Gluing developer and waste liquid discharge device thereof

Abstract

The utility model provides a gluing developer and waste liquid discharge device, including external connection end, waste liquid treatment equipment, external connection end is provided in the middle position of waste liquid treatment equipment top, and external connection end is connected with the internal structure of waste liquid treatment equipment, through the filter screen carries out preliminary filtration treatment to waste liquid, the residue detents on the filter screen, and the waste liquid is discharged through the filter screen. Residues on the filter screen can be adsorbed through the suction end, penetrating through the filter screen, of the main shaft pipe, so that the residues can be conveniently recycled and retreated; the filtered waste liquid is mixed with lime water by virtue of the stirring plate, and acidic substances in the waste liquid are neutralized, so that the corrosivity of the waste liquid is effectively reduced.

Description

Technical Field

[0001] The utility model relates to a glue coating developer and a waste liquid discharge device thereof, belonging to the field of developers. Background Art

[0002] The working process of the coating and developing machine mainly involves the steps of coating, exposure, and development, which are crucial in the photolithography process; first, a layer of photoresist is evenly coated on the clean wafer surface, and then the wafer is placed in the photolithography machine, and the wafer surface is irradiated by a light source to form the desired pattern; the photoresist undergoes a chemical reaction under the light, causing the photoresist to dissolve or solidify in the exposed area.

[0003] Among them, the waste liquid generated by the glue coating and developing machine contains chemical substances, and direct discharge causes pollution to the ecological environment. Therefore, the utility model provides a glue coating and developing machine with a waste liquid treatment function. Utility Model Content

[0004] The utility model provides a waste liquid discharge device, comprising an external connection end and a waste liquid treatment device, wherein the external connection end is arranged at the middle position of the top of the waste liquid treatment device, and the external connection end is connected to the internal structure of the waste liquid treatment device;

[0005] The waste liquid treatment equipment is set up in a frustum shape.

[0006] Furthermore, the waste liquid treatment equipment comprises a physical treatment chamber and a chemical treatment chamber, the physical treatment chamber and the chemical treatment chamber are in an upper and lower structure and are located in the inner cavity of the equipment, and the physical treatment chamber and the chemical treatment chamber can communicate with each other;

[0007] A waste liquid inlet pipe is provided on the inner wall of the physical treatment chamber, and the pipe is a one-way flow pipe.

[0008] Furthermore, the physical processing chamber comprises a main shaft tube and a filter screen, wherein the main shaft tube is located in the center of the chamber cavity, and the top end of the main shaft tube is connected to the external end, and the bottom of the main shaft tube passes through the filter screen;

[0009] The filter screen is hemispherical, and a positioning shaft is fixedly installed in the middle of the bottom of the filter screen;

[0010] The diameter of the positioning shaft is larger than the diameter of the main shaft tube, and a clearance fit can be achieved between the two, so that the main shaft tube can rotate without moving up and down;

[0011] The main shaft tube is provided with a suction end at the position where the filter screen is passed, so that the residue on the filter screen can be adsorbed to facilitate its recovery and reprocessing.

[0012] Furthermore, the physical processing chamber also includes a solid shaft rod, and the solid shaft rod is located at the bottom end of the main shaft tube.

[0013] Furthermore, the chemical treatment chamber comprises a rotating shaft and a stirring plate, and the stirring plates are provided in a plurality and are evenly distributed on the side of the rotating shaft;

[0014] The upper and lower ends of the rotating shaft are fixedly connected to the solid shaft and the cleaning end respectively, and the operating point of the cleaning end is just located at the bottom surface of the chamber;

[0015] A brush is installed on the outer edge of the cleaning end, so that the cleaning is more comprehensive;

[0016] The stirring plate is arranged in an "8" shape and is vertically fixed on a solid shaft.

[0017] Furthermore, the chemical treatment chamber also includes a liquid output pipe, which is inclined downward at a certain angle to facilitate the output of the liquid.

[0018] A glue coating and developing machine based on the above-mentioned waste liquid discharge device includes an upper cover, a display screen, a liquid storage tank, and a main body. The upper cover is located on the left side of the top of the main body, the display screen is installed on the side panel of the main body and is located in the middle position, a liquid storage tank is installed in the inner cavity of the main body, and the cavity below the upper cover is the working area of ​​the equipment. The waste liquid generated by the developing machine operation enters the physical treatment bin through the waste liquid inlet pipe for waste liquid treatment.

[0019] Beneficial Effects

[0020] The utility model performs preliminary filtering treatment on the waste liquid through the filter screen, and the residue is retained on the filter screen. The residue on the filter screen can be adsorbed through the suction end of the main shaft tube at the position where the filter screen is passed, so as to facilitate its recovery and reprocessing; the filtered waste liquid is mixed with lime water with the help of a stirring plate to neutralize the acidic substances therein, thereby effectively reducing the corrosiveness of the waste liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a structural schematic diagram of the utility model.

[0023] Figure 2 It is a structural schematic diagram of the waste liquid treatment equipment of the utility model.

[0024] Figure 3 It is a structural schematic diagram of the physical processing chamber of the utility model.

[0025] Figure 4 It is a structural schematic diagram of the cleaning end of the utility model.

[0026] Figure 5 It is a structural schematic diagram of the glue coating and developing machine of the utility model. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the utility model for which protection is sought, but merely represents the selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0028] In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0029] Reference Figure 1-Figure 5 As shown, a waste liquid discharge device comprises an external connection terminal 1 and a waste liquid treatment device 2, wherein the external connection terminal 1 is arranged at the middle position of the top of the waste liquid treatment device 2, and the external connection terminal 1 is connected to the internal structure of the waste liquid treatment device 2;

[0030] The waste liquid treatment equipment 2 is set up in a truncated cone shape.

[0031] Furthermore, the waste liquid treatment equipment 2 comprises a physical treatment chamber 21 and a chemical treatment chamber 23, wherein the physical treatment chamber 21 and the chemical treatment chamber 23 are located in the inner cavity of the equipment in an upper and lower structure, and the physical treatment chamber 21 and the chemical treatment chamber 23 can communicate with each other;

[0032] Lime water is provided in the chemical treatment chamber 23 so as to neutralize the acidic substances in the filtered waste liquid.

[0033] A waste liquid inlet pipe 22 is provided on the inner wall of the physical treatment chamber 21, and the pipe is a one-way flow pipe.

[0034] Furthermore, the physical processing chamber 21 comprises a main shaft tube 00 and a filter 03, the main shaft tube 00 is located in the center of the chamber, and the top of the main shaft tube 00 is connected to the external connection end 1, and the bottom of the main shaft tube 00 passes through the filter 03;

[0035] The filter screen 03 is hemispherical, and a positioning shaft 01 is fixedly installed in the middle of the bottom of the filter screen 03;

[0036] The waste liquid generated by the development equipment operation enters the physical processing chamber 21 through the waste liquid inlet pipe 22. After the waste liquid is filtered through the filter screen 03, the operating residue in the waste liquid is retained on the filter screen 03. When the spindle tube 00 rotates, the residue retained on the filter screen 03 is sucked in for easy recycling and reprocessing.

[0037] The diameter of the positioning shaft 01 is larger than the diameter of the main shaft tube 00, and a clearance fit can be achieved between the two, so that the main shaft tube 00 can rotate without moving up and down;

[0038] The main shaft tube 00 is provided with a suction end at the position where it passes through the filter screen 03, which can absorb the residue on the filter screen 03 for easy recovery and reprocessing.

[0039] Furthermore, the physical processing chamber 21 also includes a solid shaft rod 02 , and the solid shaft rod 02 is located at the bottom end of the main shaft tube 00 .

[0040] Furthermore, the chemical treatment chamber 23 comprises a rotating shaft 53 and a stirring plate 54, wherein the stirring plates 54 are provided in a plurality and are evenly distributed on the side of the rotating shaft 53;

[0041] The upper and lower ends of the rotating shaft 53 are fixedly connected to the solid shaft rod 02 and the cleaning end 52 respectively, and the operating point of the cleaning end 52 is just located at the bottom surface of the chamber; the rotating shaft 53 rotates under the action of the main shaft tube 00, and during the rotation, the stirring plate 54 rotates and stirs and mixes the filtered waste liquid with the lime water in the chemical treatment chamber 23, so that the acidic substances in the waste liquid can be neutralized, and the bottom precipitation can be effectively prevented during the rotation of the cleaning end 52.

[0042] A brush 521 is installed on the outer edge of the cleaning end 52 to provide a more comprehensive sweep; the stirring plate 54 is arranged in an "8" shape and is vertically fixed on the solid shaft 02.

[0043] Furthermore, the chemical treatment chamber 23 also includes a liquid output pipe 51, and the liquid output pipe 51 is inclined downward at a certain angle to facilitate the output of the liquid.

[0044] A glue coating developer based on the above-mentioned waste liquid discharge device includes an upper cover 31, a display screen 32, a liquid storage tank 33, and a main body 34. The upper cover 31 is located on the left side of the top of the main body 34. The display screen 32 is installed on the side panel of the main body 34 and is located in the middle position. The liquid storage tank 33 is installed in the inner cavity of the main body 34. The cavity below the upper cover 31 is the working area of ​​the equipment. The waste liquid generated by the developer operation enters the physical processing chamber 21 through the waste liquid inlet pipe 22 for waste liquid treatment.

[0045] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A waste liquid discharge device, characterized in that: It comprises an external connection end (1) and a waste liquid treatment device (2), wherein the external connection end (1) is arranged at the middle position of the top of the waste liquid treatment device (2), and the external connection end (1) is connected to the internal structure of the waste liquid treatment device (2); The waste liquid treatment equipment (2) is constructed in a truncated cone shape; The waste liquid treatment equipment (2) comprises a physical treatment chamber (21) and a chemical treatment chamber (23), wherein the physical treatment chamber (21) and the chemical treatment chamber (23) are located in an inner cavity of the equipment in an upper and lower structure, and the physical treatment chamber (21) and the chemical treatment chamber (23) are communicable with each other; A waste liquid inlet pipe (22) is provided on the inner wall of the physical treatment chamber (21), and the pipe is a one-way flow pipe.

2. The waste liquid discharge device according to claim 1, characterized in that: The physical processing chamber (21) comprises a main shaft tube (00) and a filter screen (03); the main shaft tube (00) is located at the center of the chamber cavity, and the top end of the main shaft tube (00) is connected to the external connection end (1), and the bottom of the main shaft tube (00) passes through the filter screen (03); The filter screen (03) is formed in a hemispherical shape, and a positioning shaft (01) is fixedly installed at the middle position of the bottom of the filter screen (03); The diameter of the positioning shaft (01) is greater than the diameter of the main shaft tube (00), and a clearance fit can be achieved between the two, so that the main shaft tube (00) can rotate without moving up and down; The main shaft tube (00) is provided with a suction end at the position where it passes through the filter screen (03), so that the residue on the filter screen (03) can be adsorbed to facilitate its recovery and reprocessing.

3. The waste liquid discharge device according to claim 2, characterized in that: The physical processing chamber (21) further comprises a solid shaft rod (02), and the solid shaft rod (02) is located at the bottom end of the main shaft tube (00).

4. The waste liquid discharge device according to claim 1, characterized in that: The chemical treatment chamber (23) comprises a rotating shaft (53) and a stirring plate (54); a plurality of stirring plates (54) are provided and are evenly distributed on the side of the rotating shaft (53); The upper and lower ends of the rotating shaft (53) are respectively fixedly connected to the solid shaft (02) and the cleaning end (52), and the operating point of the cleaning end (52) is just located on the bottom surface of the chamber; A brush (521) is installed on the outer edge of the cleaning end (52), so that the cleaning is more comprehensive. The stirring plate (54) is arranged in an "8" shape and is vertically fixed on the solid shaft (02).

5. The waste liquid discharge device according to claim 4, characterized in that: The chemical treatment chamber (23) further comprises a liquid output pipe (51), and the liquid output pipe (51) is inclined downward at a certain angle.

6. A coating and developing machine based on the waste liquid discharge device according to any one of claims 1 to 5, characterized in that: The device comprises an upper cover (31), a display screen (32), a liquid storage tank (33), and a main body (34); the upper cover (31) is located on the left side of the top of the main body (34); the display screen (32) is mounted on a side panel of the main body (34) and is located in the middle; a liquid storage tank (33) is mounted in the inner cavity of the main body (34); the cavity below the upper cover (31) is the operating area of ​​the device; waste liquid generated by the developer operation enters the physical processing chamber (21) through the waste liquid inlet pipe (22) for waste liquid treatment.

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