Test equipment with probe on-line cleaning function

Abstract

The utility model discloses test equipment with a probe on-line cleaning function. The device comprises a rack, a turntable testing device arranged on the rack, a material supply device and a material receiving device which are respectively arranged on two sides of the turntable testing device, and a material loading and carrying device arranged above the material supply device and the turntable testing device, the blanking carrying device is arranged above the turntable testing device and the material receiving device; the probe cleaning device is arranged on one side of the turntable testing device; the probe cleaning device comprises a cleaning sample for cleaning a probe of the turntable testing device and a bearing platform for placing the cleaning sample; the cleaning sample comprises a profiling body profiled with a to-be-tested material and a cleaning part attached to the surface of the profiling body. The probe cleaning device solves the problem that in the testing process of a probe, stains are prone to being generated after the tip of the probe makes contact with a welding pad or a protruding block, and consequently testing is inaccurate, the probe cleaning device is simple in structure, and the cleaning process is simple and convenient.

Description

[Technical field]

[0001] The utility model belongs to the technical field of testing equipment, in particular to a testing equipment with a probe online cleaning function. [Background technology]

[0002] In recent years, with the high integration and continuous upgrading and refinement of electronic components, electronic products are developing in the direction of miniaturization, low energy consumption, high precision and intelligence. Therefore, a variety of test equipment has been designed to test electronic products to ensure the safety, stability and reliability of electronic components, and thus ensure the quality of electronic products. The test of electronic components is mainly to connect the test machine and components through the probe card, and test the parameters of the components by transmitting signals. During the test, the probes on the probe card are directly in contact with the pads or bumps on the components to lead out the chip signals, and then cooperate with peripheral test instruments and software control to achieve the purpose of automated measurement. As electronic components tend to be smaller, the needle tip of the probe card is micron or even nanometer level. During the test, stains are easily generated after the needle tip contacts the pad or bump. If it is not cleaned in time, it will cause the test to fail, increase the resistance between the needle tip and the chip under test, and affect the test results.

[0003] Patent publication number CN108828372B discloses an electronic component testing device, which includes a turntable device, an automatic loading device, a material testing device, a material scanning device and an automatic unloading device. Although the electronic component testing device can effectively improve the testing efficiency of electronic components, on the one hand, the testing device is not provided with a probe cleaning device. During the test, stains are easily generated after the needle tip contacts the solder pad or the bump. If it is not cleaned in time, the test will fail, increase the resistance between the needle tip and the chip under test, and affect the test results; on the other hand, if the probe is removed for cleaning, it will affect the test efficiency and increase the production cost.

[0004] Therefore, it is necessary to provide a testing device with a probe online cleaning function to solve the above technical problems. [Contents of the utility model]

[0005] The main purpose of the utility model is to provide a testing device with a probe online cleaning function, which solves the problem that the probe tip is prone to stains after contacting the solder pad or bump during the test, resulting in inaccurate testing. The probe cleaning device has a simple structure and the cleaning process is simple and convenient.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a test device with a probe online cleaning function, comprising a frame, a turntable test device installed on the frame to test materials, a feeding device arranged on one side of the turntable test device, a receiving device arranged on the other side of the turntable test device opposite to the feeding device, a loading and conveying device arranged above the feeding device and the turntable test device and conveying materials, a unloading and conveying device arranged above the turntable test device and the receiving device and conveying materials, and a probe cleaning device arranged on one side of the turntable test device; the turntable test device The device includes a turntable, loading and unloading stations arranged in sequence around the turntable, and a plurality of testing stations, a plurality of carriers are arranged in an equiangular ring on the turntable, a testing mechanism for testing materials is arranged on the testing station, a probe card assembly for connecting with the material to achieve signal connection and performing relevant tests on the material is arranged on the testing mechanism, and a plurality of probes are embedded on the probe unit of the probe card assembly; the probe cleaning device includes a cleaning sample for cleaning the probe and a carrying platform for placing the cleaning sample; the cleaning sample includes a contoured body that contours with the material to be tested and a cleaning component attached to the surface of the contoured body.

[0007] Furthermore, the probe cleaning device also includes a first support plate for mounting the carrying platform, the carrying platform is provided with a plurality of accommodating cavities, the cleaning samples are accommodated in the accommodating cavities, and the accommodating cavities are configured as step grooves.

[0008] Furthermore, the probe cleaning device is fixedly mounted on the material receiving device.

[0009] Furthermore, the surface of the profiling body is provided with marking points for shooting and positioning, and the marking points are consistent with the marking points on the material to be tested.

[0010] Furthermore, the cleaning component comprises an adhesive layer at the bottom end for being attached to the contoured body and an abrasive layer at the upper end for contacting with the probe to clean the probe.

[0011] Furthermore, the carrier is provided with a slot for holding the material to be tested or the clean sample, and a plurality of movable clamping blocks are arranged around the slot, each of the movable clamping blocks is supported by an elastic member to maintain a clamping state, and the loading and unloading station is provided with a clamping mechanism for opening the movable clamping blocks.

[0012] Furthermore, the clamping mechanism includes a first driving member, a first support frame driven by the first driving member to move up and down, a plurality of clamping components arranged on the first support frame and located below the groove and acting on the movable clamping block, a second driving member fixed on the first support frame and a second support plate driven by the second driving member to move up and down, and an axis fixed on the second support plate and expanding the clamping components outward.

[0013] Furthermore, the testing mechanism includes a pressing assembly arranged above the carrier and used to press the material to be tested or the cleaning sample in the carrier, a position adjustment assembly fixed below the probe card assembly and used to adjust the position of the probe card assembly to dock with the Pad point of the material, a second support frame carrying the position adjustment assembly, a camera for acquiring the material arranged on the second support frame, and a second driving member that drives the second support frame to move up and down, and the probe card assembly is arranged below the carrier.

[0014] Furthermore, the position adjustment component is configured as a UVW alignment platform, and the position adjustment component and the probe card assembly are provided with shooting holes that are connected and cooperate with the camera. The position adjustment component adjusts the position of the probe card assembly according to the shooting information of the camera so that the probe card assembly and the material are accurately aligned.

[0015] The utility model test equipment probe online cleaning method comprises the following steps:

[0016] S1. When it is confirmed that there is no material to be tested in the loading and unloading station, the loading and unloading device or the unloading and unloading device grabs the clean sample from the carrying platform to the loading and unloading station and places it in the carrier;

[0017] S2. The turntable rotates with the clean sample in the carrier to the test station;

[0018] S3. adjusting the position of the probe card assembly so that the probe in the probe card assembly is aligned with the cleaning member;

[0019] S4. The testing mechanism simulates the product testing action to drive the probe to reciprocate up and down several times into the cleaning member for probe cleaning. After the cleaning is completed, the turntable rotates with the clean sample to the loading and unloading station;

[0020] S5. The loading and transporting device or the unloading and transporting device grabs the cleaning sample in the carrier on the loading and unloading station and returns it to the carrying platform to complete the cleaning action.

[0021] Compared with the prior art, the test equipment with online probe cleaning function of the utility model has the following beneficial effects: by arranging a probe cleaning device on the test equipment, (1) the probe cleaning device can clean the probe of the test mechanism online, thereby solving the problem that the probe tip is prone to generate stains after contacting the solder pad or bump during the test, thereby causing inaccurate testing; (2) the cleaning sample of the probe cleaning device is structurally similar to the material to be tested, and the cleaning sample is placed in a carrier on the turntable test device. The probe is cleaned by contacting the cleaning component with the test mechanism through multiple reciprocating movements up and down, and the cleaning process is simple and convenient; (3) the probe cleaning device has a simple structure, a small size, and occupies little space; therefore, compared with the prior art, the test equipment provided by the present scheme solves the problem that the probe tip is prone to generate stains after contacting the solder pad or bump during the test, thereby causing inaccurate testing, and the probe cleaning device has a simple structure and a simple and convenient cleaning process.

Brief Description of the Drawings

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of the test equipment of the embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of the three-dimensional structure of the cleaning device according to an embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of the front three-dimensional structure of the cleaning sample according to the embodiment of the utility model;

[0025] Figure 4 This is a schematic diagram of the three-dimensional structure of the back of the cleaning sample according to the embodiment of the utility model;

[0026] Figure 5 This is a schematic diagram of the cross-sectional structure of the cleaning component of the embodiment of the utility model;

[0027] Figure 6 This is a schematic diagram of the three-dimensional structure of the test mechanism of the utility model embodiment;

[0028] Figure 7 This is a schematic diagram of the three-dimensional structure of the test structure of the embodiment of the utility model;

[0029] Figure 8 This is a schematic diagram of the three-dimensional structure of the probe unit of the embodiment of the utility model;

[0030] Fig. 9 This is a schematic diagram of the three-dimensional structure of the clamping mechanism of the embodiment of the utility model;

[0031] Fig.10 This is a schematic diagram of the three-dimensional structure of the opening and clamping structure of the embodiment of the utility model;

[0032] Fig.11 This is a schematic diagram of the three-dimensional structure of a carrier clamping a clean sample according to an embodiment of the utility model;

[0033] The numbers in the figure represent:

[0034] 100-test equipment;

[0035] 1- rack;

[0036] 2-turntable test device, 21-loading and unloading station, 22-testing station, 23-carrier, 231-slot, 232-movable clamping block, 233-slide cover, 24-testing mechanism, 241-pressing assembly, 242-probe card assembly, 2421-PCBA board, 2422-probe unit, 2423-plastic module, 2424-probe, 243-position adjustment assembly, 244-second driving member, 245-second supporting frame, 246-camera, 25-turntable; 26-clamping mechanism, 261-first driving member, 262-first supporting frame, 263-clamping assembly, 264-second driving member, 265-second supporting plate, 266-axis core;

[0037] 3-feeding device; 4-unloading device; 5-loading and handling device; 6-unloading and handling device;

[0038] 7-cleaning device, 71-cleaning sample, 711-contact body, 712-cleaning component, 7121-adhesive layer, 7122-grinding layer, 713-marking point, 72-carrying platform, 73-accommodating cavity, 74-first supporting plate. [Specific implementation method]

[0039] Please refer to Figure 1-Figure 11 The present embodiment is a testing device with a probe online cleaning function. The testing device 100 includes a frame 1, a turntable testing device 2 installed on the frame 1 to test materials, a feeding device 3 arranged on one side of the turntable testing device 2, a receiving device 4 arranged on the other side opposite to the turntable testing device 2, a loading and conveying device 5 arranged above the feeding device 3 and the turntable testing device 2 and for conveying materials, a unloading and conveying device 6 arranged above the turntable testing device 2 and the receiving device 4 and for conveying materials, and a probe cleaning device 7 arranged on one side of the turntable testing device 2.

[0040] The turntable testing device 2 includes a turntable 25, a loading and unloading station 21 and a plurality of testing stations 22 which are arranged around the turntable 25 and in sequence along the rotation direction of the turntable 25. The loading and unloading station 21 and the testing station 22 are both provided with a plurality of carriers 23 for clamping materials. The testing station 22 is provided with a testing mechanism 24 for testing materials. The loading and unloading station 21 is provided with a clamping mechanism 26 for driving the carrier 23 to open.

[0041] The carrier 23 includes a slot 231 for containing materials, and a plurality of movable clamping blocks 232 are arranged around the slot 231. Each movable clamping block 232 is held in a clamping state by an elastic member, and the elastic member is in a compressed state so that the plurality of movable clamping blocks 232 are docked to form a clamping position for laterally clamping the material; the carrier 23 is provided with a through installation slot for installing each movable block 232, and a sliding cover 233 for covering the movable clamping block 232 to prevent the movable clamping block 232 from slipping off; a through opening for contacting with the material for testing is arranged in the middle of the slot 11, so as to facilitate the detection or identification of the back side of the product 200.

[0042] The clamping mechanism 26 includes a first driving member 261, a first support frame 262 driven by the first driving member 261 to move up and down, a plurality of clamping components 263 arranged on the first support frame 262 and located below the groove 231 and acting on the movable clamping block 232, a second driving member 264 fixed to the first support frame 262 and a second support plate 265 driven by the second driving member 264 to move up and down, and an axis core 266 fixed on the second support plate 23 and expanding the clamping component 264 outward.

[0043] The testing mechanism 24 includes a pressing assembly 241 disposed above the carrier 23 and used to press the material in the carrier 23, a probe card assembly 242 disposed below the carrier 23 and connected to the material to realize signal connection and perform relevant tests on the material, a position adjustment assembly 243 fixed below the probe card assembly 242 and used to adjust the position of the probe card assembly 242 to precisely connect with the pad of the material, a second support frame 245 carrying the position adjustment assembly 243, a camera 246 disposed on the second support frame 245 for acquiring the material, and a second driving member 244 for driving the second support frame 245 to move up and down.

[0044] The probe card assembly 242 includes a PCBA board 2421 and a probe unit 2422 fixed on the PCBA board 2421 and in contact with the pad of the product. The probe unit 2422 is located directly below the carrier 23. The probe unit 2422 includes a plastic module 2423 and a plurality of probes 2424 embedded in the plastic module 2423 and extending from the upper and lower ends of the plastic module 2423.

[0045] The position adjustment component 243 is configured as a UVW alignment platform. The position adjustment component 243 and the PCBA board 2421 are both provided with shooting holes that are connected and cooperate with the camera 246. The camera 246 uses the shooting holes to photograph and locate the material to obtain the position of the material identification point. The UVW alignment platform adjusts the position of the probe card component 242 according to the shooting information so that the probe card component 242 and the material can be accurately aligned.

[0046] The probe cleaning device 7 includes a cleaning sample 71 for cleaning the probe 2424, a carrying platform 72 for placing the cleaning sample 71, and a first support plate 74 for fixing the carrying platform 72. A plurality of accommodating cavities 73 are provided on the carrying platform 72. The cleaning sample 71 is accommodated in the accommodating cavity 73. The accommodating cavity 73 is arranged as a step groove for convenient placement of the cleaning sample 71.

[0047] The cleaning sample 71 includes a contoured body 711 that is contoured to the material to be tested and a cleaning component 712 attached to the back of the contoured body 711. The back of the contoured body 711 is provided with an identification point 713 for the camera 2423 to photograph and locate. The identification point 713 is consistent with the identification point of the material to be tested. On the contoured body 711, the cleaning component 712 is attached to the position in contact with the probe 2424 and the identification point 713 is exposed for the camera 2423 to photograph and identify.

[0048] The appearance structure of the cleaning sample 71 is configured to be similar to the structure of the material to be tested. The cleaning sample 71 can be placed in the carrier 23 on the turntable testing device 2. The online cleaning of the probe 2424 can be achieved by making the probe 2424 of the testing mechanism 24 contact the cleaning sample 71 and making the testing mechanism 24 reciprocate up and down multiple times to contact the cleaning probe 2424. The cleaning process is simple and convenient.

[0049] The cleaning component 712 includes a bottom adhesive layer 7121 for being attached to the contoured body 711 and an upper grinding layer 7122 for contacting with the probe 2424 to clean the probe 2424 .

[0050] In this embodiment, the cleaning component 712 is configured as sandpaper. In other embodiments, it can be configured according to actual conditions.

[0051] In this embodiment, since there are six materials to be tested, the number of cleaning samples 71 is also set to six and the size of the cleaning samples 71 is relatively small. In order to avoid occupying the space of the testing equipment 100, the size of the supporting platform 72 is also correspondingly designed to be simple and compact. Therefore, the probe cleaning device 7 can be fixed on the guide rail of the material receiving device 4, which not only avoids occupying space, but also facilitates the loading and unloading conveying device 5 and the unloading and conveying device 6 to perform conveying actions.

[0052] In other embodiments, the number of cleaning samples 71 can be set according to the number of actual test materials, the structures of the carrying platform 72 and the first support plate 74 can be adjusted accordingly, and the probe cleaning device 7 can be set at other positions on the machine 1.

[0053] The online cleaning method of the test equipment probe comprises the following steps:

[0054] S1. When it is confirmed that there is no material to be tested in the loading and unloading station 21, the loading and unloading transport device 5 or the unloading and unloading transport device 6 grabs the clean sample 71 from the carrying platform 72 to the loading and unloading station 21 and places it in the carrier 23;

[0055] S2. The turntable 25 rotates with the clean sample 71 in the carrier 23 to the test station;

[0056] S3. The position of the probe card assembly 242 is adjusted so that the probe 2424 in the probe card assembly 242 is aligned with the cleaning member 712;

[0057] S4. The testing mechanism 24 simulates the product testing action to drive the probe up and down to reciprocate multiple times to pierce the cleaning member 712 to clean the probe 2424. After cleaning, the turntable 25 rotates with the clean sample 71 to the loading and unloading station 21;

[0058] S5. The loading and unloading transport device 5 or the unloading and unloading transport device 6 grabs the clean sample 71 in the carrier 23 on the loading and unloading station 21 and returns it to the carrying platform 72 to complete the cleaning action.

[0059] The present solution is a test device with a probe online cleaning function. A probe cleaning device 7 is provided on the test device 100. (1) The probe cleaning device 7 can clean the probe 2424 of the test mechanism 24 online, thereby solving the problem that the probe 2424 is prone to generate stains after the needle tip contacts the solder pad or bump during the test, thereby causing inaccurate testing. (2) The cleaning sample 71 of the probe cleaning device 7 is similar to the structure of the material to be tested. The cleaning sample 71 is placed in the carrier 23 on the turntable test device 2. The test mechanism 24 is moved up and down multiple times to contact the cleaning component 712 to clean the probe 2424. The cleaning process is simple and convenient. (3) The probe cleaning device 7 has a simple structure, a small size, and occupies little space. Therefore, compared with the prior art, the test device 100 provided by the present solution solves the problem that the probe 2424 is prone to generate stains after the needle tip contacts the solder pad or bump during the test, thereby causing inaccurate testing. In addition, the probe cleaning device 7 has a simple structure and a simple and convenient cleaning process.

[0060] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A test device with a probe online cleaning function, characterized in that: It includes a frame, a turntable test device installed on the frame for testing materials, a feeding device arranged on one side of the turntable test device, a receiving device arranged on the other side of the turntable test device, a loading and conveying device arranged above the feeding device and the turntable test device and for conveying materials, a unloading and conveying device arranged above the turntable test device and the receiving device and for conveying materials, and a probe cleaning device arranged on one side of the turntable test device; the turntable test device includes a turntable, loading and unloading stations arranged in sequence around the turntable and a plurality of testing stations, a plurality of carriers are arranged in an equiangular ring on the turntable, a testing mechanism for testing materials is arranged on the testing station, a probe card assembly is arranged on the testing mechanism for docking with the material to realize signal connection and perform relevant tests on the material, and a plurality of probes are embedded on the probe unit of the probe card assembly; the probe cleaning device includes a cleaning sample for cleaning the probe and a carrying platform for placing the cleaning sample; the cleaning sample includes a profiling body that emulates the material to be tested and a cleaning component attached to the surface of the profiling body.

2. A test device with a probe online cleaning function as claimed in claim 1, characterized in that: The probe cleaning device further comprises a first supporting plate for mounting the carrying platform. The carrying platform is provided with a plurality of accommodating cavities. The cleaning samples are accommodated in the accommodating cavities, and the accommodating cavities are arranged as step grooves.

3. A test device with a probe online cleaning function as claimed in claim 1, characterized in that: The probe cleaning device is fixedly mounted on the material receiving device.

4. A test device with a probe online cleaning function as claimed in claim 1, characterized in that: The surface of the profiling body is provided with marking points for shooting and positioning, and the marking points are consistent with the marking points on the material to be tested.

5. A test device with a probe online cleaning function as claimed in claim 4, characterized in that: The cleaning component comprises an adhesive layer at the bottom end for being attached to the contoured body and an abrasive layer at the upper end for contacting with the probe to clean the probe.

6. A test device with a probe online cleaning function as claimed in claim 1, characterized in that: The carrier is provided with a slot for holding the material to be tested or the clean sample, and a plurality of movable clamps are arranged around the slot. Each movable clamp is supported by an elastic member to maintain a clamping state, and an opening mechanism for opening the movable clamp is arranged on the loading and unloading station.

7. A test device with a probe online cleaning function as claimed in claim 6, characterized in that: The clamping mechanism includes a first driving member, a first support frame driven by the first driving member to move up and down, a plurality of clamping components arranged on the first support frame and located below the groove and acting on the movable clamping block, a second driving member fixed to the first support frame and a second support plate driven by the second driving member to move up and down, and an axis fixed on the second support plate and expanding the clamping components outward.

8. The testing device with online probe cleaning function as claimed in claim 6, characterized in that: The testing mechanism includes a pressing assembly arranged above the carrier and used to press the material to be tested or the cleaning sample in the carrier, a position adjustment assembly fixed below the probe card assembly and used to adjust the position of the probe card assembly to dock with the Pad point of the material, a second support frame carrying the position adjustment assembly, a camera for acquiring the material arranged on the second support frame, and a second driving member that drives the second support frame to move up and down, and the probe card assembly is arranged below the carrier.

9. A test device with a probe online cleaning function as claimed in claim 8, characterized in that: The position adjustment component is configured as a UVW alignment platform. The position adjustment component and the probe card component are both provided with shooting holes that are connected and cooperate with the camera. The position adjustment component adjusts the position of the probe card component according to the shooting information of the camera so that the probe card component and the material are accurately aligned.

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