Cooling disc of cooling device for simultaneously drawing multiple crystal bars

Abstract

A cooling plate of a cooling device for simultaneously drawing a plurality of crystal bars relates to the technical field of artificial lens preparation, and is characterized in that an opening which extends outwards to the outer edge surface of a cooling plate main body is formed in the side wall of any crystal bar lifting hole (4), so that the crystal bar lifting hole forms a notch hole (8); the CCD camera collects image information of the diameter of the crystal bar through the notch hole, the defect that the CCD camera cannot collect clear diameter information of the crystal bar is effectively overcome, further, a temperature conducting layer (9) is arranged on the inner wall of the notch hole, it is guaranteed that the drawing working condition of the notch hole is consistent with that of other crystal bar lifting holes as much as possible, and the crystal bar diameter drawing device has the advantages of being simple and convenient in structure, low in cost and the like. And the device is suitable for large-scale popularization and application.

Description

Technical Field

[0001] The utility model relates to the technical field of artificial crystal preparation, in particular to a cooling plate of a cooling device for simultaneously pulling a plurality of crystal rods. Background Art

[0002] Taking multi / monocrystalline silicon as an example, a large amount of silicon cores are used in the entire production process of multi / monocrystalline silicon. In order to reduce the production cost of silicon cores, the applicant submitted a PCT patent application on March 21, 2023. The patent name is Crystal Cooling Device and Artificial Crystal Preparation Equipment for Simultaneously Pulling Multiple Crystals, and the international application number is PCT / CN2023 / 082901. The patent application discloses a crystal cooling device for simultaneously pulling multiple crystals. In the entire device, the crystal rod cooling plate is one of the key components. In actual use, it is found that when the existing crystal rod cooling plate structure uses a CCD camera to collect the diameter of the crystal rod, the CCD camera is set at a position about 15° above the cooling plate. When the CCD camera collects the aperture at the junction of the lower end of the seed crystal and the melt in the crucible (the brightness of the contact area between the melt and the seed crystal is high), the circular crystal rod pulling hole on the cooling plate will block the aperture. The CCD camera cannot obtain a complete crystal rod image, resulting in inaccurate diameter measurement data. Therefore, how to provide a crystal rod cooling plate structure that can adapt to the CCD camera to collect crystal rod diameter information is particularly important. Summary of the invention

[0003] In order to achieve the above-mentioned purpose of the invention, the utility model discloses a cooling plate for a cooling device for simultaneously pulling multiple crystal rods. The utility model forms a notch hole in the crystal rod pulling hole by providing an opening extending outwardly to the outer edge surface of the cooling plate body on the side wall of any crystal rod pulling hole. The CCD camera collects image information of the crystal rod diameter through the notch hole, effectively avoiding the disadvantage that the CCD camera cannot collect accurate crystal rod diameter information.

[0004] In order to achieve the purpose of the above invention, the utility model adopts the following technical solutions:

[0005] A cooling plate of a cooling device for simultaneously drawing multiple crystal rods is provided on the cooling plate with at least one circle of crystal rod pulling holes, a cooling medium channel for cooling the crystal rods, and a notch hole for a CCD camera to measure the diameter of the crystal rods.

[0006] The cooling plate of the cooling device for simultaneously pulling multiple crystal rods, the cooling plate comprises a cooling medium inlet pipe, a cooling medium outlet pipe and a cooling plate body, a cavity is provided in the cooling plate body and a cooling medium channel for cooling the crystal rod is formed by the cavity, and at least one circle of crystal rod pulling holes and a cooling medium inlet and a cooling medium outlet respectively connected to the cavity are provided on the cooling plate body, the cooling medium inlet is connected to the lower end of the cooling medium inlet pipe, the upper end of the cooling medium inlet pipe is connected to the upper cooling medium outlet below the lower flange of the crystal rod cooling device, the cooling medium outlet is connected to the lower end of the cooling medium outlet pipe, the upper end of the cooling medium outlet pipe is connected to the upper cooling medium inlet below the lower flange of the crystal rod cooling device, and an opening extending outward to the outer edge surface of the cooling plate body is provided on the side wall of any one of the crystal rod pulling holes so that the crystal rod pulling hole forms a notch hole.

[0007] The cooling plate of the cooling device for simultaneously drawing multiple crystal rods has a thermal conductive layer on the inner wall of the notch hole.

[0008] In the cooling plate of the cooling device for simultaneously pulling multiple crystal rods, when the crystal rod pulling holes are arranged in two or more circles, the notch holes are arranged at any one of the crystal rod pulling holes in the outermost circle.

[0009] The cooling plate of the cooling device for simultaneously drawing multiple crystal rods has a central hole in the middle of the cooling plate body.

[0010] The cooling plate of the cooling device for simultaneously pulling multiple crystal rods is provided with at least one level of upwardly recessed steps below the cooling plate body, and a circle of crystal rod pulling holes is provided on each level of the recessed steps.

[0011] The cooling plate of the cooling device for simultaneously drawing multiple crystal rods has a heat preservation plate disposed below the cooling plate body.

[0012] The cooling plate of the cooling device for simultaneously pulling multiple crystal rods is provided with a recessed step that is recessed upwardly below the cooling plate body, an outer ring insulation plate is provided on the outer ring below the cooling plate body, a circle of outer ring insulation plate crystal rod perforations corresponding to the positions of the crystal rod pulling holes are provided on the outer ring insulation plate, and an inner ring insulation plate is provided under the recessed step, a circle of inner ring insulation plate crystal rod perforations corresponding to the positions of the crystal rod pulling holes are provided on the inner ring insulation plate.

[0013] The cooling plate of the cooling device for simultaneously drawing multiple crystal rods, the outer ring insulation plate crystal rod perforations corresponding to the notch holes on the outer ring insulation plate are arranged as oblong crystal rod perforations.

[0014] The cooling plate of the cooling device for simultaneously drawing multiple crystal rods, the diameters of the crystal rod holes of the inner ring insulation plate and the crystal rod holes of the outer ring insulation plate are less than or equal to the diameter of the crystal rod pulling hole.

[0015] Due to the adoption of the above technical solution, the utility model has the following beneficial effects:

[0016] The utility model forms a notch hole in the crystal rod pulling hole by arranging an opening extending outwardly to the outer edge surface of the cooling plate main body on the side wall of any crystal rod pulling hole. The CCD camera collects image information of the crystal rod diameter through the notch hole, effectively avoiding the disadvantage that the CCD camera cannot collect accurate crystal rod diameter information. Furthermore, by arranging a thermal conductive layer on the inner wall of the notch hole, the pulling condition of the notch hole is guaranteed to be consistent with that of other crystal rod pulling holes as much as possible. The utility model has the characteristics of simple structure, good use effect, etc., and is suitable for large-scale promotion and application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0018] Figure 2 yes Figure 1 A schematic diagram of a top view structure;

[0019] Figure 3 yes Figure 2 AA cross-sectional structural diagram;

[0020] Figure 4 It is a schematic diagram of the three-dimensional structure of the utility model in the second orientation;

[0021] Figure 5 It is a schematic diagram of the three-dimensional structure of the utility model in the third position;

[0022] Figure 6 It is a schematic diagram of the three-dimensional structure of the fourth aspect of the utility model;

[0023] In the figure: 1. Cooling medium inlet pipe; 2. Cooling medium outlet pipe; 3. Cooling plate body; 4. Crystal rod pulling hole; 5. Outer ring insulation plate; 6. Middle hole; 7. Inner ring insulation plate; 8. Notch hole; 9. Thermal conductive layer; 10. Long round crystal rod perforation; 11. Cavity; 12. Concave step; 13. Outer ring insulation plate crystal rod perforation; 14. Inner ring insulation plate crystal rod perforation. DETAILED DESCRIPTION

[0024] The present application is described in detail below by way of examples, but it is not intended that there is any adverse limitation to the present application. The present application has been described in detail herein, and its specific embodiments are also disclosed therein. It will be apparent to those skilled in the art that various changes and modifications can be made to the specific embodiments of the present application without departing from the spirit and scope of the present application.

[0025] In the description of the present invention, it should be understood that the terms "center", "lateral", "length", "width", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "side" and the like indicate positions or location relationships based on the attached Figure 1 The orientation or positional relationship shown is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0026] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The innovation of the utility model is mainly that an opening extending outwardly to the outer edge surface of the cooling plate body is provided on the side wall of any crystal rod pulling hole to form a notch hole in the crystal rod pulling hole, and the CCD camera collects image information of the crystal rod diameter through the notch hole (that is, the CCD camera can collect the aperture at the junction of the lower end of the seed crystal and the melt in the crucible through the notch hole, and the notch hole will not block the aperture), effectively avoiding the disadvantage that the CCD camera cannot collect clear crystal rod diameter information, etc. Furthermore, by arranging a temperature conductive layer on the inner wall of the notch hole, the pulling condition of the notch hole and other crystal rod pulling holes can be guaranteed to be consistent as much as possible.

[0028] The utility model discloses a cooling plate for a cooling device for simultaneously pulling multiple crystal rods, wherein the cooling plate is provided with at least one circle of crystal rod pulling holes 4, a cooling medium channel for cooling the crystal rods, and a notch hole 8 for a CCD camera to measure the diameter of the crystal rods.

[0029] Below, the specific structure of the preferred embodiment of the present application will be described in detail based on the accompanying drawings and various embodiments.

[0030] Attached Figures 1 to 6A cooling plate for a cooling device for simultaneously pulling multiple crystal rods is shown, the cooling plate comprising a cooling medium inlet pipe 1, a cooling medium outlet pipe 2 and a cooling plate body 3, a cavity 11 is provided in the cooling plate body 3 and a cooling medium channel for cooling the crystal rod is formed by the cavity 11, and at least one circle of crystal rod pulling holes 4 and a cooling medium inlet and a cooling medium outlet respectively connected to the cavity 11 are provided on the cooling plate body 3, the cooling medium inlet is connected to the lower end of the cooling medium inlet pipe 1, the upper end of the cooling medium inlet pipe 1 is connected to the upper cooling medium outlet below the lower flange of the crystal rod cooling device, the cooling medium outlet is connected to the lower end of the cooling medium outlet pipe 2, the upper end of the cooling medium outlet pipe is connected to the upper cooling medium inlet below the lower flange of the crystal rod cooling device, and an opening extending outwardly to the outer edge surface of the cooling plate body 3 is provided on the side wall of any one of the crystal rod pulling holes 4 so that the crystal rod pulling hole 4 forms a notch hole 8.

[0031] It should be noted that the number of the crystal rod pulling holes 4 shown in the drawings can be adjusted, that is, it can be increased or decreased. The drawings are only schematic diagrams and do not limit the number of the crystal rod pulling holes 4.

[0032] Furthermore, the functions of the cooling medium inlet pipe 1 and the cooling medium outlet pipe 2 can be used interchangeably, for example, the cooling medium inlet pipe 1 can be used as an inlet pipe and can also be used as an outlet pipe.

[0033] During implementation, the cooling medium introduced into the cooling medium channel is cooling water or cooling oil or cooling gas, such as liquid nitrogen.

[0034] Furthermore, in order to ensure that the drawing conditions of the notch hole and other crystal rod pulling holes are consistent as much as possible, a thermal conductive layer 9 is provided on the inner wall of the notch hole 8. When the thermal conductive layer 9 is provided, the thermal conductive layer 9 can be selected as graphite glue, that is, a layer of graphite glue is applied on the inner wall of the notch hole 8. In actual use, the graphite glue absorbs the radiant heat around the notch hole 8, and transfers the absorbed radiant heat to the cooling disk body 3. A cooling medium passes through the cavity 11 on the cooling disk body 3, and the cooling disk body 3 is cooled by the cooling medium, thereby reducing the temperature in the notch hole 8. When the temperature in the notch hole 8 is reduced, the cooling rate of the crystal rod is increased, so that the temperature of the notch hole 8 is similar to that of other round crystal rod pulling holes 4, thereby achieving the consistency of the diameter of the pulled crystal rod.

[0035] In specific implementation, the graphite glue can be replaced by a zirconium oxide coating or a silicon carbide coating, that is, the material of the thermal conductive layer 9 can be any material with good thermal conductivity.

[0036] During implementation, the thermal conductive layer 9 can also be set in the form of a plurality of materials superimposed, such as first spraying G14 angular corundum sand on the inner wall of the notch hole 8, and the sandblasting surface is required to be evenly sprayed without leakage during spraying to ensure the surface cleanness; then a high-speed arc sprayer is used to spray the NI-AL coating on the sandblasted surface; and then a supersonic flame spraying method is used to spray a zirconium oxide coating on the surface of the NI-AL coating, requiring that the sandblasted surface is completely covered and the coating thickness is more than 1 mm; finally, the coating surface is milled by digital milling to ensure that the coating surface (i.e., the thermal conductive layer 9) has a thickness of 0.6 to 0.8 mm, and the milled surface is ensured to be smooth.

[0037] Furthermore, when the crystal rod pulling holes 4 are arranged in two circles or more, the notch holes 8 are arranged at any one of the crystal rod pulling holes 4 in the outermost circle.

[0038] Furthermore, a middle hole 6 is provided in the middle of the cooling disk body 3 .

[0039] Furthermore, at least one level of upwardly recessed step 12 is provided below the cooling plate body 3, and a circle of crystal rod pulling holes 4 is provided on each level of the recessed step 12. In implementation, when the crystal rod pulling holes 4 are provided in multiple circles, by respectively providing multiple levels of recessed steps 12 below the cooling plate body 3, the number of the recessed steps 12 is consistent with the number of circles of the crystal rod pulling holes 4, and the provision of the recessed steps 12 can ensure the consistency of the diameter of the crystal rod pulled by each circle of the crystal rod pulling holes 4, and the main technical problem to be solved is to overcome the problem of uneven temperature of the melt in the crucible.

[0040] Furthermore, a heat preservation plate is provided under the cooling disk body 3 .

[0041] Further, if Figure 5 As shown, when a recessed step 12 recessed upward is provided below the cooling plate body 3, an outer ring insulation plate 5 is provided on the outer ring below the cooling plate body 3, and a circle of outer ring insulation plate crystal rod through holes 13 corresponding to the positions of the crystal rod pulling holes 4 are provided on the outer ring insulation plate 5, and the diameter of the outer ring insulation plate 5 can be greater than or equal to the diameter of the cooling plate body 3, and an inner ring insulation plate 7 is provided below the recessed step 12, and a circle of inner ring insulation plate crystal rod through holes 14 corresponding to the positions of the crystal rod pulling holes 4 are provided on the inner ring insulation plate 7. In implementation, when the insulation plate is provided in multiple circles, each circle of insulation plates is an annular structure.

[0042] Furthermore, the outer ring insulation plate crystal rod through-holes 13 corresponding to the notch holes 8 on the outer ring insulation plate 5 are set as oblong crystal rod through-holes 10, so as to avoid the outer ring insulation plate crystal rod through-holes 13 blocking the aperture of the newly drawn crystal rod.

[0043] During implementation, an upwardly extending boss can be provided on the outer ring insulation plate 5 of the outer end of the oblong crystal rod through-hole 10, and the height of the boss must be lower than the top of the cooling plate body 3 (to ensure that the CCD camera can capture the aperture), that is, the outer edge surface of the notch hole 8 can be blocked by the boss.

[0044] Furthermore, the diameters of the inner ring insulation plate crystal rod through holes 14 and the outer ring insulation plate crystal rod through holes 13 are smaller than or equal to the diameter of the crystal rod pulling hole 4 .

[0045] The parts not described in detail in this application are technical solutions for which the applicant has separately applied for a patent. For details, please refer to a PCT patent application submitted by the applicant on March 21, 2023. The patent name is Crystal Cooling Device and Artificial Crystal Preparation Equipment for Simultaneous Pulling of Multiple Crystals, and the international application number is PCT / CN2023 / 082901.

[0046] The present application is mainly applied to a silicon core furnace or a core material furnace for drawing silicon cores using broken silicon materials.

[0047] Parts not described in detail in this utility model are all prior art.

[0048] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the above embodiments of the utility model can be combined with each other, and the utility model can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A cooling plate for a cooling device for simultaneously pulling multiple crystal rods, characterized in that: The cooling plate is provided with at least one circle of crystal rod pulling holes (4), a cooling medium channel for cooling the crystal rod, and a notch hole (8) for a CCD camera to measure the diameter of the crystal rod.

2. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 1, characterized in that: The cooling disk comprises a cooling medium inlet pipe (1), a cooling medium outlet pipe (2) and a cooling disk body (3); a cavity (11) is provided in the cooling disk body (3) and a cooling medium channel for cooling the crystal rod is formed by the cavity (11); and at least one circle of crystal rod pulling holes (4) and a cooling medium inlet and a cooling medium outlet respectively connected to the cavity (11) are provided on the cooling disk body (3); the cooling medium inlet is connected to the lower end of the cooling medium inlet pipe (1); the upper end of the cooling medium inlet pipe (1) is connected to the upper cooling medium outlet below the lower flange of the crystal rod cooling device; the cooling medium outlet is connected to the lower end of the cooling medium outlet pipe (2); the upper end of the cooling medium outlet pipe is connected to the upper cooling medium inlet below the lower flange of the crystal rod cooling device; and an opening extending outwardly to the outer edge surface of the cooling disk body (3) is provided on the side wall of any one of the crystal rod pulling holes (4) so ​​that the crystal rod pulling hole (4) forms a notch hole (8).

3. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to any one of claims 1 or 2, characterized in that: A thermal conductive layer (9) is provided on the inner wall of the notch hole (8).

4. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to any one of claims 1 or 2, characterized in that: When the crystal rod pulling holes (4) are arranged in two circles or more, the notch holes (8) are arranged at any one of the crystal rod pulling holes (4) in the outermost circle.

5. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 2, characterized in that: A middle hole (6) is provided in the middle of the cooling plate body (3).

6. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 2, characterized in that: At least one level of upwardly recessed step (12) is provided below the cooling plate body (3), and a circle of crystal rod pulling holes (4) is provided on each level of the recessed step (12).

7. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 2, characterized in that: A heat preservation plate is provided below the cooling plate body (3).

8. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 2, characterized in that: When a recessed step (12) recessed upward is provided below the cooling disk body (3), an outer ring insulation plate (5) is provided on the outer ring below the cooling disk body (3), and a circle of outer ring insulation plate crystal rod through holes (13) corresponding to the positions of the crystal rod lifting holes (4) are provided on the outer ring insulation plate (5); an inner ring insulation plate (7) is provided below the recessed step (12), and a circle of inner ring insulation plate crystal rod through holes (14) corresponding to the positions of the crystal rod lifting holes (4) are provided on the inner ring insulation plate (7).

9. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 8, characterized in that: The outer ring heat-insulating plate crystal rod through-holes (13) on the outer ring heat-insulating plate (5) corresponding to the notched holes (8) are configured as oblong crystal rod through-holes (10).

10. The cooling plate of the cooling device for simultaneously pulling multiple crystal rods according to claim 8, characterized in that: The diameters of the inner ring insulation plate crystal rod through holes (14) and the outer ring insulation plate crystal rod through holes (13) are less than or equal to the diameter of the crystal rod pulling hole (4).

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