Chain plate conveying mechanism and drying equipment

Abstract

The utility model discloses a chain plate conveying mechanism and drying equipment, which comprise a chain plate assembly, a chain plate conveying mechanism and a drying mechanism, the chain plate assembly consists of a plurality of groups of chain plate bodies, and the adjacent chain plate bodies are hinged with each other; the carrier is configured on the chain plate body, and the carrier is configured to be capable of moving and changing positions in the moving direction of the chain plate body; kidney-shaped holes are formed in the carrier, screw holes are formed in the surface of the chain plate body, and the carrier is connected with the chain plate body through bolts. The utility model can solve the problems that the traditional chain is difficult to convey a large batch of silicon wafers at one time, and the drying efficiency and the production efficiency of the silicon wafers are influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of drying equipment, in particular to a chain conveying mechanism and drying equipment. Background Art

[0002] When processing and drying silicon wafers, the silicon wafers are placed on a basket. When the basket and silicon wafers are sent into the drying equipment, they are generally sent by a chain or a conveyor belt. However, when facing the drying of large quantities of silicon wafers, the traditional chain or conveyor belt conveying method is difficult to form a carrying and conveying method for the basket and the silicon wafers on the basket, which leads to a reduction in the number of silicon wafers entering the oven at one time, resulting in low silicon wafer drying efficiency and affecting the production efficiency of the silicon wafers. In addition, directly placing the basket loaded with silicon wafers on the chain or conveyor belt will cause the basket to shift during the transportation process, affecting the safety of silicon wafer drying. Utility Model Content

[0003] The utility model aims to solve the above technical problem, that is, the problem that the traditional chain is difficult to transport a large number of silicon wafers at one time, which affects the drying efficiency and production efficiency of the silicon wafers.

[0004] In a first aspect, the utility model provides a chain conveying mechanism, comprising:

[0005] A chain plate assembly, wherein the chain plate assembly is composed of a plurality of chain plate bodies, and adjacent chain plate bodies are hinged to each other;

[0006] A carrier is arranged on the chain plate body, and the carrier is arranged to be movable and transposed along the movement direction of the chain plate body.

[0007] The present application installs a carrier on each chain plate body, and uses the carrier to carry the flower basket loaded with silicon wafers. By utilizing the strength of the chain plate body, large quantities of silicon wafers can be transported, thereby improving the drying and production efficiency of the silicon wafers.

[0008] In the preferred technical solution of the above-mentioned chain plate conveying mechanism, a waist-shaped hole is formed on the carrier, screw holes are opened on the surface of the chain plate body, and the carrier and the chain plate body are connected by bolts.

[0009] In the preferred technical solution of the above-mentioned chain conveying mechanism, the carrier is provided with a countersunk hole at the waist-shaped hole, and the bolt is located in the countersunk hole.

[0010] In the preferred technical solution of the above-mentioned chain plate conveying mechanism, the chain plate body has a first side, a second side, a third side and a fourth side which are adjacent to each other in sequence, wherein the first side is formed with a plurality of first hinge protrusions which are arranged at intervals, and the third side is formed with a plurality of second hinge protrusions which are arranged at intervals, and the first hinge protrusion of the chain plate body can be inserted into the second hinge protrusion of the adjacent chain plate body.

[0011] In the preferred technical solution of the above-mentioned chain conveying mechanism, a card slot is opened on the bottom surface of the second side and the fourth side of the chain body, and a card block is arranged in the card slot, and the card block is used to block the hinge shaft connecting the adjacent chain bodies.

[0012] In the preferred technical solution of the above-mentioned chain conveyor mechanism, an arc-shaped groove for placing objects is formed on the carrier.

[0013] In the preferred technical solution of the above-mentioned chain conveying mechanism, the chain is made of one of metal and hard plastic.

[0014] In a second aspect, the utility model further provides a drying device, which includes the above-mentioned chain conveying mechanism.

[0015] The beneficial effect of the utility model is that by installing a carrier on each chain plate body, the carrier carries the flower basket loaded with silicon wafers, and utilizes the strength of the chain plate body to form a large-scale transportation of silicon wafers, thereby improving the drying and production efficiency of silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a top view of the utility model;

[0017] Figure 2 It is a three-dimensional schematic diagram of the utility model;

[0018] Figure 3 is a schematic diagram of the chain plate body;

[0019] Figure 4 The first schematic diagram is a diagram of placing a silicon wafer on a flower basket;

[0020] Figure 5 A second schematic diagram showing the placement of silicon wafers on a flower basket;

[0021] Figure 6 This is a first schematic diagram of a flower basket being placed on a chain plate body by a carrier;

[0022] Figure 7 A second schematic diagram showing a flower basket being placed on the chain plate body by a carrier;

[0023] Figure 8 It is a structural schematic diagram of a card block and a card slot;

[0024] In the figure:

[0025] Silicon wafer 101, flower basket 102;

[0026] The chain plate body 1 , the first side 10 , the second side 11 , the third side 12 , the fourth side 13 , the first hinge protrusion 14 , the second hinge protrusion 15 , the screw hole 16 , the clamping groove 17 , the carrier 2 , the waist-shaped hole 21 , the arc-shaped groove 22 , the countersunk hole 23 , and the clamping block 3 . DETAILED DESCRIPTION

[0027] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0028] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Based on the problem pointed out in the background technology that it is difficult for traditional chains to transport large quantities of silicon wafers 101 at one time, which affects the drying efficiency and production efficiency of the silicon wafers 101. The utility model provides a chain plate conveying mechanism, which aims to install a carrier 2 on each chain plate body 1, and use the carrier 2 to carry the flower basket 102 loaded with silicon wafers 101. By utilizing the strength of the chain plate body 1, a large number of silicon wafers 101 can be transported, and the drying and production efficiency of the silicon wafers 101 can be improved. At the same time, the flower basket 102 is limited by the carrier 2, which can effectively avoid the phenomenon of the flower basket 102 slipping during the transportation process.

[0031] like Figures 1 to 8As shown, the chain plate conveying mechanism of the utility model includes: a chain plate assembly, the chain plate assembly is composed of a plurality of groups of chain plate bodies 1, the chain plate body 1 has a first side 10, a second side 11, a third side 12 and a fourth side 13 adjacent to each other in sequence, wherein the first side 10 is formed with a plurality of first hinge protrusions 14 arranged at intervals, and the third side 12 is formed with a plurality of second hinge protrusions 15 arranged at intervals, and the first hinge protrusions 14 of the chain plate body 1 can be inserted into the second hinge protrusions 15 of the adjacent chain plate body 1 to realize mutual hinge connection between the adjacent chain plate bodies 1; a carrier 2, the carrier 2 is arranged on the chain plate body 1, and the carrier 2 is configured to be movable and displaced along the movement direction of the chain plate body 1.

[0032] See also Figure 3 , illustratively, there are five first hinge protrusions 14 at the first side 10 of the chain plate body 1, and there are five second hinge protrusions 15 at the third side 12 of the chain plate body 1. The first hinge protrusions 14 and the second hinge protrusions 15 both have hinge holes, and the positions of the five first hinge protrusions 14 and the five second hinge protrusions 15 are arranged in sequence at intervals; when the connected chain plate bodies 1 need to be connected, first insert the second hinge protrusion 15 at the third side 12 of one chain plate body 1 into the first hinge protrusion 14 at the first side 10 of the other chain plate body 1, and then use the hinge shaft to hinge and fix the two chain plate bodies 1.

[0033] See also Figure 1 , Figure 2 , Figure 6 , Figure 7 , the carrier 2 is used to place the flower basket 102, and a plurality of silicon wafers 101 are placed in the flower basket 102. The carrier 2 is configured on the chain plate body 1, and one carrier 2 can be configured on each chain plate body 1, or the carrier 2 can be configured on the spaced chain plate bodies 1, without specific limitation. The position of the carrier 2 can be adjusted along the second side 11 of the chain plate body 1 to meet the spacing requirements between the carriers 2. The present application realizes the transportation of the flower basket 102 loaded with silicon wafers 101 by installing the carrier 2 on the chain plate body 1. The chain plate body 1 has high strength and can transport more silicon wafers 101 at one time, thereby improving the transportation efficiency of the silicon wafers 101 of the present application and improving the processing efficiency of the silicon wafers 101.

[0034] In one or more embodiments, a waist-shaped hole 21 is formed on the carrier 2, and a screw hole 16 is opened on the surface of the chain plate body 1, and the carrier 2 and the chain plate body 1 are connected by bolts.

[0035] See also Figure 1 , Figure 2 A waist-shaped hole 21 is formed on the carrier 2 along the second side 11 or the fourth side 13 of the chain plate body 1; there are two waist-shaped holes 21, which are respectively arranged on both sides of the carrier 2, and correspondingly, each chain plate body 1 is provided with a screw hole 16 corresponding to the position of the waist-shaped hole 21.

[0036] When installing the carrier 2 on the chain plate body 1, the bolt is passed through the waist-shaped hole 21 on the carrier 2, and then the bolt is tightened on the chain plate body 1; when the position of the carrier 2 is adjusted along the direction of the second side 11 or the fourth side 13, the bolt is first loosened, and then the position of the carrier 2 is moved, and then the bolt is tightened on the carrier 2 again. It has the characteristics of simple structure and convenient operation.

[0037] In other possible implementations, the chain plate body 1 is formed with an inclined “concave” structured limit block in the direction of the second side 11 or the fourth side 13 , and the carrier 2 is formed with a sliding block adapted to the limit block.

[0038] When installing the carrier 2 on the chain plate body 1, the slider formed on the carrier 2 is clamped in the limit block of the chain plate body 1, and then the bolts are passed through the carrier 2 to tighten it on the chain plate body 1; by connecting the carrier 2 to the chain plate body 1 in this way, the damage to the chain plate body 1 can be reduced and the service life of the chain plate body 1 can be increased.

[0039] In one or more embodiments, an arc-shaped groove 22 for placing objects is formed on the carrier 2 .

[0040] See also Figure 2 The arc groove 22 is used to place the shaft of the flower basket 102, forming a supporting effect on the flower basket 102, so that the flower basket 102 loaded with more silicon wafers 101 can be stably transported by the chain plate assembly. In other possible embodiments, the surface of the arc groove 22 has a friction-enhancing structure, and the friction-enhancing structure can be a regular pattern engraved on the surface of the arc groove 22; through this arrangement, the stability of the carrier 2 in transporting the flower basket 102 loaded with silicon wafers 101 can be further guaranteed.

[0041] In one or more embodiments, the carrier 2 is provided with a countersunk hole 23 at the waist-shaped hole 21 , and the bolt is located in the countersunk hole 23 .

[0042] See also Figure 2 The top of the countersunk hole 23 is located below the lowest end of the arc groove 22. Through this arrangement, the bolts located in the waist-shaped hole 21 can be prevented from blocking the arc groove 22, and the bolts can be prevented from interfering with the flower basket 102 in the arc groove 22, thereby ensuring the conveying effect of the flower basket 102 loaded with silicon wafers 101 in this application.

[0043] In one or more embodiments, a card slot 17 is opened on the bottom surface of the second side 11 and the fourth side 13 of the chain plate body 1, and a card block 3 is arranged in the card slot 17, and the card block 3 is used to block the hinge shaft connecting adjacent chain plate bodies 1.

[0044] See also Figure 8The card slot 17 and the card block 3 are arranged on the surface of the chain plate body 1 on the side away from the carrier 2. Each chain plate body 1 is provided with a card slot 17 and a card block 3 at the ends of the second side edge 11 and the fourth side edge 13. The card block 3 blocks both ends of the hinge shaft to avoid the problem of the hinge shaft falling off when the chain plate body 1 moves, thereby improving the use effect of the present application.

[0045] In one or more embodiments, the chain plate is made of one of metal and hard plastic.

[0046] In addition, the utility model also provides a drying device, which has the chain conveying mechanism in any of the above embodiments.

[0047] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A chain conveyor mechanism, characterized in that: include: A chain plate assembly, wherein the chain plate assembly is composed of a plurality of chain plate bodies, and adjacent chain plate bodies are hinged to each other; A carrier is arranged on the chain plate body, and the carrier is arranged to be movable and transposed along the movement direction of the chain plate body.

2. The chain conveyor mechanism according to claim 1, characterized in that: A waist-shaped hole is formed on the carrier, and screw holes are opened on the surface of the chain plate body. The carrier and the chain plate body are connected by bolts.

3. The chain conveyor mechanism according to claim 2, characterized in that: The carrier is provided with a countersunk hole at the waist-shaped hole, and the bolt is located in the countersunk hole.

4. The chain conveyor mechanism according to claim 1, characterized in that: The chain plate body has a first side, a second side, a third side and a fourth side which are adjacent to each other in sequence, wherein the first side is formed with a plurality of first hinge protrusions which are spaced apart, and the third side is formed with a plurality of second hinge protrusions which are spaced apart, and the first hinge protrusion of the chain plate body can be inserted into the second hinge protrusion of the adjacent chain plate body.

5. The chain conveyor mechanism according to claim 4, characterized in that: A clamping groove is provided on the bottom surface of the second side edge and the fourth side edge of the chain plate body, and a clamping block is arranged in the clamping groove, and the clamping block is used to block the hinge shaft connecting the adjacent chain plate bodies.

6. The chain conveyor mechanism according to claim 1, characterized in that: The carrier is formed with an arc-shaped groove for placing objects.

7. The chain conveyor mechanism according to claim 1, characterized in that: The chain plate is made of one of metal and hard plastic.

8. A drying device, characterized in that: It comprises the chain conveying mechanism described in any one of claims 1 to 7.

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