Detection device and detection system for detecting parallel half angle and light deflection angle of parallel light path

Abstract

The utility model discloses a detection device and a detection system, the detection device comprises a housing, a detection light path and a measurement module, the housing defines an accommodation space, the housing is provided with an input hole, and light of a parallel light path is vertically shot into the accommodation space through the input hole during detection; the detection light path is positioned in the accommodating space and is used for vertically projecting light vertically shot by the input hole to a detection area; the measuring module is located in the detection area and used for obtaining detection data used for calculating the parallel half angle and the light deflection angle of the parallel light path according to the light spots vertically projected to the detection area. The detection device can be directly used for detecting the parallel half angle and the light deflection angle of the parallel light path of the proximity exposure machine, and the light path assembly precision of the proximity exposure machine is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic equipment, in particular to a detection device for detecting parallel half angles and light deflection angles of parallel light paths, and a detection system. Background Art

[0002] In the related technology, for the general laser divergence angle measurement problem, conventional measurement methods include the ferrule method, the knife edge method, and the focal length method. For proximity exposure machines, since the light path is collimated and uniformed, the parallel light spot area is large and the energy is evenly distributed, the laser divergence angle measurement method cannot be directly applied to this large-area uniform light path parallel half-angle and light deflection angle calibration detection. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a detection device, which can directly detect the parallel half angle and light deviation angle of the parallel light path of the proximity exposure machine, and improve the assembly accuracy of the light path of the proximity exposure machine.

[0004] A second purpose of the present invention is to provide a detection system.

[0005] In order to solve the above problems, the first aspect of the utility model provides a detection device, which is characterized in that it is used to detect the parallel half-angle and light deviation angle of the parallel light path of a proximity exposure machine, and the detection device includes: a shell, the shell defines a accommodating space, and the shell has an input hole, and during detection, the light of the parallel light path is vertically absorbed into the accommodating space through the input hole; a detection light path, the detection light path is located in the accommodating space, and is used to vertically project the light vertically absorbed by the input hole to a detection area; a measurement module, the measurement module is located in the detection area, and is used to obtain detection data for calculating the parallel half-angle and light deviation angle of the parallel light path based on the light spot vertically projected to the detection area.

[0006] According to the detection device of the embodiment of the utility model, when used to detect the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine, the light of the parallel light path is input into the detection light path in the detection light path shell of the detection device through the input hole on the detection light path shell, and the detection light path projects the light of the parallel light path of the proximity exposure machine vertically to the detection area. The relevant parameters of the light spot projected vertically to the detection area can be directly obtained through the measurement module of the detection area, that is, the detection data for calculating the parallel half-angle and light deviation angle of the parallel light path, thereby directly providing detection data for calculating the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine, and providing data support for improving the assembly accuracy of the optical path of the proximity exposure machine.

[0007] In some embodiments, the shell includes: an upper base plate, a lower base plate and a light-blocking side plate, the upper base plate, the lower base plate and the light-blocking side plate enclose the accommodating space, the upper base plate is arranged parallel to the lower base plate, the input hole is located on the upper base plate, and the detection area is located on the lower base plate.

[0008] In some embodiments, the shell further includes: four support columns, one end of each of which is fixed at four corners of the lower base plate, the upper base plate is fixed on the other end of each of the four support columns, and the light-blocking side plates are fixed on the sides of the four support columns.

[0009] In some embodiments, the detection light path includes: a plurality of mounting frames, which are respectively arranged on the upper base plate and the lower base plate; and a plurality of reflectors, which are respectively arranged on the plurality of mounting frames to project the light taken in by the input hole vertically to the detection area.

[0010] In some embodiments, the multiple mounting frames include a first mounting frame, which is fixed to the lower base plate and arranged corresponding to the input hole; the multiple reflectors include a first reflector, which is fixed to the first mounting frame and is used to reflect the light vertically incident on the input hole in a parallel direction to the lower base plate.

[0011] In some embodiments, the multiple mounting frames also include a second mounting frame, which is fixed to the lower base plate and spaced apart from the first mounting frame; the multiple reflectors also include a second reflector, which is fixed to the second mounting frame and is used to reflect the reflected light of the first reflector toward the upper base plate.

[0012] In some embodiments, the multiple mounting frames also include a third mounting frame, which is fixed to the upper base plate and arranged opposite to the second mounting frame; the multiple reflectors also include a third reflector, which is fixed to the third mounting frame and is used to reflect the reflected light of the second reflector along a parallel direction of the upper base plate.

[0013] In some embodiments, the multiple mounting frames also include an adjustment frame, which is adjustably mounted on the upper base plate and spaced apart from the third mounting frame, and the input hole is located between the adjustment frame and the third mounting frame; the multiple reflectors also include a fourth reflector, which is fixed on the adjustment frame and is used to reflect the reflected light of the third reflector to the detection area on the lower base plate.

[0014] In some embodiments, the plurality of mounting brackets further include an adjusting member, which is disposed outside the upper base plate and corresponds to the adjusting bracket, and is used to adjust the angle of the adjusting bracket.

[0015] In some embodiments, the measurement module includes: a marking card, the marking card is located in the detection area and is used to mark the detection data; and an observation window, the observation window is arranged in the housing and is used to read the detection data on the marking card.

[0016] The second aspect of the utility model provides a detection system, characterized in that it includes: a detection device; a data processing device, wherein the data processing device is used to execute the method for detecting the parallel half-angle and light deviation angle of the parallel light path described in the above embodiment.

[0017] According to the detection system of the embodiment of the present invention, when used to detect the parallel half-angle and light deviation angle of the parallel light path of a proximity exposure machine, detection data for the parallel half-angle and light deviation angle of the parallel light path are obtained through a detection device; a data processing device calculates the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine based on the detection data and the structural parameters of the detection device, thereby providing data support for improving the assembly accuracy of the optical path of the proximity exposure machine.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 is a schematic diagram of a detection device according to an embodiment of the utility model;

[0021] Figure 2 is a schematic diagram of the external structure of a housing according to an embodiment of the utility model;

[0022] Figure 3 is a schematic diagram of a housing structure according to an embodiment of the utility model;

[0023] Figure 4 is a schematic diagram of a detection optical path according to an embodiment of the utility model;

[0024] Figure 5 is a schematic diagram of an adjusting member according to an embodiment of the utility model;

[0025] Figure 6 is a schematic diagram of a parallel light path according to an embodiment of the utility model;

[0026] Figure 7 is a schematic diagram of a marking card according to an embodiment of the utility model;

[0027] Figure 8 It is a structural block diagram of a detection system according to an embodiment of the utility model.

[0028] Reference numerals:

[0029] Detection device 100; detection system 200; housing 10; detection optical path 20; measurement module 30;

[0030] Upper base plate 11; lower base plate 12; light shielding side plate 13; input hole 14; support column 15; first mounting frame 21; second mounting frame 22; third mounting frame 23; adjustment frame 24; first reflector 25; second reflector 26; third reflector 27; fourth reflector 28; adjustment member 29; marking card 31; observation window 32. DETAILED DESCRIPTION

[0031] The embodiments of the present utility model are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present utility model are described in detail below.

[0032] The first aspect of the utility model provides a detection device that can be directly used to detect the parallel half-angle and light deviation angle of the parallel light path of a proximity exposure machine.

[0033] like Figure 1 As shown, the detection device 100 includes: a housing 10 , a detection optical path 20 and a measurement module 30 .

[0034] The housing defines a receiving space, and the appearance of the housing is as follows: Figure 2 As shown, the shell is provided with an input hole 14. During detection, the detection device 100 is placed on the platform of the device, and the light of the parallel light path to be detected is vertically taken into the accommodation space through the input hole 14.

[0035] The detection optical path 20 is located in the accommodation space, and the light of the parallel optical path to be detected is vertically projected to the detection optical path through the input hole 14, and the detection optical path projects the light vertically captured by the input hole 14 vertically to the detection area.

[0036] The measuring module 30 is located in the detection area, and is used to obtain detection data for calculating the parallel half angle and light deflection angle of the parallel light path according to the light spot vertically projected to the detection area.

[0037] For example, the measuring module 30 may include a measuring ruler, a card with scales, etc., which are arranged in the detection area, so as to determine the change parameters of the detection light, etc.

[0038] The angular parameters of the parallel light path may include, for example, a parallel half-angle, a light deflection angle, etc. The detection data may be understood as data that can be measured by the measurement module 30 when calculating the parallel half-angle and light deflection angle of the parallel light path. Of course, when calculating the parallel half-angle and light deflection angle of the parallel light path, the corresponding parallel half-angle and light deflection angle of the parallel light path may be obtained based on the detection data combined with other data such as geometric parameters of the detection device 100.

[0039] Specifically, when the detection device 100 is used to detect the detection data required for the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine, the detection device 100 is placed on the platform of the proximity exposure machine, so that the light of the parallel light path emitted by the proximity exposure machine enters the input hole 14 on the housing 1 of the detection device 100, and the light entering from the input hole 14 is vertically projected to the detection light path 20, and the detection light path transmits the light and projects it vertically to the detection area, and then the relevant parameters of the light spot such as diameter, center position, deviation from the center point, etc. can be measured through the measurement module of the detection area, that is, the corresponding detection data. Further, the detection data can be used to calculate the parallel half-angle and light deviation angle of the parallel light path, thereby providing data support for the calculation of the parallel half-angle and light deviation angle of the parallel light path.

[0040] According to the detection device of the embodiment of the utility model, when used to detect the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine, the light of the parallel light path is input into the detection light path in the detection light path shell of the detection device through the input hole on the detection light path shell, and the detection light path projects the light of the parallel light path of the proximity exposure machine vertically to the detection area. The relevant parameters of the light spot projected vertically to the detection area can be directly obtained through the measurement module of the detection area, that is, the detection data for calculating the parallel half-angle and light deviation angle of the parallel light path, thereby directly providing detection data for calculating the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine, and providing data support for improving the assembly accuracy of the optical path of the proximity exposure machine.

[0041] The structures of various parts of the detection device 100 according to the embodiment of the present utility model are described below.

[0042] In some embodiments, Figure 3 As shown, the housing 10 includes an upper base plate 11 , a lower base plate 12 and a light-shielding side plate 13 .

[0043] The lower bottom plate 12 and the light-blocking side plate 13 enclose a receiving space, and the upper bottom plate 11 is arranged in parallel with the lower bottom plate 12, so that when the light of the measured light path is taken into the housing, the parameter change of the light spot compared with the reference point such as the origin can be measured more accurately. The input hole 14 is located on the upper bottom plate 11, and the detection area is located on the lower bottom plate 12.

[0044] Specifically, when using a detection device to detect the detection data required for the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine, the detection device is placed on the platform of the proximity exposure machine, so that the light of the parallel light path emitted by the proximity exposure machine enters the detection device through the input hole 14 on the shell 10, and the light entering from the input hole 14 is vertically projected to the accommodating space surrounded by the lower base plate 12 and the light-blocking side plate 13, and the parallel light path is vertically projected to the detection area located on the lower base plate 12 through the detection light path in the accommodating space.

[0045] In some embodiments, Figure 3 As shown, the housing 10 further includes a support column 15 .

[0046] Specifically, the housing 10 includes four support columns 15, one end of each of which is fixed to the four corners of the lower base, the upper base is fixed to the other end of each of the four support columns, and the light-shielding side panels are fixed to the sides of the four support columns. The support columns 15, the light-shielding side panels, the upper base, and the lower base together constitute the external structure of the housing. The support columns 15 can better adjust the parallelism of the upper and lower bases.

[0047] It should be noted that the above are only examples of the shell structure given in the embodiment of the present utility model. Other structures, such as the structure of the box body and the cover body or other shell structures that define the accommodating space, can also be applied to the detection device 100 in the embodiment of the present application.

[0048] In some embodiments, Figure 4 As shown, the detection optical path 20 includes a plurality of mounting brackets and a plurality of reflective mirrors.

[0049] Specifically, a plurality of mounting frames are respectively arranged on the upper base plate and the lower base plate, and a plurality of reflectors are respectively arranged on the plurality of mounting frames to vertically project the light taken in by the input hole to the detection area. The incident light of the parallel light path to be measured is transmitted to the detection area through the plurality of reflectors of the detection light path, so that the corresponding detection data can be measured by the measurement module.

[0050] In some embodiments, Figure 4 As shown, the detection optical path 20 includes: a first mounting frame 21 and a first reflecting mirror 25 .

[0051] Specifically, the first mounting frame 21 is fixed on the lower base plate and is arranged corresponding to the input hole; the first reflector 25 is fixed on the first mounting frame 21 and is used to reflect the light incident vertically from the input hole in a parallel direction to the lower base plate.

[0052] In some embodiments, Figure 4 As shown, the detection optical path 20 includes: a second mounting bracket 22 and a second reflecting mirror 26 .

[0053] Specifically, the second mounting frame 22 is fixed to the lower base plate and spaced apart from the first mounting frame; the second reflector 26 is fixed to the second mounting frame and is used to reflect the reflected light of the first reflector toward the upper base plate.

[0054] In some embodiments, Figure 4 As shown, the detection optical path 20 includes: a third mounting bracket 23 and a third reflecting mirror 27 .

[0055] Specifically, the third mounting frame 23 is fixed to the upper base plate and is arranged opposite to the second mounting frame; the third reflector 27 is fixed to the third mounting frame and is used to reflect the reflected light of the second reflector in a direction parallel to the upper base plate.

[0056] In some embodiments, Figure 4 As shown, the detection optical path 20 includes: an adjustment frame 24 and a fourth reflecting mirror 28 .

[0057] Specifically, the adjustment frame 24 is adjustably mounted on the upper base plate and spaced apart from the third mounting frame, and the input hole is located between the adjustment frame and the third mounting frame; the fourth reflector 28 is fixed on the adjustment frame to reflect the reflected light of the third reflector to the detection area on the lower base plate.

[0058] In some embodiments, Figure 5 As shown, the plurality of mounting brackets further include an adjusting member 29, which is disposed outside the upper base plate and corresponds to the adjusting bracket, and is used to adjust the angle of the adjusting bracket to achieve calibration adjustment of the fourth reflector 28 on the adjusting bracket.

[0059] Specifically, in order to facilitate the adjustment of the adjustment frame, an adjustment piece is set on the outside of the upper base plate at a position corresponding to the adjustment frame. The adjustment piece is mechanically connected to the adjustment frame. The adjustment frame can be adjusted on the outside of the upper base plate through the adjustment piece without disassembling the detection device housing, so that the reflected light of the third reflector is reflected to the detection area on the lower base plate and is perpendicular to the surface of the lower base plate.

[0060] For example, the adjusting parts may include a top screw, a leaf spring, a steel ball, etc. The adjusting frame directly forms an angle adjustment structure with the upper base plate through the top screw, the leaf spring, and the steel ball. The angle and position of the adjusting frame can be adjusted by adjusting the top screw, so that the light emitted by the fourth reflector can be projected vertically onto the measuring module of the detection area to realize the measurement of detection data.

[0061] The following are based on Figure 6The projection process of the parallel light path in the detection device is described. The parallel light path passes through the input hole 14 on the upper base plate and illuminates the first reflector 25. The first reflector 25 reflects the light along the parallel direction of the lower base plate to the second reflector 26. The second reflector 26 reflects the light to the third reflector 27. The third reflector 27 reflects the light along the parallel direction of the upper base plate to the fourth reflector 28. The fourth reflector 28 reflects the light to the detection area, and the detection data for calculating the parallel half angle and light deflection angle of the parallel light path are obtained.

[0062] In some embodiments, the measurement module 30 includes: a marking card 31 and an observation window 32 .

[0063] Specifically, the mark card 31 is as follows Figure 7 As shown, the marking card 31 is located in the detection area and is used to mark the detection data; the observation window 32 is as shown in FIG. Figure 2 As shown, an observation window 32 is provided on the housing for reading the detection data on the marking card.

[0064] Specifically, Figure 7 As shown, the marking card 31 has scales, and the light spot is projected onto the marking card 31 . The relevant data of the light spot can be directly read through the observation window 32 as the detection data.

[0065] It should be noted that before using the detection device for measurement, the detection device can be calibrated to determine the angle of the fourth reflector and the position of the marking card, so as to ensure the accuracy of the detection data.

[0066] Specifically, during calibration, a dedicated calibration plane mirror is placed at the position of the small hole on the upper bottom plate with holes. The calibration plane mirror here meets the calibration requirements for mirror parallelism. Repeatedly adjust the position of the goniometer to ensure that the light from the goniometer is incident vertically from the small hole, and then place the calibration plane mirror on the observation surface of the measuring device, such as Figure 5 As shown, the angle of the adjustment frame is adjusted by an adjustment member outside the upper base plate, such as a top screw connecting the adjustment member, to ensure that the light emitted by the goniometer is incident perpendicular to the observation surface. At this time, the center position of the goniometer light spot is the mark card position.

[0067] The second aspect of the present invention provides a detection system, such as Figure 8 As shown, the detection system 300 includes the detection device 100 for detecting the parallel half-angle and light deviation angle of the parallel light path and the data processing device 301 of the above embodiment.

[0068] The data processing device 301 is used to obtain the parallel half angle and light deflection angle of the parallel light path of the proximity exposure machine according to the detection data of the detection device for detecting the parallel half angle and light deflection angle of the parallel light path.

[0069] Specifically, the parallel half-angle and light deviation angle of the parallel light path can be obtained based on the detection data detected by the detection device 100, such as the size and position of the light spot diameter, the total optical path of the light propagating in the accommodating cavity of the detection device, the geometric diameter of the input hole and other parameters. The specific calculation method is not within the scope of protection of this application. This application protects the architecture of the detection system based on the above detection device 100 and the data processing device 301 to provide hardware support for obtaining the parallel half-angle and light deviation angle of the parallel light path.

[0070] According to the detection system of the embodiment of the utility model, when used to detect the parallel half-angle and light deviation angle of the parallel light path of a proximity exposure machine, detection data for the parallel half-angle and light deviation angle of the parallel light path are obtained through the detection device; the data processing device calculates the parallel half-angle and light deviation angle of the parallel light path of the proximity exposure machine based on the detection data and the structural parameters of the detection device, thereby providing data support for improving the assembly accuracy of the optical path of the proximity exposure machine.

[0071] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, substrates, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0072] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A detection device for detecting the parallel half angle and light deflection angle of a parallel light path, characterized in that: The detection device comprises: A housing, wherein the housing defines a storage space and has an input hole, and during detection, the light of the parallel light path is vertically captured into the storage space through the input hole; A detection light path, the detection light path is located in the accommodation space and is used to vertically project the light vertically taken in by the input hole to the detection area; A measuring module, the measuring module is located in the detection area, and is used to obtain detection data for calculating the parallel half angle and light deflection angle of the parallel light path according to the light spot vertically projected to the detection area.

2. The detection device according to claim 1, characterized in that: The housing comprises: An upper base plate, a lower base plate and a light-blocking side plate, wherein the upper base plate, the lower base plate and the light-blocking side plate enclose the accommodating space, the upper base plate is arranged parallel to the lower base plate, the input hole is located on the upper base plate, and the detection area is located on the lower base plate.

3. The detection device according to claim 2, characterized in that: The housing further comprises: Four support columns, one end of each of the four support columns is fixed at four corners of the lower base plate, the upper base plate is fixed on the other end of each of the four support columns, and the light-shielding side plates are fixed on the sides of the four support columns.

4. The detection device according to claim 2, characterized in that: The detection optical path comprises: A plurality of mounting frames, wherein the plurality of mounting frames are respectively arranged on the upper base plate and the lower base plate; A plurality of reflectors are respectively disposed on the plurality of mounting frames to vertically project the light captured by the input hole to the detection area.

5. The detection device according to claim 4, characterized in that: The plurality of mounting brackets include a first mounting bracket, which is fixed to the lower base plate and arranged corresponding to the input hole; The plurality of reflectors include a first reflector fixed to the first mounting frame and configured to reflect light vertically incident from the input hole in a direction parallel to the lower base plate.

6. The detection device according to claim 5, characterized in that: The plurality of mounting frames further include a second mounting frame, the second mounting frame being fixed to the lower base plate and spaced apart from the first mounting frame; The plurality of reflectors further include a second reflector, which is fixed to the second mounting frame and is used to reflect the reflected light of the first reflector toward the upper base plate.

7. The detection device according to claim 6, characterized in that: The plurality of mounting frames further include a third mounting frame, the third mounting frame being fixed to the upper base plate and arranged opposite to the second mounting frame; The plurality of reflectors further include a third reflector, which is fixed on the third mounting frame and is used for reflecting the reflected light of the second reflector in a direction parallel to the upper base plate.

8. The detection device according to claim 7, characterized in that: The plurality of mounting brackets further include an adjustment bracket, the adjustment bracket is adjustably mounted on the upper base plate and spaced apart from the third mounting bracket, and the input hole is located between the adjustment bracket and the third mounting bracket; The plurality of reflectors further include a fourth reflector, which is fixed on the adjustment frame and is used for reflecting the reflected light of the third reflector to the detection area on the lower base plate.

9. The detection device according to claim 8, characterized in that: The plurality of mounting frames further include an adjusting member, which is disposed outside the upper base plate and corresponds to the adjusting frame and is used to adjust the angle of the adjusting frame.

10. The detection device according to any one of claims 1 to 9, characterized in that: The measuring module comprises: A marking card, located in the detection area and used to mark the detection data; An observation window is provided on the housing and is used for reading the detection data on the marking card.

11. A detection system, characterized in that: include: The detection device for detecting the parallel half angle and light deflection angle of a parallel light path according to any one of claims 1 to 10; A data processing device is used to obtain the parallel half angle and light deviation angle of the parallel light path according to the detection data of the detection device.

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