Cartridge transplanting device transfer trolley

Abstract

The utility model relates to the technical field of glass substrate transfer, in particular to a cartridge transplanting device transfer trolley which comprises a rack, and a supporting assembly is arranged at the bottom of the rack; the sliding mechanism is arranged on the rack, and a mounting platform is arranged on the sliding mechanism; the rotating mechanism is arranged on the mounting platform, and a revolving platform is arranged on the rotating mechanism; and the frame body is arranged on the rotary platform, the rotary platform is located above the mounting platform, and a clamping box is arranged on the frame body. The transfer trolley for the cartridge transplanting device is simple in structure, in the actual use process, the transfer trolley can slide and rotate according to actual requirements, manual carrying is not needed, cartridges can be moved to a goods shelf, meanwhile, the danger that the cartridges fall off and hurt people is avoided, and the transfer safety of the cartridges is guaranteed; the labor intensity is reduced, the fatigue of workers is reduced, the transfer efficiency is improved, and the labor cost can be effectively reduced.

Description

Technical Field

[0001] The present application relates to the technical field of glass substrate transfer, and in particular to a transfer vehicle for a cassette transfer device. Background Art

[0002] In the production process of semiconductor materials, cassettes for storing glass substrates are needed for intermediate storage and transportation of materials. The cassettes are transported by MGV (Manual Guided Vehicle) transfer vehicles for subsequent storage in warehouses.

[0003] At present, glass is generally transported by special vehicles, but the cassettes can only be transported to the shelf, and the cassettes need to be placed on the shelf manually. The cassettes are heavy and difficult to transport, and there is a risk of them falling and hitting people.

[0004] For example, the glass transfer device disclosed in CN203373267U includes a trolley and a glass basket. The glass basket is mounted on the trolley and locked, and the trolley is used to drive the glass basket for transfer. However, in actual use of the glass transfer device, when the trolley moves the glass basket to the shelf, the glass basket needs to be manually placed on the shelf. Since the glass is installed in the glass basket, the glass basket has a large weight and is not easy to carry. There is still a risk of it falling and hitting people. Utility Model Content

[0005] A technical problem to be solved by the present application is that during actual use of the glass transfer device in the prior art, since glass is installed in a glass basket, when a trolley moves the glass basket to a shelf, it is necessary to manually place the glass basket on the shelf. Since the glass basket has a large dead weight and is not easy to carry, there is still a risk of it falling and hitting people.

[0006] In order to solve the above-mentioned technical problems, an embodiment of the present application provides a transfer vehicle for a cassette transplanting device, comprising: a frame, a support assembly is provided at the bottom of the frame; a sliding mechanism, which is arranged on the frame, and a mounting platform is provided on the sliding mechanism; a rotating mechanism, which is arranged on the mounting platform, and a revolving platform is provided on the rotating mechanism; and a frame, which is arranged on the revolving platform, the revolving platform is located above the mounting platform, and a cassette is provided on the frame.

[0007] In some embodiments, the rotating mechanism includes: a rotating drive component, which is disposed on the mounting platform; a slewing component, which is disposed on the slewing platform, and the slewing component is connected to the rotating drive component.

[0008] In some embodiments, the rotary drive assembly includes: a rotary drive member connected to the mounting platform; a rotary driving gear disposed at one end of the rotary drive member, and the rotary driving gear is connected to the rotary assembly.

[0009] In some embodiments, the rotating assembly includes: a rotating shaft, which passes through the mounting platform and is connected to the rotating platform, the rotating shaft is provided with a rotating driven gear, the rotating driven gear is meshed and connected with the rotating driving gear; and a rotating bearing seat, which is connected to the rotating shaft.

[0010] In some embodiments, the sliding mechanism includes: a guide rail disposed on a frame; a plurality of sliders disposed on the guide rails respectively, and a mounting platform disposed on the sliders.

[0011] In some embodiments, a sliding drive mechanism is also included, and the sliding drive mechanism is arranged at the bottom of the mounting platform.

[0012] In some embodiments, the sliding drive mechanism includes: a sliding drive member, disposed at the bottom of the mounting platform; a sliding driving gear, disposed at one end of the sliding drive member; and a rack, disposed on the frame, the rack being meshed and connected with the sliding driving gear.

[0013] In some embodiments, a plurality of positioning blocks are further included. The plurality of positioning blocks are disposed on the outer edge of the frame, and the positioning blocks are used to drive the installation position of the cartridge.

[0014] In some embodiments, the support assembly includes a plurality of feet, and the plurality of feet are spaced apart at the bottom of the frame.

[0015] In some embodiments, the rack and the mounting platform, the rotating platform, the frame, and the cassette are all made of aluminum.

[0016] Through the above technical scheme, the cassette transplanting device transfer vehicle provided in the present application includes: a frame, a support assembly is provided at the bottom of the frame; a sliding mechanism is arranged on the frame, and a mounting platform is provided on the sliding mechanism; a rotating mechanism is arranged on the mounting platform, and a revolving platform is provided on the rotating mechanism; and a frame body is arranged on the revolving platform, the revolving platform is located above the mounting platform, and a cassette is provided on the frame body.

[0017] By setting a support assembly at the bottom of the rack, the rack can be supported by the support assembly. At the same time, a sliding mechanism is set on the rack, and a mounting platform is set on the sliding mechanism, and a rotating platform is set above the mounting platform, so that the frame set on the rotating platform can slide and rotate. When the rack reaches the shelf, the cassette can be driven to move according to the sliding mechanism and the rotating mechanism.

[0018] The structure of the transfer vehicle for the cassette transplanting device is relatively simple, and in actual use, it can slide and rotate according to actual needs. The cassette can be moved to the shelf without manual handling. At the same time, the danger of the cassette falling and hitting people is avoided, and the safety of cassette transportation is ensured; it also reduces labor intensity, reduces employee fatigue, improves transfer efficiency, and can effectively reduce labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a structural schematic diagram of a cassette transplanting device transfer vehicle disclosed in an embodiment of the present application;

[0021] Figure 2 is a side view of a transfer vehicle for a cassette transplanting device disclosed in an embodiment of the present application;

[0022] Figure 3 is a rear view of the cassette transplanting device transfer vehicle disclosed in an embodiment of the present application;

[0023] Figure 4 It is a structural schematic diagram of a frame of a cassette transplanting device transfer vehicle disclosed in an embodiment of the present application;

[0024] Figure 5 is a side view of a frame of a cassette transplanting device transfer vehicle disclosed in an embodiment of the present application;

[0025] Figure 6 It is a structural schematic diagram of the sliding drive mechanism of the transfer vehicle of the cassette transplanting device disclosed in the embodiment of the present application;

[0026] Figure 7 It is a structural schematic diagram of the sliding mechanism of the transfer vehicle of the cassette transplanting device disclosed in the embodiment of the present application;

[0027] Figure 8 It is a structural schematic diagram of the rotary platform of the transfer vehicle of the cassette transplanting device disclosed in the embodiment of the present application;

[0028] Fig. 9 It is a schematic structural diagram of the rotating mechanism of the cassette transplanting device transfer vehicle disclosed in the embodiment of the present application.

[0029] Description of reference numerals:

[0030] 1. Frame; 2. Support assembly; 3. Sliding mechanism; 4. Mounting platform; 5. Rotating mechanism; 6. Rotating platform; 7. Frame; 8. Cassette; 9. Rotating drive assembly; 10. Rotating assembly; 11. Rotating drive member; 12. Rotating driving gear; 13. Rotating shaft; 14. Rotating driven gear; 15. Rotating bearing seat; 16. Guide rail; 17. Sliding block; 18. Sliding drive mechanism; 19. Sliding drive member; 20. Sliding driving gear; 21. Rack. DETAILED DESCRIPTION

[0031] The following is a further detailed description of the implementation methods of the present application in conjunction with the accompanying drawings and examples. The detailed descriptions of the following examples and the accompanying drawings are used to exemplarily illustrate the principles of the present application, but cannot be used to limit the scope of the present application. The present application can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0032] The present application provides these embodiments to make the present application thorough and complete, and to fully express the scope of the present application to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0033] It should be noted that, in the description of this application, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0034] In addition, the words "first", "second" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0035] It should also be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0036] All terms used in this application have the same meaning as those understood by those of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.

[0037] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0038] See also Figures 1 to 9 As shown, an embodiment of the present application provides a transfer vehicle for a cassette transplanting device, comprising: a frame 1, a support assembly 2 is provided at the bottom of the frame 1; a sliding mechanism 3, which is arranged on the frame 1, and a mounting platform 4 is provided on the sliding mechanism 3; a rotating mechanism 5, which is arranged on the mounting platform 4, and a revolving platform 6 is provided on the rotating mechanism 5; and a frame 7, which is arranged on the revolving platform 6, the revolving platform 6 is located above the mounting platform 4, and a cassette 8 is provided on the frame 7.

[0039] By arranging the support assembly 2 at the bottom of the rack 1, the support assembly 2 can be used to support the rack 1. At the same time, a sliding mechanism 3 is arranged on the rack 1, and a mounting platform 4 is arranged on the sliding mechanism 3, and a rotating platform 6 is arranged above the mounting platform 4, so that the frame 7 arranged on the rotating platform 6 can slide and rotate. When the rack 1 reaches the shelf, the sliding mechanism 3 and the rotating mechanism 5 can drive the cassette 8 to move.

[0040] The structure of the cassette transplanting device transfer vehicle is relatively simple, and in actual use, it can slide and rotate according to actual needs. The cassette 8 can be moved to the shelf without manual handling. At the same time, the risk of the cassette 8 falling and hitting people is avoided, and the safety of the cassette 8 transportation is ensured; it also reduces labor intensity, reduces employee fatigue, improves transfer efficiency, and can effectively reduce labor costs.

[0041] In some embodiments, the rotating mechanism 5 includes: a rotating drive component 9 disposed on the mounting platform 4 ; a slewing component 10 disposed on the slewing platform 6 , and the slewing component 10 is connected to the rotating drive component 9 .

[0042] By arranging the rotary drive assembly 9 at the bottom of the mounting platform 4, that is, the mounting platform 4 provides a mounting position for the rotary drive assembly 9, the stability of the installation of the rotary drive assembly 9 is ensured. At the same time, the swivel assembly 10 is arranged on the swivel platform 6, and the swivel assembly 10 is connected to the rotary drive assembly 9, that is, the rotary drive assembly 9 drives the swivel assembly 10 to rotate, and then drives the swivel platform 6 to rotate, so that the frame 7 and the cassette 8 rotate.

[0043] In some embodiments, the rotary drive assembly 9 includes: a rotary drive member 11 connected to the mounting platform 4 ; a rotary driving gear 12 disposed at one end of the rotary drive member 11 , and the rotary driving gear 12 is connected to the rotary assembly 10 .

[0044] By setting the rotating drive member 11 at the bottom of the mounting platform 4, that is, the mounting platform 4 provides an installation position for the rotating drive member 11, the stability of the installation of the rotating drive member 11 is ensured. At the same time, a rotating active gear 12 is set at one end of the rotating drive member 11 to facilitate connection with the rotating assembly 10, so that the rotating assembly 10 is driven by the rotating drive member 11 to perform a rotating motion.

[0045] In some embodiments, the rotating assembly 10 includes: a rotating shaft 13, which passes through the mounting platform 4 and is connected to the rotating platform 6. The rotating shaft 13 is provided with a rotating driven gear 14, and the rotating driven gear 14 is meshed and connected with the rotating driving gear 12; a rotating bearing seat 15, which is connected to the rotating shaft 13.

[0046] The installation platform 4 is connected to the rotating platform 6 by the setting of the rotating shaft 13, and there is a certain gap between the installation platform 4 and the rotating platform 6, so that the rotating platform 6 can rotate relative to the installation platform 4. At the same time, a rotating driven gear 14 is provided on the rotating shaft 13, and the rotating driven gear 14 is meshed and connected with the rotating driving gear 12, so that the rotating driving gear 12 can be driven by the rotating driving member 11 to drive the rotating driven gear 14 to rotate, and then the rotating shaft 13 is rotated; wherein, the rotating bearing seat 15 is arranged on the rotating shaft 13.

[0047] In some embodiments, the sliding mechanism 3 includes: a guide rail 16 disposed on the frame 1; a plurality of sliders 17 disposed on the guide rail 16 respectively; and the mounting platform 4 is disposed on the sliders 17 .

[0048] The guide rail 16 is arranged on the rack 1 , and the slider 17 is arranged on the guide rail 16 , so that the connection between the mounting platform 4 and the rack 1 is achieved.

[0049] There are two guide rails 16 , which are respectively arranged on both sides of the frame 1 ; there are six sliders 17 , three sliders 17 are arranged on each guide rail 16 , and the three sliders 17 are arranged on the guide rail 16 at intervals.

[0050] In some embodiments, the cassette transfer device transporter further includes a sliding drive mechanism 18, which is disposed at the bottom of the mounting platform 4. Specifically, the sliding drive mechanism 18 includes: a sliding drive member 19, which is disposed at the bottom of the mounting platform 4; a sliding driving gear 20, which is disposed at one end of the sliding drive member 19; and a rack 21, which is disposed on the frame 1, and the rack 21 is meshed and connected with the sliding driving gear 20.

[0051] The sliding drive member 19 is arranged at the bottom of the mounting platform 4, that is, the mounting platform 4 provides a mounting position for the sliding drive member 19. At the same time, a sliding driving gear 20 is arranged on the sliding drive member 19, and the sliding driving gear 20 is meshed and connected with the rack 21 on the frame 1, that is, the sliding drive member 19 drives the sliding driving gear 20 to rotate, so that the sliding driving gear 20 is meshed with the rack 21, so that the mounting platform 4 can slide along the extension direction of the guide rail 16, thereby ensuring that the transmission is more stable.

[0052] In this embodiment, the rotary drive member 11 and the sliding drive member 19 both include a motor and a reducer, that is, the motor and the reducer are used to provide power for the sliding mechanism 3 and the rotary mechanism 5 .

[0053] In some embodiments, the cassette transfer device transfer vehicle further includes a plurality of positioning blocks (not shown in the figure), which are disposed on the outer edge of the frame 7 and are used to drive the installation position of the cassette 8 .

[0054] A support column (not shown in the figure) may also be provided on the positioning block, and the support column may be used to limit the position of the cassette 8, thereby ensuring that the cassette 8 is ready for positioning.

[0055] There are six positioning blocks, which are arranged at intervals on the outer edge of the frame 7 .

[0056] In some embodiments, the support assembly 2 includes a plurality of feet, and the plurality of feet are spaced apart at the bottom of the frame 1 .

[0057] In some embodiments, the rack 1, the mounting platform 4, the rotating platform 6, the frame 7, and the cassette 8 are all made of aluminum. The rack 1, the mounting platform 4, the rotating platform 6, the frame 7, and the cassette 8 made of aluminum have high wear resistance and are easy to install and adjust.

[0058] So far, the various embodiments of the present application have been described in detail. In order to avoid obscuring the concept of the present application, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here. Although some specific embodiments of the present application have been described in detail by examples, those skilled in the art should understand that the above examples are only for illustration, not for limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified or some technical features can be replaced by equivalents without departing from the scope and spirit of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way.

Claims

1. A cassette transplanting device transfer vehicle, characterized in that: include: A frame (1), wherein a support assembly (2) is provided at the bottom of the frame (1); A sliding mechanism (3) is arranged on the frame (1), and a mounting platform (4) is arranged on the sliding mechanism (3); A rotating mechanism (5) is arranged on the mounting platform (4), and a rotating platform (6) is arranged on the rotating mechanism (5); and The frame (7) is arranged on the rotating platform (6), the rotating platform (6) is located above the mounting platform (4), and a cartridge (8) is arranged on the frame (7).

2. The cassette transplanting device transfer vehicle according to claim 1, characterized in that: The rotating mechanism (5) comprises: A rotation drive assembly (9) is arranged on the mounting platform (4); The rotating assembly (10) is arranged on the rotating platform (6), and the rotating assembly (10) is connected to the rotating driving assembly (9).

3. The cassette transplanting device transfer vehicle according to claim 2, characterized in that: The rotary drive assembly (9) comprises: A rotating driving member (11) connected to the mounting platform (4); The rotating driving gear (12) is arranged at one end of the rotating driving member (11), and the rotating driving gear (12) is connected to the rotating assembly (10).

4. The cassette transplanting device transfer vehicle according to claim 3, characterized in that: The rotary assembly (10) comprises: A rotary shaft (13) passes through the mounting platform (4) and is connected to the rotary platform (6); a rotary driven gear (14) is provided on the rotary shaft (13); and the rotary driven gear (14) is meshedly connected to the rotary driving gear (12); A slewing bearing seat (15) is connected to the slewing shaft (13).

5. The cassette transplanting device transfer vehicle according to any one of claims 1 to 4, characterized in that: The sliding mechanism (3) comprises: A guide rail (16) is arranged on the frame (1); There are multiple sliders (17) which are respectively arranged on the guide rails (16), and the mounting platform (4) is arranged on the sliders (17).

6. The cassette transplanting device transfer vehicle according to claim 5, characterized in that: It also comprises a sliding drive mechanism (18), wherein the sliding drive mechanism (18) is arranged at the bottom of the installation platform (4).

7. The cassette transplanting device transfer vehicle according to claim 6, characterized in that: The sliding drive mechanism (18) comprises: A sliding drive member (19) is arranged at the bottom of the mounting platform (4); A sliding driving gear (20) is arranged at one end of the sliding driving member (19); A rack (21) is arranged on the frame (1), and the rack (21) is meshedly connected with the sliding driving gear (20).

8. The cassette transplanting device transfer vehicle according to claim 1, characterized in that: It also comprises a plurality of positioning blocks, which are arranged on the outer edge of the frame (7) and are used to drive the installation position of the cassette (8).

9. The cassette transplanting device transfer vehicle according to claim 1, characterized in that: The support assembly (2) comprises a plurality of feet, and the plurality of feet are arranged at intervals at the bottom of the frame (1).

10. The cassette transplanting device transfer vehicle according to claim 1, characterized in that: The frame (1), the mounting platform (4), the rotating platform (6), the frame (7), and the cassette (8) are all made of aluminum.

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