Double-signal test fixture with replaceable test probe

Abstract

The utility model discloses a dual-signal test fixture capable of replacing a test probe, which comprises a probe mounting arm, an elastic sheet clamping arm and a plurality of connectors, and is characterized in that the elastic sheet clamping arm is used for clamping and mounting a blade test probe and is arranged at the front end of the probe mounting arm; and the plurality of connectors are used for connecting signal cables and are arranged at the upper end or the side surface of the probe mounting arm. The double-signal test fixture with the replaceable test probe, the blade test probe and the test device provided by the utility model are simple to use and operate, and the worn probe can be rapidly replaced without the help of a tool. After the probe is worn or damaged, the ceramic blade test probe can be rapidly replaced without replacing the probe body, so that the problem that the whole probe body is abandoned after the tip of the traditional probe card is damaged is solved, and the use cost of consumables is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor test probes, in particular to a test fixture with dual-signal replaceable test probes. Background Art

[0002] As semiconductor process technology becomes more and more advanced, the RDS (Drain-Source Resistance) of transistors is getting smaller and smaller, and the parasitic resistance of the test device itself has an increasingly greater impact on the test results. Traditional test methods and test devices can no longer meet the requirements for the accuracy of test results.

[0003] As we all know, the Kelvin test method is an important method for signal measurement in electronic circuits. It uses four wires to transmit current and measure voltage respectively, which can effectively eliminate the interference of wire parasitic resistance and contact resistance on the measurement results. The current development trend of integrated circuits: the device size is getting smaller and smaller, the functions are increasing, and the higher integration leads to smaller and smaller chip areas, and the required test devices, especially (PAD) are getting smaller and smaller. Due to the limitation that the volume of the probe cannot be reduced indefinitely, the Kelvin test method is difficult to implement perfectly, and the parasitic resistance of the test probe and the contact resistance with the PAD are difficult to effectively eliminate.

[0004] In the existing technology for testing: Probes have been widely used in the instrumentation and testing industry and are the most commonly used sampling method for precision measurement signals;

[0005] 1. The probe tip is getting thinner and thinner. If you are not careful in operation, a slight collision will damage the tip, causing it to be scrapped and increasing the cost of use.

[0006] 2. At present, the existing probe processing precision is relatively high, especially the dual-signal probe, the processing cost is high, and the processing and assembly process is also relatively cumbersome, which greatly increases the processing cost. At the same time, the probe needle is easy to wear out during long-term use, which causes the entire probe to be abandoned, resulting in an increase in the cost of use. Utility Model Content

[0007] The utility model provides a test fixture with dual-signal replaceable test probes.

[0008] The technical solution adopted by the utility model to solve its technical problems is:

[0009] A test fixture for a dual-signal replaceable test probe, comprising a probe mounting arm, a spring clamping arm and a plurality of connectors, wherein the spring clamping arm is used for clamping and mounting a blade test probe and is arranged and installed at the front end of the probe mounting arm, and the plurality of connectors are used for connecting a signal cable and are arranged and installed at the upper end or side of the probe mounting arm;

[0010] The front end of the spring clip clamping arm is provided with a clamping opening for facilitating the insertion and installation of the blade test probe, and the clamping opening passes through the front and rear ends of the spring clip clamping arm to form a clamping arm chamber, and a spring clip substrate is regularly arranged and installed in the clamping arm chamber, and a number of soldering pads equal to the number of connectors are regularly arranged on the spring clip substrate, and a metal spring clip is regularly welded on each soldering pad, and the metal spring clip is elastically arranged in the clamping arm chamber, and each soldering pad is electrically connected one-to-one with each connector through a separate wire.

[0011] Furthermore, the plurality of connectors include a Force-end connector and a Sense-end connector, and the Force-end connector and the Sense-end connector are electrically connected to the plurality of pads one-to-one through the separate wires.

[0012] Furthermore, the spring sheet substrate is arranged and installed on one side of the clamping arm chamber, and its back side is close to the inner wall of one side of the clamping arm chamber. The plurality of solder pads are regularly arranged on the front side of the spring sheet substrate. Each metal spring sheet on the plurality of solder pads is horizontally and laterally elastically arranged in the clamping arm chamber and crosses the clamping arm chamber to reach the other inner wall of the clamping arm chamber.

[0013] Furthermore, the front end of the probe mounting arm is regularly provided with a clamping arm slot, and the spring clamping arm is regularly installed at the front end of the probe mounting arm through the clamping arm slot; the upper end or side of the probe mounting arm is regularly provided with a number of connector mounting slots equal to the number of connectors, and the connectors are regularly installed at the upper end or side of the probe mounting arm through the connector mounting slots; the rear end of the probe mounting arm is provided with a probe arm fixing column for installing and fixing the test fixture; the lower end of the probe mounting arm is provided with a connection slot chamber for facilitating the electrical connection between the wires and the connectors.

[0014] Furthermore, the metal spring sheet is an arc-shaped metal spring sheet, and its arc edge spans across the clamping arm chamber to reach the inner wall on the other side of the clamping arm chamber.

[0015] The beneficial effects of the utility model are:

[0016] 1. The utility model provides a test fixture for a dual-signal replaceable test probe, which is formed by installing a spring clip clamping arm at the front end of the probe mounting arm, installing a spring clip substrate by further installing the spring clip clamping arm, regularly arranging pads on the spring clip substrate, and welding arc-shaped metal spring clips, and then electrically connected to the connector through wires. Through the metal spring clip inside the clamping opening of the spring clip clamping arm, on the one hand, the blade test probe can be quickly disassembled and assembled, which is easy to assemble and maintain the blade test installation; on the other hand, a stable and reliable electrical connection can be provided for the blade test probe and the connector terminal.

[0017] 2. The utility model is a test fixture with dual-signal replaceable test probes. It is easy to use and can quickly replace worn probes without the help of tools. When the probe is worn or damaged, the ceramic blade test probe can be quickly replaced without replacing the needle body, which solves the problem of discarding the entire needle body after the traditional probe card needle tip is damaged, and reduces the cost of consumables. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a structural diagram of the test fixture of the utility model;

[0019] Figure 2 for Figure 1 Right side view;

[0020] Figure 3 for Figure 2 Sectional view in the AA direction;

[0021] Figure 4 It is a structural diagram of a dual-signal blade test probe;

[0022] Figure 5 for Figure 4 Back view of ;

[0023] Figure 6 for Figure 1 The structural diagram after assembling the dual signal blade test probe;

[0024] Figure 7 for Figure 6 Back view of ;

[0025] The markings in the figure are:

[0026] 1. Probe mounting arm, 101. Clamping arm slot, 102. Connector mounting slot, 103. Probe arm fixing column, 104. Connecting slot;

[0027] 2. Spring clip clamping arm, 201. Clamping opening, 202. Clamping arm chamber;

[0028] 3. Connectors: 301, Force end connector, 302, Sense end connector;

[0029] 4. shrapnel substrate, 401. solder pad, 402. metal shrapnel;

[0030] 5. Wire, 6. Blade test probe; 61. Ceramic substrate;

[0031] 621, a first gold-clad electrode layer, 6211, a first lead, 6212, a first pad, 622, a second gold-clad electrode layer, 6221, a second lead, 6222, a second pad, 623, a gold-clad protective layer;

[0032] 63. Probe, 631. First probe, 6311. First probe tip, 632. Second probe, 6321. Second probe tip, 6301. Tip bending portion. DETAILED DESCRIPTION

[0033] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0035] like Figure 1-7 As shown, the utility model discloses a test fixture for a dual-signal replaceable test probe, comprising a probe mounting arm 1, a spring clip clamping arm 2 and a plurality of connectors 3, wherein the spring clip clamping arm 2 and the plurality of connectors 3 are regularly arranged and installed on the probe mounting arm 1. A clamping arm slot 101 is provided at the front end of the probe mounting arm 1, and the spring clip clamping arm 2 is regularly installed at the front end (i.e. Figure 1 The upper end or side of the probe mounting arm 1 (i.e. Figure 1A plurality of connector mounting slots 102 are provided on the front side and the back side of the probe mounting arm 1, and a plurality of connectors 3 are regularly installed on the upper end or the side of the probe mounting arm 1 through the plurality of connector mounting slots 102. A probe arm fixing column 103 for fixing is provided at the rear end of the probe mounting arm 1.

[0036] Among them, Figure 6 As shown, the spring clip clamping arm 2 is used to quickly clamp and install the blade test probe 6, and provide electrical connection between the blade test probe and a number of connectors 3. The several connectors 3 include a Force end connector 301 and a Sense end connector 302, and the Force end connector and the Sense end connector together constitute a Kelvin test port. The Force end connector and the Sense end connector are both RF connectors / coaxial connectors. The inner conductors of the Force end connector and the Sense end connector are electrically connected to the electrode leads on the blade test probe 6 through the wires and the metal spring clips in the spring clip clamping arm 2, so that a Kelvin test device can be formed to perform a Kelvin test (four-point test).

[0037] like Figure 1 and Figure 3 As shown, in order to realize and facilitate the electrical connection between the blade test probe and several connectors, the lower end of the probe mounting arm 1 is provided with a connection slot 104 chamber for the electrical connection between the wire 5 and several connectors. Among them, the clamping arm slot 101 at the front end of the probe mounting arm and the connector mounting slot hole 102 at the upper end or side thereof are both connected to the connection slot 104.

[0038] Furthermore, several connectors 3 extend into the connection slot 104 through the connector mounting slot holes 102, and the electrode leads on the blade test probe are introduced into the connection slot 104 through the metal spring 402 and the wire 5 in the spring clamping arm 2 to be electrically connected to the inner conductors of several connectors.

[0039] Furthermore, the spring clip clamping arm 2 is a hollow cylinder, and a clamping opening 201 is provided at its front end for convenient insertion of the blade test probe 6. The clamping opening 201 penetrates the front and rear ends of the spring clip clamping arm to form a clamping arm chamber 202. Among them, a spring clip substrate 4 is regularly arranged and installed in the clamping arm chamber 202, and a plurality of pads 401 are horizontally arranged on the front of the spring clip substrate 4. A metal spring 402 is also regularly welded on each pad 401 to form a plurality of metal springs, and each pad is electrically connected to the inner conductor of each connector 3 one by one through a separate wire 5. When the blade test probe 6 is inserted into the clamping opening 201, the blade test probe squeezes the metal spring 402 to deform toward one side of the spring clip substrate, and at the same time, the blade test probe is pressed against and fixed on the inner wall of the other side of the clamping arm chamber 202 by the elastic force of the metal spring 402, so that the blade test probe is clamped and fixed in the clamping arm chamber 202 by the metal spring 402.

[0040] Correspondingly, the blade test probe 6 is also regularly provided with electrode leads electrically connected to the metal spring 402 , so that the electrode leads and the metal spring 402 are electrically connected, and then the wires 5 are electrically connected to the inner conductors of several connectors.

[0041] Further, such as Figure 3 As shown, the spring sheet substrate 4 is a rectangular substrate, which is inserted and fixed in the clamping arm chamber 202 of the spring sheet clamping arm 2 and is close to the inner wall of one side of the clamping arm chamber 202, as shown in FIG. Figure 3 The spring sheet substrate 4 can be fixed to one side inner wall of the clamping arm chamber 202 by means of screws or other fasteners; or by means of interference fit, through which its long sides are interference fit with the upper and lower inner walls of the clamping arm chamber 202, so that it is inserted and clamped and fixed to one side inner wall of the clamping arm chamber 202; or by means of adhesive products such as glue and double-sided tape, it is pasted and fixed to one side inner wall of the clamping arm chamber; or the spring sheet substrate is fixed in the clamping arm chamber by means of the above-mentioned methods.

[0042] like Figure 3 As shown, the back side of the spring substrate 4 is close to the left side of the clamping arm chamber 202, and a plurality of solder pads 401 are horizontally arranged on the front side of the spring substrate 4. Each metal spring 402 on the plurality of solder pads 401 is also horizontally and laterally elastically arranged in the clamping arm chamber and crosses the clamping arm chamber to reach the right inner wall of the clamping arm chamber.

[0043] Further, such as Figure 3 As shown, the metal spring piece 402 is an arc-shaped spring piece, and the arc edge of the arc-shaped spring piece is closely attached to or against the inner wall of the other side of the clamping arm chamber 202, such as Figure 2 In the middle, it is close to or against the right inner wall of the clamping arm chamber.

[0044] Furthermore, the metal springs 402 on the plurality of pads 401 are arranged to be vertically aligned.

[0045] In one implementation, if Figure 3 As shown, a plurality of pads 401 and a plurality of metal springs 402 are independently electrically connected to a plurality of connectors 3 through a plurality of wires 5 to form a multi-signal test channel. Figure 1 and Figure 3 As shown, the blade test probe is electrically connected to a pair of connectors 3 via a pair of pads 401 and a pair of metal springs 402 through a pair of wires 5, thereby forming a test fixture of a dual-signal replaceable test probe of the utility model.

[0046] like Figure 4 and Figure 5 As shown, it is a structural diagram of a dual-signal blade test probe with dual-signal testing, low leakage, and high temperature resistance. It includes a ceramic substrate 61 and a probe 63. The ceramic substrate 61 is in the shape of a thin blade, and a plurality of electrode layers and a metal protective layer are regularly printed on its surface. The plurality of electrode layers include a first electrode layer and a second electrode layer for electrical connection. The metal protective layer avoids the area of ​​the first electrode layer and the second electrode layer 2 and covers the surface of the ceramic substrate 61 as much as possible, thereby providing low leakage protection for the blade test probe in electrical testing and achieving low leakage performance of the blade test probe.

[0047] Furthermore, because gold has excellent conductive and protective properties, in one embodiment, the first electrode layer, the second electrode layer and the metal protective layer are all gold-coated layers, thereby forming a first gold-coated electrode layer 621, a second gold-coated electrode layer 622 and a gold-coated protective layer 623, respectively.

[0048] Among them, by using ceramics with a high dielectric constant as the substrate, a large area of ​​gold-coated protective layer 623 is spread all over the ceramic base, thereby effectively ensuring low leakage of the blade test probe.

[0049] Among them, the first gold-clad electrode layer 621 and the second gold-clad electrode layer 622 both include a lead portion and a pad portion, the pad portion is printed and arranged at the front end of the ceramic substrate, and the lead portion extends from the rear end of the ceramic substrate to the pad portion at its front end, thereby serving as an electrode lead of the pad portion. The pad portions of the first gold-clad electrode layer 621 and the second gold-clad electrode layer 622 are both regularly welded with the probe 63 to form a pair of probes, and the needle tips of the pair of probes 63 are bent toward each other and tightly close to each other but not in contact to form a double needle tip structure, thereby realizing dual signal testing. The double needle tip structure can perfectly eliminate the parasitic resistance of the probe and the contact resistance between the needle tip and the PAD. Through the Kelvin measurement method, the double needle tip structure can make the short point on the PAD, thereby eliminating the parasitic resistance of the probe and the contact resistance between the needle tip and the PAD.

[0050] Further, such as Figure 4 As shown, the ceramic substrate 61 is an L-shaped substrate, including a horizontal portion and a vertical portion, wherein the vertical portion is arranged at the front end of the horizontal portion and extends downwardly and vertically. The horizontal portion is used to insert the blade test probe into the spring clip clamping opening 201 of the above-mentioned test fixture, thereby fixing the blade test probe in the spring clip clamping opening of the test fixture, and electrically connecting the metal spring clip and the wire in the spring clip clamping arm to the several connectors on the test fixture in a regular manner. The lower end of the vertical portion is used for welding the probe 63.

[0051] like Figure 4 and Figure 7 As shown, in one embodiment, the first gold-clad electrode layer 621 includes a first lead 6211 and a first pad 6212, and the second gold-clad electrode layer 622 includes a second lead 6221 and a second pad 6222. The first pad 6212 is arranged on the front side of the bottom end of the vertical portion of the ceramic substrate, and the first lead 6211 extends from the front rear end of the horizontal portion of the ceramic substrate to the first pad 6212 on the front side of the vertical portion of the front end thereof; the second pad 6222 is arranged on the back side of the bottom end of the vertical portion of the ceramic substrate, and the second lead 6221 extends from the front rear end of the horizontal portion of the ceramic substrate to the second pad 6222 on the back side of the vertical portion of the front end thereof.

[0052] like Figure 3 and Figure 4 As shown, in order to facilitate the first lead 6211 and the second lead 6221 to contact the two metal springs 402 on the spring substrate 4 to achieve electrical connection, the first lead 6211 and the second lead 6221 are arranged along the spacing between the two metal springs 402 on the spring substrate 4 and are arranged on the same surface, and are regularly arranged on the front side of the ceramic substrate.

[0053] Furthermore, because the second pads 6222 are regularly arranged on the back side of the vertical portion of the ceramic substrate, the second lead 6221 is arranged on the front side of the horizontal portion and the vertical portion of the ceramic substrate, extending from the front side of the horizontal portion of the ceramic substrate to the front side of the vertical portion, and further extending to the back side of the vertical portion, and connected to the second pads 6222 on the back side of the vertical portion. In one embodiment, by providing a lead hole in the vertical portion of the ceramic substrate, the second lead 6221 can extend from the front side of the vertical portion through the lead hole to the back side of the vertical portion, and further extend to the second pads 6222 on the back side of the vertical portion.

[0054] like Figure 5 As shown, the gold-coated protective layer 623 is regularly arranged avoiding the first gold-coated electrode layer 621 and the second gold-coated electrode layer 622, and is arranged on the front and back sides of the ceramic substrate 61, and covers the back side of the ceramic substrate as much as possible, and contacts with the inner wall of the clamping arm chamber in the spring clamping arm on the test fixture, thereby ensuring low leakage during the test process.

[0055] like Figure 7 As shown, after the blade test probe 6 is inserted into the clamping opening of the spring clamping arm 2, the blade test probe 6 is clamped and fixed in the clamping arm chamber and closely adheres to the inner wall of the clamping arm chamber through the clamping of the metal spring and the inner wall of the clamping arm chamber.

[0056] Among them, the spring clamping arm 2 and the probe mounting arm 1 in the test fixture are both made of metal, the outer shell is also gold-plated, and the Guard signal is connected. The first gold-coated electrode layer 621 and the second gold-coated electrode layer 622 on the blade test probe 6 are connected to the Signal signal through metal springs, pads, wires and connector cores. The gold-coated protective layer 623 on the blade test probe 6 is electrically connected to the spring clamping arm and the probe mounting arm through the inner wall of the clamping arm chamber in the spring clamping arm, thereby providing a Guard signal for the gold-coated protective layer on the blade test probe through the probe mounting arm and the spring clamping arm. The ceramic substrate in the blade test probe is a ceramic substrate with a high dielectric constant, so the low leakage characteristics of the test probe can be guaranteed during the electrical test through the gold-coated protective layer.

[0057] By using a high and low temperature resistant ceramic material as the substrate, the test probe is provided with advanced characteristic analysis and reliability test fA level measurement capability in the temperature range of -60°C to 300°C. The large area of ​​gold-coated protective layer 623 is covered as much as possible on the surface of the ceramic substrate to achieve low leakage characteristics.

[0058] Further, the probe 63 includes a first probe 631 and a second probe 632. The tips of the first probe and the second probe are bent toward each other and closely approach each other to form a double-tip structure.

[0059] Furthermore, in order to facilitate the needle tip to contact the PAD on the wafer below it for needle piercing test, the needle tip of the first probe is the first probe needle tip 6311, and the needle tip of the second probe is the second probe needle tip 6321. The first probe needle tip 6311 and the second probe needle tip 6321 are bent close to each other and bent downward at the same time, so as to facilitate the contact with the PAD below it for needle piercing test. The first probe needle tip and the second probe needle tip are bent downward at the same angle, and the bending angle is 45°-90°.

[0060] Furthermore, in order to improve the service life of the probe 63 and reduce and avoid the destructiveness of the probe to the PAD on the wafer, the probe 63 is welded and arranged in the probe positioning groove at the bottom end of the vertical part of the ceramic substrate at a downward tilt, and the downward tilt angle is 10-20°. The probe 63 is arranged to be tilted downward, which can facilitate the probe to extend into and contact the PAD on the wafer for needle piercing test on the one hand, and can provide a good buffer for the probe on the other hand, reducing or avoiding deformation of the probe. Moreover, it can provide good elasticity for the needle tip at its front end, so that soft contact between the needle tip and the PAD can be achieved, further reducing or avoiding damage to the PAD by the needle tip.

[0061] The dual-signal blade test probe of the utility model has a dual-tip structure, and the two probe tips are electrically connected to the Force end connector and the Sense end connector through independent leads, metal springs and wires, realizing a dual-signal structure, which is independent of each other and realizes true Kelvin testing. Figure 6 As shown, the Force end connector 301 provides a Force signal through the first gold-clad electrode layer 621 and the first probe 631 , and the Sense end connector provides a Sense signal through the second gold-clad electrode layer 622 and the second probe 632 .

[0062] In the Kelvin measurement method, one set of needle tips measures the current passing through the PAD, and the other set of needle tips measures the voltage between the short-circuit points of the double needle tips. Because the short-circuit point is the PAD, and the contact resistance and parasitic resistance are behind the PAD. Therefore, through the test of the double-tip dual-signal ceramic blade test probe of the utility model, the parasitic resistance and contact resistance can be directly ignored. At the same time, the needle tip only needs to effectively contact the PAD, and the requirements for the needle insertion depth are small, and the destructiveness to the PAD is small, which can significantly improve the service life of the PAD. Repeated tests can still ensure the accuracy of the test results.

[0063] like Figure 3 , Figure 4 and Figure 6 As shown, after the blade test probe 6 is inserted and installed from the clamping opening of the spring clamping arm 2, the metal springs 402 on the spring substrate 4 are respectively pressed on the electrode leads of the two gold-coated electrode layers on the blade test probe 6. The electrode leads of the first gold-coated electrode layer 621 are electrically connected to the Force end connector 301 through the metal spring below, and the Force end connector provides the Force signal to the blade test probe; the leads of the second gold-coated electrode layer 622 are electrically connected to the Sense end connector 302 through the metal spring above, and the Sense end connector provides the Sense signal to the blade test probe, thereby realizing a true Kelvin test.

[0064] like Figure 6As shown, the test fixture with dual-signal replaceable test probes provided by the utility model is convenient for the disassembly, assembly and maintenance of the blade test probe. When the blade test probe is worn or damaged, the blade test probe can be quickly replaced. It is only necessary to take out the blade test probe 6 from the spring clamping arm 2 at the front end of the test fixture, and then quickly replace the new blade test probe 6 into the test fixture. There is no need to replace the needle body, which solves the problem of discarding the entire needle body after the needle tip of the traditional probe card is worn or damaged, and reduces the cost of consumables.

[0065] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A test fixture with dual-signal replaceable test probes, characterized in that: It includes a probe mounting arm, a spring clamping arm and a plurality of connectors, wherein the spring clamping arm is used to clamp and mount a blade test probe and is arranged and installed at the front end of the probe mounting arm, and the plurality of connectors are used to connect signal cables and are arranged and installed at the upper end or side of the probe mounting arm; The front end of the spring clip clamping arm is provided with a clamping opening for facilitating the insertion and installation of the blade test probe, and the clamping opening passes through the front and rear ends of the spring clip clamping arm to form a clamping arm chamber, and a spring clip substrate is regularly arranged and installed in the clamping arm chamber, and a number of soldering pads equal to the number of connectors are regularly arranged on the spring clip substrate, and a metal spring clip is regularly welded on each soldering pad, and the metal spring clip is elastically arranged in the clamping arm chamber, and each soldering pad is electrically connected one-to-one with each connector through a separate wire.

2. A test fixture with dual-signal replaceable test probes as claimed in claim 1, characterized in that: The plurality of connectors include a Force-end connector and a Sense-end connector, and the Force-end connector and the Sense-end connector are electrically connected to the plurality of pads one-to-one through the separate wires.

3. A test fixture with dual-signal replaceable test probes as claimed in claim 1 or 2, characterized in that: The spring sheet substrate is arranged and installed on one side of the clamping arm chamber, and its back side is close to the inner wall of one side of the clamping arm chamber. The plurality of solder pads are regularly arranged on the front side of the spring sheet substrate. Each metal spring sheet on the plurality of solder pads is horizontally and laterally elastically arranged in the clamping arm chamber and crosses the clamping arm chamber to reach the inner wall on the other side of the clamping arm chamber.

4. A test fixture with dual-signal replaceable test probes as claimed in claim 3, characterized in that: The front end of the probe mounting arm is regularly provided with a clamping arm slot, and the spring clamping arm is regularly installed at the front end of the probe mounting arm through the clamping arm slot; the upper end or side of the probe mounting arm is regularly provided with a number of connector mounting slots equal to the number of connectors, and the connectors are regularly installed at the upper end or side of the probe mounting arm through the number of connector mounting slots; the rear end of the probe mounting arm is provided with a probe arm fixing column for installing and fixing the test fixture; the lower end of the probe mounting arm is provided with a connection slot chamber for facilitating the electrical connection between the wires and the connectors.

5. A test fixture with dual-signal replaceable test probes as claimed in claim 3, characterized in that: The metal spring sheet is an arc-shaped metal spring sheet, and the arc edge thereof spans across the clamping arm chamber to reach the inner wall on the other side of the clamping arm chamber.

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