Split superconducting device and monocrystalline silicon production equipment

Abstract

According to the split type superconducting device and the monocrystalline silicon production equipment provided by the utility model, in the process of replacing, transforming or maintaining the monocrystalline silicon production equipment, only the first opening and closing piece and the second opening and closing piece of the split type superconducting device need to be opened and separated; the first opening and closing piece and the second opening and closing piece are enclosed on the single crystal furnace from the two sides of the single crystal furnace until an annular hollow sleeve formed by butting and splicing the first opening and closing piece and the second opening and closing piece sleeves the periphery of the single crystal furnace; and the annular hollow sleeve formed by fastening, connecting and splicing the single crystal furnace is firmly sleeved on the single crystal furnace through the fastening assembly, so that the single crystal furnace can be quickly refitted. Due to the fact that the split type superconducting device adopts the split assembly structure design, when the superconducting device is additionally arranged on the single crystal furnace, maintained or replaced, the superconducting device is convenient to mount and dismount, the single crystal furnace does not need to be lifted out of the top of the superconducting device, and the difficulty of replacement, transformation or maintenance of single crystal silicon production equipment is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production equipment, in particular to a split-type superconducting device and single crystal silicon production equipment. Background Art

[0002] Since the P-type single crystal silicon production equipment for producing P-type single crystal silicon cannot meet the manufacturing demand for N-type single crystal silicon, it is necessary to modify the existing P-type single crystal silicon production equipment. At present, in the process of converting the P-type single crystal silicon production equipment into the N-type single crystal silicon production equipment that can produce N-type single crystal silicon, it is generally necessary to install a corresponding superconducting device so that the oxygen content of the single crystal silicon produced by the single crystal silicon production equipment is reduced from the original oxygen content greater than 11ppm to the low oxygen range of less than 7ppm. However, for medium and large single crystal silicon production equipment, it is necessary to frequently replace, modify or maintain the single crystal furnace. It is usually necessary to use large lifting equipment to lift the single crystal furnace from the top of the superconducting device to achieve the replacement, modification or maintenance of the single crystal silicon production equipment, which is not convenient for the replacement, modification or maintenance of the single crystal silicon production equipment. Utility Model Content

[0003] The purpose of the embodiment of the utility model is to provide a split-type superconducting device to solve the technical problem in the prior art that during the process of replacing, modifying or maintaining single crystal silicon production equipment, it is necessary to use large-scale lifting equipment to lift the single crystal furnace out from the top of the superconducting device, which is inconvenient for replacing, modifying or maintaining the single crystal silicon production equipment.

[0004] To achieve the above object, the technical solution adopted by the utility model is: to provide a split superconducting device for use in single crystal silicon production equipment, the split superconducting device comprising:

[0005] A first opening and closing member is in a semi-cylindrical shape, and a first hollow cavity is formed inside the first opening and closing member;

[0006] The second opening and closing member is in a semi-cylindrical shape, and a second hollow cavity is formed inside the second opening and closing member.

[0007] a low-temperature refrigerator, used for providing a low-temperature environment suitable for the growth of single-crystal silicon crystals in the first hollow cavity and the second hollow cavity, the low-temperature refrigerator being connected to the first hollow cavity and the second hollow cavity respectively; and

[0008] a magnetic field generator, for generating a magnetic field covering the single crystal furnace, the magnetic field generator comprising a first superconducting coil disposed in the first hollow cavity and a second superconducting coil disposed in the second hollow cavity; and

[0009] A fastening assembly, used for fastening and connecting the first opening and closing member and the second opening and closing member;

[0010] Among them, when the first opening and closing piece and the second opening and closing piece are connected, they can be assembled to form an annular hollow sleeve, and the first hollow cavity and the second hollow cavity that are independent of each other together constitute the containing cavity of the annular hollow sleeve; when the annular hollow sleeve is mounted on the outer periphery of the single crystal furnace, the fastening assembly fastens and connects the first opening and closing piece and the second opening and closing piece to realize rapid modification of the single crystal furnace.

[0011] Furthermore, a first vacuum container having a first vacuum cavity is provided in the first hollow cavity, and the first superconducting coil is accommodated in the first vacuum cavity.

[0012] Furthermore, the outer wall of the first opening and closing member constitutes a primary heat shielding layer, and the outer wall of the first vacuum container constitutes a secondary heat shielding layer.

[0013] Furthermore, a first heat-insulating space is provided between an outer wall of the first vacuum container and an inner wall of the first opening and closing member, and the first heat-insulating space is a vacuum.

[0014] Furthermore, the magnetic field generator includes a first low-temperature refrigerator disposed on the first opening and closing member, and the first low-temperature refrigerator is connected to the first vacuum chamber.

[0015] Furthermore, a second vacuum container having a second vacuum cavity is provided in the second hollow cavity, the second superconducting coil is accommodated in the second vacuum cavity, the outer wall of the second opening and closing piece constitutes a secondary thermal shielding layer, and the outer wall of the second vacuum container constitutes a secondary thermal shielding layer.

[0016] Furthermore, a second insulation space is provided between the outer wall of the second vacuum container and the inner wall of the second opening and closing piece, and the second insulation space is a vacuum. The magnetic field generator includes a second low-temperature refrigerator arranged on the second opening and closing piece, and the second low-temperature refrigerator is connected to the second vacuum cavity.

[0017] Furthermore, the fastening assembly includes two corresponding first connecting plates, two corresponding second connecting plates, at least one first bolt for fastening the two first connecting plates together, and at least one second bolt for fastening the two second connecting plates together, the two first connecting plates are respectively arranged on one side of the first opening and closing member and the second opening and closing member, and the two second connecting plates are respectively arranged on the other side of the first opening and closing member and the second opening and closing member.

[0018] Furthermore, the first superconducting coil and / or the second superconducting coil is a saddle-type superconducting coil or a four-coil superconducting coil.

[0019] Another purpose of an embodiment of the utility model is to provide a single crystal silicon production equipment to solve the technical problem in the prior art that during the process of replacing, modifying or maintaining the single crystal furnace, the single crystal furnace needs to be lifted out from the top of the superconducting device by a large lifting equipment, which is inconvenient for replacing, modifying or maintaining the single crystal silicon production equipment.

[0020] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: to provide a single crystal silicon production equipment, including the split-type superconducting device in any of the above-mentioned solutions.

[0021] Compared with the prior art, the above one or more technical solutions in the embodiments of the present invention have at least one of the following beneficial effects:

[0022] In the split superconducting device and single crystal silicon production equipment in the embodiment of the utility model, during the process of replacing, modifying or maintaining the single crystal silicon production equipment, it is only necessary to open and separate the first opening and closing member and the second opening and closing member of the split superconducting device, so that the first opening and closing member and the second opening and closing member are enclosed on the single crystal furnace from both sides, until the annular hollow sleeve formed by the first opening and closing member docking and splicing with the second opening and closing member is sleeved on the outer periphery of the single crystal furnace, and then the annular hollow sleeve formed by splicing is fastened and connected by a fastening assembly to firmly sleeve the annular hollow sleeve on the single crystal furnace, so that the single crystal furnace can be quickly modified. Since the split superconducting device adopts a split assembly structure design, when the superconducting device is added, repaired or replaced on the single crystal furnace, the convenience of installation and disassembly of the superconducting device is improved, so that the single crystal furnace does not need to be lifted out from the top of the superconducting device by a large lifting device, the difficulty of replacing, modifying or maintaining the single crystal silicon production equipment is reduced, and the replacement, modification or maintenance of the single crystal silicon production equipment is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0024] Figure 1 A schematic diagram of the three-dimensional structure of a split-type superconducting device provided in an embodiment of the utility model;

[0025] Figure 2 An assembly diagram of a split-type superconducting device and a single crystal furnace provided in an embodiment of the utility model;

[0026] Figure 3 for Figure 1 Schematic diagram of the cross-sectional structure along line AA;

[0027] Figure 4 for Figure 2 A schematic diagram of the top view of the structure of a split-type superconducting device mounted on a single crystal furnace;

[0028] Figure 5 for Figure 2 Schematic diagram of the three-dimensional structure of a split-type superconducting device assembled on a single crystal furnace.

[0029] Among them, the reference numerals in the figure are:

[0030] 1-first opening and closing member; 11-first hollow cavity; 12-first heat-insulating space;

[0031] 2-second opening and closing member; 21-second hollow cavity; 22-second heat-insulating space;

[0032] 3-fastening assembly; 31-first connecting plate; 32-first bolt; 33-second connecting plate; 34-second bolt;

[0033] 4-first superconducting coil; 5-second superconducting coil;

[0034] 6-first vacuum container; 61-first vacuum chamber;

[0035] 7-a second vacuum container; 71-a second vacuum chamber;

[0036] 8-single crystal furnace; 9-hanging lug;

[0037] 10 - a first low-temperature refrigerator; 20 - a second low-temperature refrigerator. DETAILED DESCRIPTION

[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] It should be noted that when an element is referred to as being "connected to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0040] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0041] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0042] Reference throughout the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, when the phrases "in one embodiment" or "in some embodiments" appear in various places throughout the specification, not all references are to the same embodiment. Furthermore, in one or more embodiments, the particular features, structures, or characteristics may be combined in any suitable manner.

[0043] Please also read Figures 1 to 5 The split-type superconducting device provided by the embodiment of the utility model is now described. Figure 1 , Figure 2 and Figure 3The split superconducting device provided by the embodiment of the utility model includes a first opening and closing piece 1, a second opening and closing piece 2, a cryogenic refrigerator, a magnetic field generator and a fastening assembly 3. The first opening and closing piece 1 is in a semi-cylindrical shape with a C-shaped cross section, and a first C-shaped hollow cavity 11 is formed inside the first opening and closing piece 1. The second opening and closing piece 2 is in a semi-cylindrical shape with a C-shaped cross section, and a second C-shaped hollow cavity 21 is formed inside the second opening and closing piece 2. The cryogenic refrigerator is used to provide a low-temperature environment suitable for the growth of single crystal silicon crystals in the first hollow cavity 11 and the second hollow cavity 21, and the cryogenic refrigerator is connected to the first hollow cavity 11 and the second hollow cavity 21 respectively. The magnetic field generator is used to generate a magnetic field covering the single crystal furnace 8, and the magnetic field generator includes a first superconducting coil 4 arranged in the first hollow cavity 11 and a second superconducting coil 5 arranged in the second hollow cavity 21. The fastening assembly 3 is used to fasten the first opening and closing member 1 and the second opening and closing member 2, so that the first opening and closing member 1 and the second opening and closing member 2 can be docked and assembled to form an annular hollow sleeve. When the first opening and closing member 1 and the second opening and closing member 2 are docked and assembled to form an annular hollow sleeve, the mutually independent first hollow cavity 11 and the second hollow cavity 21 together constitute the cavity of the annular hollow sleeve. When the annular hollow sleeve is sleeved on the outer periphery of the single crystal furnace 8, the fastening assembly 3 fastens the first opening and closing member 1 and the second opening and closing member 2, so that the annular hollow sleeve formed by docking and assembling the first opening and closing member 1 and the second opening and closing member 2 is sleeved on the single crystal furnace 8, so as to realize the rapid modification of the single crystal furnace 8. When the superconducting device needs to be replaced, since the split-type superconducting device adopts a split assembly structure design and is convenient for disassembly, it is only necessary to release the fastening connection effect of the fastening assembly 3 on the annular hollow sleeve, so that the first opening and closing member 1 and the second opening and closing member 2 can be opened and separated and quickly separated from the single crystal furnace 8.

[0044] Compared with the prior art, the split-type superconducting device provided by the embodiment of the utility model only needs to open and separate the first opening and closing piece 1 and the second opening and closing piece 2 of the split-type superconducting device during the process of replacing, modifying or maintaining the single crystal silicon production equipment, so that the first opening and closing piece 1 and the second opening and closing piece 2 are enclosed on the single crystal furnace 8 from both sides, until the annular hollow sleeve formed by the first opening and closing piece 1 and the second opening and closing piece 2 are connected and assembled to be sleeved on the outer periphery of the single crystal furnace 8, and then the annular hollow sleeve formed by the assembly is fastened and connected by the fastening assembly 3 to firmly sleeve the annular hollow sleeve on the single crystal furnace 8, thereby enabling the single crystal furnace 8 to be quickly modified. Since the split-type superconducting device adopts a split assembly structure design, it is convenient to install and disassemble the superconducting device when adding, repairing or replacing the superconducting device on the single crystal furnace 8, so there is no need to lift the single crystal furnace 8 from the top of the superconducting device by large lifting equipment, thereby reducing the difficulty of replacing, modifying or maintaining the single crystal silicon production equipment, and facilitating the replacement, modification or maintenance of the single crystal silicon production equipment.

[0045] Please refer to Figure 3In some embodiments, a first vacuum container 6 having a first vacuum cavity 61 is provided in the first hollow cavity 11, and the first superconducting coil 4 is accommodated in the first vacuum cavity 61. In this embodiment, the first hollow cavity 11 inside the first opening and closing member 1 provides a first vacuum environment with a first temperature, and the first vacuum cavity 61 inside the first vacuum container 6 provides a second vacuum environment with a second temperature. The first temperature is the same as the second temperature or decreases successively. When the first temperature and the second temperature decrease successively, a two-stage temperature control method is adopted to maintain the first superconducting coil 4 inside the first opening and closing member 1 in a superconducting state.

[0046] Please refer to Figure 1 and Figure 3 In some embodiments, the outer wall of the first opening and closing member 1 constitutes a primary heat shielding layer, and the outer wall of the first vacuum container 6 constitutes a secondary heat shielding layer. In this embodiment, the outer wall of the first opening and closing member 1 and the outer wall of the first vacuum container 6 constitute a two-level heat shielding layer, which can well reflect the heat radiation from the periphery of the first opening and closing member 1 and the periphery of the first vacuum container 6, and reduce the influence of the radiation heat of the high temperature outside on the first superconducting coil 4 in the first vacuum container 6. It should be noted that the first opening and closing member 1 and the first vacuum container 6 are made of heat-insulating materials.

[0047] Please refer to Figure 3 In some of the embodiments, there is a first thermal insulation space 12 between the outer wall of the first vacuum container 6 and the inner wall of the first opening and closing member 1, and the first thermal insulation space 12 is a vacuum, which further improves the thermal insulation effect and helps to reduce the impact of the radiation heat of the external high temperature on the first superconducting coil 4 in the first vacuum container 6.

[0048] Please refer to Figure 1 , Figure 3 and Figure 4 In some embodiments, the magnetic field generator includes a first low-temperature refrigerator 10 arranged on the first opening and closing member 1 and a second low-temperature refrigerator 20 arranged on the second opening and closing member 2, the first low-temperature refrigerator 10 is connected to the first vacuum chamber 61, and the second low-temperature refrigerator 20 is connected to the second vacuum chamber 71.

[0049] Please refer to Figure 3In some embodiments, a second vacuum container 7 having a second vacuum cavity 71 is further provided in the second hollow cavity 21, the second superconducting coil 5 is accommodated in the second vacuum cavity 71, and the outer wall of the second opening and closing member 2 constitutes a secondary heat shielding layer. In this embodiment, the second hollow cavity 21 inside the second opening and closing member 2 provides a first vacuum environment having a first temperature, and the second vacuum cavity 71 inside the second vacuum container 7 provides a second vacuum environment having a second temperature, the first temperature is the same as the second temperature or decreases successively, and when the first temperature and the second temperature decrease successively, a two-stage temperature control method is adopted to maintain the first superconducting coil 4 inside the first opening and closing member 1 in a superconducting state.

[0050] Please refer to Figure 3 In some embodiments, the outer wall of the second vacuum container 7 constitutes a secondary heat shielding layer. In this embodiment, the outer wall of the second opening and closing member 2 and the outer wall of the second vacuum container 7 constitute a two-level heat shielding layer, which can well reflect the heat radiation from the periphery of the second opening and closing member 2 and the periphery of the second vacuum container 7, and reduce the influence of the radiation heat of the high temperature outside the second superconducting coil 5 in the second vacuum container 7. It should be noted that the second opening and closing member 2 and the second vacuum container 7 are made of heat-insulating materials.

[0051] Please refer to Figure 3 In some embodiments, there is a second insulation space 22 between the outer wall of the second vacuum container 7 and the inner wall of the second opening and closing member 2, and the second insulation space 22 is vacuum, which is beneficial to reduce the impact of the second superconducting coil 5 in the second vacuum container 7 with the radiation heat of the external high temperature.

[0052] Please refer to Figure 1 , Figure 2 and Figure 4In some embodiments, the fastening assembly 3 includes two first connecting plates 31, two second connecting plates 33, at least one first bolt 32 for fastening the two first connecting plates 31, and at least one second bolt 34 for fastening the two second connecting plates 33. The two first connecting plates 31 are respectively arranged on one side of the first opening and closing member 1 and the second opening and closing member 2, and the two second connecting plates 33 are respectively arranged on the other side of the first opening and closing member 1 and the second opening and closing member 2. When installing the superconducting device, it is only necessary to fasten the two first connecting plates 31 by at least one first bolt 32 and fasten the two second connecting plates 33 by at least one second bolt 34, so that the first opening and closing member 1 and the second opening and closing member 2 can be docked, so that the first opening and closing member and the second opening and closing member 2 are assembled to form an annular hollow sleeve sleeve that can be mounted on the single crystal furnace 8. When disassembling the superconducting device, it is only necessary to remove the first bolt 32 from the two first connecting plates 31 and the second bolt 34 from the two second connecting plates 33, so as to release the fastening connection function of the fastening assembly 3 on the annular hollow sleeve, and the first opening and closing member 1 and the second opening and closing member 2 can be opened and separated and quickly separated from the single crystal furnace 8. In this way, since the split-type superconducting device adopts a split assembly structure design, when the superconducting device is installed, repaired or replaced on the single crystal furnace 8, the installation and removal of the superconducting device is convenient, so that the single crystal furnace 8 does not need to be lifted out from the top of the superconducting device by large lifting equipment, which reduces the difficulty of replacing, modifying or maintaining the single crystal silicon production equipment, and facilitates the replacement, modification or maintenance of the single crystal silicon production equipment.

[0053] Please refer to Figure 5 In some of the embodiments, in order to enhance the magnetic field strength and improve the uniformity and stability of the magnetic field, the first superconducting coil 4 and / or the second superconducting coil 5 is a saddle-type superconducting coil or a four-coil superconducting coil.

[0054] Please refer to Figure 1 , Figure 4 and Figure 5 In some of the embodiments, a plurality of lifting ears 9 are provided on the first opening and closing member 1 and / or the second opening and closing member 2, and the plurality of lifting ears 9 are evenly spaced along the axial direction of the first opening and closing member 1 and / or the second opening and closing member 2, so as to facilitate lifting the first opening and closing member 1 and / or the second opening and closing member 2 by lifting equipment.

[0055] The utility model also provides a single crystal silicon production device, including the split superconducting device provided in any of the above embodiments. Since the single crystal silicon production device has all the technical features of the split superconducting device provided in any of the above embodiments, the single crystal silicon production device has the same technical effects as the split superconducting device provided in any of the above embodiments, and no further description is given here.

[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A split superconducting device for use in single crystal silicon production equipment, characterized in that: The split-type superconducting device comprises: A first opening and closing member is in a semi-cylindrical shape, and a first hollow cavity is formed inside the first opening and closing member; The second opening and closing member is in a semi-cylindrical shape, and a second hollow cavity is formed inside the second opening and closing member. a low-temperature refrigerator, used for providing a low-temperature environment suitable for the growth of single-crystal silicon crystals in the first hollow cavity and the second hollow cavity, the low-temperature refrigerator being connected to the first hollow cavity and the second hollow cavity respectively; and a magnetic field generator, for generating a magnetic field covering the single crystal furnace, the magnetic field generator comprising a first superconducting coil disposed in the first hollow cavity and a second superconducting coil disposed in the second hollow cavity; and A fastening assembly, used for fastening and connecting the first opening and closing member and the second opening and closing member; Among them, when the first opening and closing piece and the second opening and closing piece are connected, they can be assembled to form an annular hollow sleeve, and the first hollow cavity and the second hollow cavity that are independent of each other together constitute the containing cavity of the annular hollow sleeve; when the annular hollow sleeve is mounted on the outer periphery of the single crystal furnace, the fastening assembly fastens and connects the first opening and closing piece and the second opening and closing piece to realize rapid modification of the single crystal furnace.

2. The split-type superconducting device according to claim 1, characterized in that: A first vacuum container having a first vacuum cavity is disposed in the first hollow cavity, and the first superconducting coil is accommodated in the first vacuum cavity.

3. The split-type superconducting device according to claim 2, characterized in that: The outer wall of the first opening and closing member constitutes a primary heat shielding layer, and the outer wall of the first vacuum container constitutes a secondary heat shielding layer.

4. The split-type superconducting device according to claim 2, characterized in that: A first heat-insulating space is defined between the outer wall of the first vacuum container and the inner wall of the first opening and closing member, and the first heat-insulating space is vacuum.

5. The split-type superconducting device according to claim 2, characterized in that: The magnetic field generator includes a first low-temperature refrigerator disposed on the first opening and closing member, and the first low-temperature refrigerator is connected to the first vacuum chamber.

6. The split-type superconducting device according to claim 1, characterized in that: A second vacuum container having a second vacuum cavity is also provided in the second hollow cavity, the second superconducting coil is accommodated in the second vacuum cavity, the outer wall of the second opening and closing piece constitutes a secondary heat shielding layer, and the outer wall of the second vacuum container constitutes a secondary heat shielding layer.

7. The split-type superconducting device according to claim 6, characterized in that: A second insulation space is provided between the outer wall of the second vacuum container and the inner wall of the second opening and closing piece, and the second insulation space is a vacuum. The magnetic field generator comprises a second low-temperature refrigerator arranged on the second opening and closing piece, and the second low-temperature refrigerator is connected to the second vacuum cavity.

8. The split-type superconducting device according to any one of claims 1 to 7, characterized in that: The fastening assembly includes two corresponding first connecting plates, two corresponding second connecting plates, at least one first bolt for fastening the two first connecting plates together, and at least one second bolt for fastening the two second connecting plates together. The two first connecting plates are respectively arranged on one side of the first opening and closing member and the second opening and closing member, and the two second connecting plates are respectively arranged on the other side of the first opening and closing member and the second opening and closing member.

9. The split-type superconducting device according to any one of claims 1 to 7, characterized in that: The first superconducting coil and / or the second superconducting coil is a saddle-type superconducting coil or a four-coil superconducting coil.

10. A single crystal silicon production device, characterized in that: The invention comprises a split-type superconducting device as claimed in any one of claims 1 to 9.

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