Small-sized nanoimprint device

Abstract

The utility model relates to the technical field of imprinting devices, and discloses a small nanometer imprinting device which comprises a shell, a motion platform, a compression roller assembly, an adjusting assembly and a light shield. The pressing roller assembly comprises a supporting base pivoted to the side wall of the shell, a transparent pressing roller rotationally connected with the supporting base, and a UV light curing assembly arranged in the transparent pressing roller. The motion platform comprises two supporting plates arranged in the shell in parallel at an interval, a supporting roller pivoted between the two supporting plates, an objective table arranged at the tops of the two supporting plates in a sliding manner, and a driving assembly arranged between the two supporting plates; the supporting roller is tangent to the lower bottom face of the objective table and located below the transparent pressing roller. The small nanoimprint device with the structural design is small in size, compact in structure and capable of conveniently and flexibly meeting small-batch nanoimprint requirements in a roller-to-plate mode.

Description

Technical Field

[0001] The utility model relates to the technical field of imprinting devices, in particular to a small nano-imprinting device. Background Art

[0002] Nanoimprint Lithography (NIL) is a pioneering research conducted by Professor Stephen Y. Zhou of the Nanostructure Laboratory at the University of Minnesota in 1995. It is a new method of micro-nano patterning, which uses an imprint mold to achieve patterning through the force deformation of the resist.

[0003] With the development of nanoimprint technology in recent years, more and more fields use nanoimprint devices to replace electron beam lithography devices. Its main application areas include high-brightness photonic crystal LEDs, high-density disk media (HDD), optical components (optical waveguides, micro-optical lenses, gratings, mobile phone lenses), biological microfluidic devices, etc. Nanoimprint technology can be used to quickly prepare micro-nano graphic structures, avoid the use of expensive optical systems, reduce device costs, and have a high cost-effectiveness ratio; and nanoimprint devices are simple to operate, reliable in performance, and highly repeatable.

[0004] Most of the nanoimprinting devices under existing technologies have complex structures and large sizes. They can only be used in relatively open workshops in factories and cannot be conveniently and flexibly applied in desktop scenarios such as laboratories. Therefore, there is an urgent need to develop a small nanoimprinting device with a smaller size and simpler structure, which has become a problem that needs to be solved urgently. Utility Model Content

[0005] The utility model aims to provide a small-sized nano-imprinting device, which has a simple and compact structure, is easy to adjust and can meet the needs of small-sized nano-imprinting.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A small nano-imprinting device, comprising a housing, a moving platform arranged in the housing, a pressure roller assembly hinged to the side wall of the housing, an adjustment assembly arranged at one end of the housing for adjusting the flip angle of the pressure roller assembly, and a light shielding cover arranged above the pressure roller assembly; the pressure roller assembly comprises a support seat pivotally connected to the side wall of the housing, a transparent pressure roller rotatably connected to the support seat, and a UV light curing assembly arranged in the transparent pressure roller;

[0008] The motion platform includes two support plates arranged in parallel and at intervals within the shell, a support roller pivotally connected between the two support plates, a loading platform slidably arranged on the top of the two support plates, and a driving component arranged between the two support plates for driving the loading platform to move back and forth along the length direction of the support plates; the support roller is tangent to the lower bottom surface of the loading platform and is located below the transparent pressure roller.

[0009] Among them, the adjustment component includes a motor fastened to the side wall of the shell, a screw connected to the driving end of the motor, a wedge-shaped slider threadedly connected to the screw, and a support sleeve arranged between the wedge-shaped slider and the motor and rotatably connected to the screw, and the support sleeve is fastened to a support block arranged in the shell.

[0010] Wherein, one end of the two support seats away from the pivot axis is provided with a wedge-shaped notch that slidably cooperates with the wedge-shaped sliding block.

[0011] Wherein, the wedge-shaped notch is provided with a horizontal wall and an inclined wall, and when the horizontal wall is parallel to the table surface of the loading platform, the transparent pressure roller is tangent to the table surface of the loading platform.

[0012] Among them, when the screw rod is acted upon by the motor to rotate forward, the wedge-shaped slider moves along the length direction of the screw rod toward the side close to the transparent pressure roller, and at this time, the movable gap between the transparent pressure roller and the loading platform gradually becomes smaller; when the screw rod is acted upon by the motor to rotate reversely, the wedge-shaped slider moves along the length direction of the screw rod toward the side away from the transparent pressure roller, and at this time, the movable gap between the transparent pressure roller and the loading platform gradually becomes larger.

[0013] Wherein, the driving assembly includes a driven wheel and a driving wheel arranged at both ends of the shell, a motor connected to the driving wheel, and a transmission belt matched with the driving wheel, the driven wheel and the supporting roller, and the transmission belt is fastened to the loading platform.

[0014] Wherein, the UV light curing component includes a UV light bar, a light guide cover arranged on both sides of the UV light bar, and connecting pieces arranged at both ends of the UV light bar, and the connecting pieces are fastened to the support seat.

[0015] The invention further comprises an electric control box disposed below the shell, and a touch screen connected to an electric control device in the electric control box is disposed on one side wall of the shell.

[0016] Wherein, the UV light strip and the motor are both electrically connected to the electric control device.

[0017] One end of the light shield is hinged to the shell, and the other end is adsorbed to the shell via a magnet.

[0018] Beneficial effects of the utility model: The utility model provides a small nano-imprinting device, including a shell, a moving platform, a pressure roller assembly, an adjustment assembly, and a light shield; the pressure roller assembly includes a support seat pivotally connected to the side wall of the shell, a transparent pressure roller rotatably connected to the support seat, and a UV light curing assembly arranged in the transparent pressure roller; the moving platform includes two support plates arranged in parallel and spaced intervals in the shell, a support roller pivotally connected between the two support plates, a stage slidingly arranged on the top of the two support plates, and a driving assembly arranged between the two support plates; the support roller is tangent to the lower bottom surface of the stage and is located below the transparent pressure roller. The small nano-imprinting device designed with this structure is small in size and compact in structure, and can conveniently and flexibly meet the needs of small-batch nano-imprinting through a roller-to-plate method. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a small nanoimprinting device of the utility model.

[0020] Figure 2 yes Figure 1 Top view with the roller assembly and light shield removed.

[0021] Figure 3 yes Figure 1 Top view after removing the lens hood.

[0022] Figure 4 yes Figure 3 Schematic diagram of the structure of the intermediate pressure roller assembly in the initial state.

[0023] Figure 5 yes Figure 3 Schematic diagram of the structure when the flip angle between the intermediate pressure roller assembly and the motion platform becomes larger.

[0024] Figure 6 yes Figure 4 Axonometric view of a UV light-cured component.

[0025] Figure 7 The utility model is an axonometric diagram of a small nanoimprint device. DETAILED DESCRIPTION

[0026] The present invention is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "inner", "outer", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific manner, and therefore cannot be understood as a limitation on the present invention. The terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0027] like Figures 1 to 7 As shown, the utility model provides a small nanoimprinting device, which adopts a roller-to-plate imprinting method, can conveniently and flexibly meet the needs of small-batch nanoimprinting, and has a small size, compact structure, convenient transportation and placement, and relatively low cost.

[0028] Specifically, the small nano-imprinting device includes several parts such as a shell 1, a moving platform 2, a pressure roller assembly 3, an adjustment assembly 4 and a light shield 5, wherein the moving platform 2 is arranged in the shell 1, and the pressure roller assembly 3 is installed above the table of the moving platform 2. Preferably, one end of the pressure roller assembly 3 is hinged to the side wall of the shell 1 through a hinge shaft, and the other end is matched with the adjustment assembly 4 arranged on the wall of the shell 1, so that the flip angle of the pressure roller assembly 3 can be conveniently and flexibly adjusted through the adjustment assembly 4, that is, the distance between the transparent pressure roller 33 in the pressure roller assembly 3 and the table of the moving platform 2 is changed, thereby meeting the rolling of substrates 6 of different thicknesses. The structural composition of the adjustment assembly 4 and its specific coordination with the pressure roller assembly 3 will be further explained later.

[0029] The small-scale imprinting device adopting the above-mentioned structural design can first wrap the soft mold to be imprinted on the surface of the transparent pressing roller 33 of the pressing roller assembly 3, and place the side containing the microstructure toward the table of the moving platform 2, and then fix the substrate 6 coated with the nanoimprint glue to the table of the moving platform 2, and then cover the light shield 5 hinged to one end of the shell 1 on the pressing roller assembly 3, and then drive the transparent pressing roller 33 in the pressing roller assembly 3 to rotate through the movement of the table of the moving platform 2, and then transfer the microstructure pattern on the soft mold to the nanoimprint glue layer on the surface of the substrate 6; in order to prevent the soft mold from damaging the formed microstructure pattern when separating from the substrate 6, the present embodiment also provides a UV light curing component 31 in the pressing roller assembly 3, so that the formed microstructure pattern can be cured synchronously during the imprinting process.

[0030] Furthermore, the motion platform 2 for carrying the above-mentioned substrate 6 includes two support plates 21 arranged in parallel and at intervals in the shell 1, a stage 22 slidably arranged on the top of the two support plates 21, and a driving component for driving the stage 22 to move back and forth along the length direction of the support plates 21; in addition, in order to further improve the stability of the motion platform 2 when the substrate 6 is imprinted, a support roller 23 is also pivotally connected between the two support plates 21 along the width direction of the stage 22, and the support roller 23 is tangent to the lower bottom surface of the stage 22. Preferably, in order to enable the support roller 23 to better bear the pressure from the transparent pressure roller 33 in the pressure roller assembly 3 and increase the stability of the stage 22 in the motion platform 2, the support roller 23 is installed below the transparent pressure roller 33 in the pressure roller assembly 3 to balance the pressure from the transparent pressure roller 33 in the pressure roller assembly 3, avoid the pressure roller force being applied unidirectionally to the stage 22, so that the friction force is too large when the stage 22 slides horizontally, and then affects the stability of the stage 22 when it slides horizontally.

[0031] In order to further reduce the friction between the above-mentioned loading platform 22 and the top surface of the support plate 21 during the movement, preferably, a guide rail matching the lower bottom surface of the loading platform 22 is installed along the length direction of the top surface of the support plate 21; in addition, the above-mentioned driving component for driving the loading platform 22 to move includes a driven wheel 241 and a driving wheel 242 arranged at both ends of the shell 1, a motor 243 connected to the driving wheel 242, and a transmission belt 244 matching the driving wheel 242, the driven wheel 241 and the support roller 23, wherein the transmission belt 244 is fastened to the lower bottom surface of the loading platform 22, so that the loading platform 22 is driven to slide back and forth along the guide rail through the transmission belt 244, and at the same time, it can also drive the support roller 23 to rotate synchronously with the loading platform 22, so as to bear the pressure from the above-mentioned transparent pressure roller 33 on the loading platform 22, thereby reducing the friction during the sliding process of the loading platform 22, so that the sliding of the loading platform 22 is smoother.

[0032] In order to further improve the influence of the vibration generated during the movement of the stage 22 on the stamping accuracy, a shock-absorbing pad 211 is further provided between the support plate 21 and the inner bottom surface of the shell 1 to effectively reduce the vibration of the stage 22 .

[0033] Furthermore, the above-mentioned pressure roller assembly 3 includes two support seats 31 hinged at one end to the opposite side walls of the shell 1, a transparent pressure roller 33 rotatably connected between the two support seats 32, and a UV light curing assembly 31 arranged in the chamber of the transparent pressure roller 33; preferably, the transparent pressure roller 33 includes a hollow transparent glass roller 331, and a transparent flexible layer 332 coated on the outer peripheral surface of the transparent glass roller 331. The setting of the transparent flexible layer 332 can effectively avoid the rigid collision between the transparent glass roller 331 and the substrate 6 on the stage, and can also increase the printing area of ​​the substrate 6 through the deformation of the transparent flexible layer 332 during the rolling process.

[0034] In addition, the UV light emitted by the UV light curing component 31 disposed in the cavity of the transparent pressure roller 33 can pass through the transparent glass roller 331 and the transparent flexible layer 332 to fix the transferred pattern in time, thereby reducing damage to the transferred pattern.

[0035] Furthermore, the adjustment assembly 4 comprises a motor 41 fastened to the side wall of the housing 1, a screw rod 42 connected to the driving end of the motor 41, a wedge-shaped slider 43 threadedly connected to the screw rod 42, and a support sleeve 44 rotatably connected to the screw rod 42, and the support sleeve 44 is fastened to a support block disposed in the housing 1. In this structure, the support sleeve 44 can provide better support for the screw rod 42 while maintaining the rotation of the screw rod 42 through the support of the support block, thereby effectively improving the load-bearing capacity of the wedge-shaped slider 43.

[0036] Furthermore, in order to facilitate the adjustment of the flipping angle of the transparent pressure roller 33 by adjusting the component 4, that is, to adjust the size of the movable gap between the transparent flexible layer 332 coated on the outer peripheral surface of the transparent pressure roller 33 and the worktable 22, preferably, a wedge-shaped notch 321 matching the wedge-shaped slider 43 is provided at one end of the two support seats 32 away from the hinge axis, and the wedge-shaped notch 321 is provided with a horizontal wall and an inclined wall. When the horizontal wall is parallel to the surface of the worktable 22, the transparent pressure roller 33 is tangent to the surface of the worktable 22, that is, the transparent pressure roller 33 is in an initial state.

[0037] When the screw rod 42 is rotated forward by the motor 41, the wedge-shaped slider 43 moves toward the side close to the transparent pressure roller along the length direction of the screw rod 42, and at this time, the active gap between the transparent pressure roller and the stage 22 gradually becomes smaller; when the screw rod 42 is rotated reversely by the motor 41, the wedge-shaped slider 43 moves toward the side away from the transparent pressure roller along the length direction of the screw rod 42, and at this time, the active gap between the transparent pressure roller 33 and the stage 22 gradually becomes larger. In this way, the active gap between the transparent pressure roller 33 and the stage 22 can be adjusted to meet the pattern transfer of substrates 6 of different thicknesses, and the rolling force can also be adjusted.

[0038] Preferably, the UV light curing component 31 includes a UV light bar 311, a light guide cover 312 arranged on both sides of the UV light bar 311, and a connector 313 arranged at both ends of the UV light bar 311. The connector 313 is fastened to the support seat 32 to form a whole, so as to prevent the UV light curing component 31 from rotating with the transparent pressure roller 33. The UV light emitted by the UV light bar 311 arranged in this way has a relatively fixed irradiation position and is ultimately irradiated at the tangent position of the soft mold and the substrate 6. In order to better improve the irradiation efficiency and irradiation range, preferably, the UV light bar 311 is irradiated through the light guide cover 312 to an area with a width greater than 1 mm and less than 2 mm in the imprinting area.

[0039] In order to better meet the automated operation of the small stamping device and facilitate the installation of the electric control device, an electric control box 7 is also provided below the housing 1. At the same time, a touch screen 8 electrically connected to the electric control device provided in the electric control box 7 is also installed on one side wall of the housing 1, and the UV light strip 311 and the motors 41 and 243 are all electrically connected to the electric control device. In this way, the operation of the device is controlled by manipulating the touch screen 8. The specific circuit settings and working principles of the electric control device are commonly used in the relevant technology and will not be described in detail here.

[0040] In addition, in order to facilitate the installation and opening and closing of the above-mentioned light shield 5, one end of the light shield 5 is hinged to the shell 1, and the other end is adsorbed to the shell 1 through a magnet; further, in order to realize the automatic opening and closing of the light shield 5, a cylinder 9 can also be set at the hinged end of the light shield 5, and the two ends of the cylinder 9 are respectively hinged to the side wall of the shell 1 and the light shield 5, so that the automatic opening and closing of the light shield 5 can be realized by the extension and retraction of the cylinder lever.

[0041] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. A small nanoimprinting device, characterized in that: The invention comprises a shell, a moving platform arranged in the shell, a pressure roller assembly hinged to the side wall of the shell, an adjustment assembly arranged at one end of the shell for adjusting the flip angle of the pressure roller assembly, and a light shield arranged above the pressure roller assembly; the pressure roller assembly comprises a support seat pivotally connected to the side wall of the shell, a transparent pressure roller rotatably connected to the support seat, and a UV light curing assembly arranged in the transparent pressure roller; The motion platform includes two support plates arranged in parallel and at intervals within the shell, a support roller pivotally connected between the two support plates, a loading platform slidably arranged on the top of the two support plates, and a driving component arranged between the two support plates for driving the loading platform to move back and forth along the length direction of the support plates; the support roller is tangent to the lower bottom surface of the loading platform and is located below the transparent pressure roller.

2. A small nanoimprinting device according to claim 1, characterized in that: The adjustment assembly includes a motor fastened to the side wall of the shell, a screw connected to the driving end of the motor, a wedge-shaped slider threadedly connected to the screw, and a support sleeve arranged between the wedge-shaped slider and the motor and rotatably connected to the screw, wherein the support sleeve is fastened to a support block arranged in the shell.

3. A small-scale nanoimprinting device according to claim 2, characterized in that: One end of the two support seats away from the pivot axis is provided with a wedge-shaped notch that is slidably matched with the wedge-shaped sliding block.

4. A small-scale nanoimprinting device according to claim 3, characterized in that: The wedge-shaped notch is provided with a horizontal wall and an inclined wall. When the horizontal wall is parallel to the table surface of the loading platform, the transparent pressing roller is tangent to the table surface of the loading platform.

5. The small nanoimprinting device according to claim 2, characterized in that: When the lead screw rotates forwardly under the action of the motor, the wedge-shaped slider moves along the length direction of the lead screw toward the side close to the transparent pressure roller, and at this time, the movable gap between the transparent pressure roller and the loading platform gradually becomes smaller; when the lead screw rotates reversely under the action of the motor, the wedge-shaped slider moves along the length direction of the lead screw toward the side away from the transparent pressure roller, and at this time, the movable gap between the transparent pressure roller and the loading platform gradually becomes larger.

6. The small nanoimprinting device according to claim 1, characterized in that: The driving assembly includes a driven wheel and a driving wheel arranged at both ends of the shell, a motor connected to the driving wheel, and a transmission belt matched with the driving wheel, the driven wheel and the supporting roller, and the transmission belt is fastened to the loading platform.

7. The small nanoimprinting device according to claim 2, characterized in that: The UV light curing component includes a UV light strip, light guide covers arranged on both sides of the UV light strip, and connectors arranged on both ends of the UV light strip, and the connectors are fastened to the support seat.

8. A small-scale nanoimprinting device according to claim 7, characterized in that: It also includes an electric control box arranged below the shell, and a touch screen connected to the electric control device in the electric control box is arranged on one side wall of the shell.

9. A small-scale nanoimprinting device according to claim 8, characterized in that: The UV light strip and the motor are both electrically connected to the electric control device.

10. The small nanoimprinting device according to claim 1, characterized in that: One end of the light shield is hinged to the shell, and the other end is adsorbed to the shell through a magnet.

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