense, and small particles condense into large particles, which are easy to separate from the gas, so that the gas is purified.

[0052] Defoaming:

[0053] In this embodiment, a demister 5 is further provided at the lower end of the filter bag 11, the demister 5 is located above the air inlet, and the demister 5 comprises a wire mesh, which is formed by a plurality of filaments connected in an interlaced manner. Capillaries are attached to the filaments, and the filaments are wettable.

[0054] The gas entering the filter tank 6 after the scrubber 4 contains mist, and the gas with mist rises at a certain speed and passes through the demister 5, which includes a wire mesh, which is formed by a number of filaments connected in an interlaced manner. Due to the inertia of the rising mist, the mist collides with the wire mesh filaments of the demister 5 and adheres to the surface of the filaments. Under the wettability of the filaments, the surface tension of the liquid, and the capillary action of the filaments, the droplets formed by the accumulation of mist become larger and larger. When the accumulated droplets are so large that the gravity generated by themselves exceeds the combined force of the rising force of the gas and the surface tension of the liquid, the droplets separate from the filaments and fall into the wastewater area 26. After passing through the demister 5, the gas basically does not contain mist.

[0055] Filter solid particles:

[0056] The filter bag 11 will separate the solid particles in the gas. The filter bag 11 is in a strip shape, with an open lower end and a sealed upper end. The solid particles are bonded to the filter bag 11.

[0057] Exhaust Control:

[0058] The air outlet 9 is connected to the air outlet pipe 23 , a second flow control valve 10 is connected to the middle of the air outlet pipe 23 , the pressure measuring gauge 7 is connected to the filter tank 6 , and both the pressure measuring gauge 7 and the second flow control valve 10 are connected to the pressure controller 8 .

[0059] The pressure measuring meter 7 transmits a signal to the pressure controller 8 , thereby controlling the second flow control valve 10 to adjust the flow rate of the exhaust gas to control the pressure of the filter tank 6 .

[0060] Collecting waste liquid:

[0061] The gas entering the filter tank 6 through the scrubber 4 contains liquid, which will fall into the wastewater area 26 at the bottom of the filter tank 6 due to its own gravity. A water outlet 17 is provided at the bottom of the filter tank 26 for regularly draining wastewater. By regularly draining wastewater, the filter tank 6 can be cleaned without manual cleaning of the filter tank 6.

[0062] The water outlet 17 is connected to the water outlet pipe 25, the liquid level meter 18 is connected to the wastewater area 26 of the filter tank 6, the middle of the water outlet pipe 25 is connected to the third flow control valve 20, the liquid level meter 18 and the third flow control valve 20 are connected to the liquid level controller 19, the liquid level meter 18 transmits the liquid level of the wastewater at the bottom of the filter tank to the liquid level controller 19, and the liquid level controller 19 controls the liquid level of the wastewater at the bottom of the filter tank by adjusting the opening of the flow control valve 20. The wastewater discharged from the wastewater discharge port can be reused as raw water after being filtered and cooled in the back-end process.

[0063] Wastewater area inlet control:

[0064] The water inlet 16 is connected to the second water inlet pipe 24 , the middle part of which is connected in sequence with the filter 14 and the fourth flow control valve 15 . The wastewater area 26 of the filter tank 6 is also connected to the temperature measuring meter 12 , and the temperature measuring meter 12 and the fourth flow control valve 15 are both connected to the temperature controller 13 .

[0065] The temperature measuring meter 12 transmits the temperature of the waste water at the bottom of the filter tank 6 to the temperature controller 13. The temperature controller 13 adjusts the flow rate of raw water into the filter 14 and finally into the water inlet 16 by adjusting the opening of the fourth flow control valve 15, thereby controlling the temperature of the waste water at the bottom of the filter tank 6.

[0066] Through the above-mentioned water inlet control, cool water can enter the wastewater area at the bottom of the filter tank 6 from the water inlet 16 as needed, which can effectively reduce the temperature in the filter tank and dilute the wastewater concentration to prevent it from reaching saturation and gasification.

[0067] In summary, the filter tank 6 of the present invention uses water as a medium to clean the dust particles in the gas.

[0068] In the description of the present utility model, unless otherwise clearly defined, the words such as setting, installing, connecting, etc. should be understood in a broad sense, and the technical personnel in the relevant technical field can reasonably determine the specific meaning of the above words in the present utility model in combination with the specific content of the technical solution. For the technical personnel in the field, various other corresponding changes and deformations can be made according to the technical solution and conception described above, and all these changes and deformations should fall within the scope of protection of the claims of the present utility model.

Claims

1. A filtering and cleaning device for treating high temperature gas, characterized in that: include: A filter tank (6) and a scrubber (4), wherein the filter tank (6) comprises a filter bag (11) and a wastewater area (26), the filter bag (11) being arranged at the upper part of the filter tank (6), and the wastewater area (26) being arranged at the bottom of the filter tank (6); the filter tank (6) further comprises an air inlet, an air outlet (9) and a water outlet (17), the air inlet being arranged on one side of the filter tank (6) and being located below the filter bag (11) and between the wastewater area (26) and the filter bag (11). 6), the air outlet (9) is located above the filter bag (11), the water outlet (17) is connected to the wastewater area (26), the outlet of the scrubber (4) is connected to the air inlet, the inlet of the scrubber is connected to an air intake treatment device, the air intake treatment device includes an air intake pipe (21) and a water inlet pipe (22), the outlet of the air intake pipe (21) and the outlet of the water inlet pipe (22) are connected to the inlet of the scrubber (4) together.

2. A filtering and cleaning device for treating high temperature gas according to claim 1, characterized in that: A demister (5) is also provided at the lower end of the filter bag (11), and the demister (5) is located above the air inlet.

3. A filtering and cleaning device for treating high temperature gas according to claim 2, characterized in that: The demister (5) comprises a wire mesh, which is formed by a plurality of filaments connected in an interlaced manner.

4. A filtering and cleaning device for treating high temperature gas according to claim 3, characterized in that: The filaments are attached with capillaries, and the filaments are wettable.

5. A filtering and cleaning device for treating high temperature gas according to claim 1, characterized in that: The scrubber (4) is a Venturi scrubber.

6. A filtering and cleaning device for treating high temperature gas according to claim 1, characterized in that: A flow meter (1) is connected to the middle of the air inlet pipe (21), a first flow control valve (3) is provided in the middle of the water inlet pipe (22), and both the flow meter (1) and the first flow control valve (3) are connected to a flow controller (2).

7. A filtering and cleaning device for treating high temperature gas according to claim 1, characterized in that: The air outlet (9) is connected to an air outlet pipe (23), a second flow control valve (10) is arranged in the middle of the air outlet pipe (23), a pressure measuring gauge (7) is arranged on the top of the filter tank (6), and the pressure measuring gauge (7) and the second flow control valve (10) are both connected to a pressure controller (8).

8. The filtering and cleaning device for treating high temperature gas according to claim 1, characterized in that: The filter tank (6) further comprises a water inlet (16), wherein the water inlet (16) is in communication with the wastewater area (26).

9. A filtering and cleaning device for treating high temperature gas according to claim 8, characterized in that: The water inlet (16) is connected to a second water inlet pipe (24), the second water inlet pipe (24) is provided with a filter (14) and a fourth flow control valve (15), the wastewater area (26) of the filter tank (6) is also connected to a temperature measuring meter (12), and the temperature measuring meter (12) and the fourth flow control valve (15) are both connected to a temperature controller (13).

10. A filtering and cleaning device for treating high temperature gas according to claim 1, characterized in that: The water outlet (17) is connected to a water outlet pipe (25), the wastewater area (26) of the filter tank (6) is connected to a liquid level meter (18), a third flow control valve (20) is provided in the middle of the water outlet pipe (25), and the liquid level meter (18) and the third flow control valve (20) are both connected to a liquid level controller (19).

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