Electrode structure of vacuum plasma cleaning machine

Abstract

The utility model discloses an electrode structure of a vacuum plasma cleaning machine, which relates to the technical field of accessories of the vacuum plasma cleaning machine, and comprises a plurality of groups of positive electrode screens and a plurality of groups of negative electrode screens, and the positive electrode screens and the negative electrode screens are arranged at intervals. A negative electrode top plate is fixedly arranged at the top between every two adjacent groups of positive electrode screen plates and negative electrode screen plates, a positive electrode middle plate is fixedly arranged in the middle between every two adjacent groups of positive electrode screen plates and negative electrode screen plates, and a negative electrode bottom plate is fixedly arranged at the bottom between every two adjacent groups of positive electrode screen plates and negative electrode screen plates; according to the utility model, the distance between the positive electrode and the negative electrode is shortened, the plasma concentration is enhanced, and the mobility of special gas is enhanced by the meshes, so that the activity of the plasma is higher; cleaning in the horizontal direction and the vertical direction is achieved, plasma energy is concentrated and gathered, plasmas with more densities are generated under the same power, the cleaning effect is further improved, waste is reduced, energy is saved, and efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum plasma cleaning machine accessories, in particular to an electrode structure of a vacuum plasma cleaning machine. Background Art

[0002] A vacuum plasma cleaning machine, also called a plasma cleaning machine or a plasma surface treatment machine, is a new high-tech technology that uses plasma to achieve effects that conventional cleaning methods cannot achieve. It is mainly used in the optoelectronics industry, the automotive industry, the plastics industry, the packaging industry, the printing industry, etc. The electrode structure is one of the key components for the discharge of the reaction chamber of the vacuum plasma cleaning machine. The traditional electrode structure generally arranges negative electrodes at the top and bottom of the reaction chamber, and arranges a positive electrode horizontally in the middle of the reaction chamber to separate the reaction chamber into two upper and lower chambers. The defect of this structure is that cleaning can only be performed in two vertical directions in the reaction chamber, and the plasma generated is relatively small. If the product to be cleaned is of a special shape, it is likely to affect the cleaning effect. In this context, the applicant is committed to developing an electrode structure for a vacuum plasma cleaning machine that can achieve cleaning in both horizontal and vertical directions, and generate more plasma in the same time to further improve the cleaning effect. Utility Model Content

[0003] The utility model aims to achieve cleaning in both horizontal and vertical directions and to generate more plasma in the same time, thereby further improving the cleaning effect.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0005] An electrode structure of a vacuum plasma cleaning machine comprises a plurality of groups of positive electrode mesh plates and a plurality of groups of negative electrode mesh plates, wherein the positive electrode mesh plates and the negative electrode mesh plates are arranged in an interval with each other, a negative electrode top plate is fixedly arranged at the top between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates, a positive electrode middle plate is fixedly arranged in the middle between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates, and a negative electrode bottom plate is fixedly arranged at the bottom between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates, and the negative electrode top plate, the positive electrode middle plate and the negative electrode bottom plate are respectively insulated from the positive electrode mesh plates or the negative electrode mesh plates.

[0006] Furthermore, the positive electrode mesh plate and the negative electrode mesh plate are both vertically arranged and parallel to each other.

[0007] Furthermore, the negative electrode top plate, the positive electrode middle plate, and the negative electrode bottom plate are all parallel to each other and perpendicular to the positive electrode mesh plate.

[0008] Furthermore, the distances between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates are equal.

[0009] Furthermore, it also includes an insulating connecting strip, and the negative electrode top plate, the positive electrode middle plate, and the negative electrode bottom plate are fixedly connected to the positive electrode mesh plate or the negative electrode mesh plate respectively through the insulating connecting strip.

[0010] Furthermore, the positive electrode mesh plate, the negative electrode mesh plate, the negative electrode top plate, the positive electrode middle plate, and the negative electrode bottom plate are all made of aluminum.

[0011] Furthermore, the positive electrode mesh plate, the negative electrode mesh plate, the negative electrode top plate, the positive electrode middle plate, and the negative electrode bottom plate are all fixedly provided with feed-in connectors.

[0012] Furthermore, the positive electrode mesh plate, the negative electrode mesh plate, the negative electrode top plate, and the positive electrode middle plate form a first chamber, and the positive electrode mesh plate, the negative electrode mesh plate, the positive electrode middle plate, and the negative electrode bottom plate form a second chamber.

[0013] Furthermore, mesh holes are evenly formed on the positive electrode mesh plate and the negative electrode mesh plate.

[0014] The beneficial effects of the utility model are as follows: the utility model arranges the positive electrode mesh plate and the negative electrode mesh plate at intervals with each other, and arranges the negative electrode top plate, the positive electrode middle plate, and the negative electrode bottom plate in sequence at the top, middle, and bottom between two adjacent groups of positive electrode mesh plates and negative electrode mesh plates. When performing cleaning work, the utility model is first installed in the reaction chamber of an existing vacuum plasma cleaning machine, and the positive electrode mesh plate and the positive electrode middle plate of the utility model are connected to the positive pole of the high-frequency power supply of the existing vacuum plasma cleaning machine, and the negative electrode mesh plate, the negative electrode top plate, and the negative electrode bottom plate of the utility model are connected to the negative pole of the high-frequency power supply of the existing vacuum plasma cleaning machine, and the workpiece to be cleaned is placed on the positive electrode middle plate or the negative electrode bottom plate.

[0015] During cleaning, the high-frequency power supply of the existing vacuum plasma cleaning machine provides electric field energy, so that plasma is formed between the positive electrode mesh plate and the negative electrode mesh plate in the horizontal direction, thereby cleaning the workpiece located on the positive electrode middle plate and the negative electrode bottom plate in the horizontal direction;

[0016] At the same time, plasma is formed in the vertical direction between the positive electrode middle plate and the negative electrode top plate, so that the workpiece located on the positive electrode middle plate is cleaned in the vertical direction;

[0017] At the same time, plasma is also formed in the vertical direction between the positive electrode middle plate and the negative electrode bottom plate, so that the workpiece located on the negative electrode bottom plate is cleaned in the vertical direction;

[0018] In summary, the utility model achieves the purpose of direct cleaning by plasma in both horizontal and vertical directions, and forms plasma in the vertical direction through the positive electrode middle plate and the negative electrode top plate. Compared with the traditional technology, the utility model generates more plasma in the same time, thereby forming a high plasma concentration, which further improves the cleaning effect to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] The reference numerals in the drawings are: positive electrode mesh plate 1 , negative electrode mesh plate 2 , insulating connecting strip 3 , negative electrode top plate 4 , positive electrode middle plate 5 , negative electrode bottom plate 6 . DETAILED DESCRIPTION

[0021] The utility model is further described below in conjunction with the accompanying drawings.

[0022] like Figure 1 The electrode structure of a vacuum plasma cleaning machine shown in the figure comprises a plurality of groups of positive electrode mesh plates 1 , a plurality of groups of negative electrode mesh plates 2 , and an insulating connecting strip 3 .

[0023] The positive electrode mesh plates 1 and the negative electrode mesh plates 2 are arranged at intervals from each other. The positive electrode mesh plates 1 and the negative electrode mesh plates 2 are arranged vertically and parallel to each other. The distances between each two adjacent groups of positive electrode mesh plates 1 and negative electrode mesh plates 2 are equal.

[0024] The positive electrode mesh plate 1 and the negative electrode mesh plate 2 are evenly provided with mesh holes. The design of the mesh holes makes the airflow direction even, so that the gas is easier to dissociate and the plasma is easier to flow and is even.

[0025] A negative electrode top plate 4 is fixedly arranged at the top between each two adjacent groups of positive electrode mesh plates 1 and negative electrode mesh plates 2, a positive electrode middle plate 5 is fixedly arranged in the middle between each two adjacent groups of positive electrode mesh plates 1 and negative electrode mesh plates 2, and a negative electrode bottom plate 6 is fixedly arranged at the bottom between each two adjacent groups of positive electrode mesh plates 1 and negative electrode mesh plates 2. The negative electrode top plate 4, the positive electrode middle plate 5, and the negative electrode bottom plate 6 are all parallel to each other and perpendicular to the positive electrode mesh plate 1, so that a first chamber is formed between the positive electrode mesh plate 1, the negative electrode mesh plate 2, the negative electrode top plate 4, and the positive electrode middle plate 5, and a second chamber is formed between the positive electrode mesh plate 1, the negative electrode mesh plate 2, the positive electrode middle plate 5, and the negative electrode bottom plate 6.

[0026] The negative electrode top plate 4, the positive electrode middle plate 5, and the negative electrode bottom plate 6 are respectively insulated from the positive electrode mesh plate 1 or the negative electrode mesh plate 2; the specific structure is: the negative electrode top plate 4, the positive electrode middle plate 5, and the negative electrode bottom plate 6 are respectively fixedly connected to the positive electrode mesh plate 1 or the negative electrode mesh plate 2 through the insulating connecting strip 3.

[0027] The positive electrode mesh plate 1 , the negative electrode mesh plate 2 , the negative electrode top plate 4 , the positive electrode middle plate 5 , and the negative electrode bottom plate 6 are all made of aluminum.

[0028] Feed-in connectors are fixedly provided on the positive electrode mesh plate 1, the negative electrode mesh plate 2, the negative electrode top plate 4, the positive electrode middle plate 5, and the negative electrode bottom plate 6. The design of the feed-in connector facilitates electrical connection with the high-frequency power supply of the existing vacuum plasma cleaning machine.

[0029] The working principle of the utility model is: when performing cleaning work, the utility model is first installed in the reaction chamber of the existing vacuum plasma cleaning machine, and the positive electrode mesh plate 1 and the positive electrode middle plate 5 of the utility model are connected to the positive electrode of the high-frequency power supply of the existing vacuum plasma cleaning machine, and the negative electrode mesh plate 2, the negative electrode top plate 4, and the negative electrode bottom plate 6 of the utility model are connected to the negative electrode of the high-frequency power supply of the existing vacuum plasma cleaning machine.

[0030] Turn on the vacuum plasma cleaning machine, place the workpiece to be cleaned in the first chamber or the second chamber, close the door of the reaction chamber of the vacuum plasma cleaning machine, start the vacuum pump to pump the air pressure in the reaction chamber to negative pressure, then provide an appropriate amount of specific gas in the reaction chamber, such as oxygen, nitrogen or other active gases, then adjust the air pressure in the reaction chamber to the required air pressure, start the high-frequency power supply, and form plasma in the horizontal direction between the positive electrode mesh plate 1 and the negative electrode mesh plate 2, so as to clean the workpiece located on the positive electrode middle plate 5 and the negative electrode bottom plate 6 in the horizontal direction; at the same time, form plasma in the vertical direction between the positive electrode middle plate 5 and the negative electrode top plate 4, so as to clean the workpiece located on the positive electrode middle plate 5 in the vertical direction; at the same time, form plasma in the vertical direction between the positive electrode middle plate 5 and the negative electrode bottom plate 6, so as to clean the workpiece located on the negative electrode bottom plate 6 in the vertical direction.

[0031] The utility model realizes the purpose of direct cleaning by plasma in both horizontal and vertical directions, and generates more plasma in the same time by using the utility model, thereby forming a high plasma concentration, and further improving the cleaning effect to a certain extent; because the positive electrode mesh plate 1 and the negative electrode mesh plate 2 are evenly provided with mesh holes, the airflow direction is uniform, the gas is easier to dissociate, the plasma is easier to flow and is more uniform, and the positive electrode mesh plate 1, the negative electrode mesh plate 2, the negative electrode top plate 4, the positive electrode middle plate 5, and the negative electrode bottom plate 6 are closer to the workpiece to be cleaned, and the contact surface is increased, the concentration of plasma is increased, and it is easier to clean every corner of the workpiece, and the workpiece to be cleaned can be fully loaded, which further improves the work efficiency.

[0032] The utility model shortens the distance between the positive and negative electrodes, enhances the plasma concentration, and the mesh holes enhance the fluidity of the special gas, thereby making the plasma more active; it achieves cleaning in both horizontal and vertical directions, concentrates the plasma energy, and generates a higher density of plasma at the same power, further improving the cleaning effect, reducing waste, and saving energy and increasing efficiency.

[0033] The above disclosure is only a preferred embodiment of the present invention, which cannot be used to limit the scope of protection of the present invention. Therefore, equivalent changes made within the scope of the patent application of the present invention still fall within the scope covered by the present invention. The above does not impose any limitation on the technical scope of the present invention. Any modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. An electrode structure of a vacuum plasma cleaning machine, characterized in that: It comprises a plurality of groups of positive electrode mesh plates and a plurality of groups of negative electrode mesh plates, wherein the positive electrode mesh plates and the negative electrode mesh plates are arranged in an interval with each other, a negative electrode top plate is fixedly arranged on the top between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates, a positive electrode middle plate is fixedly arranged in the middle between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates, and a negative electrode bottom plate is fixedly arranged on the bottom between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates, and the negative electrode top plate, the positive electrode middle plate and the negative electrode bottom plate are respectively insulated from the positive electrode mesh plates or the negative electrode mesh plates.

2. The electrode structure of a vacuum plasma cleaning machine according to claim 1, characterized in that: The positive electrode mesh plate and the negative electrode mesh plate are both vertically arranged and parallel to each other.

3. The electrode structure of a vacuum plasma cleaning machine according to claim 2, characterized in that: The negative electrode top plate, the positive electrode middle plate and the negative electrode bottom plate are all parallel to each other and perpendicular to the positive electrode mesh plate.

4. The electrode structure of a vacuum plasma cleaning machine according to claim 1, characterized in that: The distances between each two adjacent groups of positive electrode mesh plates and negative electrode mesh plates are equal.

5. The electrode structure of a vacuum plasma cleaning machine according to claim 1, characterized in that: It also includes an insulating connecting strip, and the negative electrode top plate, the positive electrode middle plate, and the negative electrode bottom plate are fixedly connected to the positive electrode mesh plate or the negative electrode mesh plate respectively through the insulating connecting strip.

6. The electrode structure of a vacuum plasma cleaning machine according to claim 1, characterized in that: The positive electrode mesh plate, the negative electrode mesh plate, the negative electrode top plate, the positive electrode middle plate and the negative electrode bottom plate are all made of aluminum.

7. The electrode structure of a vacuum plasma cleaning machine according to claim 1, characterized in that: Feed-in connectors are fixedly arranged on the positive electrode mesh plate, the negative electrode mesh plate, the negative electrode top plate, the positive electrode middle plate and the negative electrode bottom plate.

8. The electrode structure of a vacuum plasma cleaning machine according to claim 1, characterized in that: The positive electrode mesh plate, the negative electrode mesh plate, the negative electrode top plate and the positive electrode middle plate form a first chamber, and the positive electrode mesh plate, the negative electrode mesh plate, the positive electrode middle plate and the negative electrode bottom plate form a second chamber.

9. An electrode structure of a vacuum plasma cleaning machine according to any one of claims 1 to 8, characterized in that: The positive electrode mesh plate and the negative electrode mesh plate are both uniformly provided with mesh holes.

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