Longitudinal-torsional mode conversion type ultrasonic stator and motor thereof

Abstract

The utility model provides a longitudinal-torsional mode conversion type ultrasonic stator and a motor thereof, a mounting surface and a driving foot of a converter are respectively arranged at two ends of the converter, the outer diameter of the mounting surface is larger than the variable cross section of the outer diameter of the driving foot, and a central through hole penetrates through the converter along the axis. The chutes are uniformly distributed at the periphery of the converter and penetrate through and communicate with the central through hole; screw holes are evenly distributed in the installation face, and the piezoelectric ceramic assembly and the balancing weight are sequentially attached to the installation face and are fixed to the screw holes through fastening bolts respectively. The diameters of the two ends of the converter are inconsistent, so that stress generated by vibration is more concentrated; skewed slots are uniformly distributed at the periphery of the converter, so that the mass distribution of the converter is non-uniform, the structure is asymmetric, and torsional vibration of the stator is excited by a piezoelectric ceramic piece; radial vibration and torsional vibration are similar in frequency and have a certain phase difference in space, so that mass points of the stator on the contact surface of the rotor and the stator generate an elliptical motion track to push the rotor to rotate.

Description

Technical Field

[0001] The utility model belongs to the technical field of ultrasonic motors, and particularly relates to a longitudinal-torsion mode conversion type ultrasonic stator and a motor thereof. Background Art

[0002] Ultrasonic motor is an energy conversion device that uses the inverse piezoelectric effect of piezoelectric materials to convert electric field energy into elastic strain energy, and converts the high-frequency micro-vibration generated by the elastic body into unidirectional macroscopic motion of the mover through friction coupling, thereby realizing the conversion of electrical energy into mechanical energy. Due to its unique working characteristics, ultrasonic motors have the characteristics of compact structure, flexible design, low speed and high torque, direct drive, and no electromagnetic interference. They are widely used in precision control, industrial robots, biomedicine and other fields.

[0003] As a major classification of ultrasonic motors, the research on mode conversion ultrasonic motors can be traced back to the 1980s. There are existing studies on longitudinal-torsional mode conversion ultrasonic motors. For example, the patent for mode conversion piezoelectric thread-driven linear ultrasonic motor with publication number CN201110120487.3, which opens inclined grooves along the outer surface of the mode converter, can achieve the torsional motion of the motor by only using longitudinal vibration piezoelectric ceramic sheets.

[0004] The modal conversion rotary ultrasonic motor, with its low speed, high torque and compact structure, meets the driving requirements of mechanical joints. As the demand for driving motor power of mechanical joints continues to increase and the requirements for compactness become more stringent, it is urgent to have a high-power hollow structure for joint driving motors and focus more vibration mechanical energy on the friction coupling surface. Existing technical solutions fail to meet the above requirements. Utility Model Content

[0005] The utility model provides a longitudinal-torsional mode conversion type ultrasonic stator and a motor and a detection device thereof, which can effectively solve the above-mentioned problems.

[0006] The utility model is achieved in this way:

[0007] A longitudinal-torsional mode conversion type ultrasonic stator comprises a converter, a fastening bolt, a counterweight and a piezoelectric ceramic component. The variable-section rotating body structure is provided with a central through hole. The rotating body structure is provided with a driving foot, an inclined groove and a mounting surface in sequence from one end to the other end along the rotation axis. The outer diameter of the mounting surface is larger than the outer diameter of the driving foot. The central through hole passes through the converter along the axis. The inclined groove is evenly distributed on the periphery of the converter and passes through the connected central through hole. The mounting surface is evenly distributed with screw holes. The piezoelectric ceramic component and the counterweight are sequentially attached to the mounting surface and fixed to the screw holes respectively by fastening bolts.

[0008] As a further improvement, the piezoelectric ceramic assembly is provided with a piezoelectric ceramic sheet and an electrode sheet. The polarization direction of the piezoelectric ceramic sheet is along its thickness direction, the polarization directions of two adjacent piezoelectric ceramic sheets are opposite, and an electrode sheet is provided between the two piezoelectric ceramic sheets respectively; an electrode sheet is also provided between the piezoelectric ceramic assembly and the counterweight block.

[0009] As a further improvement, the electrode sheet is connected to a ground signal and an excitation signal, and the ground signal and the excitation signal are alternately connected to the electrode sheet.

[0010] As a further improvement, the mounting surface is provided with at least two screw holes, corresponding to at least two groups of piezoelectric ceramic components.

[0011] As a further improvement, the piezoelectric ceramic component is provided with at least two piezoelectric ceramic sheets.

[0012] As a further improvement, the converter is in the shape of a frustum.

[0013] As a further improvement, the oblique grooves on the converter are parallel to each other, and the ends of the oblique grooves near the mounting surface overlap or intersect axially with the ends of the adjacent oblique grooves near the driving foot.

[0014] As a further improvement, a fixing flange is provided on the outer periphery of the mounting surface end of the converter.

[0015] As a further improvement, the end surface of the driving foot is provided with a tooth groove.

[0016] A longitudinal-torsional mode conversion type ultrasonic motor comprises a rotor assembly, an ultrasonic stator and a motor base plate. The rotor assembly and the ultrasonic stator are contact-connected and fixed on the motor base plate. The rotor assembly is provided with a rotating rod, a bearing seat, an output shaft and a bearing limiting ring. The bearing seat is fixed on the motor base plate. The output shaft passes through the central through hole of the bearing seat. The bearing limiting ring is provided on the output shaft to limit the axial displacement. The rotating rod and the output shaft are connected to the ultrasonic stator side. The ultrasonic stator is provided with a clamping plate arranged on the motor base plate. The rotating rod is contact-connected with the driving foot plane of the ultrasonic stator.

[0017] As a further improvement, the rotating rod is a tapered rotating rod.

[0018] The beneficial effects of the utility model are:

[0019] 1. By designing the modal converter with inconsistent end face diameters at both ends, a variable cross-section structure, and a hollow structure, the stress generated by vibration is more concentrated; a circumferentially uniformly distributed through inclined slots are opened along the axial direction of the converter, so that the mass distribution of the converter is uneven and the structure is asymmetric. When the longitudinal vibration of the stator is stimulated by the piezoelectric ceramic sheet, torsional vibration can be induced; the radial vibration and torsional vibration have similar frequencies, and the two have a certain phase difference in space and in time, so that the particles of the stator on the contact surface between the rotor and the stator produce an elliptical motion trajectory, driving the rotor to rotate; when exciting the motor, only the longitudinal vibration mode needs to be excited, which will simplify the control circuit of the motor drive.

[0020] 2. The fastening bolts, piezoelectric ceramic components, and counterweights are evenly arranged along the circumference of the converter tail end. The converter has a central through hole along the axis to allow the cable to pass through, thereby achieving a compact structural design and facilitating the protection of the cable.

[0021] 3. The converter has a tooth groove at the top, and the driving foot is located on the top surface of the tooth. The contact state between the stator and the rotor is surface contact, which helps to improve the contact state between the stator and the rotor; it is also conducive to the discharge of the wear debris generated during the contact process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall structure provided by an embodiment of a longitudinal-torsional mode conversion type ultrasonic stator of the utility model;

[0024] Figure 2 It is a structural schematic diagram provided by an embodiment of a longitudinal-torsional mode conversion type ultrasonic stator of the utility model;

[0025] Figure 3 It is an explosion schematic diagram provided by an embodiment of a longitudinal-torsional mode conversion type ultrasonic stator of the utility model;

[0026] Figure 4 It is a schematic diagram of the polarization arrangement and electrical excitation of a piezoelectric ceramic component provided by a longitudinal-torsional mode conversion type ultrasonic stator embodiment of the utility model;

[0027] Figure 5 It is a modal analysis diagram provided by an embodiment of a longitudinal-torsional mode conversion type ultrasonic stator of the utility model;

[0028] Figure 6 It is a structural schematic diagram of a longitudinal-torsional mode conversion type ultrasonic motor embodiment of the utility model and a schematic diagram of a stator output characteristic test device.

[0029] Reference numerals:

[0030] Converter 1; mounting surface 11; driving foot 12; central through hole 13; inclined groove 14; screw hole 15; fixing flange 16; tooth groove 17; fastening bolt 2; counterweight block 3; piezoelectric ceramic component 4; piezoelectric ceramic sheet 41; electrode sheet 42; ground signal 421; excitation signal 422; rotor assembly 5; ultrasonic stator 6; motor base plate 7; micrometer head 5-1; pressure sensor 5-2; pressure sensor fixing plate 5-3; pressure transmission column 5-4; linear bearing connecting plate 5-5; linear bearing 5-6; spring 5-7; clamping plate 5-8; rotating rod 5-9; bearing seat 5-10; output shaft 5-11; bearing limit ring 5-12; bearing seat bottom plate 5-13; cushion block 5-14; cushion block plate 5-15; cross roller bearing upper plate 5-16; cross roller bearing 5-17; cross roller bearing bottom plate 5-18; triangle plate 5-19; triangle plate bottom plate 5-20. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the utility model for which protection is claimed, but merely represents selected embodiments of the utility model.

[0032] In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In the description of the present invention, the terms "upper", "middle", "side", "side", "upper side", "end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] Reference Figure 1-5 As shown, a longitudinal-torsional mode conversion type ultrasonic stator includes a converter 1, a fastening bolt 2, a counterweight 3 and a piezoelectric ceramic component 4. The converter 1 is provided with a mounting surface 11, a driving foot 12, a central through hole 13 and an inclined groove 14. It is a variable-section rotating body structure provided with a central through hole 13. The rotating body structure is provided with a driving foot 12, an inclined groove 13 and a mounting surface 11 in sequence from one end to the other end along the rotation axis. The outer diameter of the mounting surface 11 is larger than the outer diameter of the driving foot 12. The central through hole 13 passes through the converter 1 along the axis. The inclined groove 14 is evenly distributed on the periphery of the converter 1 and passes through and connects the central through hole 13; the mounting surface 11 is evenly distributed with screw holes 15, and the piezoelectric ceramic component 4 and the counterweight 3 are sequentially attached to the mounting surface 11 and are respectively fixed to the screw holes 15 by the fastening bolts 2.

[0035] By designing the modal converter 1 with inconsistent end face diameters at both ends and a variable cross-section structure, the stress generated by vibration is more concentrated; a circumferentially uniformly distributed penetrating inclined slots 14 are provided along the axial direction of the modal converter 1, so that the mass distribution of the modal converter 1 is uneven and the structure is asymmetric. When the longitudinal vibration of the stator is excited by the piezoelectric ceramic sheet 41, torsional vibration can be induced; the radial vibration and torsional vibration have similar frequencies, and the two have a certain phase difference in space and a certain phase difference in time, so that the particles of the stator on the contact surface between the rotor and the stator produce an elliptical motion trajectory, driving the rotor to rotate; when exciting the motor, only the longitudinal vibration mode needs to be excited, which will simplify the control circuit of the motor drive.

[0036] Furthermore, the piezoelectric ceramic component 4 is provided with a piezoelectric ceramic sheet 41 and an electrode sheet 42. The polarization direction of the piezoelectric ceramic sheet 41 is along its thickness direction, the polarization directions of two adjacent piezoelectric ceramic sheets 41 are opposite, and an electrode sheet 42 is respectively provided between the two piezoelectric ceramic sheets 41; an electrode sheet 42 is also provided between the piezoelectric ceramic component 4 and the counterweight block 3.

[0037] Furthermore, the electrode sheet 42 is connected to a ground signal 421 and an excitation signal 422 , and the ground signal 421 and the excitation signal 422 are alternately connected to the electrode sheet 42 .

[0038] Furthermore, the mounting surface 11 is provided with at least two screw holes 15 , corresponding to at least two groups of piezoelectric ceramic components 4 . Preferably, three screw holes 15 are provided, corresponding to three groups of piezoelectric ceramic components 4 .

[0039] Furthermore, the piezoelectric ceramic component 4 is provided with at least two piezoelectric ceramic sheets 41 .

[0040] Furthermore, the converter 1 is in a frustum shape.

[0041] Furthermore, the inclined slots 14 on the converter 1 are parallel to each other, and the ends of the inclined slots 14 near the mounting surface 11 overlap or intersect with the ends of the adjacent inclined slots 14 near the driving foot 12 in the axial direction.

[0042] Furthermore, a fixing flange 16 is provided on the outer periphery of the mounting surface 11 of the converter 1 to fix the entire stator structure.

[0043] Furthermore, the end surface of the driving foot 12 is provided with a tooth groove 17. The contact state between the stator and the rotor is surface contact, which helps to improve the contact state between the stator and the rotor and facilitates the discharge of wear debris generated during the contact process.

[0044] Reference Figure 1-6 As shown, a longitudinal-torsional mode conversion type ultrasonic motor includes a rotor assembly 5, an ultrasonic stator 6 and a motor base plate 7. The rotor assembly 5 and the ultrasonic stator 6 are contact-connected and fixed on the motor base plate 7. The rotor assembly 5 is provided with a rotating rod 5-9, a bearing seat 5-10, an output shaft 5-11 and a bearing limiting ring 5-12. The bearing seat 5-10 is fixed on the motor base plate 7. The output shaft 5-11 passes through the central through hole 13 of the bearing seat 5-10. The bearing limiting ring 5-12 is provided on the output shaft 5-11 to limit the axial displacement. The rotating rod 5-9 and the output shaft 5-11 are connected to the ultrasonic stator 6 side; the ultrasonic stator 6 is provided with a clamping plate 5-8 provided on the motor base plate 7, and the rotating rod 5-9 is contact-connected with the driving foot 12 of the ultrasonic stator 6 in a plane.

[0045] Furthermore, the rotating rod 5-9 is a conical rotating rod.

[0046] The main design purpose of the rotating rod 5-9 using a tapered shaft is to facilitate testing. The large end surface contacts the stator drive foot 12. To ensure the contact area, the large end surface of the rotating rod 5-9 should be slightly larger than the end surface of the stator drive foot 12. The rod of the rotating rod 5-9 is connected to the torque test instrument, and there are requirements for its diameter.

[0047] The stator of a radial-torsional mode conversion ultrasonic motor is composed of fastening bolts 2, a counterweight block 3, a longitudinal vibration piezoelectric ceramic component 4 and a longitudinal-torsional mode converter 1; wherein three groups of fastening bolts 2 pass through the counterweight block 3, the longitudinal vibration piezoelectric ceramic component 4 and the longitudinal-torsional mode converter 1 in sequence, and are evenly arranged along the circumferential direction of the tail end of the longitudinal-torsional mode converter 1 to form a stator.

[0048] The counterweight block 3 and the longitudinal-torsional mode converter 1 are both made of metal materials; the longitudinal-torsional mode converter 1 is designed with a fixing flange 16 for stator clamping, and the fixing flange 16 is located at the vibration node of the periphery of the longitudinal-torsional mode converter 1 of the stator.

[0049] The longitudinal vibration piezoelectric ceramic assembly 4 is composed of an electrode sheet 42 and a piezoelectric ceramic sheet 41. The polarization direction of the piezoelectric ceramic sheet 41 is along its thickness direction. The polarization directions of adjacent piezoelectric ceramic sheets 41 are opposite and there is an electrode sheet 42 between the piezoelectric ceramic sheets 41. Each piezoelectric ceramic sheet 41 uses "+" and "-" to represent the electric domain. There is also an electrode sheet 42 between the longitudinal vibration piezoelectric ceramic assembly 4 and the counterweight 3. The electrode sheet 42 is separated by a ground signal 421 and an excitation signal 422. By default, the electrode sheet 42 farthest from the converter 1 is always grounded.

[0050] Figure 1-4 The longitudinal torsion mode converter 1 of the stator is shown. The longitudinal torsion mode converter 1 is provided with a central through hole 13 along its axial direction, and there are three screw holes 15 along the circumferential direction at the tail end of the converter 1 for connecting the fastening bolts 2; along the axial direction of the end face of the longitudinal torsion mode converter 1, there are inclined grooves 14 evenly distributed along the circumference and penetrating; the driving foot 12 is located at the tooth top surface of the converter 1, and the contact mode with the rotor is planar contact, so that the stator driving end face and the rotor have a good contact effect.

[0051] When the stator of the ultrasonic motor of the utility model is working, a single-phase excitation signal 422 is applied to the piezoelectric ceramic sheet 41. Due to the inverse piezoelectric effect, after the piezoelectric ceramic sheet 41 is excited by the electrical signal, the longitudinal vibration mode of the stator is excited by the structural resonance. The diameters of the end faces of the mode converter 1 at both ends are inconsistent, and the structure is variable cross-section. When a group of longitudinal vibration piezoelectric ceramic sheets 41 are used to excite the longitudinal vibration mode of the stator, another working mode (radial vibration mode) can be induced at the end face of the stator. A circumferentially uniformly distributed through inclined grooves 14 are designed along the axial direction of the mode converter 1, so that the mass distribution of the mode converter 1 is uneven and the structure is asymmetric, and torsional vibration can be induced from the radial vibration. The radial vibration and torsional vibration have similar frequencies, and the two have a certain phase difference in space and a certain phase difference in time, so that the particles on the stator driving end face produce periodic vibrations with an elliptical motion trajectory, and then the rotor is driven to rotate through friction.

[0052] The piezoelectric vibrator uses the second-order longitudinal vibration mode and the first-order torsional vibration mode as working modes. When the longitudinal vibration wave generated by the excitation piezoelectric ceramic passes through the mode converter 1, a part of it passes through the part without the inclined slot 14 and reaches the free boundary and then reflects back, while the longitudinal vibration wave passing through the inclined slot 14 will be reflected to form a torsional vibration wave that reaches the free boundary and reflects, thereby forming longitudinal vibration and torsional vibration with the same frequency but different phases, which are superimposed at the driving end face to form a longitudinal-torsional composite motion with an elliptical motion trajectory. The excitation signal 422 used by the piezoelectric vibrator is a single-phase standing wave signal, and the three groups of piezoelectric ceramics are excited simultaneously. There are four motion stages within one working cycle of the excitation signal 422, such as Figure 5 shown.

[0053] Figure 6 The figure shows a stator output characteristic test device diagram, which is used to test the torque and speed of the motor. The device mainly includes a stator assembly, a rotor assembly 5, a pre-pressure device and a clamping mechanism. The original intention of the device design is to test the output performance of the stator. The stator assembly has been introduced above and will not be repeated here. The rotor assembly 5 is composed of a rotating rod 5-9, a bearing seat 5-10, an output shaft 5-11 and a bearing limit ring 5-12; the bearing seat 5-10 is fixed on the bearing seat bottom plate 5-13, and a cushion block 5-14 is used to keep the rotor and the stator at the same height; the cushion block is fixed on the cushion block plate 5-15, and the cushion block plate 5-15 is connected to the motor bottom plate 7 to fix the position of the rotor assembly 5; the output shaft 5-11 passes through the central through hole 13 of the bearing seat and a bearing limit ring 5-12 is used to limit the axial displacement. The stator is fixed on the clamping plate 5-8, and the clamping plate is connected to the cross roller bearing upper plate 5-16 through a triangular plate 5-19. The cross roller bearing upper plate 5-16, the cross roller bearing 5-17, and the cross roller bearing bottom plate 5-18 form a sliding platform, which can limit the stator assembly to have only single degree of freedom movement when the stator is subjected to pre-pressure. The pre-pressure device is composed of a micrometer head 5-1, a pressure sensor 5-2, a pressure sensor fixing plate 5-3, a pressure transmission column 5-4, a linear bearing connecting plate 5-5, a linear bearing 5-6, and a spring 5-7. The pre-pressure is adjusted by the micrometer head 5-1 so that the linear bearing 5-6 presses the spring 5-7 to apply adaptive pre-pressure to the tail of the stator. The piezoelectric sensor fixing plate 5-3 is connected to the motor bottom plate 7 through the triangle plate 5-19 and the triangle plate bottom plate 5-20.

[0054] The ultrasonic motor of the present application has a simple structure, a large output torque, a hollow structure, inconsistent diameters at both ends, a small upper and large lower structural design, and an inclined slot along the axial direction of the end face of the mode converter to achieve dual-mode conversion, and a radial-torsional composite motion with an elliptical motion trajectory is superimposed at the driving end face of the stator to achieve rotor motion. By opening an inclined slot along the axial direction of the end face of the mode converter, torsional vibration is induced in the radial vibration, and a radial-torsional composite motion that can drive the rotor to rotate is superimposed at the driving end face. Three groups of ceramic sheets are arranged in a circle along the tail end of the converter, so that the overall structure of the stator is hollow, which is conducive to the passage and protection of cables; the top of the converter is provided with a tooth groove, which is conducive to the contact between the stator / rotor, and helps to discharge the debris generated at the contact interface during the operation of the motor, avoiding adhesive wear and abrasive wear on the stator / rotor contact surface, and improving the output performance of the motor. When driving the ultrasonic motor, only one group of piezoelectric ceramic sheets and a single excitation source are needed to complete the bidirectional actuation of the motor, simplifying the driving control circuit of the ultrasonic motor.

[0055] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A longitudinal-torsional mode conversion type ultrasonic stator, characterized in that: It includes a converter, a fastening bolt, a counterweight and a piezoelectric ceramic component. The converter is a variable-section rotating body structure with a central through hole. The rotating body structure is provided with a driving foot, an inclined groove and a mounting surface in sequence from one end to the other end along the rotation axis. The outer diameter of the mounting surface is larger than the outer diameter of the driving foot. The central through hole passes through the converter along the axis. The inclined groove is evenly distributed on the periphery of the converter and passes through the connected central through hole. The mounting surface is evenly distributed with screw holes. The piezoelectric ceramic component and the counterweight are sequentially attached to the mounting surface and fixed to the screw holes respectively by fastening bolts.

2. The longitudinal-torsional mode conversion ultrasonic stator according to claim 1, characterized in that: The piezoelectric ceramic assembly is provided with piezoelectric ceramic sheets and electrode sheets. The polarization direction of the piezoelectric ceramic sheets is along the thickness direction. The polarization directions of two adjacent piezoelectric ceramic sheets are opposite. An electrode sheet is respectively provided between the two piezoelectric ceramic sheets. An electrode sheet is also provided between the piezoelectric ceramic assembly and the counterweight block.

3. The longitudinal-torsional mode conversion ultrasonic stator according to claim 2, characterized in that: The electrode sheet is connected to a ground signal and an excitation signal, and the ground signal and the excitation signal are alternately connected to the electrode sheet.

4. The longitudinal-torsional mode conversion ultrasonic stator according to claim 1, characterized in that: The mounting surface is provided with at least two screw holes, corresponding to at least two groups of piezoelectric ceramic components.

5. The longitudinal-torsional mode conversion ultrasonic stator according to claim 1 or 2, characterized in that: The piezoelectric ceramic component is provided with at least two piezoelectric ceramic sheets.

6. The longitudinal-torsional mode conversion type ultrasonic stator according to claim 1, characterized in that: The oblique grooves on the converter are parallel to each other, and the ends of the oblique grooves near the mounting surface overlap or intersect with the ends of the adjacent oblique grooves near the driving foot in the axial direction.

7. A longitudinal-torsional mode conversion type ultrasonic stator according to claim 1 or 6, characterized in that: A fixing flange is provided on the outer periphery of the mounting surface end of the converter.

8. The longitudinal-torsional mode conversion type ultrasonic stator according to claim 1, characterized in that: The end surface of the driving foot is provided with a tooth groove.

9. A longitudinal-torsional mode conversion ultrasonic motor, characterized in that: It includes a rotor assembly, an ultrasonic stator and a motor base plate, wherein the rotor assembly and the ultrasonic stator are in contact connection and fixed on the motor base plate, the ultrasonic stator is the ultrasonic stator according to any one of claims 1 to 8, the rotor assembly is provided with a rotating rod, a bearing seat, an output shaft and a bearing limiting ring, the bearing seat is fixed on the motor base plate, the output shaft passes through the central through hole of the bearing seat, the bearing limiting ring is provided on the output shaft to limit the axial displacement, the rotating rod and the output shaft are connected to the ultrasonic stator side; the ultrasonic stator is provided with a clamping plate provided on the motor base plate, and the rotating rod is in contact connection with the driving foot plane of the ultrasonic stator.

10. The longitudinal-torsional mode conversion ultrasonic motor according to claim 9, characterized in that: The rotating rod is a tapered rotating rod.

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