Vacuum welding device

Abstract

The utility model provides a vacuum welding device which comprises at least one vacuum chamber, and each vacuum chamber comprises a chamber body, a gas supply mechanism for filling nitrogen into the chamber body, a vacuumizing mechanism for vacuumizing the chamber body and a circulating mechanism capable of extracting nitrogen in the chamber body and discharging the nitrogen into the chamber body after heating or cooling; during use, a heating or cooling process can be realized by heating or cooling nitrogen and then circularly heating or cooling a to-be-processed material, all the technical processes are carried out in a vacuum environment, and compared with the prior art, oxidation of the to-be-processed material is avoided.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum welding, and in particular to a vacuum welding device. Background Art

[0002] With the vigorous development of the semiconductor industry, the method of welding semiconductor modules through a vacuum welding furnace has become more popular. The principle of welding is that solder is placed on the electronic components of the circuit board. The solder melts when heated, and the electronic components are welded to the circuit board. After welding, the circuit board needs to be cooled.

[0003] The traditional process flow is completed through multiple heating chambers or cooling chambers, which heat or cool step by step to achieve the purpose of heating or cooling. However, during the entire process, each chamber is not a vacuum environment and the oxygen content in the chamber is difficult to control, which leads to oxidation problems of the semiconductor module. Summary of the invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, the present application aims to provide a vacuum welding device, comprising: comprising at least one vacuum chamber, each of the vacuum chambers comprising:

[0005] A cabin body, wherein the cabin body has a first space, and the material to be processed is placed in the first space, and the cabin body has an upper cover and a lower cover along a first direction;

[0006] A gas supply mechanism, the gas supply mechanism is used to fill the first space with nitrogen;

[0007] A vacuum pumping mechanism, the vacuum pumping mechanism is used to extract the gas in the first space to make it reach the vacuum requirement;

[0008] Two circulation mechanisms are respectively arranged in the upper cover and the lower cover; the circulation mechanisms are used to extract nitrogen from the first space, heat or cool it, and then discharge it into the first space.

[0009] According to the technical solution provided in the embodiment of the present application, the upper cover and the lower cover both have a cover body, the cover body has a second space, the circulation mechanism is arranged in the second space, and each of the circulation mechanisms includes:

[0010] An exhaust assembly, the exhaust assembly is arranged on the side of the second space close to the first space, the exhaust assembly has a first cavity, and the exhaust assembly has an exhaust member connected with the first cavity and the first space at the end close to the first space; a first gap is formed between the end of the exhaust assembly away from the first space and the inner wall of the cover body; the first gap is connected with the first space through a first air inlet;

[0011] a heat exchange component, the heat exchange component being disposed in the first gap and being used for cooling or heating the nitrogen in the first gap;

[0012] A gas extraction component is arranged in the first gap, and is used to extract the heated or cooled nitrogen and discharge it into the first cavity through the exhaust port.

[0013] According to the technical solution provided in the embodiment of the present application, a mounting component is provided in the first gap, and a third space is provided in the mounting component. The third space is connected to the first space through the first air inlet, and the heat exchange component is provided in the third space; the mounting component is connected to the inner wall of the cover body at the end away from the first space, and is connected to the exhaust component near the end of the first space, and a fourth space is formed between the mounting component and the inner wall of the cover body; a second air inlet is provided in the middle of the mounting component away from the end of the first space, and the air extraction component includes an impeller provided in the fourth space and connected to the second air inlet, and the rotation of the impeller causes the nitrogen to flow.

[0014] According to the technical solution provided in the embodiment of the present application, the installation component is provided with the exhaust port away from the first space end, and a first gas gathering component is provided circumferentially of the exhaust port, and the first gas gathering component is connected with the first cavity near the first space end; a second gas gathering component is provided circumferentially of the impeller, and a fifth space is formed between the second gas gathering component and the impeller, and the fifth space is connected with the exhaust port.

[0015] According to the technical solution provided in the embodiment of the present application, the exhaust member is a plurality of exhaust holes arranged at the exhaust component close to the first space end, and the plurality of exhaust holes are used to uniformly distribute the wind pressure.

[0016] According to the technical solution provided in the embodiment of the present application, each of the vacuum chambers further includes a supporting mechanism and a first driving mechanism arranged in the first space, the supporting mechanism is used to place the material to be processed, and the first driving mechanism is used to drive the material to be processed to move along the first direction.

[0017] According to the technical solution provided in the embodiment of the present application, a first mounting plate and a second mounting plate are distributed along the second direction in the first space, and the first mounting plate and the second mounting plate have mounting surfaces at their ends close to each other, and the first driving mechanism includes a transmission component arranged on each of the mounting surfaces, and each of the transmission components includes at least two first sprockets distributed along the third direction and arranged at both ends of the mounting surface and rotatably connected to the mounting surface, and the two first sprocket outer sleeves are provided with chains matching them; the bearing mechanism is arranged on the chain, and the first driving mechanism also includes a first driving component, and the first driving component drives any of the first sprockets corresponding to different transmission components to rotate; the second direction is perpendicular to the first direction; the third direction is perpendicular to the second direction and the second direction.

[0018] According to the technical solution provided in the embodiment of the present application, the bearing mechanism includes a plurality of bearing pins arranged at the ends of the two chains close to each other, and the extending direction of the bearing pins is the second direction.

[0019] According to the technical solution provided in the embodiment of the present application, a guide rail is further provided in the first space, the extension direction of the guide rail is the second direction, a slider matching it is provided on the guide rail, and the slider is connected to the first mounting plate; a second driving mechanism is also provided in the first space, and the second driving mechanism is used to drive the first mounting plate to drive the slider to move on the guide rail.

[0020] According to the technical solution provided in the embodiment of the present application, the second driving mechanism includes a transmission rod passing through the first mounting plate, the transmission rod is threadedly connected to the first mounting plate, one end of the transmission rod is connected to a second driving assembly, and the second driving assembly is used to drive the transmission rod to rotate.

[0021] In summary, the present application proposes a vacuum welding device, comprising at least one vacuum chamber, each vacuum chamber comprising a chamber body, an air supply mechanism for filling nitrogen into the chamber body, a vacuum pumping mechanism for evacuating the chamber body, and a circulation mechanism that can extract nitrogen from the chamber body and discharge it into the chamber body after heating or cooling; when in use, the heating or cooling process can be achieved by heating or cooling the nitrogen and then heating or cooling the material to be processed through the circulation of nitrogen, and all process processes are carried out in a vacuum environment. Compared with the prior art, oxidation of the material to be processed is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the structure of a vacuum chamber provided in an embodiment of the present application;

[0023] Figure 2 A schematic diagram of the appearance of the upper cover provided in the embodiment of the present application;

[0024] Figure 3 for Figure 2 Sectional view of AA in the middle;

[0025] Figure 4 A schematic diagram of the structure of the upper cover provided in the embodiment of the present application;

[0026] Figure 5 A bottom view of an exhaust assembly provided in an embodiment of the present application;

[0027] Figure 6 A top view of an exhaust assembly and a mounting assembly provided in an embodiment of the present application;

[0028] Figure 7 The heat exchange assembly provided in the embodiment of the present application is a schematic diagram of the structure of a cooling assembly;

[0029] Figure 8 The heat exchange component provided in the embodiment of the present application is a schematic structural diagram of a heating component;

[0030] Fig. 9 A schematic diagram of the structure of the first mounting plate, the second mounting plate, the first driving mechanism, the bearing mechanism, the guide rail, the slider, the transmission rod, and the second driving assembly provided in an embodiment of the present application;

[0031] Fig.10 A schematic structural diagram of the mounting surface of the first mounting plate provided in an embodiment of the present application.

[0032] 1. Cabin; 11. Upper cover; 12. Lower cover; 13. Cover; 21. Exhaust assembly; 211. Exhaust member; 212. First air inlet; 22. Heat exchange assembly; 221. Heating assembly; 23. Air extraction assembly; 231. Impeller; 232. Drive motor; 233. Sealing assembly; 234. Second air gathering assembly; 235. Fifth space; 24. Mounting assembly; 241. Fourth space; 242. Third space; 243. Second air inlet; 24 4. Mounting plate; 245. Exhaust port; 246. First gas gathering assembly; 3. First driving mechanism; 4. Supporting mechanism; 41. Supporting pin; 42. Limiting assembly; 51. First mounting plate; 52. Second mounting plate; 53. Mounting surface; 54. First sprocket; 55. Chain; 56. First driving assembly; 57. Second sprocket; 58. Third sprocket; 59. Rotating rod; 61. Guide rail; 62. Slider; 63. Transmission rod; 64. Second driving assembly. DETAILED DESCRIPTION

[0033] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It is also necessary to explain that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0034] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] As mentioned in the background technology, the present application proposes a vacuum welding device, including at least one vacuum chamber, each of which includes:

[0036] A cabin 1, wherein the cabin 1 has a first space, and the material to be processed is placed in the first space, and the cabin 1 has an upper cover 11 and a lower cover 12 along a first direction; wherein the cabin 1 also includes an inlet and an outlet, and the inlet and the outlet are both provided with doors, and when the two doors, the upper cover 11 and the lower cover 12 are all in a closed state, the first space is a closed space;

[0037] A gas supply mechanism, the gas supply mechanism is used to fill the first space with nitrogen;

[0038] A vacuum pumping mechanism, the vacuum pumping mechanism is used to extract the gas in the first space to make it reach the vacuum requirement;

[0039] Two circulation mechanisms are respectively arranged in the upper cover 11 and the lower cover 12; the circulation mechanisms are used to extract nitrogen from the first space, heat or cool it, and then discharge it into the first space.

[0040] Please refer to Figure 1 As shown, the first direction is the up-down direction, and each of the vacuum chambers 1 has two circulation mechanisms. The vacuum pumping mechanism and the gas supply mechanism are arranged outside the chamber body 1, and are connected to the first space through a pipeline. The vacuum pumping mechanism and the gas supply mechanism are not limited to one structure, and can be a mechanism that can realize nitrogen filling or vacuum pumping in the prior art; when in use, when the first space is in a closed state, the gas in the first space is first extracted through the vacuum pumping mechanism to meet the vacuum requirement, and then nitrogen is filled into the first space through the gas supply mechanism, and the nitrogen is heated or cooled through the circulation mechanism, and the nitrogen is circulated in the first space, thereby realizing the heating and cooling of the material to be processed. Compared with the prior art, the process of the present application is carried out in a vacuum environment, which avoids the oxidation of the material to be processed.

[0041] In a preferred embodiment, the upper cover 11 and the lower cover 12 both have a cover body 13, the cover body has a second space, the circulation mechanism is arranged in the second space, and each of the circulation mechanisms includes:

[0042] An exhaust component 21, the exhaust component 21 is arranged at the second space near the first space side, the exhaust component 21 has a first cavity, and the exhaust component 21 has an exhaust member 211 connected with the first cavity and the first space near the end of the first space; a first gap is formed between the end of the exhaust component 21 away from the first space and the inner wall of the cover body 13; the first gap is connected with the first space through a first air inlet 212;

[0043] a heat exchange component 22, the heat exchange component 22 being disposed in the first gap and used for cooling or heating the nitrogen in the first gap;

[0044] The gas extraction component 23 is disposed in the first gap and is used to extract the heated or cooled nitrogen and discharge it into the first cavity through the exhaust port 245.

[0045] Please refer to Figure 2-Figure 8 As shown, when the upper cover 11 and the lower cover 12 are in a closed state, a closed first space is formed; optionally, the number of the first air inlet 212 is two, and the two side walls of the exhaust component 21 along the left and right directions are concave toward the inner wall side away from the cover body 13 to form the first air inlet 212; the exhaust member 211 is a plurality of exhaust holes provided at the end of the exhaust component 21 close to the first space, and the plurality of exhaust holes are used to uniform the wind pressure. The side wall of the exhaust component 21 close to the first space is provided with a plurality of uniformly arranged exhaust holes. When the exhaust component 23 discharges the heated or cooled nitrogen into the first cavity, the nitrogen in the first cavity is dispersed by the exhaust holes and discharged into the first space, thereby improving the uniformity of the wind pressure blown to the material to be processed.

[0046] Among them, Figure 8 As shown, the heat exchange component 22 may be a heating component 221 for heating nitrogen. Optionally, the heating component 221 is four heating tubes distributed in the first gap along the left and right directions. The heating tubes are prior art and are not limited to one form. They can heat nitrogen and will not be described here. When the heat exchange component 22 is the heating component 221, the vacuum chamber can be used as a vacuum heating chamber. The solder is melted in the vacuum heating chamber so that the components are welded on the circuit board. The temperature in the chamber can be controlled by controlling the power of the heating component 221. After welding is completed, the first space is vacuumed again by the vacuum pumping mechanism to discharge the bubbles in the molten solder.

[0047] like Figure 7As shown, the heat exchange component 22 can be a cooling component 222 for cooling nitrogen. The form of the cooling component is not limited. Optionally, the cooling component 222 is an S-shaped coiled cooling water pipe. When the heat exchange component 22 is the cooling component 222, the vacuum chamber can be used as a vacuum cooling chamber. After the materials to be processed are welded in the vacuum heating chamber, they are transported to the vacuum cooling chamber for cooling.

[0048] In a preferred embodiment, a mounting component 24 is provided in the first gap, and a third space 242 is provided in the mounting component 24. The third space 242 is communicated with the first space through the first air inlet, and the heat exchange component 22 is provided in the third space 242; the mounting component 24 is connected to the inner wall of the cover body 13 at the end away from the first space, and is connected to the exhaust component 21 near the first space end, and a fourth space 241 is formed between the mounting component 24 and the inner wall of the cover body 13; a second air inlet 243 is provided in the middle of the mounting component 24 at the end away from the first space, and the exhaust component 23 includes an impeller 231 provided in the fourth space 241 and communicated with the second air inlet 243, and the impeller 231 rotates to make the nitrogen flow.

[0049] Among them, please refer to Figure 1 , Figure 3 , Figure 6-Figure 8 As shown, the mounting assembly 24 includes a mounting plate 244 away from the first space side, the mounting plate 244 is rectangular, and the four sides of the mounting plate 244 extend toward the first space side to form mounting side walls, each of the mounting side walls abuts against the inner wall of the cover body 13, and each of the mounting side walls extends inward near the first space end to form an extension plate, and the extension plate is threadedly connected to the exhaust assembly 21 away from the first space end, and the exhaust assembly 21, the mounting plate 244 and the four mounting side walls form the third space 242; the heat exchange assembly 22 is fixed on the mounting plate 244, and a through hole is provided in the middle of the mounting plate 244, which is the second air inlet 243. When the impeller 231 rotates, a negative pressure is formed at the first air inlet 212, and the nitrogen in the first space is drawn from the first air inlet 212 to the third space 242, and enters the impeller 231 through the second air inlet 243.

[0050] The end of the impeller 231 away from the mounting assembly 24 is connected to the output shaft of a driving motor 232 disposed outside the cover body 13, and the impeller 231 is driven to rotate by the driving motor 232. A sealing assembly 233 is also provided between the driving motor 232 and the cover body 3, and the sealing assembly 233 is used for air to enter the fourth space 241. Optionally, the sealing assembly 233 is a magnetic fluid seal.

[0051] In a preferred embodiment, the mounting component 24 is provided with the exhaust port 245 away from the first space end, and a first gas gathering component 246 is provided circumferentially of the exhaust port 245, and the first gas gathering component 246 is connected with the first cavity near the first space end; a second gas gathering component 234 is provided circumferentially of the impeller 231, and a fifth space 235 is formed between the second gas gathering component 234 and the impeller 231, and the fifth space 235 is connected with the exhaust port 245.

[0052] Among them, please refer to Figure 6-Figure 8 As shown, the exhaust port 245 is a through hole arranged on the mounting plate 244. Optionally, the exhaust port 245 is two in number and is respectively arranged on both sides of the second air inlet 243. The first gas gathering component 246 includes four first baffles connected in sequence, and one end of the four first baffles away from the mounting plate 244 extends into the first cavity. The second gas gathering component 234 includes two second baffles arranged at the end of the mounting plate 244 away from the third space 242, and the two second baffles are close to the inner wall of the cover body 13 at the ends away from the mounting plate 244, and the fifth space 235 is formed between the two second baffles and the inner wall of the cover body 13; when the driving motor 232 drives the impeller 231 to rotate, the nitrogen in the first space is pumped into the third space 242 through the first air inlet 212, and is heated or cooled by the heat exchange component 22 and then pumped into the fifth space 235 through the second air inlet 243, and is discharged into the first cavity through the two exhaust ports 245 through the first gas gathering component 246, and then discharged into the first space through the multiple exhaust holes of the exhaust component 21, forming a nitrogen cycle.

[0053] In a preferred embodiment, each of the vacuum chambers further includes a supporting mechanism 4 and a first driving mechanism 3 arranged in the first space, the supporting mechanism 4 is used to place the material to be processed, and the first driving mechanism 3 is used to drive the material to be processed to move along the first direction.

[0054] Among them, please refer to Fig. 9 As shown, the vacuum welding device includes multiple vacuum chambers, including multiple process links such as heating and cooling. The material to be processed in the vacuum chamber is transferred to the next vacuum chamber through the first driving mechanism 3 to complete the entire process.

[0055] In a preferred embodiment, a first mounting plate 51 and a second mounting plate 52 are distributed along the second direction in the first space, and the first mounting plate 51 and the second mounting plate 52 have mounting surfaces 53 at their ends close to each other. The first driving mechanism 3 includes a transmission component provided on each of the mounting surfaces 53, and each of the transmission components includes at least two first sprockets 54 distributed along the third direction and provided at both ends of the mounting surface 53 and rotatably connected to the mounting surface 53, and the two first sprockets 54 are outer sleeves provided with chains 55 matching therewith; the supporting mechanism 4 is provided on the chain 55, and the first driving mechanism 3 also includes a first driving component 56, and the first driving component 56 drives any of the first sprockets 54 corresponding to different transmission components to rotate; the second direction is perpendicular to the first direction; and the third direction is perpendicular to the second direction and the second direction.

[0056] Among them, please refer to Fig. 9 and Fig.10 As shown, the transmission assembly also includes a second sprocket 57 disposed below the first sprocket and rotatably connected to the mounting surface, and three third sprockets 58 disposed on one side of the second sprocket 57 and rotatably connected to the mounting surface 53. The chain 55 can cooperate with the teeth of all the first sprocket 54, the second sprocket 57 and the third sprocket 58. The third sprocket 58 is used to ensure that the chain 55 is in a taut state to improve the stability of the transmission. Please refer to Fig. 9 The second direction is the front-to-back direction, and the third direction is the left-to-right direction. The chain 55 between the two first sprockets 54 is parallel to the third direction. The second sprocket 57 has a positioning through hole in the middle, and the cross-section of the positioning through hole is a regular hexagon. A rotating rod 59 is provided through the two positioning through holes, and the cross-section of the rotating rod 59 is also a regular hexagon. The outer wall of the rotating rod 59 is in close contact with the inner wall of the positioning through hole, so when the rotating rod 59 rotates, the second sprocket 57 can be driven to rotate, and the second sprocket 57 can move in the front-to-back direction on the rotating rod 59. One end of the rotating rod 57 is rotatably connected to the inner wall of the cabin 1, and the other end extends out of the cabin 1 and is connected to the first driving assembly 56. The rotating rod 59 is driven by the first driving assembly 56 to drive the second sprocket 57 to rotate, thereby driving the chain 55 to rotate, thereby driving the first sprocket 54 and the third sprocket 58 to rotate.

[0057] In a preferred embodiment, the bearing mechanism 4 includes a plurality of bearing pins 41 disposed at the ends of the two chains 55 close to each other, and the extending direction of the bearing pins 41 is the second direction.

[0058] The bearing pins 41 on the two chains 55 are respectively arranged at two ends of the bottom of the material to be processed along the second direction, thereby playing a role in bearing the material to be processed.

[0059] The first mounting plate 51 and the second mounting plate 52 are both provided with a limiting assembly 42, and the limiting assembly 42 is buckled on the top of the first mounting plate 51 or the second mounting plate 52. The two limiting assemblies 42 are provided with limiting grooves at the ends close to each other, and the extending direction of the limiting groove is the third direction. The opening direction of the limiting groove is toward the other end of the limiting groove. The chain 55 between the two first sprocket wheels 54 is placed in the limiting groove, and the bearing pin 41 is placed outside the limiting groove. The limiting groove is used to ensure that the bearing pin 41 on the chain 55 placed between the two first sprocket wheels 54 remains horizontal, thereby ensuring the stability of placing the material to be processed. In addition, a protrusion is extended inwardly from the opening of the limiting groove, and the protrusion is used to prevent the chain 55 from escaping from the limiting groove.

[0060] In a preferred embodiment, a guide rail 61 is further provided in the first space, and the extension direction of the guide rail 61 is the second direction. A slider 62 matching with the guide rail 61 is provided on the guide rail 61, and the slider 62 is connected to the first mounting plate 51. A second driving mechanism is also provided in the first space, and the second driving mechanism is used to drive the first mounting plate 51 to drive the slider 62 to move on the guide rail 61.

[0061] Among them, please refer to Fig. 9 As shown, when only one side of the material to be processed has components welded thereon, the material to be processed can be placed on a pallet, and then the pallet can be placed on the supporting pin 41, and the specifications of the pallet are fixed; when components need to be welded on both the top and bottom surfaces of the material to be processed, it is inconvenient to place the material on a pallet, and the material to be processed can be directly placed on the supporting pin 41. When the specifications of the materials to be processed in different systems are different, it is necessary to change the spacing between the two chains 55 by moving the first mounting plate 51.

[0062] Optionally, two guide rails 61 are provided on both sides of the first mounting plate 51 along the third direction in the first direction, each guide rail 61 is provided with a slider 62, and the two sliders 62 are respectively connected to the two ends of the first mounting plate 51 along the third direction.

[0063] In a preferred embodiment, the second driving mechanism includes a transmission rod 63 passing through the first mounting plate 51, the transmission rod 63 is threadedly connected to the first mounting plate 51, one end of the transmission rod 63 is connected to a second driving component 64, and the second driving component 64 is used to drive the transmission rod 63 to rotate.

[0064] Among them, please refer to Fig. 9 As shown, the first mounting plate 51 is provided with a first through hole, the second mounting plate 52 is provided with a second through hole at a position corresponding to the first through hole, the transmission rod 63 passes through the first through hole and the second through hole, and is rotatably connected to the second through hole and threadedly connected to the first through hole; therefore, when the transmission rod 63 rotates, the first mounting plate 51 can be driven to slide on the two guide rails 61. One end of the transmission rod 63 is rotatably connected to the inner wall of the cabin 1, and the other end extends out of the cabin 1 and is connected to the second driving assembly 64.

[0065] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with (but not limited to) technical features with similar functions disclosed in the present application.

Claims

1. A vacuum welding device, characterized in that: Comprising at least one vacuum chamber, each of the vacuum chambers comprising: A cabin (1), wherein the cabin (1) has a first space, and materials to be processed are placed in the first space, and the cabin (1) has an upper cover (11) and a lower cover (12) along a first direction; A gas supply mechanism, the gas supply mechanism is used to fill the first space with nitrogen; A vacuum pumping mechanism, the vacuum pumping mechanism is used to extract the gas in the first space to make it reach the vacuum requirement; Two circulation mechanisms, the two circulation mechanisms are respectively arranged in the upper cover (11) and the lower cover (12); the circulation mechanisms are used to extract nitrogen from the first space, heat or cool it, and then discharge it into the first space.

2. The vacuum welding device according to claim 1, characterized in that: The upper cover (11) and the lower cover (12) both have a cover body (13), the cover body has a second space, the circulation mechanism is arranged in the second space, and each of the circulation mechanisms comprises: An exhaust component (21), the exhaust component (21) being arranged on a side of the second space close to the first space, the exhaust component (21) having a first cavity therein, and an exhaust member (211) communicating with the first cavity and the first space at an end of the exhaust component (21) close to the first space; a first gap is formed between an end of the exhaust component (21) away from the first space and an inner wall of the cover body (13); the first gap is communicated with the first space via a first air inlet (212); a heat exchange component (22), the heat exchange component (22) being arranged in the first gap and being used to cool or heat the nitrogen in the first gap; An air extraction component (23), the air extraction component (23) being arranged in the first gap and used for extracting heated or cooled nitrogen and discharging it into the first cavity through an exhaust port (245).

3. The vacuum welding device according to claim 2, characterized in that: A mounting assembly (24) is provided in the first gap, and a third space (242) is provided in the mounting assembly (24). The third space (242) is communicated with the first space via the first air inlet, and the heat exchange assembly (22) is provided in the third space (242); the mounting assembly (24) is connected to the inner wall of the cover body (13) at an end away from the first space, and is connected to the exhaust assembly (21) at an end close to the first space, and a fourth space (241) is formed between the mounting assembly (24) and the inner wall of the cover body (13); a second air inlet (243) is provided in the middle of the end of the mounting assembly (24) away from the first space, and the air extraction assembly (23) comprises an impeller (231) provided in the fourth space (241) and communicated with the second air inlet (243), and the impeller (231) rotates to cause nitrogen to flow.

4. The vacuum welding device according to claim 3, characterized in that: The mounting component (24) is provided with the exhaust port (245) away from the first space end, and a first gas gathering component (246) is provided circumferentially of the exhaust port (245), and the first gas gathering component (246) is connected with the first cavity near the first space end; the impeller (231) is provided with a second gas gathering component (234) circumferentially, and a fifth space (235) is formed between the second gas gathering component (234) and the impeller (231), and the fifth space (235) is connected with the exhaust port (245).

5. The vacuum welding device according to claim 2, characterized in that: The exhaust member (211) is a plurality of exhaust holes provided at the exhaust component (21) close to the first space end, and the plurality of exhaust holes are used to even out the wind pressure.

6. The vacuum welding device according to claim 1, characterized in that: Each of the vacuum chambers further comprises a bearing mechanism (4) and a first driving mechanism (3) arranged in the first space, wherein the bearing mechanism (4) is used to place the material to be processed, and the first driving mechanism (3) is used to drive the material to be processed to move along a first direction.

7. The vacuum welding device according to claim 6, characterized in that: A first mounting plate (51) and a second mounting plate (52) are arranged in the first space along the second direction, and the first mounting plate (51) and the second mounting plate (52) have mounting surfaces (53) at their ends close to each other. The first driving mechanism (3) comprises a transmission assembly arranged on each of the mounting surfaces (53), and each of the transmission assemblies comprises at least two first sprocket wheels (54) arranged at both ends of the mounting surface (53) along the third direction and rotatably connected to the mounting surface (53), and the outer sleeves of the two first sprocket wheels (54) are provided with chains (55) matching therewith; the bearing mechanism (4) is arranged on the chain (55), and the first driving mechanism (3) further comprises a first driving assembly (56), and the first driving assembly (56) drives any of the first sprocket wheels (54) corresponding to different transmission assemblies to rotate; the second direction is perpendicular to the first direction; The third direction is perpendicular to the second direction and the second direction.

8. The vacuum welding device according to claim 7, characterized in that: The bearing mechanism (4) comprises a plurality of bearing pins (41) provided at the ends of the two chains (55) close to each other, and the extending direction of the bearing pins (41) is the second direction.

9. The vacuum welding device according to claim 7, characterized in that: A guide rail (61) is further provided in the first space, the extension direction of the guide rail (61) being the second direction, a sliding block (62) matching the guide rail (61) being provided on the guide rail (61), the sliding block (62) being connected to the first mounting plate (51); a second driving mechanism is further provided in the first space, the second driving mechanism being used to drive the first mounting plate (51) to drive the sliding block (62) to move on the guide rail (61).

10. The vacuum welding device according to claim 9, characterized in that: The second driving mechanism comprises a transmission rod (63) passing through the first mounting plate (51), the transmission rod (63) being threadedly connected to the first mounting plate (51), one end of the transmission rod (63) being connected to a second driving assembly (64), the second driving assembly (64) being used to drive the transmission rod (63) to rotate.

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