Waste photoresist stripping liquid filtering device

Abstract

The utility model relates to a photoresist stripping liquid waste liquid filtering device which comprises a filtering box, a liquid storage bin, a stirring cylinder, a stirring plate, an anti-blocking head, a filtering layer, an adsorption layer and a suction filtration layer, the liquid storage bin is arranged below the filtering box, and the liquid storage bin is connected with the filtering box through a supporting plate; during use, waste liquid enters the stirring barrel, the design of the stirring barrel can ensure that the waste liquid is fully mixed before entering the filtering box, the subsequent filtering effect is improved, then the waste liquid enters the filtering box, and the filtering box is treated through the filtering layer, the adsorption layer and the suction filtration layer; the anti-blocking head is driven to rotate while the waste liquid is stirred through the stirring plate, the height of the anti-blocking head can be adjusted, and when the anti-blocking head makes contact with the upper surface of the filtering layer, the combined design of the stirring plate and the anti-blocking head can effectively prevent solid particles in the waste liquid from blocking the filtering layer in the stirring process.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist stripping liquid processing devices, in particular to a photoresist stripping liquid waste liquid filtering device. Background Art

[0002] Photoresist stripping is a process in which the photoresist swells, softens and dissolves through a chemical reaction between the stripping solution and the photoresist. The general stripping solution is composed of (CH3)2SO in a weight ratio of 7:3. It is a colorless, transparent liquid with a pungent odor. DMSO plays a dual role as a reaction solvent and a reaction reagent in the reaction, allowing certain reactions that cannot be realized to proceed smoothly in DMSO. It has an accelerating and catalytic effect on certain chemical reactions, improves the yield, and improves product performance. Here, its role is to swell the photoresist. The role of MEA is to penetrate the photoresist / film interface, causing the photoresist to detach and dissolve.

[0003] Chinese patent publication number CN214809072U discloses a photoresist stripping liquid waste filtering device, the device includes a vertically arranged liquid storage tank, the liquid storage tank is a box structure with an opening at the top, and a liquid inlet and a liquid outlet are respectively arranged at both ends of the liquid storage tank; a horizontally arranged partition is arranged in the liquid storage tank, and the partition divides the inner cavity of the liquid storage tank into an upper chamber and a lower chamber, and a suction filtration device is arranged in the lower chamber of the liquid storage tank, which penetrates the partition and is connected to the upper chamber, and a filtering unit is arranged in the upper chamber of the liquid storage tank, and a stirring device is also arranged in the upper chamber of the liquid storage tank, and the filtering unit is arranged between the stirring device and the suction filtration device; this new use solves the problems of inconvenient filter membrane replacement and low recovery efficiency in the existing device.

[0004] However, although the photoresist stripping liquid waste liquid filtering device is convenient for replacing the filter membrane, it does not fundamentally solve the problem. The product is prone to clogging when filtering the photoresist stripping liquid waste liquid. Utility Model Content

[0005] In view of the above problems, a photoresist stripping liquid waste liquid filtering device is provided. The design of the stirring drum can ensure that the waste liquid is fully mixed before entering the filter box. In order to prevent the filter layer from being blocked, the waste liquid is stirred by a stirring plate while driving the anti-blocking head to rotate. The height of the anti-blocking head can be adjusted. When the anti-blocking head contacts the upper surface of the filter layer, the combined design of the stirring plate and the anti-blocking head can effectively prevent solid particles in the waste liquid from clogging the filter layer during the stirring process, and it is convenient for users to replace the oil film in the filtration layer.

[0006] In order to solve the problems of the prior art, the utility model provides a photoresist stripping liquid waste liquid filtering device, comprising a filter box, a liquid storage tank, a stirring drum, a stirring plate, an anti-clogging head, a filter layer, an adsorption layer and a suction filtration layer, the liquid storage tank is arranged below the filter box, the liquid storage tank and the filter box are connected by a support plate, the stirring drum is arranged on the top of the filter box, the stirring plate is arranged inside the stirring drum, the anti-clogging head is arranged at equal intervals below the stirring plate, the filter layer is arranged inside the filter box, the adsorption layer is arranged below the filter layer, and the suction filtration layer is arranged below the filter layer.

[0007] Preferably, a barrel cover connected by a positioning screw is arranged on the top of the mixing barrel, a conveying pipe for conveying waste liquid is arranged on one side of the top of the barrel cover, and a ventilation pipe is arranged on the other side of the top of the barrel cover.

[0008] Preferably, a motor is arranged at the top center of the cylinder cover, a transmission rod is arranged at the output end of the motor, a mounting seat matching the stirring plate is annularly distributed on the outer wall of the transmission rod, and a locking bolt for positioning is arranged on the top of the mounting seat.

[0009] Preferably, internal threaded barrels are arranged at equal intervals at the bottom of the stirring plate, and a stud connected to the anti-blocking head is threadedly installed at one end of the internal threaded barrel.

[0010] Preferably, a rubber column is bonded to the bottom of the anti-clogging head, and the rubber column is distributed in an annular shape at the bottom of the anti-clogging head.

[0011] Preferably, a discharge hole is provided at the bottom of the mixing drum, and a circular hole is provided at the top of the filter box, and the discharge hole coincides with the central axis of the circular hole.

[0012] Preferably, a pull plate is provided on one side of the filter box, and a limit plate is provided on one side of the pull plate and inside the filter box. There are multiple limit plates, and the limit plates are matched with the filter layer, the adsorption layer and the filtration layer respectively.

[0013] Preferably, a filter net is arranged inside the filter layer, an activated carbon layer is arranged inside the adsorption layer, and a filter membrane is arranged inside the filtration layer.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] During use, the waste liquid enters the mixing drum. The design of the mixing drum can ensure that the waste liquid is fully mixed before entering the filter box, thereby improving the subsequent filtration effect. Then the waste liquid enters the filter box. The filter box is processed by the filter layer, adsorption layer and suction layer. In order to prevent the filter layer from being blocked, the waste liquid is stirred by the stirring plate while driving the anti-blocking head to rotate. The height of the anti-blocking head can be adjusted. When the anti-blocking head contacts the upper surface of the filter layer, the combined design of the stirring plate and the anti-blocking head can effectively prevent the solid particles in the waste liquid from clogging the filter layer during the stirring process. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The present invention is a schematic diagram of the overall structure of a product of a photoresist stripping liquid waste filtering device.

[0017] Figure 2 The present invention is a schematic diagram of the side structure of a photoresist stripping liquid waste filtering device.

[0018] Figure 3 The present invention is a schematic diagram of a partial cross-sectional structure of a filter box of a photoresist stripping liquid waste filtering device.

[0019] Figure 4 The present invention is a schematic diagram of the structure of a stirring plate of a photoresist stripping liquid waste filtering device.

[0020] Figure 5 The present invention is a schematic diagram of the filter layer structure of a photoresist stripping liquid waste filter device.

[0021] Figure 6 A schematic diagram of the structure of a photoresist stripping liquid waste filtering device.

[0022] The numbers in the figure are: 1. filter box; 2. liquid storage tank; 3. mixing drum; 4. stirring plate; 5. anti-blocking head; 6. filter layer; 7. adsorption layer; 8. suction layer; 9. drum cover; 10. conveying pipe; 11. air vent; 12. transmission rod; 13. mounting seat; 14. internal threaded barrel; 15. stud; 16. pull plate; 17. limit plate; 18. discharge hole; 19. round hole; 20. rubber column. DETAILED DESCRIPTION

[0023] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0024] Please refer to Figures 1 to 6A photoresist stripping liquid waste filtering device comprises a filter box 1, a liquid storage tank 2, a stirring drum 3, a stirring plate 4, an anti-clogging head 5, a filter layer 6, an adsorption layer 7 and a suction filter layer 8, wherein the liquid storage tank 2 is arranged below the filter box 1, and the liquid storage tank 2 and the filter box 1 are connected by a support plate, the stirring drum 3 is arranged at the top of the filter box 1, the stirring plate 4 is arranged inside the stirring drum 3, the anti-clogging head 5 is arranged at equal intervals below the stirring plate 4, the filter layer 6 is arranged inside the filter box 1, the adsorption layer 7 is arranged below the filter layer 6, and the suction filter layer 8 is arranged below the filter layer 6.

[0025] When in use, the waste liquid enters the mixing drum 3. The design of the mixing drum 3 can ensure that the waste liquid is fully mixed before entering the filter box 1, thereby improving the subsequent filtering effect. Then the waste liquid enters the filter box 1, and the filter box 1 is processed by the filter layer 6, the adsorption layer 7 and the suction filter layer 8. In order to prevent the filter layer 6 from being blocked, the waste liquid is stirred by the stirring plate 4 while driving the anti-blocking head 5 to rotate. The height of the anti-blocking head 5 can be adjusted. When the anti-blocking head 5 contacts the upper surface of the filter layer 6, the combined design of the stirring plate 4 and the anti-blocking head 5 can effectively prevent the solid particles in the waste liquid from blocking the filter layer 6 during the stirring process.

[0026] like Figure 2 and Figure 3 As shown, a drum cover 9 connected by a positioning screw is arranged on the top of the mixing drum 3, a conveying pipe 10 for conveying waste liquid is arranged on one side of the top of the drum cover 9, and a vent pipe 11 is arranged on the other side of the top of the drum cover 9.

[0027] The barrel cover 9 is connected to the mixing barrel 3 through a positioning screw, which is convenient for users to disassemble and assemble it. At the same time, it cooperates with the delivery pipe 10 to facilitate the addition of photoresist stripping liquid waste into the mixing barrel 3. At the same time, it cooperates with the air vent pipe 11 to effectively remove the gas generated during the stirring process and maintain the air pressure balance in the mixing barrel 3.

[0028] like Figure 3 and Figure 6 As shown, a motor is arranged at the top center of the cylinder cover 9, a transmission rod 12 is arranged at the output end of the motor, a mounting seat 13 adapted to the stirring plate 4 is distributed in an annular manner on the outer wall of the transmission rod 12, and a locking bolt for positioning is arranged on the top of the mounting seat 13.

[0029] Start the motor, the motor drives the transmission rod 12 and the mounting seat 13 to rotate, the mounting seat 13 drives the stirring plate 4 to provide kinetic energy, and cooperates with the locking bolt to facilitate the user to disassemble and assemble the stirring plate 4.

[0030] like Figure 4 As shown, internal threaded barrels 14 are arranged at equal intervals at the bottom of the stirring plate 4 , and a stud 15 connected to the anti-blocking head 5 is threadedly installed at one end of the internal threaded barrel 14 .

[0031] The stud 15 is rotated and matched with the internal threaded tube 14. The length of the stud 15 can be adjusted. The stud 15 drives the anti-clogging head 5, which is convenient for the user to remove particles on the surface of the filter layer 6 to avoid clogging.

[0032] like Figure 4 As shown, a rubber column 20 is bonded to the bottom of the anti-blocking head 5 , and the rubber column 20 is distributed in an annular shape at the bottom of the anti-blocking head 5 .

[0033] The rubber column 20 is soft and avoids damaging the filter layer 6 .

[0034] like Figure 3 and Figure 5 As shown, a discharge hole 18 is provided at the bottom of the mixing drum 3 , and a circular hole 19 is provided at the top of the filter box 1 . The discharge hole 18 coincides with the central axis of the circular hole 19 .

[0035] The center axis of the discharge hole 18 coincides with the center axis of the circular hole 19, which facilitates the flow of waste liquid.

[0036] like Figure 2 and Figure 5 As shown, a pull plate 16 is provided on one side of the filter box 1, and a limit plate 17 is provided on one side of the pull plate 16 and inside the filter box 1. There are multiple limit plates 17, and the limit plates 17 are matched with the filter layer 6, the adsorption layer 7 and the filtration layer 8 respectively.

[0037] The design of the pull plate 16 and the limit plate 17 facilitates the replacement or cleaning of the filter layer 6, the adsorption layer 7 and the suction filter layer 8, thereby increasing the maintainability and usability of the equipment.

[0038] like Figure 5 As shown, a filter mesh is disposed inside the filter layer 6, an activated carbon layer is disposed inside the adsorption layer 7, and a filter membrane is disposed inside the suction filtration layer 8.

[0039] The waste liquid is initially filtered through the filter screen of the filter layer 6 to remove large particles of impurities. The filtered waste liquid enters the adsorption layer 7 and adsorbs organic pollutants through the activated carbon layer. The adsorbed waste liquid is then finely filtered through the filter membrane of the suction filter layer 8 to remove tiny particles.

[0040] The above embodiments only express one or several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the attached claims.

Claims

1. A photoresist stripping liquid waste liquid filtering device, characterized in that: The invention comprises a filter box (1), a liquid storage tank (2), a stirring drum (3), a stirring plate (4), an anti-clogging head (5), a filter layer (6), an adsorption layer (7) and a suction filter layer (8), wherein the liquid storage tank (2) is arranged below the filter box (1), the liquid storage tank (2) and the filter box (1) are connected via a support plate, the stirring drum (3) is arranged at the top of the filter box (1), the stirring plate (4) is arranged inside the stirring drum (3), the anti-clogging head (5) is arranged below the stirring plate (4) at equal intervals, the filter layer (6) is arranged inside the filter box (1), the adsorption layer (7) is arranged below the filter layer (6), and the suction filter layer (8) is arranged below the filter layer (6).

2. A photoresist stripping liquid waste liquid filtering device according to claim 1, characterized in that: The top of the mixing drum (3) is provided with a drum cover (9) connected via a positioning screw, one side of the top of the drum cover (9) is provided with a delivery pipe (10) for delivering waste liquid, and the other side of the top of the drum cover (9) is provided with a ventilation pipe (11).

3. A photoresist stripping liquid waste liquid filtering device according to claim 2, characterized in that: A motor is arranged at the top center of the cylinder cover (9), a transmission rod (12) is arranged at the output end of the motor, a mounting seat (13) adapted to the stirring plate (4) is distributed in an annular pattern on the outer wall of the transmission rod (12), and a locking bolt for positioning is arranged at the top of the mounting seat (13).

4. A photoresist stripping liquid waste liquid filtering device according to claim 3, characterized in that: Internally threaded barrels (14) are arranged at equal intervals at the bottom of the stirring plate (4), and a stud (15) connected to the anti-blocking head (5) is threadedly mounted on one end of the internally threaded barrel (14).

5. A photoresist stripping liquid waste filtering device according to claim 4, characterized in that: A rubber column (20) is bonded to the bottom of the anti-blocking head (5), and the rubber column (20) is distributed in an annular shape at the bottom of the anti-blocking head (5).

6. A photoresist stripping liquid waste liquid filtering device according to claim 5, characterized in that: The bottom of the mixing drum (3) is provided with a discharge hole (18), the top of the filter box (1) is provided with a circular hole (19), and the center axis of the discharge hole (18) coincides with the center axis of the circular hole (19).

7. A photoresist stripping liquid waste liquid filtering device according to claim 6, characterized in that: A pull plate (16) is provided on one side of the filter box (1), and a limit plate (17) is provided on one side of the pull plate (16) and located inside the filter box (1), and a plurality of limit plates (17) are provided, and the limit plates (17) are matched with the filter layer (6), the adsorption layer (7) and the suction layer (8), respectively.

8. A photoresist stripping liquid waste filtering device according to claim 7, characterized in that: The filter layer (6) is provided with a filter screen inside, the adsorption layer (7) is provided with an activated carbon layer inside, and the suction filtration layer (8) is provided with a filter membrane inside.

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