Wet oxygen process system

Abstract

The utility model discloses a wet oxygen process system which comprises a pure water circulating unit, a wet oxygen unit and a drainage unit, the pure water circulation unit comprises a water inlet pipe section, a circulation pipe section and a water return pipe section which are sequentially connected, an inlet of the water inlet pipe section and an outlet of the water return pipe section are connected with a peripheral pure water source, an outer circulation connecting pipe is arranged between the water inlet pipe section and the water return pipe section and provided with an outer circulation valve, and a water inlet valve is arranged at the water inlet end of the circulation pipe section. A water return valve is arranged at the water outlet end of the circulating pipe section; a plurality of water inlet branch pipes are arranged on the circulating pipe in parallel, the water inlet branch pipes are connected with the corresponding wet oxygen units one by one and used for supplementing pure water needed by the wet oxygen units, and water drained by the wet oxygen units is drained to the periphery through the drainage unit; and the circulating pipe section is also provided with a water quality detector, a water outlet and a first water discharge valve. According to the system, the quality of pure water in the internal main pipeline can be kept, the water quality can be conveniently monitored in real time, and little water is wasted during water changing.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing equipment and photovoltaic equipment, and in particular relates to a wet oxygen process system. Background Art

[0002] In the photovoltaic field, the wet oxygen process refers to the process in which the source gas is passed through the bubbling process device to carry water vapor into the reaction chamber to complete the process. The wet oxygen process can effectively reduce the temperature of the reaction chamber, increase the life of quartz parts (quartz boats, quartz boat holders, quartz tubes); shorten the process time, increase equipment production capacity; improve the efficiency of the battery cells; at the same time, because it can reduce the reaction temperature, it can reduce the failure rate of the sealing components of the reaction chamber, which is conducive to the stable operation of the equipment. The existing wet oxygen process in the photovoltaic field mainly adopts the method of manual regular water replacement in application. Most links require manual participation and frequent manual operation, and it is impossible to achieve fully automated quarterly mass production. In a small number of wet oxygen systems currently in use, pure water can only achieve the flow order of periphery-internal main pipeline-water bottle. When the pure water in the periphery or internal pipeline is contaminated or deteriorates after being stored for a long time, the unqualified pure water cannot be directly discharged from the device, and the entire water replacement cycle cannot be achieved. Or, when a small number of devices with water replenishment and drainage functions are applied to mass production machines, they only solve the problem of how to drain water out of the device itself, without considering the peripheral conditions of the machine and failing to achieve the circulation of the entire system. There are still many problems such as (1) the water in the main pipe is easy to deteriorate, which will cause a lot of pure water waste when replaced; (2) water quality testing is troublesome and it is difficult to monitor the water quality online for a long time; (3) the amount of water discharged when changing water in the mass production machine is large, and the processing burden is heavy. Utility Model Content

[0003] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a wet oxygen process system which is beneficial to maintaining the quality of pure water in the main pipeline, is convenient for online monitoring of water quality, and saves pure water.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A wet oxygen process system comprises a pure water circulation unit, a wet oxygen unit and a drainage unit; the pure water circulation unit comprises an inlet pipe section, a circulation pipe section and a return pipe section which are connected in sequence, the inlet of the inlet pipe section and the outlet of the return pipe section are respectively connected to an external pure water source, an external circulation connecting pipe is arranged between the inlet pipe section and the return pipe section, an external circulation valve is arranged on the external circulation connecting pipe, an inlet valve is arranged at the inlet end of the circulation pipe section, and a return valve is arranged at the outlet end of the circulation pipe section; a plurality of inlet branch pipes are arranged in parallel on the circulation pipe section, each of the inlet branch pipes is connected to a corresponding wet oxygen unit one by one, and is used to replenish the pure water required by the wet oxygen unit, and the water discharged from each wet oxygen unit is discharged to the periphery through the drainage unit; the circulation pipe section is also provided with a water quality detector, a drainage outlet and a first drainage valve located on the drainage outlet.

[0006] As a further improvement, a pressure-stabilizing throttle valve is also provided on the circulation pipe section between the water inlet valve and the water inlet branch pipe.

[0007] Further improved, the drainage unit includes a water storage tank, multiple drainage branch pipes, a drainage main pipe and an external drainage pipe. The drainage outlet of each wet oxygen unit is connected to the drainage main pipe through a corresponding drainage branch pipe. The drainage main pipe is connected to the inlet of the water storage tank, and the external drainage pipe is connected to the outlet of the water storage tank. The water storage tank is provided with a liquid level gauge, and the liquid level gauge includes a low water level gauge, a middle water level gauge and a high water level gauge. Each drainage branch pipe is provided with a second drainage valve, and the external drainage pipe is provided with a water pump, a second one-way valve and an external drainage valve.

[0008] As a further improvement, a water tank leakage detector is provided at the bottom of the water storage tank.

[0009] As a further improvement, the wet oxygen unit includes a gas-liquid mixing component for mixing pure water with a source-carrying gas to form steam, the gas-liquid mixing component is connected to a pressure relief pipe, the pressure relief pipe is provided with a pressure sensor and a pressure relief valve, and a filter is provided at the end of the pressure relief pipe.

[0010] Further improved, the wet oxygen unit also includes an air inlet pipe, a heating pipe, and a reaction chamber; the gas-liquid mixing assembly includes a water bottle and a constant temperature tank, the water bottle is respectively connected to the water inlet branch pipe, the air inlet pipe, the heating pipe and the drainage branch pipe, each of the water inlet branches is provided with a water replenishment valve, the air inlet pipe is provided with an air inlet valve and a flow controller, the air inlet pipe is used to input the source gas, the water bottle is located in the constant temperature tank, the constant temperature tank is used to keep the pure water in the water bottle at a constant temperature to ensure that the amount of pure water brought out by the source gas meets the process requirements and is stable, the water bottle is provided with a water bottle thermometer, a water bottle liquid level detector and a water bottle leakage detector, the heating pipe is used to transport steam to the reaction chamber, and the heating pipe is provided with a heating pipe temperature detector and a first one-way valve.

[0011] As a further improvement, the wet oxygen process system also includes a control unit, and the water replenishment valve, air intake valve, flow controller, water bottle liquid level detector, water bottle leakage detector, air outlet valve, pressure sensor and pressure relief valve are all connected to the control unit to achieve automatic water replenishment, air intake, air outlet and pressure relief of the wet oxygen unit.

[0012] As a further improvement, the water inlet valve, water return valve, external circulation valve, first drain valve, pressure-stabilizing throttle valve and water quality detector are all connected to the control unit to realize automatic operation of the pure water circulation unit.

[0013] Further improved, the second drain valve, liquid level gauge, water pump, external drain valve and water tank leakage detector are all connected to the control unit. The control unit controls the start and stop of the water pump and the switch of the second drain valve and the external drain valve according to the information fed back by the liquid level gauge and the water tank leakage detector to realize automatic drainage of the water tank.

[0014] Further improved, the pure water circulation unit also includes a spare water inlet pipe section and a spare water return pipe section, the inlet of the spare water inlet pipe section and the outlet of the spare water return pipe section are respectively connected to the spare peripheral pure water source, a spare water inlet is provided on the circulation pipe section between the water inlet valve and the pressure-stabilizing throttle valve, the outlet of the spare water inlet pipe section is connected to the spare water inlet, a spare return water port is provided on the circulation pipe section close to the return water valve, the inlet of the spare return water pipe section is connected to the spare return water port, a spare external circulation connecting pipe is provided between the spare water inlet pipe section and the spare return water pipe section, a spare external circulation valve is provided on the spare external circulation connecting pipe, a spare water inlet valve is provided between the spare external circulation connecting pipe and the spare water inlet, and a spare return water valve is provided between the spare external circulation connecting pipe and the spare water return port.

[0015] Compared with the prior art, the advantages of the utility model are:

[0016] In view of the problems that the water in the main pipeline used to provide pure water in the current mainstream wet oxygen process is easy to deteriorate, it is inconvenient to replace and wastes a lot of pure water resources, it is impossible to detect the water quality in real time, and the amount of waste water discharged when the batch production machine changes water is large, the utility model proposes a wet oxygen process system, the main pipeline for providing pure water is set as a circulation pipeline with an inlet pipe section and a return pipe, and an inlet branch pipe, a water quality detector, a drain and a first drain valve are set on the circulation pipeline, thereby realizing the circulation of pure water in the main pipeline of the machine water supply, which is conducive to maintaining and monitoring the water quality. Because the higher the purity of water, the stronger its ability to dissolve substances is relatively, when it comes into contact with air, the carbon dioxide, oxygen, ammonia and other gases in it are very easy to dissolve in it quickly, causing water deterioration and increased conductivity. At the same time, most of the existing pure water resistivity detection devices have fluidity requirements, otherwise the data is inaccurate. Therefore, keeping the pure water in a clean and closed pipeline to keep it flowing can avoid deterioration caused by contact with air or standing still and difficulty in water quality detection. This system sets up a main pipeline for pure water circulation to meet the real-time monitoring of water quality by the water quality detector. Only when the water quality is qualified can it supply water to the corresponding wet oxygen process through the water inlet branch pipe, and multiple water inlet branches can be set according to demand to meet the water needs of multiple process units at the same time. If the water quality is unqualified, the water inlet valve and the return valve can be closed, and the external circulation valve can be opened to switch the water inlet to the periphery for treatment, and the drain port can be opened to discharge the unqualified pure water remaining in the main pipeline of the machine, that is, the circulation pipeline. The wet oxygen process system of this utility model can maintain the water quality of pure water in the internal main pipeline, and can monitor the water quality in real time, which meets the mainstream design requirements of online detection of water quality detectors, making water quality detection more convenient and accurate, and unqualified water will not enter the process unit, avoiding pollution to the wet oxygen process, and the amount of water discharged due to unqualified is small, which greatly reduces the waste of pure water resources, thereby reducing the burden of wastewater treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall structural principle of the wet oxygen process system in Example 1 of the utility model.

[0018] Figure 2 This is a schematic diagram of the structural principle of the pure water circulation unit in Example 1 of the utility model.

[0019] Figure 3 This is a schematic diagram of the structural principle of the drainage unit in Example 1 of the utility model.

[0020] Figure 4 This is a schematic diagram of the structural principle of the wet oxygen unit in Example 1 of the utility model.

[0021] Figure 5 This is a schematic diagram of the structural principle of the pure water circulation unit in Example 2 of the utility model.

[0022] The reference numerals in the figure indicate: 1. pure water circulation unit; 101. spare water inlet pipe section; 102. spare water return pipe section; 103. spare water inlet; 104. spare water return; 105. spare external circulation connecting pipe; 106. spare external circulation valve; 107. spare water inlet valve; 108. spare water return valve; 11. water inlet pipe section; 12. circulation pipe section; 121. water inlet valve; 122. water return valve; 123. water inlet branch pipe; 1231. water supply valve; 124. water quality detector; 125. first drain valve; 126. pressure regulating throttle valve; 13. water return pipe section; 14. external circulation connecting pipe; 141. external circulation valve; 2. wet oxygen unit; 21. gas-liquid mixing component; 211. water bottle; 2111. water bottle thermometer; 2112. water bottle liquid level detector; 211 3. Water bottle leakage detector; 212. Constant temperature bath; 22. Pressure relief pipe; 221. Pressure sensor; 222. Pressure relief valve; 223. Filter; 23. Air intake pipe; 231. Air intake valve; 232. Flow controller; 233. Air intake manual valve; 24. Heating pipe; 241. Heating pipe temperature detector; 242. First check valve; 243. Gas valve; 25. Reaction chamber; 3. Drainage unit; 31. Water storage tank; 311. Water tank leakage detector; 32. Drainage branch pipe; 321. Second drain valve; 33. Drainage main pipe; 34. External pipe; 341. Water pump; 342. Second check valve; 343. External valve; 35. Liquid level gauge; 351. Low water level gauge; 352. Middle water level gauge; 353. High water level gauge; 4. Control unit. DETAILED DESCRIPTION

[0023] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Embodiment 1:

[0025] Figures 1 to 4 A specific embodiment of the wet oxygen process system of the utility model is shown, which includes a pure water circulation unit 1, a wet oxygen unit 2 and a drainage unit 3; the pure water circulation unit 1 mainly provides pure water that meets the requirements for the entire system, such as Figure 2As shown, it comprises an inlet pipe section 11, a circulation pipe section 12 and a return pipe section 13 connected in sequence, the inlet of the inlet pipe section 11 and the outlet of the return pipe section 13 are respectively connected to an external pure water source, an external circulation connecting pipe 14 is arranged between the inlet pipe section 11 and the return pipe section 13, an external circulation connecting pipe 14 is arranged on the external circulation connecting pipe 14, an inlet valve 121 is arranged at the water inlet end of the circulation pipe section 12, and a return valve 122 is arranged at the water outlet end of the circulation pipe section 12; There are multiple water inlet branch pipes 123, each of which is connected to the corresponding wet oxygen unit 2 one by one, and is used to replenish the pure water required by the wet oxygen unit 2. The water discharged from each wet oxygen unit 2 is discharged to the periphery through the drainage unit 3; the circulation pipe section 12 is also provided with a water quality detector 124, a drain outlet and a first drain valve 125 located on the drain outlet. The water quality detector 124 is used to detect the water quality of pure water in the pure water circulation unit 1 to monitor the water quality of pure water entering the wet oxygen unit 2.

[0026] In the wet oxygen process system of this embodiment, the main pipeline for providing pure water is set as a circulation pipeline having an inlet pipe section 11 and a return pipe section 13, and an inlet branch pipe 123, a water quality detector 124, a drain port and a first drain valve 125 are set on the circulation pipeline, thereby realizing the circulation of pure water in the main water supply pipeline of the machine, which is conducive to maintaining and monitoring water quality. Because the higher the purity of water, the stronger its ability to dissolve substances is relatively, when it comes into contact with air, the carbon dioxide, oxygen, ammonia and other gases in it are very easy to dissolve in it quickly, causing water deterioration and increased conductivity. At the same time, most of the existing pure water resistivity detection devices have fluidity requirements, otherwise the data is inaccurate. Therefore, keeping the pure water in a clean and closed pipeline to keep it flowing can avoid deterioration caused by contact with air or standing still and difficulties in water quality detection. This system sets a water quality detector 124 on the main pipeline of the circulation flow to monitor the water quality in real time. Only when the water quality is qualified can it supply water to the corresponding wet oxygen unit 2 through the water inlet branch pipe 123, and multiple water inlet branches 123 can be set according to demand to meet the water needs of multiple wet oxygen units 2 at the same time. If the water quality is unqualified, the water inlet valve 121 and the return valve 122 can be closed, and the external circulation valve 141 can be opened to switch the water inlet to the periphery for treatment, and at the same time, the drain port can be opened to discharge the unqualified pure water retained in the main pipeline of the machine, that is, the circulation pipeline. The wet oxygen process system of this embodiment can better maintain the water quality of the pure water in the internal main pipeline, and can monitor the water quality in real time, which meets the mainstream design requirements of the online detection of the water quality detector 124, making water quality detection more convenient and accurate, and unqualified water will not enter the process unit, avoiding pollution to the wet oxygen process, and the amount of water discharged due to unqualified is small, which greatly reduces the waste of pure water resources, thereby reducing the burden of wastewater treatment.

[0027] In this embodiment, a pressure stabilizing throttle valve 126 is further provided on the circulation pipe section 12 between the water inlet valve 121 and the water inlet branch pipe 123. The pressure stabilizing throttle valve 126 can ensure the stability of the water pressure in the pipeline, and prevent the unstable water pressure during process water replenishment from causing the liquid level to shake, the liquid level detection to be inaccurate, the water level to be too high, and other problems.

[0028] In this embodiment, a control unit 4 is also included, and the water inlet valve 121, the return valve 122, the external circulation valve 141, the first drain valve 125, the pressure-stabilizing throttle valve 126 and the water quality detector 124 are all connected to the control unit 4 to realize the automatic operation of the pure water circulation unit 1. The control unit 4 is a PLC or a host computer. During operation, pure water enters the circulation pipe section 12 from the periphery of the equipment through the water inlet pipe section 11, flows through the water quality detector 124 along the circulation pipe section 12, and then returns to the periphery through the return pipe section 13, so that the pure water keeps flowing in the main pipeline. The water quality detector 124 is installed on the circulation pipe section 12 to directly perform online detection, and the water quality detection results are fed back to the control unit 4 in real time. When water quality problems are detected, the control unit 4 controls the water inlet valve 121 and the water return valve 122 to close, and opens the external circulation valve 141 to form an external circulation, so that unqualified water cannot enter the system, and is only connected after being processed by the periphery and qualified. At the same time, the first drain valve 125 is opened to discharge all the unqualified water in the device.

[0029] like Figure 3 As shown, the drainage unit 3 of this embodiment includes a water storage tank 31, multiple drainage branch pipes 32, a drainage main pipe 33 and an external drainage pipe 34. The drainage outlet of each wet oxygen unit 2 is connected to the drainage main pipe 33 through the corresponding drainage branch pipe 32. The drainage main pipe 33 is connected to the inlet of the water storage tank 31, and the external drainage pipe 34 is connected to the outlet of the water storage tank 31. A liquid level gauge 35 is provided on the water storage tank 31. The liquid level gauge 35 includes a low water level gauge 351, a middle water level gauge 352 and a high water level gauge 353. Each drainage branch pipe 32 is provided with a second drainage valve 321, and the external drainage pipe 34 is provided with a water pump 341, a second one-way valve 342 and an external drainage valve 343.

[0030] The replaced and discharged water in the wet oxygen unit 2 flows into the drainage main pipe 33 through the drainage branch pipe 32, and then flows into the water storage tank 31 through the drainage main pipe 33. The water level is judged by the three liquid level gauges 35 on the water storage tank 31 and the start and stop of the water pump 341 are controlled. The water in the water storage tank 31 is discharged to the periphery of the machine through the water pump 341. Since the pipes that can be used for drainage outside the machine are under a certain pressure and there are impurities such as mud and sand in the peripheral water, in order to prevent the water outlet of the water pump 341 from being blocked and difficult to maintain, a second one-way valve 342 is added to protect the water pump 341 and facilitate maintenance.

[0031] In this embodiment, a water tank leakage detector 311 is provided at the bottom of the water tank 31. When a leakage occurs, a prompt is given in time, and the staff can discover and deal with it in time to avoid corrosion of equipment or danger, which is beneficial to protecting the equipment.

[0032] In this embodiment, the second drain valve 321, the liquid level meter 35, the water pump 341, the external drain valve 343 and the water tank leakage detector 311 are all connected to the control unit 4. The control unit 4 controls the start and stop of the water pump 341 and the switch of the second drain valve 321 and the external drain valve 343 according to the information fed back by the liquid level meter 35 and the water tank leakage detector 311 to realize automatic drainage of the water storage tank 31.

[0033] Specifically, the liquid level gauge 35 has a corresponding warning light, which is defined as being on when the liquid level gauge 35 detects water at the position, and is defined as being off when no water is detected at the position. When the low water level gauge 351 and the middle water level gauge 352 are on, the water pump 341 is controlled to start, and when the low water level gauge 351 is off, the water pump 341 is stopped. When the high water level gauge 353 is on, the second drain valve 321 on each drainage branch pipe 32 is closed, and each wet oxygen unit 2 is stopped from draining water into the water storage tank 31 until the high water level gauge 353 on the water storage tank 31 is off. When the control unit 4 receives the warning signal from the water tank leakage detector 311, it will also close the second drain valve 321 on each drainage branch pipe 32 and start the water pump 341. This can prevent the water pump 341 from starting and stopping frequently, which is beneficial to extending the service life of the water pump 341; it can also prevent abnormal low or medium liquid levels or frequent drainage into the water tank 31 causing water overflow or water leakage from the water tank 31 to the machine, causing corrosion or danger.

[0034] In this embodiment, the wet oxygen unit 2 includes a gas-liquid mixing component 21 for mixing pure water with a source-carrying gas to form steam, and a pressure relief pipe 22 is connected to the gas-liquid mixing component 21. The pressure relief pipe 22 is provided with a pressure sensor 221 and a pressure relief valve 222, and a filter 223 is provided at the end of the pressure relief pipe 22. In order to ensure that pure water is not contaminated, pure water is usually stored in a quartz bottle in the wet oxygen process, but the quartz bottle is fragile, and the pressure relief pipe 22 and the pressure relief valve 222 are provided to prevent the quartz bottle from breaking or other problems caused by pressure imbalance, and the filter 223 at the end of the pressure relief pipe 22 can prevent the outside air from entering the process device and causing pollution when the pressure relief valve 222 is opened.

[0035] In this embodiment, the pressure sensor 221 and the pressure relief valve 222 are both connected to the control unit 4. The pressure sensor 221 transmits the detection signal to the control unit 4. When the pressure sensor 221 detects an abnormal pressure signal, the control unit 4 opens the pressure relief valve 222 to release the pressure and balance the internal and external pressures to achieve automatic pressure relief of the gas-liquid mixing component 21.

[0036] like Figure 4As shown, the wet oxygen unit 2 of this embodiment also includes an air inlet pipe 23, a heating pipe 24, and a reaction chamber 25; the gas-liquid mixing component 21 includes a water bottle 211 and a constant temperature tank 212, the water bottle 211 is respectively connected to the water inlet branch pipe 123, the air inlet pipe 23, the heating pipe 24 and the drainage branch pipe 32, each water inlet branch pipe 123 is provided with a water replenishment valve 1231, the air inlet pipe 23 is provided with an air inlet valve 231, an air inlet hand valve 233 and a flow controller 232, and the air inlet pipe 23 is used to The source-carrying gas is input, and the water bottle 211 is located in a constant temperature bath 212. The constant temperature bath 212 is used to keep the pure water in the water bottle 211 at a constant temperature to ensure that the amount of pure water brought out by the source-carrying gas meets the process requirements and is stable. The water bottle 211 is provided with a water bottle thermometer 2111, a water bottle liquid level detector 2112 and a water bottle leakage detector 2113. The heating pipe 24 is used to transport steam to the reaction chamber 25. The heating pipe 24 is provided with a heating pipe temperature detector 241 and a first one-way valve 242.

[0037] During operation, the source gas enters the water bottle 211 from the air inlet pipe 23, and enters the reaction chamber 25 along the heating pipe 24 with water vapor through bubbling to complete the process. The air inlet hand valve 233, the flow controller 232 (specifically a mass flow controller), and the air inlet valve 231 jointly complete the control of the source gas, which can be nitrogen or oxygen or other gases that meet the requirements. The water bottle 211 is placed in a constant temperature bath 212, which is equipped with a temperature controller and a heater to ensure that the temperature of the pure water in the water bottle 211 meets the process requirements. The water bottle liquid level detector 2112 is used to detect the water level in the water bottle 211 to complete the control of the water change function. The water bottle thermometer 2111 is used to detect the temperature of pure water in the water bottle. In order to ensure sealing and accuracy, the water bottle 211 adopts the form of welding the bottom temperature sleeve, and then placing the thermometer in the temperature sleeve. When the water temperature is detected to exceed the set deviation value, the signal is fed back to the thermostat, and the corresponding heating and stopping heating actions are performed. At the same time, if the process is in the set temperature detection step, the host computer signal will be prompted. Equipped with a water bottle leakage detector 2113, the water bottle 211 can be broken and processed in time to avoid pure water flowing to the inside of the machine and causing dangerous accidents. The heating pipe 24 is a conventional pipeline wrapped with heating tape, insulation and thermostat to obtain heating, which can ensure that the water vapor in the transportation process will not condense. The heating pipe temperature detector 241 is equipped on the heating pipe 24, which can realize the full detection of the temperature of the heating pipe 24 during bubbling, and timely adjustment is made by the thermostat to ensure the smooth progress of the process. Of course, it can also be fed back to the control unit 4 to realize detection and regulation.

[0038] In this embodiment, the water replenishment valve 1231, the air inlet valve 231, the flow controller 232, the water bottle liquid level detector 2112 and the water bottle water leakage detector 2113, the air outlet valve 243, the pressure sensor 221 and the pressure relief valve 222 are all connected to the control unit 4 to realize automatic water replenishment, air intake, air outlet and pressure relief of the wet oxygen unit 2. For example, it is best to set the automatic water replenishment high liquid level of the water bottle 211 at 12±2CM. Of course, in other embodiments, the optimal liquid level will be different according to the specific parameters such as the shape, size, and set temperature of the water bottle; the water bottle liquid level detector 2112 feeds back the detected water level signal to the control unit 4. When the water level is lower than the set value, the control unit 4 controls the water replenishment valve 1231 to open for water replenishment.

[0039] The control unit 4 of this embodiment adopts the host computer of the main station. Corresponding detection will be carried out on the key steps in the main process of automatic water replenishment. The system will automatically take corresponding adjustment measures according to the detection results to ensure the smooth progress of the process and feedback of abnormalities; the system also runs through the communication detection of the whole process, the liquid level detection of the water bottle, the temperature detection of the heating pipe, the leakage detection of the water bottle 211 and the water storage tank 31, etc. The signals can be fed back to the host computer of the main station for corresponding actions and prompts.

[0040] In addition, each time the machine is shut down and restarted, the water bottle 211 and the pipeline need to be cleaned to ensure the purity of the entire system during the standby stage and the first process. The specific process is as follows: 1: Perform two consecutive water changes and stop at the end of the second water bottle 211 drainage process to facilitate the cooling of the water bottle 211 and drain all the water in the water storage tank 31 out of the machine. 2. Close the water inlet valve 121 and the return valve 122, and open the external circulation valve 141 to ensure the peripheral circulation of pure water. 3. Open the air inlet hand valve 233 and the air inlet valve 231 on the air inlet pipe 23, the air delivery valve 243 on the heating pipe 24, and the pressure relief valve 222 on the pressure relief pipe 22, and pass a gas with a flow rate of 4000SCCM for purging to ensure that all the water in the pipeline is evacuated. 4. Block the outlet of the pressure relief valve 222 to complete the shutdown process. 5. When resuming the machine, first remove the plug at the outlet of the pressure relief valve 222, and open the air inlet hand valve 233, air inlet valve 231, air delivery valve 243 and pressure relief valve 222, and set the gas flow rate to 4000SCCM to purge the pipeline and water bottle 211. 6. Close the external circulation valve 141, open the water inlet valve 121 and the return valve 122, and let the pure water circulate in the pipeline for 12 hours. 7. After confirming that the water quality test is qualified, the automatic water change process is repeated twice for each tube. The water added to the water bottle 211 for the third time begins to heat up, and the first round of process is carried out.

[0041] Through the above connection, this embodiment can realize unattended automation of the wet oxygen process, avoid waste of pure water while ensuring that the water quality meets the requirements, save labor, time, and material costs, and realize batch application of the wet oxygen process, thereby reducing the temperature of the reaction chamber 25, which can increase the life of quartz parts (quartz boat, quartz boat support, quartz tube); shorten the process time, increase equipment production capacity; and improve the efficiency of battery cells. At the same time, since the reaction temperature can be reduced, the failure rate of the sealing components in the reaction chamber 25 can be reduced, which is conducive to the stable operation of the equipment.

[0042] Embodiment 2:

[0043] A wet oxygen process system, the main structure of which is the same as that of Example 1, also includes a pure water circulation unit 1, a wet oxygen unit 2 and a drainage unit 3; the pure water circulation unit 1 mainly provides pure water that meets the requirements for the entire system, such as Figure 2 As shown, it includes an inlet pipe section 11, a circulation pipe section 12 and a return pipe section 13 connected in sequence, the inlet of the inlet pipe section 11 and the outlet of the return pipe section 13 are respectively connected to the peripheral pure water source, an external circulation connecting pipe 14 is arranged between the inlet pipe section 11 and the return pipe section 13, and an external circulation valve 141 is arranged on the external circulation connecting pipe 14, an inlet valve 121 is arranged at the water inlet end of the circulation pipe section 12, and a return valve 122 is arranged at the water outlet end of the circulation pipe section 12; a plurality of inlet branch pipes 123 are arranged in parallel on the circulation pipe, each inlet branch pipe 123 is connected to the corresponding wet oxygen unit 2 one by one, and is used to supplement the pure water required by the wet oxygen unit 2, and the water discharged from each wet oxygen unit 2 is discharged to the periphery through the drainage unit 3; a water quality detector 124, a drainage port and a first drainage valve 125 are also arranged on the circulation pipe section 12, and the water quality detector 124 is used to detect the pure water quality in the pure water circulation unit 1 to monitor the pure water quality entering the wet oxygen unit 2.

[0044] like Figure 5As shown, the main difference between this embodiment and embodiment 1 is that the pure water circulation unit 1 further includes a spare water inlet pipe section 101 and a spare water return pipe section 102, the inlet of the spare water inlet pipe section 101 and the outlet of the spare water return pipe section 102 are respectively connected to the spare peripheral pure water source, and a spare water inlet port 103 is provided on the circulation pipe section 12 between the water inlet valve 121 and the pressure-stabilizing throttle valve 126, the outlet of the spare water inlet pipe section 101 is connected to the spare water inlet port 103, and the circulation pipe section 101 near the return valve 122 is 2 is provided with a standby water return port 104, the inlet of the standby water return pipe section 102 is connected to the standby water return port 104, a standby external circulation connecting pipe 105 is provided between the standby water inlet pipe section 101 and the standby water return pipe section 102, a standby external circulation connecting pipe 105 is provided with a standby external circulation valve 106, a standby water inlet valve 107 is provided between the standby external circulation connecting pipe 105 and the standby water inlet 103, and a standby water return valve 108 is provided between the standby external circulation connecting pipe 105 and the standby water return port 104. By setting the standby water inlet pipe section 101, the standby water return pipe section 102, the standby external circulation pipe section 12 and the corresponding valves, the switching of the peripheral standby pure water source can be realized, and the standby pure water source can be switched in time when the water quality test is unqualified, thereby ensuring the normal process production and avoiding the loss of production suspension caused by unqualified water quality of the water source.

[0045] Although the present invention has been disclosed as a preferred embodiment, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed technical content to make many possible changes and modifications to the technical solution of the present invention without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.

Claims

1. A wet oxygen process system, characterized in that: The invention comprises a pure water circulation unit (1), a wet oxygen unit (2) and a drainage unit (3); the pure water circulation unit (1) comprises a water inlet pipe section (11), a circulation pipe section (12) and a water return pipe section (13) which are connected in sequence; the inlet of the water inlet pipe section (11) and the outlet of the water return pipe section (13) are respectively connected to an external pure water source; an external circulation connecting pipe (14) is provided between the water inlet pipe section (11) and the water return pipe section (13); an external circulation valve (141) is provided on the external circulation connecting pipe (14); and a water inlet end of the circulation pipe section (12) is provided with a A water inlet valve (121) is provided, and a water return valve (122) is provided at the water outlet end of the circulation pipe section (12); a plurality of water inlet branch pipes (123) are provided in parallel on the circulation pipe section (12), and each of the water inlet branch pipes (123) is connected to a corresponding wet oxygen unit (2) one by one and is used to replenish the pure water required by the wet oxygen unit (2); the water discharged from each wet oxygen unit (2) is discharged to the periphery through the drainage unit (3); and a water quality detector (124), a drainage outlet, and a first drainage valve (125) located on the drainage outlet are also provided on the circulation pipe section (12).

2. The wet oxygen process system according to claim 1, characterized in that: A pressure-stabilizing throttle valve (126) is also provided on the circulation pipe section (12) between the water inlet valve (121) and the water inlet branch pipe (123).

3. The wet oxygen process system according to claim 2, characterized in that: The drainage unit (3) comprises a water storage tank (31), a plurality of drainage branch pipes (32), a drainage main pipe (33) and an external drainage pipe (34). The drainage outlet of each of the wet oxygen units (2) is connected to the drainage main pipe (33) via a corresponding drainage branch pipe (32). The drainage main pipe (33) is connected to the inlet of the water storage tank (31). The external drainage pipe (34) is connected to the outlet of the water storage tank (31). A liquid level gauge (35) is provided on the water storage tank (31). The liquid level gauge (35) comprises a low water level gauge (351), a middle water level gauge (352) and a high water level gauge (353). Each of the drainage branch pipes (32) is provided with a second drainage valve (321). The external drainage pipe (34) is provided with a water pump (341), a second one-way valve (342) and an external drainage valve (343).

4. The wet oxygen process system according to claim 3, characterized in that: A water tank leakage detector (311) is provided at the bottom of the water storage tank (31).

5. The wet oxygen process system according to claim 3, characterized in that: The wet oxygen unit (2) comprises a gas-liquid mixing component (21) for mixing pure water with a source-carrying gas to form steam, the gas-liquid mixing component (21) being connected to a pressure relief pipe (22), the pressure relief pipe (22) being provided with a pressure sensor (221) and a pressure relief valve (222), and a filter (223) being provided at the end of the pressure relief pipe (22).

6. The wet oxygen process system according to claim 5, characterized in that: The wet oxygen unit (2) further comprises an air inlet pipe (23), a heating pipe (24), and a reaction chamber (25); the gas-liquid mixing assembly (21) comprises a water bottle (211) and a constant temperature tank (212); the water bottle (211) is respectively connected to the water inlet branch pipe (123), the air inlet pipe (23), the heating pipe and the drainage branch pipe; each of the water inlet branch pipes (123) is provided with a water replenishment valve (1231); the air inlet pipe (23) is provided with an air inlet valve (231) and a flow controller (232); the air inlet pipe (23) is used to input a source gas The water bottle (211) is located in a constant temperature bath (212). The constant temperature bath (212) is used to keep the pure water in the water bottle (211) at a constant temperature so as to ensure that the amount of pure water carried out by the source-carrying gas meets the process requirements and is stable. The water bottle (211) is provided with a water bottle temperature measuring instrument (2111), a water bottle liquid level detector (2112) and a water bottle water leakage detector (2113). The heat tracing pipe (24) is used to transport steam to the reaction chamber (25). The heat tracing pipe (24) is provided with a heat tracing pipe temperature detector (241) and a first one-way valve (242).

7. The wet oxygen process system according to claim 6, characterized in that: It also includes a control unit (4), wherein the water replenishment valve (1231), the air intake valve (231), the flow controller (232), the water bottle liquid level detector (2112), the water bottle water leakage detector (2113), the air outlet valve (243), the pressure sensor (221) and the pressure relief valve (222) are all connected to the control unit (4) to achieve automatic water replenishment, air intake, air outlet and pressure relief of the wet oxygen unit (2).

8. The wet oxygen process system according to any one of claims 2 to 6, characterized in that: It also includes a control unit (4), wherein the water inlet valve (121), the water return valve (122), the external circulation valve (141), the first drainage valve (125), the pressure-stabilizing throttle valve (126) and the water quality detector (124) are all connected to the control unit (4) to realize automatic operation of the pure water circulation unit (1).

9. The wet oxygen process system according to any one of claims 4 to 6, characterized in that: The device further comprises a control unit (4); the second drain valve (321), the liquid level meter (35), the water pump (341), the external drain valve (343) and the water tank leakage detector (311) are all connected to the control unit (4); the control unit (4) controls the start and stop of the water pump (341) and the switch of the second drain valve (321) and the external drain valve (343) according to information fed back by the liquid level meter (35) and the water tank leakage detector (311), so as to realize automatic drainage of the water storage tank (31).

10. The wet oxygen process system according to any one of claims 1 to 7, characterized in that: The pure water circulation unit (1) further comprises a spare water inlet pipe section (101) and a spare water return pipe section (102); the inlet of the spare water inlet pipe section (101) and the outlet of the spare water return pipe section (102) are respectively connected to a spare peripheral pure water source; a spare water inlet port (103) is provided on the circulation pipe section (12) between the water inlet valve (121) and the pressure-stabilizing throttle valve (126); the outlet of the spare water inlet pipe section (101) is connected to the spare water inlet port (103); and a spare water return port (103) is provided on the circulation pipe section (12) near the water return valve (122). 04), the inlet of the standby water return pipe section (102) is connected to the standby water return port (104), a standby external circulation connecting pipe (105) is provided between the standby water inlet pipe section (101) and the standby water return pipe section (102), a standby external circulation valve (106) is provided on the standby external circulation connecting pipe (105), a standby water inlet valve (107) is provided between the standby external circulation connecting pipe (105) and the standby water inlet port (103), and a standby water return valve (108) is provided between the standby external circulation connecting pipe (105) and the standby water return port (104).

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