Conveying disc and chemical vapor deposition equipment

Abstract

The utility model discloses a conveying disc and chemical vapor deposition equipment. The conveying disc is formed by splicing a plurality of same component units in a separable manner. According to the conveying disc and the chemical vapor deposition equipment provided by the utility model, the conveying disc is formed by assembling a plurality of same component units, and each component unit can be independently disassembled and assembled, so that when the conveying disc is deformed and damaged, only the damaged component unit needs to be replaced, and the whole conveying disc does not need to be replaced, so that the use cost is reduced; and the service life is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a conveyor disc and chemical vapor deposition equipment. Background Art

[0002] In the semiconductor production process, various processing steps are used to manufacture integrated circuits on semiconductor wafers. These steps include the deposition of different material layers (e.g., deposition of metal layers, passivation layers, and insulating layers on a wafer substrate), and patterning the deposited material layers by photolithography to form a multi-layer metal interconnect structure on the wafer. Chemical vapor deposition (CVD) processes are widely used to form material layers on semiconductor wafers. CVD processes include low temperature chemical vapor deposition (LTCVD), low pressure chemical vapor deposition (LPCVD), rapid thermal chemical vapor deposition (RTCVD), plasma enhanced chemical vapor deposition (PECVD), etc.

[0003] In chemical vapor deposition equipment, the wafer is placed on a carrier ring, and the transfer plate holds up the carrier ring and rotates to transfer the wafer to each heating device to complete the film formation on the wafer surface. In existing equipment, the transfer plate is a whole, which has a descending and rising action during operation. After long-term temperature rise and fall, the transfer plate may be deformed and damaged. If only one corner is deformed and damaged, the entire plate needs to be replaced, which increases the cost; in addition, during maintenance, the entire plate needs to be taken out, which is prone to collision, increasing the difficulty and time of work. Utility Model Content

[0004] A series of simplified concepts are introduced in the utility model content section, which will be further described in detail in the detailed implementation section. The utility model content section of the utility model does not mean to attempt to define the key features and essential technical features of the technical solution claimed for protection, nor does it mean to attempt to determine the scope of protection of the technical solution claimed for protection.

[0005] The utility model provides a conveying tray, which is formed by separably splicing a plurality of identical component units.

[0006] Exemplarily, the conveyor disc is formed by assembling four identical component units, and the four identical component units are assembled into a cross shape.

[0007] Exemplarily, there are four bearing areas on the conveyor disc, and the bearing areas are circular or arc-shaped. The bearing areas are used to hold up the bearing ring in the first position when the conveyor disc rises, rotate the conveyor disc, and place the bearing ring in the second position when the conveyor disc descends.

[0008] Exemplarily, each of the component units has a bearing area.

[0009] Exemplarily, each of the component units is provided with a load-bearing arc, and the load-bearing area is formed by splicing the load-bearing arcs of adjacent component units.

[0010] Exemplarily, each of the component units further includes a support column, which is disposed at an edge of the bearing area and is used to support the bearing ring.

[0011] Exemplarily, a circular through hole is formed in the central area of ​​the conveying disk, and the circular through hole is used for the rotating shaft to pass through the conveying disk, and each of the component units includes an arc for forming the circular through hole.

[0012] Exemplarily, the component unit is made of a high-temperature resistant metal material, and the support column is made of a high-temperature resistant and insulating ceramic material.

[0013] Exemplarily, the conveyor plate is used to convey wafers, and the carrying ring is used to carry wafers.

[0014] The utility model also provides a chemical vapor deposition device, comprising any one of the above-mentioned conveying discs.

[0015] According to the conveyor disc and chemical vapor deposition equipment provided by the utility model, a conveyor disc is formed by a plurality of identical component units which are detachably spliced ​​together, and each component unit can be individually disassembled and assembled. Thus, when the conveyor disc is deformed and damaged, only the damaged component unit needs to be replaced without replacing the entire conveyor disc, thereby reducing the use cost and extending the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The following drawings of the present invention are used as a part of the present invention for understanding the present invention. The drawings show the embodiments of the present invention and their descriptions, and are used to explain the principle of the present invention.

[0017] In the attached figure:

[0018] Figure 1 It is a structural schematic diagram of a conveyor disc according to an embodiment of the utility model;

[0019] Figure 2 It is a schematic structural diagram of a component unit according to an embodiment of the utility model.

[0020] Reference numerals

[0021] 10. Component Unit

[0022] 20. Arc

[0023] 30. Connection hole

[0024] 40. Loading area

[0025] 50. Support column DETAILED DESCRIPTION

[0026] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.

[0027] In order to thoroughly understand the present invention, a detailed description will be provided in the following description to illustrate a conveyor plate and chemical vapor deposition equipment of the present invention. Obviously, the implementation of the present invention is not limited to the specific details familiar to technicians in the field of semiconductor technology. The preferred embodiments of the present invention are described in detail below, but in addition to these detailed descriptions, the present invention can also have other embodiments.

[0028] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should also be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of the features, wholes, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or combinations thereof.

[0029] Now, exemplary embodiments according to the present utility model will be described in more detail with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in a variety of different forms and should not be interpreted as being limited to the embodiments described herein. It should be understood that these embodiments are provided to make the disclosure of the present utility model thorough and complete, and to fully convey the concepts of these exemplary embodiments to those of ordinary skill in the art. In the accompanying drawings, for the sake of clarity, the thickness of layers and regions is exaggerated, and the same reference numerals are used to represent the same elements, and thus their description will be omitted.

[0030] Aiming at the problem that only one corner of the conveyor disc is deformed and damaged and the entire conveyor disc needs to be replaced, the utility model provides a conveyor disc, such as Figure 1 and Figure 2 As shown, the conveyor tray is composed of a plurality of identical component units 10 which are separably connected to each other.

[0031] In one embodiment, Figure 1 and Figure 2As shown, the conveyor tray is formed by assembling four identical component units 10, and the four identical component units 10 are assembled into a cross shape. Since the conveyor tray is installed on the chemical vapor deposition equipment, the conveyor tray is usually assembled by assembling four identical component units 10 due to the limitation of installation conditions.

[0032] It should be noted that in the embodiment of the present application, the conveyor disc is only assembled by the component unit 10, and no other components are included. Therefore, when producing the conveyor disc, only one standard component (i.e., the component unit 10) needs to be produced, which is convenient for the production, storage and assembly of the conveyor disc, can reduce component loss, and improve the yield rate of the assembled conveyor disc.

[0033] In one embodiment, since the conveyor disc is installed in the chemical vapor deposition equipment and is in a high temperature environment for a long time during operation, the component unit 10 is usually made of high temperature resistant and corrosion resistant metal materials, for example, stainless steel is used to form the main part of the component unit.

[0034] Exemplarily, a circular through hole is formed in the central area of ​​the conveying disk, and the circular through hole is used to allow the rotating shaft to pass through the conveying disk. Each of the assembly units 10 includes an arc 20 for forming the circular through hole.

[0035] In one embodiment, Figure 1 As shown, the conveyor disk formed by assembling the component units 10 is usually arranged around the rotating axis of the chemical vapor deposition device, that is, the rotating axis of the chemical vapor deposition device passes through the conveyor disk, so it is necessary to reserve a circular through hole in the center of the conveyor disk for the rotating axis to pass through. Therefore, each component unit 10 is provided with an arc 20 for forming the circular through hole. When the conveyor disk is assembled by four identical component units 10, each component unit 10 is provided with a 1 / 4 arc.

[0036] Exemplarily, each of the component units 10 is provided with a connection hole 30, and the connection hole 30 is used to install the component unit.

[0037] Furthermore, the connection holes 30 are used to mount the component unit 10 on other components of the chemical vapor deposition equipment, and / or, the connection holes 30 are used to connect adjacent component units 10 .

[0038] In one embodiment, each assembly unit 10 is provided with at least one connection hole 30. Figure 1 and Figure 2As shown, only one connection hole is provided on the assembly unit 10, which is used to mount the assembly unit 10 to other components (e.g., a rotating shaft) of the chemical vapor deposition equipment. The connection hole 30 is usually provided at the arc 20 of the assembly unit 10. When the size of the assembly unit 10 is large, two or more connection holes can be provided at both ends of the assembly unit 10, respectively, so as to stably mount the assembly unit 10 to other components of the chemical vapor deposition equipment.

[0039] In one embodiment, the connection hole 30 can also be used to connect with adjacent component units 10, so that multiple component units 10 are assembled to form a conveyor tray as a whole. In particular, when the conveyor tray does not need to be fixedly connected to other components, the component units 10 only need to be connected to each other to form a conveyor tray, so that the conveyor tray can be moved as a whole, and when the conveyor tray is deformed and damaged, only the damaged component unit needs to be replaced without replacing the entire conveyor tray.

[0040] Furthermore, the assembly unit further includes a connecting member (not shown) arranged corresponding to the connecting hole, and the connecting member includes a bolt.

[0041] In one embodiment, the connector includes a detachable connector for detachably mounting the component unit 10 to other components of the chemical vapor deposition apparatus, and / or for detachably connecting the component units 10 to each other. The detachable connector includes a bolt, a bolt-nut combination, or any component capable of realizing the above-mentioned detachable connection mode, which is not limited in the present application.

[0042] Exemplarily, there are four carrying areas 40 on the conveyor disc, and the carrying areas 40 are circular or arc-shaped, and the carrying areas 40 are used to hold up the carrying ring at the first position when the conveyor disc rises, rotate the conveyor disc, and place the carrying ring at the second position when the conveyor disc descends. The carrying ring is used to carry wafers.

[0043] In one embodiment, the bearing area 40 of the conveyor disk can be separately provided in each component unit 10, or a bearing arc can be provided on the component unit 10, and the bearing area 40 is formed by splicing the bearing arcs of adjacent component units, which is not limited in the present application.

[0044] In one embodiment, the carrying area 40 is used to hold up the carrying ring, which is used to hold the wafer. Specifically, when the conveyor plate rises, the carrying ring holding the wafer at the first position is held up, and then the conveyor plate rotates clockwise driven by the rotating shaft. When it rotates to the target position (for example, the second position), the conveyor plate descends, and the carrying ring holding the wafer is placed at the second position, thereby realizing the change of the wafer position.

[0045] Exemplarily, each of the assembly units 10 includes at least one supporting column 40 , and the supporting column 50 is disposed at an edge of the bearing area 40 , and the supporting column 50 is used to support a wafer.

[0046] In one embodiment, the support column 50 is also called a ceramic finger, which is used to support the carrier ring during the semiconductor wafer production process. The support column 50 is generally made of a high temperature resistant and insulating ceramic material, such as high purity alumina.

[0047] In one embodiment, each assembly unit 10 is provided with at least three support columns 50, and the support columns 50 are provided at the edge of the bearing area 40. Figure 1 and Figure 2 Each component unit 10 is provided with three support columns 40 for supporting and / or limiting the bearing ring.

[0048] The utility model also provides a chemical vapor deposition device, comprising the conveying plate as described above, wherein the conveying plate is used for conveying wafers.

[0049] According to the conveyor disc and chemical vapor deposition equipment provided by the utility model, a conveyor disc is assembled from a plurality of identical component units, and each component unit can be individually disassembled and assembled. Thus, when the conveyor disc is deformed and damaged, only the damaged component unit needs to be replaced without replacing the entire conveyor disc, thereby reducing the use cost and extending the service life.

[0050] The utility model has been described through the above embodiments, but it should be understood that the above embodiments are only for the purpose of example and description, and are not intended to limit the utility model to the scope of the described embodiments. In addition, it can be understood by those skilled in the art that the utility model is not limited to the above embodiments, and more variations and modifications can be made according to the teachings of the utility model, and these variations and modifications all fall within the scope of protection claimed by the utility model. The protection scope of the utility model is defined by the attached claims and their equivalents.

Claims

1. A conveyor plate, characterized in that: The conveyor plate is composed of a plurality of identical component units which are separably connected to each other; There are four bearing areas on the conveyor disc, and the bearing areas are circular or arc-shaped, and the bearing areas are used to hold up the bearing ring at the first position when the conveyor disc rises, rotate the conveyor disc, and place the bearing ring at the second position when the conveyor disc descends; Each of the component units further includes a support column, which is arranged at an edge of the bearing area and is used to support the bearing ring.

2. The conveyor disk according to claim 1, characterized in that The conveyor plate is formed by assembling four identical component units, and the four identical component units are assembled into a cross shape.

3. The conveyor plate according to claim 1, characterized in that Each of the component units has a bearing area.

4. The conveyor disk according to claim 1, characterized in that Each of the component units is provided with a load-bearing circular arc, and the load-bearing area is formed by splicing the load-bearing circular arcs of adjacent component units.

5. The conveyor plate according to claim 1, characterized in that A circular through hole is formed in the central area of ​​the conveying disk, and the circular through hole is used for the rotating shaft to pass through the conveying disk. Each of the component units includes an arc for forming the circular through hole.

6. The conveyor plate according to claim 1, characterized in that The component unit is made of high-temperature resistant metal material, and the support column is made of high-temperature resistant and insulating ceramic material.

7. The conveyor plate according to claim 1, characterized in that The conveying plate is used for conveying wafers, and the carrying ring is used for carrying wafers.

8. A chemical vapor deposition device, characterized in that: A conveyor disc comprising the conveyor disc according to any one of claims 1 to 7.

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