Gas flow divider and semiconductor processing equipment

Through the modular design and the use of signal transfer units, the existing gas shunt maintenance costs and slow response speed are solved, and the fast response and low-latency gas shunt control is achieved to meet the needs of various semiconductor processing equipment.

CN222316697UActive Publication Date: 2025-01-07NANCHANG ADVANCED MIRCO FAB EQUIP INC
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Patent Information

Application Number
CN202420625267.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-28
Publication Date
2025-01-07
Estimated Expiration
2034-03-28

AI Technical Summary

Technical Problem

The existing gas diverters have high maintenance and use costs, slow response feedback speed, and lack scalability, making it difficult to meet the needs of changing gas circuit settings.

Method used

The gas shunt adopts a modular design, which simplifies the electrical connection loop through the combination of the controller and the gas shunt module, uses a signal adapter to realize control, omits the logic control unit, uses the EtherCAT interface to improve the response speed, and is assembled through modular Reduce maintenance costs.

Benefits of technology

It realizes the rapid response and low latency of the gas shunt, reduces maintenance costs, improves the application freedom and assembly speed of the equipment, and adapts to the control conditions of various flow ratios.

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Abstract

A gas diverter and semiconductor processing equipment, the gas diverter supplies gas to a reaction chamber in the semiconductor processing equipment, the gas diverter comprises a controller and at least two gas branching modules arranged on a branching gas pipeline, the gas branching modules comprise signal transfer units, and the signal transfer units are connected with the controller. The control valves and the flow sensors are arranged on the branch gas pipelines in series, the signal switching unit is electrically connected with the controller, the control valves and the flow sensors respectively, and the controller receives measurement signals of the flow sensors through the signal switching unit and controls opening and closing of the control valves through the signal switching unit. According to the utility model, all parts are modularly arranged, so that the degree of freedom of product application is improved, the equipment maintenance cost is reduced, the assembly difficulty is reduced, and the signal response speed is improved.
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