Electric tool

Abstract

The utility model provides an electric tool, and relates to the technical field of semiconductors, the electric tool comprises a body, the body is detachably connected with a locking opening part used for being in butt joint with a moving bearing of a lead screw of a photoetching machine, and the body is internally provided with a power supply, a power switch connected with the power supply, a speed regulation module and a motor connected with the speed regulation module; the speed regulation module and the motor are respectively connected with the power switch; the motor is connected with the opening locking part, the power switch drives the motor to drive the opening locking part to rotate forwards and backwards, and the rotating speed of the opening locking part is adjusted through the speed adjusting module so as to drive a lead screw of the photoetching machine to move to lubricate and oil the lead screw. The device has the advantages of small-space operation, the rotating speed and the forward and reverse rotating directions are adjusted in real time, a large amount of manual operation time is saved, and then the maintenance and recovery actions of lead screw oiling of the photoetching machine are efficiently completed; manual operation is replaced by automatic operation, the efficiency and the operation safety are greatly improved, and the requirement for experience of operators is lowered; the device can be suitable for lubricating and oiling operation of lead screws of different specifications.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an electric tool. Background Art

[0002] In the semiconductor industry, the photolithography process is particularly critical. If you want the products produced to meet high-level yield requirements, you need to perform continuous and regular maintenance on the photolithography machine to ensure the accuracy of this important optical equipment.

[0003] During daily maintenance, the lead screw of the lithography machine needs to be lubricated. The current reality is that when lubricating the lead screw of the stage unit of the lithography machine, it is necessary to manually move the lead screw track and clean the waste grease. When working in a narrow space, it is not conducive to the operation of the operator, and there is a risk of damaging the parts and downtime; and the efficiency of re-operation is low, the operation takes a long time, and the production operation is affected. Similarly, the above disadvantages also exist when lubricating the lead screw. Utility Model Content

[0004] The purpose of the embodiments of the present application is to provide an electric tool that can automatically lubricate and oil the lead screw of a lithography machine, thereby improving operating efficiency and realizing automated operation.

[0005] According to one aspect of an embodiment of the present application, there is provided an electric tool, comprising a main body, to which is detachably connected a locking portion for docking with a movable bearing of a lead screw of a photolithography machine, a power supply, a power switch connected to the power supply, a speed regulation module, and a motor connected to the speed regulation module are arranged in the main body, and the speed regulation module and the motor are also connected to the power switch, respectively; the motor is connected to the locking portion, and the power switch drives the motor to drive the locking portion to rotate forward and reverse, and the speed of the locking portion is adjusted by the speed regulation module to drive the lead screw of the photolithography machine to move and lubricate the lead screw.

[0006] Optionally, the locking portion includes a first sleeve connected to the motor and a second sleeve arranged in the first sleeve, a plurality of claws are arranged in the second sleeve, and a clamping area is formed between the plurality of claws for clamping a movable bearing connected to the screw.

[0007] Optionally, the plurality of claws are connected to the second sleeve via a spring, and the first sleeve and the second sleeve are threadedly connected, so that the plurality of claws can be driven to move relatively closer or farther away through relative movement of the first sleeve and the second sleeve to adjust the clamping area of ​​the clamping area.

[0008] Optionally, the inner wall of the first sleeve and the outer wall of the second sleeve are respectively provided with matching threads.

[0009] Optionally, an indicator light is further provided on the main body, a resistor connected to the indicator light is provided in the main body, the indicator light and the resistor are respectively connected to the power switch, and the indicator light is used to indicate the forward and reverse rotation of the motor.

[0010] Optionally, the indicator light is a light emitting diode.

[0011] Optionally, the main body is provided with a charging interface, and the charging interface is connected to the power source for charging the power source.

[0012] Optionally, the power switch and the speed regulation module each have an operation button exposed from the body.

[0013] Optionally, the operation button of the speed control module is turned clockwise to adjust the speed.

[0014] Optionally, the power switch is a hexagonal rocker switch.

[0015] The power tool provided in the embodiment of the present application is powered by a power supply, and the motor is driven to rotate forward and reversely by starting the power switch to realize the forward and reverse rotation of the locking part, and the locking part is connected with the movable bearing of the lead screw of the lithography machine to drive the lead screw forward or backward, exposing more lead screws and lead screw tracks, so as to clean the waste grease on the lead screw track or apply new lubricating grease to the lead screw to complete the lubrication and oiling of the lead screw. The speed control module can adjust the speed of the motor, and then adjust the speed of the locking part, the forward or backward speed of the lead screw, and can adjust the speed in real time according to the working habits of the equipment engineer, adapt to the use needs of novices or senior equipment engineers, and operate in a fixed small space without unnecessary actions, saving space and time, improving efficiency, and greatly reducing the risk of damage to parts and equipment downtime. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 This is one of the schematic diagrams of the structure of the electric tool provided in this embodiment;

[0018] Figure 2 This is the second schematic diagram of the structure of the electric tool provided in this embodiment;

[0019] Figure 3 is a schematic diagram of the application of the electric tool provided in this embodiment;

[0020] Figure 4 is a system circuit diagram of the electric tool provided in this embodiment;

[0021] Figure 5a This is one of the structural schematic diagrams of the locking portion of the electric tool provided in this embodiment;

[0022] Figure 5b This is the second structural schematic diagram of the lock portion of the electric tool provided in this embodiment;

[0023] Figure 5c This is the third structural schematic diagram of the locking portion of the electric tool provided in this embodiment.

[0024] Icons: 101-charging port; 102-power supply; 103-speed control module; 104-motor; 105-power switch; 106-indicator light; 107-locking part; 107a-first sleeve; 107b-second sleeve; 107c-claw; 107d-spring; 108-resistance; 10-X-axis lead screw track; 11-X-axis lead screw; 12-X-axis movable bearing; 20-Y-axis lead screw track; 21-Y-axis lead screw; 22-Y-axis movable bearing; 30-syringe; 40-slide plate. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0026] In the description of this application, it should be noted that the terms "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] It should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0028] The lead screw of the Stage unit of the lithography machine is provided with a movable bearing. Currently, when lubricating and oiling the lead screw manually, the movable bearing is manually locked with a crank tool, and the crank handle is held to rotate forward or reverse to drive the lead screw forward or backward, thereby exposing more of the lead screw and lead screw track, making it easier to clean the waste grease on the lead screw track or apply new grease to the lead screw.

[0029] However, in actual operation, due to the small and cramped internal space of the Stage unit of the lithography machine, even very skilled equipment engineers will spend a long time and get half the result with twice the effort, so it is not conducive to the operation of equipment engineers; and the above operations need to be repeated many times to achieve the goal, which is a major disadvantage that cannot be ignored in existing manual operations.

[0030] In addition, there are many power pipelines, solenoid valves, communication lines and other devices near the mobile bearing. During manual operation, it is necessary to hold the crank handle and make circular motions, which may cause the risk of hitting other devices or dropping the crank tool. As a result, there is a risk of power pipelines, solenoid valves, communication lines and other devices falling or damaging accessories, causing equipment downtime and failure to resume work on time, wasting a lot of production operation time, resulting in huge production capacity losses and economic losses, which has become another serious disadvantage of existing manual operations.

[0031] In view of this, to solve the above problems, please refer to Figure 1 , Figure 2 As shown, an embodiment of the present application provides an electric tool, which can be used in the operation scenario of lubricating and oiling the lead screw of the lithography machine for maintenance; specifically, the electric tool includes a main body, on which is detachably connected a locking portion 107 for docking with a movable bearing of the lead screw of the lithography machine, a power supply 102, a power switch 105 connected to the power supply 102, a speed regulation module 103, and a motor 104 connected to the speed regulation module 103 are arranged in the main body, and the speed regulation module 103 and the motor 104 are also connected to the power switch 105, respectively; the motor 104 is connected to the locking portion 107, and the power switch 105 drives the motor 104 to drive the locking portion 107 to rotate forward and reverse, and adjusts the rotation speed of the locking portion 107 through the speed regulation module 103, so as to drive the lead screw of the lithography machine to move and lubricate and oil the lead screw.

[0032] The power supply 102 is used to supply power to the electric tool, mainly to the speed regulating module 103, the motor 104 and other components of the electric tool that require electrical energy.

[0033] The power switch 105 is used to turn the power tool on or off. For example, the power switch 105 is a hexagonal rocker switch. The hexagonal rocker switch has six contacts, which can be connected in groups of two to achieve three states of circuit connection, which will be described in detail later.

[0034] The power switch 105 is connected to the motor 104 and the speed control module 103 respectively. The motor 104 is used to provide forward and reverse power. The motor 104 and the locking part 107 are detachably connected, and the locking part 107 is driven by the motor 104 to rotate forward and reverse; the locking part 107 is used to be mounted on the movable bearing of the lithography machine, thereby driving the screw to move, and the screw can be lubricated and oiled at this time.

[0035] The speed regulating module 103 is also connected to the motor 104 and is used to adjust the speed of the motor 104 according to the current change to meet the requirements of the screw movement speed.

[0036] Among them, the motor 104 and the locking part 107 are detachably connected, which means that the locking part 107 can be replaced at any time; when replacing the locking part 107 of different specifications, different specifications of the screw can be used for lubrication and oiling, which expands the use range of the power tool. The same body is equipped with locking parts 107 of different specifications, which also saves the cost of the power tool, thereby reducing the operating cost of screw lubrication and oiling.

[0037] Specifically, Figure 3 As shown, the working object of the present application - the lithography machine, has an X-axis moving bearing 12, a Y-axis moving bearing 22, and corresponding X-axis lead screws 11 and Y-axis lead screws 21; during operation, the locking portion 107 is inserted into the X-axis moving bearing 12, and the electric tool is started to rotate forward or reverse, which can drive the X-axis lead screw 11 forward or backward, and then drive the slide 40 connected to the X-axis lead screw 11 forward or backward, exposing more X-axis lead screw rails 10 and X-axis lead screws 11, and cleaning the waste grease on the X-axis lead screw rails 10 or applying new lubricating grease to the X-axis lead screw 11 through the syringe 30. The Y-axis lead screw rails 20 and Y-axis lead screws 21 are operated in the same way and will not be repeated.

[0038] Therefore, in the power tool provided by the embodiment of the present application, the power supply 102 supplies power to the power tool, and the power switch 105 is used to start the motor 104 to rotate forward and reverse, so as to realize the forward and reverse rotation of the locking part 107. The locking part 107 is docked with the movable bearing of the lead screw of the lithography machine to drive the lead screw forward or backward, exposing more lead screws and lead screw tracks, so as to clean the waste grease on the lead screw track or apply new lubricating grease to the lead screw, and complete the lubrication and oiling of the lead screw. The speed control module 103 can adjust the speed of the motor 104, and then adjust the speed of the locking part 107, the forward or backward speed of the lead screw, and can adjust the speed in real time according to the working habits of the equipment engineer, adapt to the use needs of novices or senior equipment engineers, and operate in a fixed small space without unnecessary actions, saving space and time, improving efficiency, and greatly reducing the risk of damaging parts and equipment downtime.

[0039] Furthermore, an indicator light 106 is provided on the main body, and a resistor 108 connected to the indicator light 106 is provided in the main body. The indicator light 106 and the resistor 108 are connected to the power switch 105 respectively. The indicator light 106 is used to indicate the forward and reverse rotation of the motor 104.

[0040] For example, the indicator light 106 is a red and green light emitting diode, which shares a circuit with the motor 104; the resistor 108 is a fixed 2KΩ resistor 108, which is mainly used to reduce the voltage of the light emitting diode so that the working voltage of the light emitting diode can adapt to the voltage of the system circuit.

[0041] The main body is also provided with a charging interface 101 , which is connected to a power source 102 . For example, the power source 102 is a 12V DC power source 102 (lithium battery, rechargeable), and is used to charge the power source 102 through the charging interface 101 .

[0042] The system circuit diagram of the electric tool in this application is as follows Figure 4 As mentioned above, three states of circuit connection can be realized, corresponding to the three states of the power tool. The working principle is as follows:

[0043] The first state: the hexagonal rocker switch is in the middle position, the circuit is not turned on, no closed circuit is formed, and the power tool is not working.

[0044] The second state: the hexagonal boat switch is pushed upward, ①③ contact points are conductive, ②④ contact points are conductive, and the PWM speed control module 103 is turned on clockwise (a "click" sound will be heard). At this time, the motor 104 works and rotates forward, and the circuit where the light-emitting diode is located is forward conductive, and the green indicator light is on.

[0045] The third state: the hexagonal boat switch is pushed down, ⑤③ contact points are turned on, ⑥④ contact points are turned on, and the PWM speed control module 103 is turned on clockwise (a "click" sound will be heard). At this time, the motor 104 works counterclockwise and reverses, and the circuit where the light-emitting diode is located is reversely conducted, and the red indicator light is on.

[0046] The power switch 105 and the speed regulating module 103 respectively have operation buttons exposed from the body, and the start and stop of the power switch 105 and the speed regulation of the speed regulating module 103 can be controlled by the respective operation buttons.

[0047] The operating button of the speed regulating module 103 is turned clockwise to adjust the speed, so as to facilitate the operation of the operator.

[0048] On the other hand, please refer to the configuration of the lock portion 107. Figure 5a , Figure 5b , Figure 5cThe locking portion 107 includes a first sleeve 107a connected to the motor 104 and a second sleeve 107b arranged in the first sleeve 107a. A plurality of claws 107c are arranged in the second sleeve 107b, and a clamping area is formed between the plurality of claws 107c for clamping the movable bearing of the screw.

[0049] The second sleeve 107b is disposed in the first sleeve 107a. The first sleeve 107a and the motor 104 are detachably connected. The motor 104 rotates through the first sleeve 107a to drive the locking portion 107 to rotate.

[0050] A plurality of claws 107c evenly distributed around the circumference are formed in the second sleeve 107b. In the present application, four claws 107c are provided. The clamping area formed between the claws 107c is used to clamp the movable bearing of the lead screw. In this way, when the motor 104 rotates, the locking portion 107 rotates accordingly, and the clamped movable bearing also rotates accordingly, so that the lead screw moves forward or backward, exposing the lead screw for lubrication and oiling.

[0051] Furthermore, the plurality of claws 107c are connected to the second sleeve 107b via a spring 107d, and the first sleeve 107a and the second sleeve 107b are threadedly connected, so that the plurality of claws 107c are driven to move relatively closer or farther away through the relative movement of the first sleeve 107a and the second sleeve 107b to adjust the clamping area of ​​the clamping area.

[0052] The inner wall of the first sleeve 107a and the outer wall of the second sleeve 107b are respectively provided with matching threads. For example, the inner wall of the first sleeve 107a is provided with internal threads, and the outer wall of the second sleeve 107b is provided with external threads. The first sleeve 107a and the second sleeve 107b are engaged with each other so that the first sleeve 107a and the second sleeve 107b can move relative to each other.

[0053] The claw 107c is connected to the second sleeve 107b through the spring 107d, so that the claw 107c can move relative to the second sleeve 107b; the first sleeve 107a is tightened clockwise and can move upward. At this time, when the first sleeve 107a moves upward, the side wall is squeezed to the position where the claw 107c is set on the second sleeve 107b. The squeezing spring 107d makes the claw 107c move inward, the clamping area is reduced, and the movable bearing is locked by four clamping hands and fixedly clamped.

[0054] The first sleeve 107a is tightened counterclockwise and moves downward. At this time, when the first sleeve 107a moves downward, the side wall is away from the position where the claw 107c is set by the second sleeve 107b, the spring 107d is released to the outside, and the claw 107c moves outward, the clamping area increases, the movable bearing is released by the four clamps, and the spring 107d exerts force to reset the claw 107c.

[0055] Through the movement of the claw 107c, the size of the clamping area can be adjusted. The same locking portion 107 can adapt to mobile bearings of different specifications and is suitable for lubrication and oiling of screws of multiple sizes, thereby saving costs.

[0056] In summary, when the electric tool of the present application is working, by operating the power switch 105, the corresponding contact point of the power switch 105 is turned on, the PWM speed control module 103 is turned on, the motor 104 is working and rotating, and the circuit conduction indicator light of the light-emitting diode is on. The PWM speed control module 103 controls the slow rotation clockwise and counterclockwise to adjust the speed of the motor 104. The electric tool of the present application is a compact handheld electric tool, which has advantages for small space operations; it is driven by a DC motor 104, and the key contacts adjust the speed and the positive and negative directions of rotation in real time, saving a lot of manual operation time, and then efficiently completing the maintenance and restoration of the lead screw of the lithography machine; it realizes the replacement of manual operation with automated operation actions, and also realizes a huge improvement in efficiency and operation safety, reducing the experience requirements for operators; it has the ability to simultaneously meet the use diversity of the forward and reverse rotation of the motor 104 and the fast and slow speed regulation of the speed control module 103, creating mature conditions; it can be applied to the movable bearings of lead screws of different specifications, and can cover the lead screw lubrication and oiling operations of all Nikon lithography machines.

[0057] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An electric tool, characterized in that: include: A main body, on which a locking portion for docking with a movable bearing of a lead screw of a photolithography machine is detachably connected, a power supply, a power switch connected to the power supply, a speed regulating module, and a motor connected to the speed regulating module are arranged in the main body, and the speed regulating module and the motor are also connected to the power switch respectively; the motor is connected to the locking portion, and the power switch drives the motor to drive the locking portion to rotate forward and reverse, and the speed of the locking portion is adjusted by the speed regulating module to drive the lead screw of the photolithography machine to move and lubricate the lead screw.

2. The electric tool according to claim 1, characterized in that: The locking portion includes a first sleeve connected to the motor and a second sleeve arranged in the first sleeve, a plurality of claws are arranged in the second sleeve, and a clamping area is formed between the plurality of claws for clamping the movable bearing connected to the screw.

3. The electric tool according to claim 2, characterized in that: The plurality of claws are connected to the second sleeve via a spring, and the first sleeve and the second sleeve are threadedly connected, so that the plurality of claws are driven to move relatively closer or farther away through relative movement of the first sleeve and the second sleeve, so as to adjust the clamping area of ​​the clamping area.

4. The electric tool according to claim 3, characterized in that: The inner wall of the first sleeve and the outer wall of the second sleeve are respectively provided with matching threads.

5. The electric tool according to any one of claims 1 to 4, characterized in that: The main body is also provided with an indicator light, and the main body is provided with a resistor connected to the indicator light. The indicator light and the resistor are respectively connected to the power switch, and the indicator light is used to indicate the forward and reverse rotation of the motor.

6. The electric tool according to claim 5, characterized in that: The indicator light is a light emitting diode.

7. The electric tool according to any one of claims 1 to 4, characterized in that: The main body is provided with a charging interface, and the charging interface is connected to the power source and is used to charge the power source.

8. The electric tool according to any one of claims 1 to 4, characterized in that: The power switch and the speed regulating module respectively have operation buttons exposed from the body.

9. The electric tool according to claim 8, characterized in that: The operating button of the speed regulating module is turned clockwise to adjust the speed.

10. The electric tool according to any one of claims 1 to 4, characterized in that: The power switch is a hexagonal rocker switch.

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