Feeding device of single crystal furnace

Abstract

The utility model relates to the technical field of monocrystalline silicon production equipment, and provides a feeding device of a single crystal furnace, which comprises a stock bin, a feeding device and a feeding device, the material conveying pipe is arranged below the material bin and is used for conveying the silicon material into a crucible in the single crystal furnace; wherein a material conveying guide wheel with a plurality of material grids is arranged between a discharging opening of the material bin and a feeding opening of the material conveying pipe, and the material conveying guide wheel is externally connected with a motor with a frequency converter; and through driving of the motor, the material conveying guide wheel can rotate anticlockwise, so that each material grid is provided with the discharging opening in an upper bearing manner and is connected with the feeding opening in a lower connecting manner. The output rotating speed of the motor is controlled through the frequency converter so as to achieve the purpose of controlling the rotating speed of the material conveying guide wheel, so that each material grid can feed quantitative silicon materials into the material conveying pipe, the feeding speed is accurately controlled, stabilized and unified, the feeding accuracy and continuity are improved, and then the requirements of OCR and CCZ crystal pulling processes are met.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production equipment, in particular to a feeding device for a single crystal furnace. Background Art

[0002] In order to reduce the production cost of monocrystalline silicon and improve the quality of crystal rods, industry technicians have developed two crystal pulling processes, OCR and CCZ (Continuous Czocharlski), after a large number of experiments and data verification.

[0003] When the above two processes are used to pull single crystal silicon rods, a feeding mechanism is usually added outside the single crystal furnace to continuously add solid silicon material into the crucible of the single crystal furnace while maintaining crystal pulling, thereby ensuring continuous crystal pulling.

[0004] At present, different manufacturers have designed various feeding mechanisms according to different application scenarios, either single-stage vibration or two-stage vibration. However, vibration feeding has large fluctuations and is difficult to control. Its feeding speed cannot be unified, and the feeding accuracy deviation is relatively large, which makes it difficult to meet the requirements of OCR and CCZ crystal pulling processes. Utility Model Content

[0005] In view of the shortcomings of the prior art, the utility model provides a feeding device for a single crystal furnace to solve the problems in the prior art that the vibration feeding has large fluctuations and is difficult to control, the feeding speed cannot be unified, the feeding accuracy deviation is relatively large, and it is difficult to meet the requirements of OCR and CCZ crystal pulling processes.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A feeding device for a single crystal furnace, comprising:

[0008] Silos for storing silicon materials; and

[0009] A material delivery pipe is provided below the material bin and is used to deliver silicon material to the crucible in the single crystal furnace;

[0010] Among them, a feed guide wheel with multiple material grids is provided between the discharge port of the silo and the feed port of the feed pipe, and the feed guide wheel is externally connected to a motor with a frequency converter; through the drive of the motor, the feed guide wheel can rotate counterclockwise so that each of the material grids supports the discharge port above and is connected to the feed port below.

[0011] In one embodiment disclosed in the present application, a vibrator is installed on the outer side wall of the feed pipe corresponding to the lower side of the feed inlet.

[0012] In one embodiment disclosed in the present application, the vibrator is a single-stage vibrator.

[0013] In one embodiment disclosed in the present application, the feed guide wheel comprises a shell with an inlet and an outlet and a wheel body rotatably arranged inside the shell, the shell inlet is sealed and docked with the feed port, the shell outlet is sealed and docked with the feed port through a soft connection, and the rotating shaft of the wheel body passes through the shell and is connected to the output shaft of the motor;

[0014] A plurality of L-shaped partitions are arranged on the wheel body around its rotating shaft, and the plurality of L-shaped partitions are evenly distributed around the circumference to form a plurality of the above-mentioned material grids.

[0015] In one embodiment disclosed in the present application, each of the material grids is lined with a polytetrafluoroethylene plate.

[0016] In one embodiment disclosed in the present application, there are 10 material grids evenly distributed around the circumference of the rotating axis of the wheel body.

[0017] In one embodiment disclosed in the present application, the feed guide wheel is rotatably disposed directly below the discharge port and is located to the upper left of the feed port.

[0018] In one embodiment disclosed in the present application, the feed opening and the feed opening are both rectangular structures;

[0019] Wherein, the feed discharge port is sealedly connected to the shell inlet of the feed guide wheel through a cavity containing an arc-shaped baffle.

[0020] Compared with the prior art, the beneficial effects of the utility model are:

[0021] 1. The output speed of the motor is controlled by a frequency converter to achieve the purpose of controlling the rotation speed of the feed guide wheel, so that each material grid can feed a certain amount of silicon material into the feed pipe, thereby accurately controlling and stabilizing the uniform feeding rate, improving the accuracy and continuity of feeding, and thus meeting the needs of OCR and CCZ crystal pulling processes.

[0022] 2. The vibrator can vibrate the silicon material at the feed inlet to avoid clogging the pipeline, and at the same time enable the silicon material to continue to move, further improving the continuity of feeding. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0025] Figure 2 It is a schematic diagram of the main cross-sectional structure of the utility model;

[0026] Figure 3 It is a schematic diagram of the three-dimensional structure of the feed guide wheel (wheel body). DETAILED DESCRIPTION

[0027] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0028] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0030] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0032] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0033] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0034] See also Figure 1 to Figure 3 As shown, the utility model provides a feeding device for a single crystal furnace, comprising:

[0035] A material bin 10, used for containing silicon materials (such as silicon blocks); and

[0036] The material delivery pipe 20 is provided below the material bin 10 and is used to deliver silicon material to the crucible in the single crystal furnace;

[0037] Among them, a feed guide wheel 30 with multiple material grids is provided between the discharge port 11 of the silo 10 and the feed port 21 of the feed pipe 20, and the feed guide wheel 30 is externally connected to a motor with a frequency converter (not shown in the figure); driven by the motor, the feed guide wheel 30 can rotate counterclockwise so that each material grid supports the discharge port 11 at the top and is connected to the feed port 21 at the bottom.

[0038] Specifically, the output speed of the motor is controlled by a frequency converter to achieve the purpose of controlling the rotation speed of the feed guide wheel 30, so that each material grid can deliver a certain amount of silicon material into the feed pipe 20, thereby accurately controlling and stabilizing the uniform feeding rate, improving the accuracy and continuity of feeding, and thus meeting the requirements of OCR and CCZ crystal pulling processes.

[0039] A vibrator 40 is installed on the outer wall of the corresponding delivery pipe 20 below the feed inlet 21. The vibrator 40 can vibrate the silicon material at the feed inlet 21 to avoid clogging the pipe, and at the same time can make the silicon material continue to move, further improving the continuity of feeding.

[0040] In this embodiment, the vibrator 40 is a single-stage vibrator.

[0041] The feeding guide wheel 30 includes a housing with an inlet and an outlet (not shown in the figure) and a wheel body 31 rotatably arranged inside the housing. The housing inlet is sealed and connected to the discharge port 11, and the housing outlet is sealed and connected to the feed port 21 through a flexible connection. The rotating shaft (not shown in the figure) of the wheel body 31 passes through the housing and is connected to the output shaft of the motor; see Figure 2 and Figure 3 As shown, a plurality of L-shaped baffles 32 are arranged around the rotating axis of the wheel body 31, and the plurality of L-shaped baffles 32 are evenly distributed around the circumference to form a plurality of the above-mentioned material grids. The interval between the outer ends of each two adjacent L-shaped baffles 32 is the inlet and outlet of the material grid: when the material grid is directly below the discharge port 11, the silicon material enters the material grid; as the material feeding guide wheel 30 rotates, when the front material grid moves downward and has not reached the shell outlet, its L-shaped baffle 32 can prevent the silicon material from running out, and the silicon material of the rear material grid can continue to fall after rotating a certain angle due to the obstruction of its corresponding L-shaped baffle 32. In this way, under the premise of a certain rotation speed of the material feeding guide wheel 30, it can be ensured that the silicon material entering each material grid is quantitative; when the front material grid moves to directly above the feed port 21, its corresponding L-shaped baffle 32 no longer plays a blocking role, and the silicon material rolls into the material feeding pipe 20 under its own gravity.

[0042] In order to reduce or avoid the silicon material from being contaminated, each material grid is lined with a polytetrafluoroethylene plate. Specifically, the polytetrafluoroethylene plate is connected to the surrounding wall surface in each material grid in the form of bonding or screws.

[0043] In this embodiment, there are 10 material grids evenly distributed around the circumference of the rotation axis of the wheel body 31 .

[0044] See also Figure 2 As shown, the material conveying guide wheel 30 is rotatably arranged just below the discharge port 11 and located at the upper left of the feed port 21. In this way, a covered observation port can be arranged at the feed port 21 to facilitate the operator to open the cover during inspection to check whether the silicon material is blocked, so as to respond in time.

[0045] See also Figure 1 As shown, the material discharge port 11 and the material feed port 21 are both rectangular structures; wherein the material discharge port 11 is sealedly connected to the shell inlet of the material conveying guide wheel 30 through a cavity 12 containing an arc-shaped baffle.

[0046] The above embodiments are only preferred embodiments of the present utility model and are not limitations on the technical solutions of the present utility model. Any technical solution that can be implemented on the basis of the above embodiments without creative work should be deemed to fall within the scope of protection of the patent of the present utility model.

Claims

1. A feeding device for a single crystal furnace, characterized in that: include: Silo, used to hold silicon materials; and A material delivery pipe is provided below the material bin and is used to deliver silicon material to the crucible in the single crystal furnace; Among them, a feed guide wheel with multiple material grids is provided between the discharge port of the silo and the feed port of the feed pipe, and the feed guide wheel is externally connected to a motor with a frequency converter; through the drive of the motor, the feed guide wheel can rotate counterclockwise so that each of the material grids supports the discharge port above and is connected to the feed port below.

2. The feeding device for a single crystal furnace according to claim 1, characterized in that: A vibrator is installed on the outer side wall of the conveying pipe corresponding to the lower side of the feed inlet.

3. The feeding device for a single crystal furnace according to claim 2, characterized in that: The vibrator is a single-stage vibrator.

4. The feeding device for a single crystal furnace according to any one of claims 1 to 3, characterized in that: The feed guide wheel comprises a shell with an inlet and an outlet and a wheel body rotatably arranged inside the shell, the shell inlet is sealed and docked with the discharge port, the shell outlet is sealed and docked with the feed port through a soft connection, and the rotating shaft of the wheel body passes through the shell and is connected to the output shaft of the motor; A plurality of L-shaped partitions are arranged on the wheel body around its rotating shaft, and the plurality of L-shaped partitions are evenly distributed around the circumference to form a plurality of the above-mentioned material grids.

5. The feeding device for a single crystal furnace according to claim 4, characterized in that: Each of the material grids is lined with a polytetrafluoroethylene plate.

6. The feeding device for a single crystal furnace according to claim 5, characterized in that: There are 10 material grids evenly distributed around the circumference of the rotating shaft of the wheel body.

7. The feeding device for a single crystal furnace according to claim 5 or 6, characterized in that: The material conveying guide wheel is rotatably arranged just below the material discharge port and is located at the upper left of the material feed port.

8. The feeding device for a single crystal furnace according to claim 7, characterized in that: The feed opening and the feed opening are both rectangular in structure; Wherein, the feed discharge port is sealedly connected to the shell inlet of the feed guide wheel through a cavity containing an arc-shaped baffle.

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