Swing frame structure for double-sided coating device and vacuum coating device

Abstract

The utility model relates to a vacuum coating device which comprises an unwinding roller and a winding roller, and further comprises a swing frame structure for a double-sided coating device, a first swing frame mechanism is arranged at the front end of the unwinding roller, a second swing frame mechanism is arranged at the front end of the winding roller, and the first swing frame mechanism and the second swing frame mechanism are both connected with a linkage driving mechanism. The linkage driving mechanism is arranged, the telescopic arm and the supporting arm are used for controlling the swing frame mechanism of the unwinding roller, the first connecting rod and the second connecting rod are used for controlling the swing frame mechanism of the winding roller, and the telescopic arm and the first connecting rod are fixed to the same cross beam. The cross beam is driven to rotate, meanwhile, the passing rollers on the swing frame mechanisms on the two sides are controlled to keep a preset distance from the outermost layer of a film roll on the corresponding unwinding roller or winding roller, and therefore the two swing frame mechanisms are controlled through one driving mechanism, the driving cost is reduced, occupied space in a vacuum cavity is reduced, and the production efficiency is improved. And the pressure of the vacuum pump is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a swing frame structure for a double-sided coating device and a vacuum coating device. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the plated object (metal, semiconductor or insulator) to form a thin film. In the vacuum coating device, a swing frame structure is set in front of the winding roller, which can be used to ensure that the film surface is flat during the winding process.

[0003] For example, a Chinese utility model with publication number CN210886191U discloses an evaporation vacuum coating device. When a winding mechanism is used for winding, as the coil increases, the winding swing frame assembly has a follow-up movement function, and the winding swing frame assembly can rotate so that the winding swing frame assembly maintains a preset distance from the outermost layer of the flexible film on the winding mechanism, which can ensure that the film surface is flat during the winding process. Specifically, the winding swing frame assembly includes a winding swing frame body and a first winding roller, a winding flattening roller, a second winding roller, and a third winding roller installed on the winding swing frame body, which are sequentially arranged along the conveying path of the flexible film. The winding swing frame body can rotate around the first winding roller so that the third winding roller maintains a preset distance from the outermost layer of the wound flexible film on the winding mechanism.

[0004] Similarly, the above-mentioned device also has an unwinding swing frame assembly in front of the unwinding roller. When the unwinding mechanism is used for unwinding, as the roll material is reduced, the unwinding swing frame assembly has a follow-up movement function. The unwinding swing frame assembly can rotate so that the unwinding swing frame assembly maintains a preset distance from the outermost layer of the wound flexible film on the unwinding mechanism, thereby ensuring that the film surface is flat during the unwinding process.

[0005] Since the swing frame assembly at the unwinding end and the swing frame assembly at the winding end are separately arranged, the driving mechanisms of the two swing frame assemblies are also separate. One driving mechanism controls one swing frame. The two driving mechanisms are relatively expensive and occupy more space inside the vacuum chamber, requiring a larger vacuum chamber. The vacuum pumping operation pressure of a large vacuum chamber is relatively high, and the cost is also increased. Utility Model Content

[0006] In order to solve the problem that in the existing vacuum coating device, when swing frame assemblies are provided at both the wind-up roller and the unwinding roller, two driving mechanisms are required, resulting in a large occupancy rate inside the vacuum coating chamber, the utility model provides a swing frame structure for a double-sided coating device and a vacuum coating device.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A swing frame structure for a double-sided coating device, comprising two swing frame mechanisms respectively arranged on an unwinding roller and a winding roller, characterized in that it also comprises a linkage driving mechanism, the linkage driving mechanism comprises a cylinder, a crossbeam, a telescopic arm, a support arm, a first connecting rod and a second connecting rod, the two ends of the crossbeam are rotatably arranged on the side wall of a vacuum chamber, and one end thereof is drivingly connected to the cylinder on the outer wall of the vacuum chamber, and the cylinder drives the crossbeam to rotate; one end of the telescopic arm is fixed to the crossbeam, and the other end is hinged to one end of the support arm, and the other end of the support arm is rotationally connected to the swing frame mechanism of the unwinding roller;

[0009] One end of the first connecting rod is fixed on the crossbeam, and the other end is hinged to one end of the second connecting rod. The other end of the second connecting rod is rotatably connected to the swing frame mechanism of the winding roller.

[0010] By adopting the above technical solution, the rotation of the beam can simultaneously drive the telescopic arm and the first connecting rod to rotate around the axis of the beam, and the telescopic arm pulls or pushes the swing mechanism on the same side to rotate through the support arm, and the first connecting rod pulls or pushes the swing mechanism on the same side to rotate through the second connecting rod.

[0011] As a preferred technical solution of the utility model, the swing frame mechanism includes swing frame plates and a rotating column on both sides, and also includes a cross bar, a flattening roller and a passing roller arranged in parallel between the two swing frame plates. One end of the rotating column is fixedly connected to the side wall of the vacuum chamber, and the other end is rotatably connected to the swing frame plate on the corresponding side, and the swing frame plate rotates around the rotating column.

[0012] Furthermore, the passing roller of the winding roller swing frame mechanism is arranged on the corresponding swing frame plate at one end close to the winding roller, the passing roller of the unwinding roller swing frame mechanism is arranged on the corresponding swing frame plate at one end close to the unwinding roller, the cross bar of the two swing frame mechanisms is arranged on the other end of the swing frame plate away from the passing roller, and the flattening rollers of the two swing frame mechanisms are arranged between the passing roller and the cross bar.

[0013] Furthermore, the two swing frames of the swing frame mechanism are arranged opposite to each other on the left and right sides, and the inner sides of the two swing frames are respectively provided with roller mounting holes, flattening roller mounting holes and cross bar mounting holes corresponding to the roller, the flattening roller and the cross bar. The roller is rotatably arranged in the roller mounting hole through a roller bearing, the flattening roller is rotatably arranged in the flattening roller mounting hole through a flattening roller bearing, and the cross bar is rotatably arranged in the cross bar mounting hole through a cross bar bearing.

[0014] Furthermore, a rotating column mounting hole corresponding to the rotating column is provided on the outer side of the swing frame plate, and the rotating column is rotatably arranged in the rotating column mounting hole through a rotating column bearing.

[0015] As a preferred technical solution of the utility model, the end of the support arm is rotatably connected to the first cross bar of the unwinding roller swing frame mechanism and is located below the first cross bar; the end of the second connecting rod is rotatably connected to the second cross bar of the winding roller swing frame mechanism and is located above the second cross bar.

[0016] As a preferred technical solution of the utility model, the output shaft of the cylinder is rotatably connected to one end of the third connecting rod, and the other end of the third connecting rod is fixedly connected to the end of the beam. The cylinder is used to drive the third connecting rod to swing back and forth to drive the beam to rotate.

[0017] As a preferred technical solution of the utility model, the two side walls of the vacuum chamber are respectively provided with beam mounting holes corresponding to the two ends of the beam, and the two ends of the beam are sleeved with beam bearings. The beam is rotatably arranged in the beam mounting hole through the beam bearings.

[0018] As a preferred technical solution of the utility model, a counterweight mechanism is provided at one end of the crossbeam away from the cylinder, and the counterweight mechanism includes a counterweight block, a fourth connecting rod and a fifth connecting rod. The counterweight block is located below the crossbeam and connected to one end of the fourth connecting rod, the other end of the fourth connecting rod is hinged to one end of the fifth connecting rod, and the other end of the fifth connecting rod is fixedly connected to the end of the crossbeam.

[0019] By adopting the above technical solution, when the crossbeam rotates, the fifth connecting rod is driven to rotate around the axis of the crossbeam, thereby driving the counterweight block to move up and down through the fourth connecting rod.

[0020] The utility model also provides a vacuum coating device, including a unwinding roller and a winding roller, and also includes the swing frame structure for the double-sided coating device described in the above scheme, the two swing frame mechanisms are respectively arranged corresponding to the unwinding roller and the winding roller, the swing frame mechanism includes a first swing frame mechanism and a second swing frame mechanism, the first swing frame mechanism and the second swing frame mechanism are both connected to a linkage drive mechanism.

[0021] The utility model according to the above scheme has the following beneficial effects:

[0022] The utility model sets a linkage driving mechanism, uses a telescopic arm and a supporting arm to control the swinging frame mechanism of the unwinding roller, uses a first connecting rod and a second connecting rod to control the swinging frame mechanism of the winding roller, and the telescopic arm and the first connecting rod are fixed on the same crossbeam, so that the rollers on the swinging frame mechanisms on both sides are controlled to maintain a preset distance with the outermost layer of the film roll on the corresponding unwinding roller or winding roller while driving one crossbeam to rotate, so that one driving mechanism controls two swinging frame mechanisms, thereby reducing the driving cost, reducing the space occupied in the vacuum chamber, and helping to reduce the pressure of the vacuum pump;

[0023] Furthermore, by setting a telescopic arm to adjust the rotation variation of the swing plate of the first swing mechanism, the swing mechanisms on both sides can share the same drive and both swing mechanisms can have a good film surface smoothing effect on the film roll on their side. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the utility model;

[0025] Figure 2 It is a structural schematic diagram of the unwinding roller part in the utility model;

[0026] Figure 3 It is a schematic diagram of the connection between the cylinder and the crossbeam;

[0027] Figure 4 It is a schematic diagram of the connection between the counterweight block and the crossbeam;

[0028] Figure 5 This is a comparison diagram of the telescopic arm before and after extension;

[0029] Figure 6 It is a schematic diagram of the rotation trajectory of the swing frame plate and the short telescopic arm;

[0030] Figure 7 It is a schematic diagram of the rotation trajectory of the swing frame plate and the long telescopic arm;

[0031] Figure 8 It is a schematic diagram of the swing plate after the short telescopic arm rotates at an angle α;

[0032] Fig. 9 Schematic diagram of the swing plate after the long telescopic arm rotates through an angle α.

[0033] In the figure,

[0034] 1. Unwinding roller; 2. Winding roller; 3. Swinging frame plate; 4. Passing roller; 5. Rotating column; 6. Cross bar; 7. Flattening roller; 8. Support arm; 9. Telescopic arm; 10. Cross beam; 101. Cross beam bearing; 11. First connecting rod; 12. Second connecting rod; 13. Third connecting rod; 14. Fourth connecting rod; 15. Fifth connecting rod; 16. Counterweight; 17. Side wall; 18. Film; 19. Cylinder. DETAILED DESCRIPTION

[0035] In order to better understand the purpose, technical solution and technical effect of the utility model, the utility model is further explained in conjunction with the drawings and embodiments below. It should be noted that similar numbers and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, it is stated that the embodiments described below are only used to explain the utility model and are not used to limit the utility model.

[0036] It should be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may also be a central element, and when an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time.

[0037] The indicated orientation or position relationship is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the product of the application is usually placed when used, or the orientation or position relationship commonly understood by technical personnel in this field, or the orientation or position relationship in which the product of the application is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0038] The terms "first" and "second" are only used for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined.

[0039] Embodiment 1

[0040] like Figure 1 and Figure 2 As shown, a vacuum coating device is an evaporation coating device or a magnetron sputtering coating device, and the vacuum coating device includes a vacuum chamber and an unwinding roller 1 and a winding roller 2 arranged in the vacuum chamber. The installation structure is: the two side walls 17 of the vacuum chamber are provided with unwinding roller mounting holes corresponding to the unwinding roller 1, and the two ends of the unwinding roller 1 are sleeved with unwinding roller bearings, and the two ends of the unwinding roller 1 are rotatably arranged in the unwinding roller mounting holes on both sides through the unwinding roller bearings, and one end of the unwinding roller 1 is connected to the unwinding drive motor. The two side walls 17 of the vacuum chamber are provided with winding roller mounting holes corresponding to the winding roller 2, and the two ends of the winding roller 2 are sleeved with winding roller bearings, and the two ends of the winding roller 2 are rotatably arranged in the winding roller mounting holes on both sides through the winding roller bearings, and one end of the winding roller 2 is connected to the winding drive motor. When the unwinding drive motor and the winding drive motor are working, the film is unwound from the unwinding roller 1 and gradually wound on the winding roller 2.

[0041] The vacuum coating device has a swing frame structure, which includes a first swing frame mechanism and a second swing frame mechanism. Specifically, the unwinding roller 1 is provided with a first swing frame mechanism, and the winding roller 2 is provided with a second swing frame mechanism. The two swing frame mechanisms have the same structure, and both include a swing frame plate 3, a passing roller 4, a rotating column 5, a flattening roller 7, and a cross bar 6. Taking the first swing frame mechanism as an example, the swing frame plates 3 on the left and right sides are correspondingly arranged, the passing roller 4, the flattening roller 7, and the cross bar 6 are arranged in parallel between the two swing frame plates 3, and the two rotating columns 5 are arranged on the outer side surfaces of the swing frame plates 3 on both sides. The ends of the passing roller 4, the flattening roller 7, the cross bar 6 and the rotating column 5 can all be rotatably set on the swing frame plate 3. Specifically, the inner side of the swing frame plate 3 is respectively provided with a passing roller mounting hole, a flattening roller mounting hole and a cross bar mounting hole corresponding to the passing roller 4, the flattening roller 7 and the cross bar 6, and the outer side of the swing frame plate 3 is provided with a rotating column mounting hole corresponding to the rotating column 5; the end of the passing roller 4 is sleeved with a passing roller bearing, the end of the flattening roller 7 is sleeved with a flattening roller bearing, the end of the cross bar 6 is sleeved with a cross bar bearing, and the end of the rotating column 5 is provided with a rotating column bearing; thereby achieving: the passing roller 4 is rotatably set in the passing roller mounting hole through the passing roller bearing, the flattening roller 7 is rotatably set in the flattening roller mounting hole through the flattening roller bearing, the cross bar 6 is rotatably set in the cross bar mounting hole through the cross bar bearing, and the rotating column 5 is rotatably set in the rotating column mounting hole through the rotating column bearing.

[0042] Figure 1 To show the device from the outside, it can be seen from the figure that the crossbar 6 and the roller 4 are rotatably arranged at the two ends of the swing frame plate 3, and because the swing frame plate 3 rotates around the rotating column 5, the crossbar 6 and the roller 4 rotate around the rotating column 5. The roller 4 of the first swing frame mechanism corresponds to the end of the swing frame plate 3 close to the unwinding roller 1, the crossbar 6 corresponds to the other end of the swing frame plate 3, the flattening roller 7 is located between the roller 4 and the crossbar 6, and the rotating column 5 and the flattening roller 7 are located on the inner and outer sides of the middle of the swing frame plate 3; similarly, the roller 4 of the second swing frame mechanism corresponds to the end of the two swing frame plates 3 close to the winding roller 2, the crossbar 6 corresponds to the other end of the two swing frame plates 3, the flattening roller 7 is located between the roller 4 and the crossbar 6, and the rotating column 5 and the flattening roller 7 are located on the inner and outer sides of the middle of the swing frame plate 3.

[0043] The first swing frame mechanism is arranged behind the unwinding roller 1, and the second swing frame mechanism is arranged in front of the winding roller 2. After the film is unwound from the unwinding roller 1, it passes through the roller 4, the flattening roller 7, and the cross bar 6 of the first swing frame mechanism in sequence, and then passes through the two evaporation mechanisms to complete the double-sided coating of the film, and then passes through the cross bar 6, the flattening roller 7, and the roller 4 of the second swing frame mechanism in sequence, and finally is wound on the winding roller 2. The two swing frames have the same function, but they act on different objects. The roller 4 of the first swing frame mechanism is used to maintain a preset distance from the outermost layer of the flexible film wound on the unwinding mechanism to keep the film surface flat during the unwinding process; the roller 4 of the second swing frame mechanism is used to maintain a preset distance from the outermost layer of the flexible film wound on the winding mechanism to keep the film surface flat during the winding process.

[0044] In the utility model, the swing frame structure also includes a linkage drive mechanism, which includes a cylinder 19, a crossbeam 10, a telescopic arm 9, a support arm 8, a first connecting rod 11 and a second connecting rod 12. The cylinder 19 is arranged on the outer side wall of the vacuum chamber. Both ends of the crossbeam are rotatably connected to the side wall 17 of the vacuum chamber, and the end of the crossbeam passes through the side wall 17, and one end is transmission-connected to the cylinder 19, so that the cylinder 19 drives the crossbeam 10 to rotate. One end of the telescopic arm 9 is fixed on the crossbeam 10, and the other end is hinged to one end of the support arm 8. The length of the telescopic arm 9 can be automatically telescopically adjusted according to the set program instructions, and the end of the telescopic arm 9 that is hinged to the support arm 8 is the movable end. The movable end of the telescopic arm 9 is hinged to the end of the support arm 8 through a hinge shaft. The other end of the support arm 8 is rotatably connected to the swing frame mechanism of the unwinding roller 1, and specifically, the other end of the support arm 8 is rotatably connected to the crossbar 6 of the first swing frame mechanism. One end of the first connecting rod 11 is fixed to the crossbeam 10, and the other end is hinged to one end of the second connecting rod 12. The end of the first connecting rod 11 is hinged to the end of the second connecting rod 12 through a hinge shaft. The other end of the second connecting rod 12 is rotatably connected to the swing frame mechanism of the winding roller 2, specifically, the other end of the second connecting rod 12 is rotatably connected to the crossbar 6 of the second swing frame mechanism.

[0045] By setting a linkage drive mechanism, when the crossbeam 10 rotates clockwise under the drive of the cylinder, the telescopic arm 9 rotates clockwise and pulls the support arm 8 toward the side away from the unwinding roller 1, and the support arm 8 pulls the swing frame plate 3 through the corresponding crossbar 6. The swing frame plate 3 rotates around the rotating column 5, and the roller 4 at one end of the swing frame plate 3 close to the unwinding roller 1 is close to the unwinding roller 1. As the film on the unwinding roller 1 is gradually unwound, the diameter of the film roll becomes smaller, and the roller 4 is close to the unwinding roller 1 and always maintains a preset distance from the outermost layer of the film roll, so as to keep the film surface flat during the unwinding process. While the crossbeam 10 rotates clockwise, the first connecting rod 11 rotates clockwise and pulls the second connecting rod 12 toward the side away from the winding roller 2, and the second connecting rod 12 pulls the swing frame plate 3 through the corresponding crossbar 6, and the swing frame plate 3 rotates around the rotating column 5, and the roller 4 at one end of the swing frame plate 3 close to the winding roller 2 is away from the winding roller 2. As the film on the winding roller 2 is gradually wound, the diameter of the film roll increases, and the passing roller 4 is away from the winding roller 2 and always maintains a preset distance from the outermost layer of the film roll.

[0046] The swing frame plate of the first swing frame mechanism and the swing frame plate of the second swing frame mechanism are symmetrically arranged with the crossbeam as the center, the unwinding roller is located on the left side of the corresponding swing frame plate, and the winding roller is also located on the left side of the corresponding swing frame plate. It can be seen that the unwinding roller and the winding roller are located on the same side of the corresponding swing frame plate, so that when the roller of one swing frame plate approaches or moves away from the unwinding roller, the roller of the other swing frame plate correspondingly moves away from or close to the winding roller.

[0047] In an optional embodiment, the two ends of the crossbeam 10 protrude from the side wall 17 of the vacuum chamber respectively, and the two side walls of the vacuum chamber are respectively provided with crossbeam mounting holes corresponding to the two ends of the crossbeam 10. The two ends of the crossbeam are sleeved with crossbeam bearings 101, and the crossbeam 10 is rotatably arranged in the crossbeam mounting holes through the crossbeam bearings 101. The output shaft of the cylinder 19 is rotatably connected to one end of the third connecting rod 13, and the other end of the third connecting rod 13 is fixedly connected to the end of the crossbeam 10. The cylinder 19 is used to drive the third connecting rod 13 to swing back and forth to drive the crossbeam 10 to rotate. Please refer to Figure 2 The cylinder 19 is on the side away from the output shaft ( Figure 2 The left side of the cylinder is rotatably connected to the side wall 17 of the vacuum chamber. Specifically, a rotatable roller is provided on the cavity plate, and the left side of the cylinder base is connected to the roller, so that the cylinder can swing up and down with the roller as the center to better cooperate with the third connecting rod that swings left and right.

[0048] In summary, the utility model sets a linkage driving mechanism, uses the telescopic arm and the support arm to control the swing frame mechanism of the unwinding roller, uses the first connecting rod and the second connecting rod to control the swing frame mechanism of the winding roller, and the telescopic arm and the first connecting rod are fixed on the same crossbeam, so as to drive one crossbeam to rotate while controlling the rollers on the swing frame mechanisms on both sides to maintain a preset distance with the outermost layer of the film roll on the corresponding unwinding roller or winding roller. Therefore, the utility model realizes that one driving mechanism controls two swing frame mechanisms, reduces the driving cost, and also reduces the space occupied inside the vacuum chamber, which helps to reduce the pressure of the vacuum pump.

[0049] In the utility model, a telescopic arm is used in the structure of the swing frame mechanism for controlling the unwinding roller. The length of the telescopic arm can be automatically adjusted according to the set program instructions. The amount of telescopic adjustment is adjusted according to actual needs and can be adjusted in real time during the operation of the device. The purpose of setting the telescopic arm is to change the rotation variation of the swing plate of the first swing frame mechanism, so that the swing frame mechanisms on both sides can obtain a better film surface flattening effect under the same drive.

[0050] In the early stage of unwinding, the unwinding diameter is larger and the winding diameter is smaller. The speed of unwinding diameter reduction is slower than the speed of winding diameter increase. At this stage, the swing plate of the unwinding roller should rotate less, so that its over-roller can better match the slower speed of unwinding diameter reduction, while the swing plate of the winding roller should rotate more, so that its over-roller can better match the faster speed of winding diameter increase. As the coating progresses, the unwinding diameter is equal to the winding diameter, and the swing plates on both sides rotate the same amount. In the late stage of unwinding, the unwinding diameter is smaller and the winding diameter is larger. The speed of unwinding diameter reduction is faster than the speed of winding diameter increase. Contrary to the early stage of unwinding, the swing plate of the unwinding roller should rotate more, while the swing plate of the winding roller should rotate less.

[0051] Based on the above principle, a telescopic arm is set on the rod on one side of the swing frame mechanism of the unwinding roller. Under the same rotation speed of the crossbeam, the shorter telescopic arm has a smaller rotation control amount for the swing frame plate, and the longer telescopic arm has a larger rotation control amount for the swing frame plate. Therefore, the rotation speed of the crossbeam is set according to the standard of the winding diameter change of the winding roller, so that the rotation amount of the swing frame plate on the winding side is always adapted to the winding diameter. According to the above analysis, the swing frame plate on the unwinding side uses a shorter telescopic arm in the early stage of unwinding, and the rotation amount of the swing frame plate on the unwinding side is small; as the unwinding progresses, the telescopic arm gradually extends; in the late stage of unwinding, a longer telescopic arm is used, and the rotation amount of the swing frame plate on the unwinding side is large. Thereby, the rotation amount of the swing frame plate on the unwinding side can always be adapted to the unwinding diameter. Therefore, by setting the telescopic arm to adjust the rotation change amount of the swing plate of the first swing frame mechanism, the swing frame mechanisms on both sides can achieve a better film surface flattening effect on the film roll when sharing the same drive.

[0052] like Figure 5 As shown in the figure, the telescopic arm is compared before (left) and after (right). Figure 6 As shown in the figure, the trajectory motion diagram of the short telescopic arm rotating at an angle α is as follows: the crossbar of the swing plate rotates from point A1 to point A2, the short telescopic arm rotates from point B1 to point B2, and the support arm changes from A1B1 to A2B2. Figure 7 As shown in the figure, the trajectory motion diagram of the long telescopic arm rotating at an angle of α: the crossbar of the swing plate rotates from point C1 to point C2, the long telescopic arm rotates from point D1 to point D2, and the support arm changes from C1D1 to C2D2. The state of the swing plate after the short telescopic arm rotates at an angle of α ( Figure 8 ) and the swing plate state after the long telescopic arm rotates by an angle α ( Fig. 9 ), it can be seen that the shorter telescopic arm has a smaller control over the rotation of the swing frame plate, while the longer telescopic arm has a larger control over the rotation of the swing frame plate.

[0053] It should be noted that Figures 5 to 9 The rollers in the middle are not shown.

[0054] Embodiment 2

[0055] like Figure 2 and Figure 4As shown, a vacuum coating device has the same structure as the first embodiment, except that a counterweight mechanism is provided at the end of the beam 10 away from the cylinder 19, and the counterweight mechanism includes a counterweight block 16, a fourth connecting rod 14 and a fifth connecting rod 15. The counterweight block 16 is located below the beam 10 and is connected to one end of the fourth connecting rod 14. The other end of the fourth connecting rod 14 is hinged to one end of the fifth connecting rod 15 via a hinge shaft, and the other end of the fifth connecting rod 15 is fixedly connected to the end of the beam 10. When the beam 10 rotates, the fifth connecting rod 15 is driven to rotate around the axis of the beam 10, thereby driving the counterweight block 16 to move up and down through the fourth connecting rod 14, thereby balancing the forces on the front and rear sides of the beam 10, which helps to reduce the load of the cylinder 19 driving the beam 10. It should be noted that Figure 2 The fifth connecting rod is omitted and not drawn. Figure 4 .

[0056] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A swing frame structure for a double-sided coating device, comprising two swing frame mechanisms respectively arranged on an unwinding roller and a winding roller, characterized in that: It also includes a linkage drive mechanism, which includes a cylinder, a crossbeam, a telescopic arm, a support arm, a first connecting rod and a second connecting rod. Both ends of the crossbeam are rotatably arranged on the side wall of the vacuum chamber, and one end of the crossbeam is drivingly connected to the cylinder on the outer side wall of the vacuum chamber, and the cylinder drives the crossbeam to rotate; one end of the telescopic arm is fixed to the crossbeam, and the other end is hinged to one end of the support arm, and the other end of the support arm is rotatably connected to the swing frame mechanism of the unwinding roller; One end of the first connecting rod is fixed on the crossbeam, and the other end is hinged to one end of the second connecting rod. The other end of the second connecting rod is rotatably connected to the swing frame mechanism of the winding roller.

2. The swing frame structure for a double-sided coating device according to claim 1, characterized in that: The swing frame mechanism includes swing frame plates and a rotating column on both sides, and also includes a cross bar, a flattening roller and a passing roller arranged in parallel between the two swing frame plates. One end of the rotating column is fixedly connected to the side wall of the vacuum chamber, and the other end is rotatably connected to the swing frame plate on the corresponding side, and the swing frame plate rotates around the rotating column.

3. The swing frame structure for a double-sided coating device according to claim 2, characterized in that: The passing roller of the winding roller swing frame mechanism is arranged on the corresponding swing frame plate at one end close to the winding roller, the passing roller of the unwinding roller swing frame mechanism is arranged on the corresponding swing frame plate at one end close to the unwinding roller, the cross bars of the two swing frame mechanisms are arranged on the other end of the swing frame plate away from the passing roller, and the flattening rollers of the two swing frame mechanisms are arranged between the passing roller and the cross bars.

4. The swing frame structure for a double-sided coating device according to claim 2 or 3, characterized in that: The two swing frame plates of the swing frame mechanism are arranged opposite to each other on the left and right, and the inner sides of the two swing frame plates are respectively provided with roller mounting holes, flattening roller mounting holes and cross bar mounting holes corresponding to the roller, the flattening roller and the cross bar. The roller is rotatably arranged in the roller mounting hole through a roller bearing, the flattening roller is rotatably arranged in the flattening roller mounting hole through a flattening roller bearing, and the cross bar is rotatably arranged in the cross bar mounting hole through a cross bar bearing.

5. The swing frame structure for a double-sided coating device according to claim 2, characterized in that: A rotating column mounting hole corresponding to the rotating column is provided on the outer side of the swing frame plate, and the rotating column is rotatably arranged in the rotating column mounting hole through a rotating column bearing.

6. The swing frame structure for a double-sided coating device according to any one of claims 1 to 3 or 5, characterized in that: The end of the support arm is rotatably connected to the first crossbar of the unwinding roller swing frame mechanism and is located below the first crossbar; the end of the second connecting rod is rotatably connected to the second crossbar of the winding roller swing frame mechanism and is located above the second crossbar.

7. The swing frame structure for a double-sided coating device according to claim 6, characterized in that: The output shaft of the cylinder is rotatably connected to one end of the third connecting rod, and the other end of the third connecting rod is fixedly connected to the end of the beam. The cylinder is used to drive the third connecting rod to swing back and forth to drive the beam to rotate.

8. The swing frame structure for a double-sided coating device according to any one of claims 1 to 3, 5 or 7, characterized in that: The two side walls of the vacuum chamber are respectively provided with beam mounting holes corresponding to the two ends of the beam, and the two ends of the beam are sleeved with beam bearings. The beam is rotatably arranged in the beam mounting holes through the beam bearings.

9. The swing frame structure for a double-sided coating device according to claim 8, characterized in that: A counterweight mechanism is provided at one end of the crossbeam away from the cylinder, and the counterweight mechanism includes a counterweight block, a fourth connecting rod and a fifth connecting rod. The counterweight block is located below the crossbeam and connected to one end of the fourth connecting rod, the other end of the fourth connecting rod is hinged to one end of the fifth connecting rod, and the other end of the fifth connecting rod is fixedly connected to the end of the crossbeam.

10. A vacuum coating device, characterized in that: It includes a unwinding roller and a winding roller, and also includes a swing frame structure for a double-sided coating device as described in any one of claims 1 to 9, the two swing frame mechanisms are respectively arranged corresponding to the unwinding roller and the winding roller, the swing frame mechanism includes a first swing frame mechanism and a second swing frame mechanism, and the first swing frame mechanism and the second swing frame mechanism are both connected to a linkage drive mechanism.

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