Silicon wafer tidying mechanism
By using servo motor drive and rubber ring synchronous belt drive in the silicon wafer regulation mechanism, combined with rubber-energy bearings, the problems of size limitations and high cost in the existing technology are solved, and high precision regularization and performance of multi-size silicon wafers are achieved. Automated production reduces the risk of caching.
Patent Information
- Application Number
- CN202420834163.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-22
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-04-22
AI Technical Summary
Existing silicon wafer regularization mechanisms can only process silicon wafers of specific sizes and cannot meet the requirements of silicon wafer regularization of multiple sizes, resulting in poor versatility and increased risk of trash materials.
A silicon wafer regularization mechanism including servo motor drive and rubber ring synchronous belt transmission is designed, and rubber-enclosed bearings are used to replace traditional belts and motor wheels to achieve automated production and multi-dimensional regularization of silicon wafers.
The accuracy of incoming materials conveyed by silicon wafers is improved, the risk of material is reduced, and the mechanism cost is greatly optimized by omitting motors and wheel sets.
Smart Images
Figure CN222300637U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon slice production, in particular to a silicon slice regularization mechanism. Background Art
[0002] Silicon wafers are the main material for producing photovoltaic products. At the same time, silicon wafers are also an important material for making integrated circuits. Through photolithography, ion implantation and other methods, various semiconductor devices can be made. They are widely used in aerospace, industry, agriculture and national defense. Silicon wafers are transported from the conveyor module. Before entering the key process (screen printing, silicon wafer buffering, silicon wafer baking, silicon wafer basket lifting, etc.), the silicon wafers need to be regulated. The general silicon wafer regulation mechanism is fixed on both sides of the conveyor belt. Therefore, it can only achieve the regulation of silicon wafers of a specific size, but cannot meet the regulation of silicon wafers of other sizes. Its versatility is poor. For this reason, we propose a silicon wafer regulation mechanism. Utility Model Content
[0003] In order to overcome the shortcomings of the prior art, the utility model provides a silicon wafer aligning mechanism. The silicon wafers are conveyed from a conveying module and are aligning the silicon wafers before entering key processes (screen printing, silicon wafer caching, silicon wafer baking, silicon wafer basket lifting, etc.), thereby improving the conveying accuracy of incoming materials and reducing the risk of material jamming.
[0004] To solve the above technical problems, the utility model provides the following technical solutions: a silicon wafer regularization mechanism, comprising a base plate, a moving mechanism is provided on one side of the top of the base plate, and a synchronous mechanism is provided on the other side of the top of the base plate, the moving mechanism comprises a linear guide rail fixedly mounted on one side of the top of the base plate, both ends of the top of the linear guide rail are slidably provided with slider mounting seats, the side surfaces of the two slider mounting seats away from each other are fixedly connected with side vertical plates, and the top of the side vertical plates is fixedly connected with a crossbeam, the synchronous mechanism comprises a synchronous belt on one side of the moving mechanism, a synchronous wheel and a synchronous wheel idler are respectively installed at two ends of the inner side of the synchronous belt, a motor mounting seat is provided on one side of the synchronous wheel, a servo motor is fixedly installed on one side of the motor mounting seat, the output shaft of the servo motor is fixedly connected to one side of the synchronous wheel, and clamping blocks are respectively fixedly mounted on one side surface of the top of the synchronous belt and the other side surface of the bottom, and the two clamping blocks are respectively fixedly connected to the two slider mounting seats.
[0005] The mechanism is driven by a servo motor and a rubber ring synchronous belt. The crossbeams move toward the middle synchronously, and each of the two crossbeams is equipped with a rubber-coated bearing. It is mainly used for silicon wafers, which can regulate the movements and realize automated production. The silicon wafers are transported from the conveying module, and before entering the key process, they are screen printed, cached, baked, and lifted into position by a silicon wafer basket. This regulates the silicon wafers, improves the accuracy of conveying incoming materials, and reduces the risk of jamming.
[0006] As a preferred technical solution of the utility model, rubber-coated bearings are equidistantly installed on the top of the two beams, and there are three rubber-coated bearings on the top of the beams, which are located on the same axis. The regular parts on both sides of a general regularizing mechanism are often guided by belts, and often require a separate set of motors and wheel sets, which have a complex structure and increase the overall cost of the mechanism. The present device installs a rubber-coated bearing on each of the two beams, and its effect is the same as that of two belts. It only relies on the bearings themselves, omits the motor and wheel set, and greatly optimizes the cost of the mechanism.
[0007] As an optimal technical solution of the utility model, the motor mounting seat is fixedly installed on the top of the base plate, the inner side of the synchronous wheel idler is rotatably connected with a short shaft, and idler support blocks are symmetrically installed at both ends of the short shaft, the idler support blocks are fixedly installed on the base plate, and one side of the two idler support blocks is provided with a tensioning screw, and the surfaces of the two idler support blocks are provided with adjustment grooves, the two ends of the short shaft are respectively located on the inner sides of the two adjustment grooves, and one end of the tensioning screw is threadedly connected to the idler support block and is located on the inner side of the adjustment groove; it can be used for synchronous belt tensioning.
[0008] As an optimal technical solution of the utility model, a sensing sheet is provided at the bottom of one side of the slider mounting seat, a groove sensor is provided at the bottom of the sensing sheet, and the groove sensor is installed on the bottom plate. The bottom plate is provided with a groove sensor to confirm the final required size.
[0009] As a preferred technical solution of the utility model, the clamping block includes a synchronous belt lower pressure plate and an angle code, the synchronous belt lower pressure plate is fixedly connected to the slider mounting seat, and the two clamping blocks are distributed in a mirror image.
[0010] As a preferred technical solution of the utility model, the outer bottom of the beam is covered with a buffer block, and the cross-section of the buffer block is an L-shaped structure, which plays a protective buffering role.
[0011] As a preferred technical solution of the utility model, the slider mounting seat is fixedly connected to the synchronous belt through a clamping block; when the synchronous belt moves, the slider mounting seat can follow the movement.
[0012] Compared with the prior art, the utility model can achieve the following beneficial effects:
[0013] 1. The mechanism is driven by a servo motor and a rubber ring synchronous belt. The crossbeams move synchronously toward the middle, and each of the two crossbeams is equipped with a rubber-coated bearing. It is mainly used for silicon wafers, which can regulate the movements and realize automated production. The silicon wafers are transported from the conveying module. Before entering the key process, the silicon wafers are regulated to improve the accuracy of conveying incoming materials and reduce the risk of jamming.
[0014] 2. This device installs a rubber-coated bearing on each of the two beams, and its effect is the same as that of two belts. It only relies on the bearings themselves, omitting the motor and wheel set, greatly optimizing the mechanism cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a schematic diagram of the structure of an embodiment of the utility model;
[0016] Figure 2 It is a rear view structural schematic diagram of the utility model;
[0017] Figure 3 It is a side structural schematic diagram of the utility model.
[0018] Among them: 1. Base plate; 2. Linear guide; 3. Slider mounting seat; 4. Side plate; 5. Crossbeam; 6. Rubber-coated bearing; 7. Servo motor; 8. Motor mounting seat; 9. Synchronous wheel; 10. Synchronous wheel idler; 11. Synchronous belt; 12. Idle wheel support block; 13. Short shaft; 15. Synchronous belt lower pressure plate; 16. Angle code; 17. Slot sensor; 18. Induction sheet; 19. Tensioning screw; 20. Buffer block. DETAILED DESCRIPTION
[0019] In order to make the technical means, creative features, purpose and efficacy of the utility model easy to understand, the utility model is further described below in conjunction with specific embodiments, but the following embodiments are only preferred embodiments of the utility model, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the utility model. The experimental methods in the following embodiments are conventional methods unless otherwise specified, and the materials, reagents, etc. used in the following embodiments are all commercially available unless otherwise specified.
[0020] Embodiment:
[0021] like Figure 1 , Figure 2 , Figure 3As shown, a silicon wafer tidying mechanism comprises a bottom plate 1, a moving mechanism is provided on one side of the top of the bottom plate 1, a synchronization mechanism is provided on the other side of the top of the bottom plate 1, the moving mechanism comprises a linear guide rail 2 fixedly mounted on one side of the top of the bottom plate 1, slider mounting seats 3 are slidably provided at both ends of the top of the linear guide rail 2, a side surface of the two slider mounting seats 3 away from each other is fixedly connected with a side vertical plate 4, a crossbeam 5 is fixedly connected with the top of the side vertical plate 4, the synchronization mechanism comprises a synchronous belt 11 on one side of the moving mechanism, a synchronous wheel 9 and a synchronous wheel idler wheel 10 are respectively installed at both ends of the inner side of the synchronous belt 11, a motor mounting seat 8 is provided on one side of the synchronous wheel 9, a servo motor 7 is fixedly mounted on one side of the motor mounting seat 8, the output shaft of the servo motor 7 is fixedly connected to one side of the synchronous wheel 9, a clamping block is fixedly mounted on one side surface of the top of the synchronous belt 11 and the other side surface of the bottom, and the two clamping blocks are respectively fixedly connected to the two slider mounting seats 3;
[0022] Assembly process:
[0023] Installation and fixing phase:
[0024] 1. A linear guide rail 2, an idler wheel support block 12, and a slot sensor 17 are installed on the bottom plate;
[0025] 2. Install the slider mounting seat 3 on the linear guide rail 2, and then connect and install the side plate 4 and the crossbeam 5 respectively, and install three rubber-coated bearings 6 on each crossbeam 5;
[0026] 3. Install the servo motor 7 on the motor mounting seat 8. The servo motor 7 is connected with the synchronous wheel 9, the synchronous wheel idler wheel 10 and the synchronous belt 11 to form a wheel set. A short shaft 13 is installed between the two idler wheel support blocks 12 for installing the synchronous wheel idler wheel 10. Two tensioning screws 19 are installed on the idler wheel support block 12, which can be used for tensioning the synchronous belt;
[0027] 4. The wheel set and the slider mounting seat 3 are connected through the synchronous belt lower pressure plate 15 and the angle code 16. When the synchronous belt 11 moves, the crossbeam 5 part can follow the movement.
[0028] Debugging method: After the silicon wafer regularization module is installed in place according to the project requirements, it is necessary to check whether the sensor sheet 18 is installed and whether the slot sensor 17 is connected and outputs a signal before powering on, so as to confirm the final required size.
[0029] (2) Check whether the motion trajectory interferes with other parts of the machine. If not, you can power it on to restore it. There is a buffer of about 10 mm between the soft limit and the hard limit. Pay attention to whether the motor rotation direction is correct.
[0030] The mechanism is driven by a servo motor 7 and a rubber ring-type synchronous belt 11. The crossbeam 5 moves synchronously to the middle, and three rubber-coated bearings 6 are installed on each of the two crossbeams 5. It is mainly used for silicon wafers to regularize the movements and realize automated production. The silicon wafers are transported from the conveying module. Before entering the key process (screen printing, silicon wafer caching, silicon wafer baking, silicon wafer basket lifting, etc.), the silicon wafers are regularized to improve the accuracy of conveying incoming materials and reduce the risk of material jamming.
[0031] In other embodiments, the present embodiment discloses that rubber-coated bearings 6 are equidistantly installed on the top of the two beams 5, and the number of rubber-coated bearings 6 on the top of the beam 5 is three, and the three rubber-coated bearings 6 are on the same axis; the regular parts on both sides of a general regularizing mechanism are often guided by belts, and often require a separate set of motors and wheel sets, which have a complex structure and increase the overall cost of the mechanism. The present device installs three rubber-coated bearings 6 on each of the two beams 5, and the effect is the same as that of two belts. It only relies on the bearings themselves, omits the motor and wheel set, and greatly optimizes the cost of the mechanism.
[0032] In other embodiments, the present embodiment discloses that the motor mounting base 8 is fixedly mounted on the top of the base plate 1, the synchronous wheel idler 10 is rotatably connected to the inner side with a short shaft 13, and idler support blocks 12 are symmetrically mounted on both ends of the short shaft 13. The idler support blocks 12 are fixedly mounted on the base plate 1, and tensioning screws 19 are provided on one side of the two idler support blocks 12. Adjustment grooves are provided on the surfaces of the two idler support blocks 12, and the two ends of the short shaft 13 are respectively located on the inner sides of the two adjustment grooves, and one end of the tensioning screw 19 is screwed to the idler support block 12 and is located on the inner side of the adjustment groove; it can be used for tensioning the synchronous belt.
[0033] In other embodiments, this embodiment discloses that a sensing sheet 18 is provided at the bottom of one side of the slider mounting seat 3, a groove sensor 17 is provided at the bottom of the sensing sheet 18, and the groove sensor 17 is installed on the base plate 1. The base plate 1 is provided with a groove sensor 17, which can confirm the final required size.
[0034] In other embodiments, this embodiment discloses that the clamping block includes a synchronous belt pressing plate 15 and an angle code 16, the synchronous belt pressing plate 15 is fixedly connected to the slider mounting seat 3, and the two clamping blocks are distributed in a mirror image.
[0035] In other embodiments, this embodiment discloses that the outer bottom of the beam 5 is covered with a buffer block 20, and the cross section of the buffer block 20 is an L-shaped structure, which plays a protective buffering role.
[0036] In other embodiments, this embodiment discloses that the slider mounting seat 3 is fixedly connected to the synchronous belt 11 through a clamping block; when the synchronous belt 11 moves, the slider mounting seat 3 can partially follow the movement.
[0037] The implementation modes of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited thereto, and various changes can be made within the knowledge scope of technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A silicon wafer aligning mechanism, comprising a base plate (1), characterized in that: A moving mechanism is provided on one side of the top of the base plate (1), and a synchronization mechanism is provided on the other side of the top of the base plate (1). The moving mechanism comprises a linear guide rail (2) fixedly mounted on one side of the top of the base plate (1), and slider mounting seats (3) are slidably provided at both ends of the top of the linear guide rail (2). A side surface of the two slider mounting seats (3) that are away from each other is fixedly connected with a side vertical plate (4), and a crossbeam (5) is fixedly connected to the top of the side vertical plate (4). The synchronization mechanism comprises a synchronous belt (11) located on one side of the moving mechanism, and a synchronous wheel (9) and a synchronous wheel idler wheel (10) are respectively mounted on the inner ends of the synchronous belt (11). A motor mounting seat (8) is provided on one side of the synchronous wheel (9), and a servo motor (7) is fixedly mounted on one side of the motor mounting seat (8). The output shaft of the servo motor (7) is fixedly connected to one side of the synchronous wheel (9). Clamping blocks are respectively fixedly mounted on one side of the top of the synchronous belt (11) and on the other side of the bottom, and the two clamping blocks are respectively fixedly connected to the two slider mounting seats (3).
2. A silicon wafer tidying mechanism according to claim 1, characterized in that: Rubber-coated bearings (6) are equidistantly mounted on the tops of the two crossbeams (5), and there are three rubber-coated bearings (6) on the tops of the crossbeams (5), and the three rubber-coated bearings (6) are located on the same axis.
3. A silicon wafer tidying mechanism according to claim 1, characterized in that: The motor mounting seat (8) is fixedly mounted on the top of the base plate (1); a short shaft (13) is rotatably connected to the inner side of the synchronous wheel idler (10); idler support blocks (12) are symmetrically mounted at both ends of the short shaft (13); the idler support blocks (12) are fixedly mounted on the base plate (1), and a tensioning screw (19) is provided on one side of the two idler support blocks (12).
4. The silicon wafer aligning mechanism according to claim 1, characterized in that: A sensing sheet (18) is provided at the bottom of one side of the slider mounting seat (3), a slot-shaped sensor (17) is provided at the bottom of the sensing sheet (18), and the slot-shaped sensor (17) is mounted on the bottom plate (1).
5. The silicon wafer aligning mechanism according to claim 1, characterized in that: The clamping block comprises a synchronous belt lower pressure plate (15) and an angle code (16); the synchronous belt lower pressure plate (15) is fixedly connected to a slider mounting seat (3); and the two clamping blocks are distributed in a mirror image.
6. The silicon wafer aligning mechanism according to claim 3, characterized in that: The surfaces of the two idler wheel support blocks (12) are both provided with adjustment grooves, the two ends of the short shaft (13) are respectively located inside the two adjustment grooves, and one end of the tensioning screw (19) is screwed to the idler wheel support block (12) and is located inside the adjustment groove.
7. The silicon wafer aligning mechanism according to claim 1, characterized in that: The outer bottom of the cross beam (5) is covered with a buffer block (20), and the cross section of the buffer block (20) is an L-shaped structure.
8. The silicon wafer aligning mechanism according to claim 1, characterized in that: The slider mounting seat (3) is fixedly connected to the synchronous belt (11) via a clamping block.