Cutting equipment

Abstract

The utility model provides cutting equipment. The cutting equipment comprises a first wiring roller, a second wiring roller, a driving part, at least two processing rollers and at least one cutting line detection sensor, the driving part is used for driving the at least two processing rollers, a cutting line is wound on the at least two processing rollers, one end of the wound cutting line is connected with the first wiring roller, the other end of the wound cutting line is connected with the second wiring roller, and the wound cutting line is driven by the driving part to rotate along with the rotation of the at least two processing rollers so as to cut a to-be-cut piece; the at least one cutting line detection sensor is used for detecting the abnormal state of the cutting line, and the abnormal state at least comprises a doubling state and a breaking state. The cutting quality can be improved, and the cutting cost can be reduced.

Description

Technical Field

[0001] The utility model relates to the cutting field, in particular to a cutting device. Background Art

[0002] In some application scenarios, for example, in silicon wafer cutting scenarios, a slicer is used to cut silicon wafers. The automatic wire arrangement system of the slicer first releases a diamond wire with a length of about 200-300km and a finished diameter of 50-65μm (even close to 30um) from the wire distribution roller into the cutting area, and evenly and precisely winds it repeatedly on the main roller in the cutting area. The main roller is provided with fine winding grooves, and a single diamond wire is arranged in the grooves, arranged side by side to form a diamond wire network of about 3,000 wires with a spacing of less than 250μm, and then led out of the cutting area by the take-up wheel. The diameter of the diamond wire and the density of the wire network are both at the micron level, so precise wire arrangement places high demands on the diamond wire management system. Its characteristics are thin wire (reducing silicon rod loss), dense (increasing the number of wafers per unit length of silicon rod), and evenly spaced arrangement (avoiding different thicknesses of silicon wafers), which is convenient for improving wafer output efficiency.

[0003] During the silicon wafer cutting process, the upper surface of the silicon rod is fixed in the cutting equipment, and the silicon rod moves slowly downward. The wire speed of the diamond wire mesh accelerates from a stationary state to more than 2,400 meters / minute (equivalent to 144 kilometers / hour) within 4 seconds. After running at high speed for about 30 seconds, it decelerates to 0 meters / minute within 4 seconds; then repeats the movement in the reverse direction; the diamond wire mesh cuts the silicon rod through this reciprocating high-speed movement. Wire bow refers to the degree of bending of the wire saw during cutting, which affects the cutting efficiency. If the tensile strength or yield strength of the diamond wire is not enough, the cutting force is not enough, or the cutting parameters are not coordinated with the diamond wire parameters, the wire will break, which will cause great damage to the production continuity and increase the non-silicon cost. Therefore, the wire break rate of the diamond wire should be as low as possible, and the wire break should be detected in time. Utility Model Content

[0004] In view of the above technical problems, the technical solution adopted by the utility model is:

[0005] An embodiment of the utility model provides a cutting device, which at least includes: a first wiring roller, a second wiring roller, a driving unit, at least two processing rollers and at least one cutting line detection sensor; the driving unit is used to drive the at least two processing rollers, and the at least two processing rollers are wound with cutting lines, one end of the wound cutting lines is connected to the first wiring roller, and the other end is connected to the second wiring roller, and the wound cutting lines are driven by the driving unit and rotate along with the rotation of the at least two processing rollers to cut the cut piece; wherein, when the number of cutting lines wound on the first wiring roller is greater than a first set number threshold, the first wiring roller is used to release the cutting lines, and the second wiring roller is used to receive the cutting lines, and when the number of cutting lines wound on the first wiring roller is less than a second set number threshold, the first wiring roller is used to receive the cutting lines, and the second wiring roller is used to release the cutting lines; the at least one cutting line detection sensor is used to detect abnormal states of the cutting lines, and the abnormal states at least include a parallel line state and a broken line state.

[0006] The utility model has at least the following beneficial effects:

[0007] The wire cutting device provided by the embodiment of the utility model can detect the abnormal state of the cutting wire in real time, thereby improving the cutting quality of the cut piece. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0009] Figure 1 A schematic diagram of the structure of a cutting device provided in one embodiment of the utility model;

[0010] Figure 2 A schematic structural diagram of a cutting device provided in another embodiment of the utility model;

[0011] Figures 3 to 7 This is a schematic diagram of abnormal state detection of cutting line provided by the utility model. DETAILED DESCRIPTION

[0012] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0013] The utility model provides a cutting device, such as Figure 1 As shown, the device at least includes: a first wiring roller 1, a second wiring roller 2, a driving unit (not shown), at least two processing rollers and at least one cutting line detection sensor 5.

[0014] In an embodiment of the utility model, the driving unit is used to drive the at least two processing rollers so that the at least two processing rollers rotate in the same rotation direction. The driving unit may be a servo motor. The two processing rollers are arranged in parallel, and a plurality of wire grooves formed according to a set spacing are arranged on the outer peripheral surface of each processing roller, and the depth and width of the wire grooves can be set based on actual needs. The number of wire grooves and the spacing between the wire grooves can also be set according to actual needs. In a non-limiting embodiment, the number of wire grooves can be 3000, and the spacing between the wire grooves can be less than 250μm.

[0015] In the embodiment of the utility model, the at least two processing rollers are wound with a cutting wire 6, one end of the wound cutting wire is connected to the first wiring roller 1, and the other end is connected to the second wiring roller 2. The wound cutting wire is driven by the driving part and rotates with the rotation of the at least two processing rollers to cut the workpiece 8. In an illustrative example, as Figure 1 As shown, two processing rollers may be included, namely a first processing roller 3 and a second processing roller 4. In another exemplary embodiment, as shown in FIG. Figure 2 As shown, three processing rollers may be included, namely a first processing roller 3, a second processing roller 4 and a third processing roller 9. The three processing rollers may be arranged in an isosceles triangle.

[0016] like Figure 1As shown, the cutting wire can be conveyed between the first wiring roller 1 and the processing roller through multiple guide wheels, and the cutting wire can be conveyed between the second wiring roller 2 and the processing roller through multiple guide wheels 7. Wherein, when the number of cutting wires wound on the first wiring roller is greater than the first set number threshold, the first wiring roller is used to release the cutting wire, and the second wiring roller is used to receive the cutting wire, and when the number of cutting wires wound on the first wiring roller is less than the second set number threshold, the first wiring roller is used to receive the cutting wire, and the second wiring roller is used to release the cutting wire. In other words, the first wiring roller 1 and the second wiring roller can be used as both a wire feeding roller and a wire taking-up roller. The first set number threshold and the second set number threshold can be set based on actual needs. Each wiring roller can be driven by a corresponding drive unit, such as a servo motor.

[0017] In the embodiment of the utility model, when a single cutting wire conveyed by the wiring roller is transmitted to the processing roller, since both ends of the cutting wire are fixed by the wiring roller, under the action of the driving unit, it will be tightly wound in the wire groove of the processing roller to form a tightly arranged cutting wire net. During the cutting process of the cut piece, the upper surface of the cut piece is fixed in the cutting device, and the cut piece moves slowly downward. The linear speed of the cutting wire net is accelerated from a static state to a set speed, such as 2400 meters / minute (equivalent to 144 kilometers / hour) or more within a set time, such as 4 seconds. After the high-speed continuous operation for a set operation time, such as about 30 seconds, it decelerates to 0 meters / minute within 4 seconds; then repeats the movement in the reverse direction; the cutting wire net achieves the cutting of the cut piece through this reciprocating high-speed movement.

[0018] In the embodiment of the utility model, the cutting wire can be a diamond wire, the cut piece can be a silicon wafer, and the cutting wire detection sensor can be an eddy current sensor.

[0019] In an embodiment of the utility model, the at least one cutting line detection sensor is used to detect an abnormal state of the cutting line, and the abnormal state includes at least a parallel state and a broken state. The parallel state refers to multiple cutting lines stacked together in parallel, and the broken state refers to the cutting line being broken.

[0020] It is known to those skilled in the art that the core component of the probe of the eddy current sensor is the detection coil. When a high-frequency AC signal is passed through the detection coil, the high-frequency magnetic field generated by the coil generates eddy currents in the metal conductor. The eddy currents in turn affect the magnetic field strength and ultimately change the inductance and resistance of the detection coil. The demodulation circuit obtains the impedance information of the coil and can demodulate the change in displacement based on the corresponding relationship between impedance and distance. In the utility model, the characteristics of the diamond wire being metal and the eddy current sensor are utilized, and the signal change detected by the eddy current sensor is utilized to realize the detection of the abnormal state of the diamond wire.

[0021] In the embodiment of the utility model, the eddy current sensor can be an existing structure. For example, it can be divided into an integrated circuit built-in type or a probe + controller type. Among them, the circuit of the integrated circuit built-in type is integrated inside the probe, and no additional controller is required, which is convenient for installation and saves space. The probe + controller method has a low expansion coefficient and a large measurement range.

[0022] Further, in an exemplary embodiment, a first cutting line detection sensor 51 may be included, and the first cutting line detection sensor 51 is arranged on the side of any one of the at least two processing rollers, and is used to move along the axial direction of the processing roller to detect the parallel state and the broken state of the wound cutting line. Taking three processing rollers as an example, the first cutting line detection sensor 51 can be arranged on the side of the first processing roller 3 or the second processing roller 4, such as Figure 3 As shown, it can be set at a set position on the left side of the first processing roller 3. The distance between the first cutting line detection sensor 51 and the processing roller can be determined based on actual conditions. The closer the better in theory, the more accurate the detection signal can be.

[0023] Specifically, the first cutting line detection sensor 51 can be driven by a corresponding driving mechanism (not shown) to move along the axial direction of the processing roller at a set speed. In the embodiment of the utility model, the number of unit cutting line detections of the first cutting line detection sensor 51, that is, the number of cutting lines that can be detected each time, can be determined based on actual conditions, as long as the detection accuracy can be ensured. Before the first cutting line detection sensor 51 officially works, the detection signal threshold of the first cutting line detection sensor 51 needs to be calibrated. Specifically:

[0024] When the cutting line is in a normal state, that is, there is no line merging or line breaking, the driving mechanism of the first cutting line detection sensor 51 drives the first cutting line detection sensor 51 installed at a set position to move along the axial direction of the processing roller from one end to the other end at a set speed to scan the cutting line on the processing roller multiple times. In this way, after completing the i-th scan, the corresponding detection signal set I1 is obtained. i ={I1 i1 , I1 i2 , ..., I1 ij , ..., I1 in}, I1 ij is the signal detected by the first cutting line detection sensor 51 at the jth scanning position in the i-th scanning process, i is 1 to m, m is the number of scanning times corresponding to each scanning of the first cutting line detection sensor 51; j is 1 to n, n is the number of scanning positions corresponding to the first cutting line detection sensor 51, P is the number of cutting lines arranged on the processing roller, ΔL1 is the unit cutting line detection number of the first cutting line detection sensor 51, that is, the number of cutting lines that can be scanned at each scanning position is the unit cutting line detection number. In the embodiment of the utility model, the detection signal can be a voltage.

[0025] In an exemplary embodiment, the total average signal AvgI1 can be obtained t =(I1 t 1+I1 t 2+……+I1 t i +……+I1 t m ) / m as the line connection and line disconnection status detection signal threshold, where I1 t i is the average detection signal corresponding to the i-th scanning process, I1 t i =(I1 i1 +I1 i2 +……+I1 ij +……+I1 in ) / n.

[0026] In another embodiment, the average signal AvgI1 of the j-th scanning position may be obtained. j =(I1 1j +I1 2j +……+I1 ij +……+I1 mj ) / m is used as the detection signal threshold for the line connection and line disconnection status of the jth scanning position. Compared with using the total average signal as the detection signal threshold, using the corresponding average signal as the detection signal threshold for each scanning position can make the detection more accurate.

[0027] The working principle of the first cutting line detection sensor 51 is:

[0028] During the cutting process, the driving mechanism of the first cutting line detection sensor 51 drives the first cutting line detection sensor 51 installed at the set position to move along the axial direction of the processing roller from one end to the other end at a set speed. If the currently detected monitoring signal is greater than the parallel and broken line state detection signal threshold and the absolute value of the difference between the two is greater than the set threshold, it is determined that the cutting line is in a parallel state; if the currently detected monitoring signal is less than the parallel and broken line state detection signal threshold and the absolute value of the difference between the two is greater than the set threshold, it is determined that the cutting line is in a broken line state.

[0029] In another embodiment of the utility model, the abnormal state also includes an abnormal bending state. The device also includes a second cutting line detection sensor 52, which is arranged between the two processing rollers and is used to move along the axial direction of the processing rollers to detect whether the wound cutting line is in an abnormal bending state. Taking three processing rollers as an example, the second cutting line detection sensor 52 can be arranged between the first processing roller and the second processing roller 4, that is, arranged at a side position above the cutting line in a horizontal state, such as the left side or the right side, such as Figure 4 The distance between the second cutting line detection sensor 52 and the cutting line can be determined based on actual conditions. The closer the better in theory, the more accurate the detection signal can be.

[0030] Specifically, the second cutting line detection sensor 52 can be driven by a corresponding driving mechanism (not shown) to move along the axial direction of the processing roller at a set speed. In the embodiment of the utility model, the unit cutting line detection number △L2 of the second cutting line detection sensor 52, that is, the number of cutting lines that can be detected each time, can be determined based on actual conditions as long as the detection accuracy can be ensured.

[0031] During the cutting process, the cutting line needs to maintain a certain degree of curvature, i.e., bending, to improve the cutting efficiency of the cutting line. In an embodiment of the utility model, if the curvature of the cutting line is within a preset range, it means that the cutting line is in a normal curvature state, otherwise, it is in an abnormal curvature state. In an exemplary embodiment, the preset range may be [Hmin, Hmax], where Hmin is the preset minimum curvature degree, and Hmax is the preset maximum curvature degree. In an exemplary embodiment, Hmin = 5 mm, and Hmax = 10 mm.

[0032] Before the second cutting line detection sensor 52 officially works, it is necessary to calibrate the detection signal threshold of the second cutting line detection sensor 52. Specifically:

[0033] When the cutting line is at the preset minimum level, the driving mechanism of the second cutting line detection sensor 52 drives the second cutting line detection sensor 52 installed at the set position to move along the axial direction of the processing roller from one end to the other end at a set speed to scan the cutting line between the processing rollers multiple times. In this way, after completing the rth scan, the corresponding detection signal set I2 is obtained. min r ={I2 min r1 , I2 min r2 , ..., I2 min rs , ..., I2 min rg}, I2min rs is the signal detected by the second cutting line detection sensor 52 at the s-th scanning position during the r-th scanning process, r is 1 to g, g is the number of scans corresponding to each scan of the second cutting line detection sensor 52; s is 1 to h, h is the number of scanning positions corresponding to the second cutting line detection sensor 52, P is the number of cutting lines arranged on the processing roller, ΔL1 is the unit cutting line detection number of the second cutting line detection sensor 52, that is, the number of cutting lines that can be scanned at each scanning position is the unit cutting line detection number.

[0034] In an exemplary embodiment, the total average signal AvgI2 may be obtained. min t =(I2 min-t 1+I2 min-t 2+……+I2 min-t r +……+I2 min-t g ) / g as the first bending degree detection signal threshold DB1, where I2 min-t r is the average detection signal corresponding to the rth scanning process, I2 min-t r =(I2 min r1 +I2 min r2 +……+I2 min rs +……+I2 min rg ) / g.

[0035] In another embodiment, the average signal AvgI2 of the s-th scanning position may be obtained. min s =(I2 min 1s +I2 min 2s +……+I2 min rs +……+I2 min gs ) / g is used as the first bending degree detection signal threshold DB1 of the s-th scanning position. Compared with using the total average signal as the detection signal threshold, using the corresponding average signal at each scanning position as the detection signal threshold can make the detection more accurate.

[0036] When the cutting line is at the preset maximum extent, the driving mechanism of the second cutting line detection sensor 52 drives the second cutting line detection sensor 52 installed at the set position to move along the axial direction of the processing roller from one end to the other end at a set speed to scan the cutting line between the processing rollers multiple times. In this way, after completing the rth scan, the corresponding detection signal set I2 is obtained. max r ={I2 max r1 , I2 max r2 , ..., I2 max rs , ..., I2 max rg}, I2 max rs is the signal detected by the second cutting line detection sensor 52 at the sth scanning position during the rth scanning process, r is between 1 and g, g is the number of scans corresponding to each scan of the second cutting line detection sensor 52; s is between 1 and h, h is the number of scanning positions corresponding to the second cutting line detection sensor 52, n = [P / △L1], P is the number of cutting lines arranged on the processing roller, △L1 is the unit cutting line detection number of the second cutting line detection sensor 52, that is, the number of cutting lines that can be scanned at each scanning position is the unit cutting line detection number.

[0037] In an exemplary embodiment, the total average signal AvgI2 may be obtained. max t =(I2 max-t 1+I2 max-t 2+……+I2 max-t r +……+I2 max-t g ) / g as the second bending degree detection signal threshold DB2, where I2 max-t r is the average detection signal corresponding to the rth scanning process, I2 max-t r =(I2 max r1 +I2 max r2 +……+I2 max rs +……+I2 max rg ) / g.

[0038] In another embodiment, the average signal AvgI2 of the s-th scanning position may be obtained. max s =(I2 max 1s+I2 max 2s +……+I2 max rs +……+I2 max gs ) / g is used as the second bending degree detection signal threshold DB2 of the s-th scanning position. Compared with using the total average signal as the detection signal threshold, using the corresponding average signal at each scanning position as the detection signal threshold can make the detection more accurate. The working principle of the second cutting line detection sensor 52 is:

[0039] During the cutting process, the driving mechanism of the second cutting line detection sensor 52 drives the second cutting line detection sensor 52 installed at the set position to move along the axial direction of the processing roller from one end to the other end at a set speed. If the currently detected monitoring signal is less than the first bending degree detection signal threshold or greater than the second bending degree detection signal threshold, it is determined that the cutting line is in an abnormal bending state.

[0040] In the embodiment of the present invention, the first cutting line detection sensor 51 and the second cutting line detection sensor 52 can perform asynchronous scanning in time division or perform synchronous scanning at the same time.

[0041] Furthermore, in an embodiment of the utility model, the abnormal state may also include a non-vertical state. The device also includes a third cutting line detection sensor and a fourth cutting line detection sensor. The third cutting line detection sensor is arranged on the side of the first vertical guide wheel and is linked to the first vertical guide wheel, and is used to detect whether the cutting line released or received by the first wiring roller is in a vertical state; the fourth cutting line detection sensor is arranged on the side of the second vertical guide wheel and is linked to the second vertical guide wheel, and is used to detect whether the cutting line released or received by the second wiring roller is in a non-vertical state. Wherein, the first vertical guide wheel is used to guide the metal wire conveyed by the first wiring roller to a vertical state, such as the first guide wheel for conveying the metal wire conveyed by the first wiring roller. Figure 1 The second vertical guide wheel is used to guide the metal wire conveyed by the second wiring roller to a vertical state, and is the first guide wheel for conveying the metal wire conveyed by the second wiring roller, such as Figure 1 In the embodiment of the present invention, the eddy current sensor and the corresponding vertical guide wheel can share a mounting bracket to achieve linkage.

[0042] In the embodiment of the utility model, the third cutting line detection sensor and the fourth cutting line detection sensor are used to detect the vertical state of a single metal wire, and the third cutting line detection sensor and the fourth cutting line detection sensor are collectively referred to as the metal wire vertical state detection sensor 11. Figure 5As shown, a protective cover 12 is provided at the front end of the metal wire vertical state detection sensor 11, i.e., the third cutting line detection sensor and the fourth cutting line detection sensor. The protective cover is a metal protective cover to prevent the probe from being cut when the diamond wire is broken. In another exemplary embodiment, the front plug of the metal wire vertical state detection sensor 11 can be set as a ceramic front plug, which can also play a protective role.

[0043] In an exemplary embodiment of the present invention, Figure 5 As shown, the third cutting line detection sensor and the fourth cutting line detection sensor each have a detection probe; the third cutting line detection sensor is vertically arranged with the first vertical guide wheel, that is, the axis of the third cutting line detection sensor is perpendicular to the axis of the first vertical guide wheel. In this way, the probe of the third cutting line detection sensor is facing the metal wire, that is, the axis of the third cutting line detection sensor and the metal wire are located in the same plane; the fourth cutting line detection sensor is vertically arranged with the second vertical guide wheel, that is, the axis of the fourth cutting line detection sensor is perpendicular to the axis of the second vertical guide wheel. In this way, the probe of the fourth cutting line detection sensor is facing the metal wire, that is, the axis of the third cutting line detection sensor and the metal wire are located in the same plane. It should be noted that, in order to avoid redundancy, Figure 5 Only a schematic diagram of the arrangement of a metal wire vertical state detection sensor is shown. The distance between the metal wire vertical state detection sensor and the metal wire can be set based on actual needs as long as the detection accuracy can be ensured.

[0044] Furthermore, the utility model performs the following operations during the cutting process:

[0045] Operation 1: when the metal wire is in a traveling state, respectively acquiring detection signals DS3 and DS4 collected by the third cutting line detection sensor and the fourth cutting line detection sensor.

[0046] Operation 2: if |DSp-V0|>0, it is determined that the metal wire transported by the corresponding vertical guide wheel is currently in a skewed state; wherein, p=3 or 4, and V0 is the set vertical state detection signal threshold.

[0047] In an embodiment of the utility model, V0 can be determined in the following manner: when the metal wire is in a vertical state and the metal wire vertical state detection sensor is located at a set position, for example, at a position about 1.5 mm away from the metal wire, the detection signal of the metal wire vertical state detection sensor is obtained at this time as the vertical state detection signal threshold V0.

[0048] If |DSp-V0|>0, it means that the metal wire conveyed by the corresponding vertical guide wheel is currently in a skewed state. Specifically, if (DSp-V0)>0, it means that the metal wire is deflected toward the direction close to the eddy current sensor, that is, it is deflected to the left; if (V0-DSp)>0, it means that the metal wire is deflected toward the direction away from the eddy current sensor, that is, it is deflected to the right; if DSp=V0, it means that the metal wire conveyed by the corresponding vertical guide wheel is currently in a vertical state.

[0049] It should be noted that those skilled in the art can also calculate the deflection angle of the metal wire based on the trigonometric function relationship. Specifically, the vertical distance a between the metal wire vertical state detection sensor and the wire entry or exit point of the wiring roller is known, and the horizontal distance b between the metal wire and the metal wire vertical state detection sensor is also known. The horizontal distance bc between the current metal wire and the metal wire vertical state detection sensor can be known through the detection signal of the metal wire vertical state detection sensor. In this way, the deflection angle θ satisfies: tanθ=(b-bc) / a.

[0050] In this embodiment, the metal wire vertical state detection sensor can identify the degree of deflection in the direction parallel to the plane of the wire wheel, but the deflection in the direction perpendicular to the plane of the wire wheel will affect the detection accuracy. In addition, the mounting bracket of the probe must move with the mounting bracket of the wire wheel to form a whole, and the inclination in the plane perpendicular to the wire wheel will affect the detection accuracy. Therefore, in order to further improve the detection accuracy, in another embodiment of the utility model, the metal wire vertical state detection sensor adopts another structure. The structure of the metal wire vertical state detection sensor in this embodiment is basically the same as that of the metal wire vertical state detection sensor in the aforementioned embodiment, except that it has three detection probes, such as Figure 6 As shown, both the third cutting line detection sensor and the fourth cutting line detection sensor have three detection probes, including a middle detection probe and a left detection probe and a right detection probe respectively arranged on both sides of the middle detection probe. The third cutting line detection sensor is arranged in parallel with the first vertical guide wheel, that is, the axis of the third cutting line detection sensor is in a plane parallel to the axis of the first vertical guide wheel; the fourth cutting line detection sensor is arranged in parallel with the second vertical guide wheel, that is, the axis of the fourth cutting line detection sensor is parallel to the axis of the second vertical guide wheel.

[0051] It should be noted that, in order to avoid redundancy, Figure 6 Only a schematic diagram of the arrangement of a metal wire vertical state detection sensor is shown. The distance between the metal wire vertical state detection sensor and the metal wire can be set based on actual needs as long as the detection accuracy can be ensured.

[0052] Further, in this embodiment, during the cutting process, the following operations are performed:

[0053] Operation 3, when the metal wire is in the moving state, obtaining the detection signal V31 collected by the three detection probes of the current third cutting line detection sensor c 、V32 c and V33 c And obtain the detection signal V41 collected by the three detection probes of the fourth cutting line detection sensor c 、V42 c and V43 c Among them, V31 c V32 is the detection signal currently collected by the left probe of the third eddy current sensor. c V33 is the detection signal currently collected by the middle probe of the third eddy current sensor. c V41 is the detection signal currently collected by the right probe of the third eddy current sensor. c V42 is the detection signal currently collected by the left probe of the fourth eddy current sensor. c V43 is the detection signal currently collected by the middle probe of the fourth eddy current sensor. c It is the detection signal currently collected by the right probe of the fourth eddy current sensor.

[0054] Operation 4, based on Vq1 c 、Vq2 c 、Vq3 c And V1, V2 and V3, determine whether the metal wire currently transported by the wiring roller is in a vertical state, where q is equal to 3 or 4, V1, V2 and V3 are the first set detection signal threshold, the second set detection signal threshold and the third set detection signal threshold respectively.

[0055] In the embodiment of the present utility model, V1, V2 and V3 can be obtained by the following method: when the metal wire is in a vertical state and the metal wire vertical state detection sensor is located at a set position (such as Figure 6 When the state is shown by the solid line L1 in the figure, the three detection probe detection signals of the metal wire vertical state detection sensor are obtained at this time, which are respectively used as the first set detection signal threshold, the second set detection signal threshold and the third set detection signal threshold.

[0056] Furthermore, operation 4 may specifically include:

[0057] If V1 c =V1,V2 c =V2,V3 c = V3, confirm that the metal line is in a vertical state; if Vq1 c >V1,Vq2 c <V2,Vq3 c <V3, it is determined that the metal wire transported by the corresponding vertical guide wheel is currently in the first deflection state; if Vq1c >Vq1,Vq2 c >V2,Vq3 c <V3, it is determined that the metal wire conveyed by the corresponding vertical guide wheel is currently in the second deflection state; if Vq1 c >V1,Vq2 c >V2,Vq3 c > V3, it is determined that the metal wire transported by the corresponding vertical guide wheel is currently in the third deflection state; if Vq1 c <V1,Vq2 c <V2,Vq3 c > V3, it is determined that the metal wire conveyed by the corresponding vertical guide wheel is currently in the fourth deflection state; if Vq1 c <V1,Vq2 c <V2,Vq3 c > V3, it is determined that the metal wire conveyed by the corresponding vertical guide wheel is currently in the fifth deflection state; if Vq1 c <V1,Vq2 c <V2,Vq3 c <V3, and (Vq3 c -V3)<(Vq1 c -V1), determine that the metal wire conveyed by the corresponding vertical guide wheel is currently in the sixth deflection state; if Vq1 c <V1,Vq2 c <V2,Vq3 c <V3, and (Vq3 c -V3)=(Vq1 c -V1), determine that the metal wire transported by the corresponding vertical guide wheel is currently in the seventh deflection state; if Vq1 c <V1,Vq2 c <V2,Vq3 c <V3, and (Vq1 c -V1)>(Vq3 c -V3), determine that the metal wire conveyed by the corresponding vertical guide wheel is currently in the eighth skew state.

[0058] In the embodiment of the utility model, the first deflection state is the state in which the metal wire deflects to the left in the plane where the circumferential surface of the parallel wiring roller is located from the vertical state, that is, the state in which the metal wire deflects in the direction indicated by the arrow a1. Figure 6The state shown by the left dotted line L2 in the figure, the second deflection state is the state in which the metal wire deflects from the vertical state in the plane in the second quadrant to the direction close to the detection probe, that is, the state in which it is offset in the direction indicated by the arrow a2; the third deflection state is the state in which the metal wire deflects from the vertical state in the plane where the circumferential surface of the vertical wiring roller is located to the direction close to the detection probe, that is, the state in which it is offset in the direction indicated by the arrow a3; the fourth deflection state is the state in which the metal wire deflects from the vertical state in the plane in the first quadrant to the direction close to the detection probe, that is, the state in which it is offset in the direction indicated by the arrow a4; the fifth deflection state is the state in which the metal wire deflects from the vertical state to the right in the plane where the circumferential surface of the parallel wiring roller is located, that is, the state in which it is offset in the direction indicated by the arrow a5. Figure 6 The state shown by the right dotted line L3 in the figure, the sixth skewed state is that the metal wire is deflected from the plane in the fourth quadrant in the vertical state toward the direction away from the detection probe, that is, it is offset in the direction indicated by the arrow a6; the seventh skewed state is that the metal wire is deflected from the plane in the vertical state where the circumferential surface of the vertical wiring roller is located toward the direction away from the detection probe, that is, it is offset in the direction indicated by the arrow a7; the eighth skewed state is that the metal wire is deflected from the plane in the third quadrant in the vertical state toward the direction away from the detection probe, that is, it is offset in the direction indicated by the arrow a8.

[0059] Further, in another embodiment of the present invention, the metal wire vertical state detection sensor adopts another structure. The structure of the metal wire vertical state detection sensor in this embodiment is basically the same as that of the metal wire vertical state detection sensor in the aforementioned embodiment, except that it has four detection probes, such as Figure 7 As shown, the third cutting line detection sensor and the fourth cutting line detection sensor each have four detection probes, including an upper detection probe group and a lower detection probe group, the upper detection probe group includes a first upper detection probe and a second upper detection probe arranged side by side, and the lower detection probe group is arranged on the lower side of the upper detection probe group, including a first lower detection probe and a second lower detection probe arranged side by side. Among them, the first upper detection probe and the second upper detection probe are arranged tangently, the first lower detection probe and the second lower detection probe are arranged tangently, and the tangent between the first upper detection probe and the second upper detection probe is collinear with the tangent between the first lower detection probe and the second lower detection probe, that is, located on the same straight line. Each detection probe has the same shape, but the difference is that the detection signal is different. Specifically, the detection signal of the second lower detection probe is greater than the detection signal of the first lower detection probe, the detection signal of the first lower detection probe is greater than the signal of the first upper detection probe, and the detection signal of the first upper detection probe is greater than the detection signal of the second upper detection probe.

[0060] It should be noted that, in order to avoid redundancy, Figure 7Only a schematic diagram of the arrangement of a metal wire vertical state detection sensor is shown. The distance between the metal wire vertical state detection sensor and the metal wire can be set based on actual needs as long as the detection accuracy can be ensured.

[0061] Furthermore, in this embodiment, during the cutting process, the following operations are performed:

[0062] Operation 5, when the metal wire is in the moving state, obtaining the detection signal V31 collected by the four detection probes of the current third cutting line detection sensor c To V34 c And obtain the detection signal V41 collected by the four detection probes of the fourth cutting line detection sensor c To V44 c Among them, V31 c V32 is the detection signal currently collected by the first upper detection probe of the third eddy current sensor. c V33 is the detection signal currently collected by the second upper detection probe of the third eddy current sensor. c V34 is the detection signal currently collected by the second lower detection probe of the third eddy current sensor. c V41 is the detection signal currently collected by the second lower detection probe of the third eddy current sensor; c V42 is the detection signal currently collected by the first upper detection probe of the fourth eddy current sensor. c V43 is the detection signal currently collected by the second upper detection probe of the fourth eddy current sensor. c V44 is the detection signal currently collected by the second lower detection probe of the fourth eddy current sensor. c It is the detection signal currently collected by the second lower detection probe of the fourth eddy current sensor.

[0063] Operation 6, based on V31 c To V34 c Get the current position X1 of the first wiring roller c , and based on V41 c To V44 c Get the current position X2 of the second wiring roller c ; Among them, X1 c =((|V34 c -V33 c ∣-∣V31 c -V32 c ∣)-b1) / k1,X2 c =((|V44 c -V43 c ∣-∣V41 c -V42 c|)-b2) / k2; b1 and b2 are the first set value and the second set value respectively, k1 and k2 are the first set coefficient and the second set coefficient respectively.

[0064] In the embodiment of the utility model, the position of the vertical guide wheel is the coordinate of the center of the vertical guide wheel on the X-axis in the set rectangular coordinate system. The set rectangular coordinate system can be a custom rectangular coordinate system, such as a world coordinate system.

[0065] In the embodiment of the present utility model, b1 and k1 can be obtained by the following steps:

[0066] Step 1: When the metal wire is in a vertical state (such as Figure 7 When the third cutting line detection sensor is in the reference state corresponding to the set position, the detection signal V31 collected by the four detection probes of the third cutting line detection sensor is obtained. 0 To V34 0 And the position of the first vertical guide wheel X1 0 , and obtain the reference parameter group P0 = (△C0, X1 0 ), △C0 is the reference signal difference, △C0=|V34 0 -V33 0 ∣-∣V31 0 -V32 0 ∣).

[0067] In the embodiment of the utility model, when the metal wire is in a vertical state, the metal wire and the tangent line of the detection probe of the third cutting line detection sensor overlap in the vertical direction, such as Figure 7 As shown by the solid line L in .

[0068] Step 2, control the first vertical guide wheel to shift leftward from the reference state according to the set offset △d until the corresponding metal wire is located at the edge of the first upper detection probe, and obtain the left offset parameter set PL = {PL1, PL2, ..., PL r , ..., PL w}, PL r is the rth parameter group in PL, r ranges from 1 to w, w is the number of parameter groups in PL; PL r =(△C L r , X1 L r ), △C L r For PL r The corresponding signal difference, △C L r =|V34 L r -V33 Lr ∣-∣V31 L r -V32 L r ∣), V31 L r To V34 L r They are the detection signals corresponding to the four detection probes of the third cutting line detection sensor after the first vertical guide wheel is controlled to deviate to the left for the rth time, X1 L r To control the position of the first vertical guide wheel after the first vertical guide wheel deflects to the left for the rth time. △d can be set based on actual needs, for example, 1 to 2 mm.

[0069] Step 3, control the first vertical guide wheel to shift rightward from the reference state according to the set offset △d until the corresponding metal wire is located at the edge of the second upper detection probe, and obtain the right offset parameter set PR = {PR1, PR2, ..., PR r , ..., PR w}, PR r is the rth parameter group in PR, r ranges from 1 to w, w is the number of parameter groups in PR; PR r =(△C R r , X1 R r ), △C R r For PR r The corresponding signal difference, △C R r =|V34 R r -V33 R r ∣-∣V31 R r -V32 R r ∣), V31 R r To V34 R r They are the detection signals corresponding to the four detection probes of the third cutting line detection sensor after the first vertical guide wheel is controlled to deflect to the right for the rth time, X1 R r To control the corresponding position of the first vertical guide wheel after the first vertical guide wheel deviates to the right for the rth time.

[0070] Step 4, using the signal difference of each parameter group as the vertical coordinate and the position of the vertical guide wheel as the horizontal coordinate, draw the corresponding relationship curve to obtain the signal difference-position curve.

[0071] Step 5, obtain the curve that satisfies the linear relationship in the signal difference-position curve as the reference curve, and fit the obtained reference curve to obtain the signal difference-position relationship formula Y1=k1×X1+b1, where Y1 is the signal difference and X1 is the position of the first vertical guide wheel.

[0072] Those skilled in the art know that b2 and k2 can be obtained by referring to the method of obtaining b1 and k1. To avoid redundancy, the present invention omits a detailed description thereof.

[0073] Operation 7, if X1 c >X1 0 , determine that the metal wire conveyed by the first wiring roller is in a left-biased state, if X1 c <X1 0 , determine that the metal wire transported by the first wiring roller is in a right-biased state; if X2 c >X2 0 , determine that the metal wire conveyed by the second wiring roller is in a left-biased state, if X2 c <X2 0 , determine that the metal wire transported by the second wiring roller is in a right-biased state; X1 0 is the position of the first wiring roller when the conveyed metal wire is in a vertical state, X2 0 It is the position of the second wiring roller corresponding to when the conveyed metal wire is in a vertical state.

[0074] Operation 8, if |X1 c -X1 0 ∣>X1 m , or |X2 c -X2 0 ∣>X2 m , outputs an alarm signal indicating that the metal wire is too deflected.

[0075] Among them, X1 m is the alarm position threshold corresponding to the first vertical guide wheel, X2 m X1 is the alarm position threshold corresponding to the second vertical guide wheel. m When the metal wire is located at the center line position of the first upper detection probe of the third cutting line detection sensor, the position corresponding to the first vertical guide wheel, X2 m It is the position corresponding to the second vertical guide wheel when the corresponding metal wire is located at the center line position of the first upper detection probe of the fourth cutting line detection sensor.

[0076] Furthermore, during the cutting process, if it is detected that the metal wire is in a skewed state, the corresponding vertical guide wheel is controlled to perform a corresponding operation so that the metal wire is in a vertical state.

[0077] It is known to those skilled in the art that when it is determined that the metal wire is in a deflected state, the distance and direction that the corresponding vertical guide wheel needs to move can be determined based on the signal detected by the eddy current sensor, so as to control the corresponding vertical guide wheel to perform corresponding operations based on the determined distance and direction that needs to be moved. Any method for determining the distance and direction that the corresponding vertical guide wheel needs to move based on the signal detected by the eddy current sensor falls within the scope of protection of this application. Figure 7 For example, if X1 c >X1 0 , control the first vertical guide wheel to shift to the right (X1 c -X1 0 ) The corresponding offset is sufficient.

[0078] Those skilled in the art are aware that if the metal wire is in a vertical state, the force applied to it is minimal, thereby increasing the service life of the metal wire. Therefore, the embodiment of the utility model detects the vertical state of the metal wire, and when it is detected that it is in a non-vertical state, the position of the wiring roller is adjusted in time, thereby making the metal wire in a vertical state, thereby avoiding the problem of excessive force caused by deflection.

[0079] Furthermore, the cutting device provided by the utility model also includes an alarm device, which is used to output an alarm signal when the cutting line is in an abnormal state.

[0080] Those skilled in the art will appreciate that the cutting device provided in the embodiment of the present invention may also include other structures of existing cutting devices, such as a frame and the like.

[0081] In summary, the cutting device provided by the embodiment of the utility model can detect the abnormal state of the cutting line in real time during the cutting process, so that the cutting quality can be improved.

[0082] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should also be understood by those skilled in the art that various modifications may be made to the embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A cutting device, characterized in that: At least: a first wiring roller, a second wiring roller, a driving unit, at least two processing rollers, and at least one cutting line detection sensor; The driving unit is used to drive the at least two processing rollers, and the at least two processing rollers are wound with cutting wires, one end of the wound cutting wire is connected to the first wiring roller, and the other end is connected to the second wiring roller. Driven by the driving unit, the wound cutting wire rotates along with the rotation of the at least two processing rollers to cut the workpiece to be cut; wherein, when the number of cutting wires wound on the first wiring roller is greater than a first set number threshold, the first wiring roller is used to release the cutting wire, and the second wiring roller is used to receive the cutting wire, and when the number of cutting wires wound on the first wiring roller is less than a second set number threshold, the first wiring roller is used to receive the cutting wire, and the second wiring roller is used to release the cutting wire; the at least one cutting wire detection sensor is used to detect abnormal states of the cutting wire, and the abnormal states include at least a parallel wire state and a broken wire state.

2. The device according to claim 1, characterized in that A first cutting line detection sensor is included, which is arranged on the side of any one of the at least two processing rollers and is used to move along the axial direction of the processing roller to detect the parallel state and broken state of the wound cutting line.

3. The device according to claim 1, characterized in that The abnormal state also includes an abnormal bending state; the device also includes a second cutting line detection sensor, which is arranged between two processing rollers and is used to move along the axial direction of the processing rollers to detect whether the wound cutting line is in an abnormal bending state.

4. The device according to claim 1, characterized in that The abnormal state also includes a non-vertical state; the equipment also includes a third cutting line detection sensor and a fourth cutting line detection sensor, the third cutting line detection sensor is arranged on the side of the first vertical guide wheel and is linked with the first vertical guide wheel, and is used to detect whether the cutting line released or received by the first wiring roller is in a vertical state; the fourth cutting line detection sensor is arranged on the side of the second vertical guide wheel and is linked with the second vertical guide wheel, and is used to detect whether the cutting line released or received by the second wiring roller is in a non-vertical state; wherein, the first vertical guide wheel is used to guide the metal wire conveyed by the first wiring roller to a vertical state; the second vertical guide wheel is used to guide the metal wire conveyed by the second wiring roller to a vertical state.

5. The device according to claim 4, characterized in that A protective cover is provided at the front end of the third cutting line detection sensor and the fourth cutting line detection sensor.

6. The device according to claim 4, characterized in that The third cutting line detection sensor and the fourth cutting line detection sensor each have a detection probe; the third cutting line detection sensor and the first vertical guide wheel are vertically arranged; the fourth cutting line detection sensor and the second vertical guide wheel are vertically arranged.

7. The device according to claim 4, characterized in that The third cutting line detection sensor and the fourth cutting line detection sensor both have three detection probes, including a middle detection probe and a left detection probe and a right detection probe respectively arranged on both sides of the middle detection probe; the third cutting line detection sensor is arranged parallel to the first vertical guide wheel; the fourth cutting line detection sensor is arranged parallel to the second vertical guide wheel.

8. The device according to claim 4, characterized in that The third cutting line detection sensor and the fourth cutting line detection sensor each have four detection probes, including an upper detection probe group and a lower detection probe group, the upper detection probe group includes a first upper detection probe and a second upper detection probe arranged side by side, the lower detection probe group is arranged on the lower side of the upper detection probe group, including a first lower detection probe and a second lower detection probe arranged side by side; wherein, the third cutting line detection sensor is arranged in parallel with the first vertical guide wheel, and the fourth cutting line detection sensor is arranged in parallel with the second vertical guide wheel.

9. The device according to any one of claims 1 to 8, characterized in that The cutting line detection sensor is an eddy current sensor.

10. The device according to any one of claims 1 to 8, characterized in that The cutting wire is a diamond wire; the cut object is a silicon wafer.

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