Clamping jaw of disassembly and cleaning auxiliary equipment of crystal pulling furnace

Through the servo motor drive screw transmission mechanism and weight monitoring system, combined with the flip-up clamping mechanism and thermal insulation material, the problems of unsmooth operation and inaccurate clamping force in the prior art are solved, and a higher Control flexibility and security reduce costs.

CN222274779UActive Publication Date: 2024-12-31NINGBO JINGYAO SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202323540513.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-25
Publication Date
2024-12-31
Estimated Expiration
2033-12-25

AI Technical Summary

Technical Problem

The clamping jaws of existing crystal pulling furnace removal auxiliary equipment cannot adjust the tensioning speed when clamping the internal components of the heat field, resulting in unsmooth operation, easy to damage the fragile components, and inaccurate clamping force control and poor pressure sealing, resulting in Great pressure loss.

Method used

Adopt the design including servo motor, lead screw transmission mechanism, weight monitoring mechanism and flip-up clamping mechanism, and the servo motor drives the lead screw transmission mechanism to achieve accurate control of multi-link clamping jaws, weight monitoring prevents overload, and multi-link clamping The claw mechanism can rotate 360°, flexibly fit the curved surface shape, and uses thermal insulation materials.

Benefits of technology

Improves the flexibility of clamping position control and the accuracy of torque control, reduces the risk of equipment damage, and enhances safety and cost-effectiveness.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of single crystal and polycrystalline silicon crystal pulling industry, in particular to a clamping jaw of auxiliary equipment for dismounting and cleaning a crystal pulling furnace, which comprises a lead screw transmission mechanism and a servo motor, the servo motor is arranged above the lead screw transmission mechanism, a speed reducer is arranged above the lead screw transmission mechanism, the servo motor is in transmission connection with the speed reducer, and the speed reducer is connected with the lead screw transmission mechanism. A weight monitoring mechanism is installed on the surface of the lead screw transmission mechanism, a signal lamp is installed on the surface of the lead screw transmission mechanism, a slewing bearing is installed below the lead screw transmission mechanism, a guide column is installed on the lower surface of the lead screw transmission mechanism, and a multi-connecting-rod clamping jaw mechanism is installed at one end of the guide column. According to the scheme, the servo motor is used for driving the lead screw to drive the multi-connecting-rod clamping jaw mechanism to be opened and closed, the flexibility of position control and the clamping force accuracy of torque control can be improved, the control flexibility is effectively improved, the clamping safety is improved, and the use cost is reduced.
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Description

Technical Field

[0001] The utility model relates to the technical field of single crystal and polycrystalline silicon crystal pulling industry, in particular to a clamping claw of auxiliary equipment for dismantling and cleaning a crystal pulling furnace. Background Art

[0002] In the furnace dismantling and cleaning process in the crystal pulling industry, the currently known auxiliary equipment jaws cannot adjust the opening and closing speed of the jaws when clamping components inside the hot field, resulting in the jaws being unable to smoothly contact the components and easily damaging fragile components due to high-speed overshoot.

[0003] The inventors have found in their daily work that when the known auxiliary equipment clamps the internal components of the thermal field, it detects the hydraulic pressure and then converts the electrical signal into feedback to the host computer. It has a slow reaction speed and is easily affected by the ambient temperature and the degree of aging of the seals, resulting in inaccurate control of the clamping force and easy damage to the thermal field components. When the known auxiliary equipment clamps the thermal field components for transfer, it disconnects the hydraulic oil pipe circuit and seals the pressure in the pipe and the cylinder to maintain the pressure. The pressure loss is large and cannot be compensated. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a clamping claw for auxiliary equipment for dismantling a crystal pulling furnace.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a crystal pulling furnace dismantling auxiliary equipment clamping jaws, including a screw transmission mechanism and a servo motor, the servo motor is installed above the screw transmission mechanism, a reducer is installed above the screw transmission mechanism, the servo motor is connected to the reducer, a weight monitoring mechanism is installed on the surface of the screw transmission mechanism, a signal light is installed on the surface of the screw transmission mechanism, through the weight monitoring mechanism, when the clamping jaws clamp the thermal field component to lift, the weight of the clamped object will be monitored, when the weight exceeds the rated maximum value, the signal light will be triggered to feedback to the operator to prevent overloading and overturning of the equipment, a slewing bearing is installed below the screw transmission mechanism, the slewing bearing can enable the clamping jaw mechanism to achieve 360° arbitrary rotation to avoid the non-clamping area, a guide column is installed on the lower surface of the screw transmission mechanism, one end of the guide column is installed with a multi-link clamping jaw mechanism, one end of the multi-link clamping jaw mechanism is installed with a flippable holding and tightening mechanism, the weight monitoring mechanism can prevent the object from being overloaded during clamping and lifting.

[0006] Preferably, a push rod is slidably connected inside the screw transmission mechanism, and one end of the push rod is fixedly connected to a sliding plate.

[0007] Preferably, the number of the guide columns and the multi-link clamping mechanism are three, and the three guide columns and the multi-link clamping mechanism are all in a circular array. The servo motor is used to drive the screw transmission to drive the multi-link clamping mechanism to open and close, which can improve the flexibility of position control and the clamping force accuracy of torque control.

[0008] Preferably, the sliding plate is sleeved on a guide column, and one end of the multi-link clamping mechanism is mounted on the sliding plate.

[0009] Preferably, a swingable mechanism is installed at one end of the flippable holding and tightening mechanism, and a heat insulating material is installed on the surface of the swingable mechanism. The winding method of the heat insulating material is more beautiful and convenient for replacement.

[0010] Preferably, a flip lock is installed on one side of the flip holding and tightening mechanism, and the flexible flip holding and tightening mechanism can more effectively fit the curved shape of the clamped object.

[0011] Preferably, a retractable lifting hook is installed inside the flippable holding and tightening mechanism for lifting special objects.

[0012] Compared with the prior art, the advantages and positive effects of the utility model are:

[0013] 1. In the utility model, the scheme uses a servo motor to drive the lead screw transmission to drive the multi-link clamp mechanism to open and close, which can improve the flexibility of position control and the clamping force accuracy of torque control. This scheme effectively improves the control flexibility, improves the clamping safety, and reduces the use cost.

[0014] 2. In the utility model, the weight monitoring mechanism can prevent the object from being overloaded during clamping and lifting.

[0015] 3. In the utility model, the flexible flippable holding and tightening mechanism can more effectively fit the curved surface of the clamped object.

[0016] 4. In the utility model, the winding method of the heat insulation material is more beautiful and convenient for replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The utility model provides a three-dimensional structural schematic diagram of a clamping jaw of a crystal pulling furnace dismantling auxiliary equipment;

[0018] Figure 2 The utility model provides a front view structural schematic diagram of a clamping jaw of a crystal pulling furnace dismantling auxiliary equipment;

[0019] Figure 3 The utility model proposes a structural schematic diagram of the recovery state in the clamping jaws of a crystal pulling furnace dismantling auxiliary equipment;

[0020] Figure 4The utility model provides a partial structural schematic diagram of a clamping jaw of a crystal pulling furnace dismantling auxiliary equipment;

[0021] Figure 5 The utility model proposes a kind of auxiliary equipment for dismantling and cleaning crystal pulling furnace Figure 4 Schematic diagram of the side structure.

[0022] Legend:

[0023] 1. Signal light; 2. Speed ​​reducer; 3. Servo motor; 4. Weight monitoring mechanism; 5. Screw transmission mechanism; 6. Slewing bearing; 7. Multi-link clamp mechanism; 8. Flip-over clamping mechanism; 9. Flip lock; 10. Swingable mechanism; 11. Insulation material; 12. Retractable lifting hook; 13. Guide column; 14. Push rod; 15. Sliding plate. DETAILED DESCRIPTION

[0024] See also Figure 1-5 The utility model provides a technical solution: a crystal pulling furnace dismantling auxiliary equipment clamp, including a screw transmission mechanism 5 and a servo motor 3, the servo motor 3 is installed above the screw transmission mechanism 5, a reducer 2 is installed above the screw transmission mechanism 5, the servo motor 3 is connected to the reducer 2, a weight monitoring mechanism 4 is installed on the surface of the screw transmission mechanism, a signal light 1 is installed on the surface of the screw transmission mechanism, through the weight monitoring mechanism 4, when the clamp clamps the thermal field component to lift, it will monitor the weight of the clamped object, when the weight exceeds the rated maximum value, it will trigger the signal light 1 to feedback to the operator to prevent overloading and overturning of the equipment, a slewing bearing 6 is installed below the screw transmission mechanism, the slewing bearing 6 can make the clamp mechanism realize 360° arbitrary rotation to avoid the non-clamping area, a guide column 13 is installed on the lower surface of the screw transmission mechanism, one end of the guide column 13 is installed with a multi-link clamp mechanism 7, one end of the multi-link clamp mechanism 7 is installed with a flippable holding mechanism 8, the weight monitoring mechanism 4 can prevent the object from being overloaded during clamping and lifting.

[0025] Specifically, a push rod 14 is slidably connected inside the lead screw transmission mechanism 5 , and one end of the push rod 14 is fixedly connected to a sliding plate 15 .

[0026] In this embodiment: the number of guide columns 13 and the number of multi-link clamping mechanisms 7 are both three, and the three guide columns 13 and the multi-link clamping mechanisms 7 are all in a circular array. The servo motor 3 drives the screw transmission to drive the multi-link clamping mechanism 7 to open and close, which can improve the flexibility of position control and the clamping force accuracy of torque control.

[0027] Specifically, the sliding plate 15 is sleeved on the guide column 13 , and one end of the multi-link clamping mechanism 7 is mounted on the sliding plate 15 .

[0028] Specifically, a swingable mechanism 10 is installed at one end of the flippable holding and tightening mechanism 8, and a heat insulating material 11 is installed on the surface of the swingable mechanism 10. The winding method of the heat insulating material 11 is more beautiful and convenient for replacement.

[0029] In this embodiment: a flip lock 9 is installed on one side of the flippable holding and tightening mechanism 8, and the flexible flippable holding and tightening mechanism 8 can more effectively fit the curved surface shape of the clamped object.

[0030] Specifically, a retractable lifting hook 12 is installed inside the flippable holding and tightening mechanism 8 for lifting special objects.

[0031] Working principle: This solution uses a servo motor 3 to drive the reducer 2, the screw drive mechanism 5 and the push rod 14 to rotate forward or reverse to push the sliding plate 15 of the clamp to limit the up and down movement in the guide column 13, thereby realizing the extension of the multi-link clamp mechanism 7. This solution uses a servo motor 3 to drive the screw drive to drive the multi-link clamp mechanism 7 to open and close, which can improve the flexibility of position control and the accuracy of the clamping force of torque control. This solution effectively improves the control flexibility, improves the clamping safety, and reduces the cost of use. The weight monitoring mechanism 4 can prevent the object from being overloaded during clamping and lifting. The flexible and reversible holding mechanism 8 can more effectively fit the curved shape of the clamped object. The winding method of the thermal insulation material 11 is more beautiful and easy to replace.

Claims

1. A crystal pulling furnace dismantling auxiliary equipment clamp, comprising a lead screw transmission mechanism (5) and a servo motor (3), characterized in that: The servo motor (3) is installed above the screw transmission mechanism (5), a reducer (2) is installed above the screw transmission mechanism (5), the servo motor (3) is connected to the reducer (2) in a transmission manner, a weight monitoring mechanism (4) is installed on the surface of the screw transmission mechanism (5), a signal light (1) is installed on the surface of the screw transmission mechanism (5), a slewing bearing (6) is installed below the screw transmission mechanism (5), a guide column (13) is installed on the lower surface of the screw transmission mechanism (5), a multi-link clamping mechanism (7) is installed at one end of the guide column (13), and a flippable clamping mechanism (8) is installed at one end of the multi-link clamping mechanism (7).

2. The crystal pulling furnace dismantling auxiliary equipment clamp according to claim 1, characterized in that: A push rod (14) is slidably connected inside the screw transmission mechanism (5), and one end of the push rod (14) is fixedly connected to a sliding plate (15).

3. The clamping jaws of the auxiliary equipment for dismantling a crystal pulling furnace according to claim 1, characterized in that: The number of the guide posts (13) and the number of the multi-link clamping mechanisms (7) are both three, and the three guide posts (13) and the multi-link clamping mechanisms (7) are all arranged in a circular array.

4. The crystal pulling furnace dismantling auxiliary equipment clamp according to claim 2, characterized in that: The sliding plate (15) is sleeved on the guide column (13), and one end of the multi-link clamping mechanism (7) is mounted on the sliding plate (15).

5. The clamping jaws of the auxiliary equipment for dismantling a crystal pulling furnace according to claim 1, characterized in that: A swingable mechanism (10) is installed at one end of the flippable holding and tightening mechanism (8), and a heat insulating material (11) is installed on the surface of the swingable mechanism (10).

6. The crystal pulling furnace dismantling auxiliary equipment clamp according to claim 1, characterized in that: A flip lock (9) is installed on one side of the flippable holding and tightening mechanism (8).

7. The clamping jaws of the auxiliary equipment for dismantling a crystal pulling furnace according to claim 1, characterized in that: A retractable lifting hook (12) is installed inside the reversible holding and tightening mechanism (8).