Novel heat shield fixing felt for thermal field of single crystal furnace

Abstract

The utility model discloses a novel heat shield fixed felt for a single crystal furnace thermal field, and particularly relates to the technical field of monocrystalline silicon production, the novel heat shield fixed felt comprises an upper heat shield fixed felt, a lower heat shield fixed felt is arranged at the bottom of the upper heat shield fixed felt, and a splicing mechanism is arranged between the upper heat shield fixed felt and the lower heat shield fixed felt; the splicing mechanism comprises a thickened heat shield fixing felt, the bottom of the thickened heat shield fixing felt is fixedly connected with the top of a lower heat shield fixing felt, sealing felts are fixedly connected into the upper heat shield fixing felt and the lower heat shield fixing felt, and felt fixing clamping blocks are fixedly connected to the two sides of the bottom of the upper heat shield fixing felt. By arranging the splicing mechanism and the splicing type fixed felt, the overall stability and structural strength of the fixed felt can be improved, deformation and damage of the fixed felt in a high-temperature environment are reduced, one fixed felt can be independently replaced when the fixed felt is damaged, the whole fixed felt structure does not need to be replaced, maintenance and management are convenient, and the service life of the fixed felt is prolonged. And meanwhile, the solid felt is used for replacing a heat shield quartz ring, so that the problem that the heat shield quartz ring is easily broken when impacted by external force is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, and more specifically to a new type of heat shield solid felt for the thermal field of a single crystal furnace. Background Art

[0002] At present, the heat shield of the single crystal furnace has an insulation layer added between the inner heat shield layer and the outer heat shield layer. The material of the insulation layer is soft felt, which makes it difficult for the temperature of the inner heat shield layer to be transferred to the outer heat shield layer, thereby improving the insulation performance of the heat shield. A solid felt is placed on the heat shield, and the solid felt is an integrated type, and a quartz ring is placed on the solid felt of the heat shield.

[0003] After searching, it was found that a Chinese patent with publication number CN220503270U discloses a spliced ​​thermal field solid felt and a single crystal furnace. The upper and lower parts of the stacked soft felt are often not flush with the upper and lower edges of the insulation tube, and need to be manually trimmed with cutting tools. However, manual trimming cannot achieve 100% flatness. During use, the uneven connection will cause heat to be lost from the narrow gaps unnecessarily. At the same time, a large amount of labor costs are consumed in the trimming process. By separately setting the upper insulation solid felt and the lower insulation solid felt, wherein the upper insulation solid felt is inlaid in the lower insulation solid felt; no manual intervention is required for cutting, thereby ensuring the flatness and airtightness of the upper and lower edges of the felt, and increasing the thermal insulation of the thermal field.

[0004] However, in actual use, some heat shield quartz rings have poor impact resistance and are easily broken when subjected to external force. At the same time, during use, the solid felt method mentioned above has insufficient thickness and is inconvenient to splice, which can easily lead to deformation and damage of the solid felt in a high temperature environment. When damaged, the entire solid felt needs to be replaced, which is inconvenient to maintain. Utility Model Content

[0005] In order to overcome the problems and defects in the prior art, the utility model provides a new type of heat shield solid felt for the thermal field of a single crystal furnace to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a new type of heat shield felt for the thermal field of a single crystal furnace, comprising an upper heat shield felt, a lower heat shield felt is arranged at the bottom of the upper heat shield felt, and a splicing mechanism is arranged between the upper heat shield felt and the lower heat shield felt;

[0007] The splicing mechanism includes a thickened heat shield solid felt, the bottom of the thickened heat shield solid felt is fixedly connected to the top of the lower heat shield solid felt, the upper heat shield solid felt and the lower heat shield solid felt are fixedly connected with sealing felt inside, the bottom of the upper heat shield solid felt is fixedly connected with solid felt blocks on both sides, the surfaces of both sides of the solid felt blocks are provided with connecting slide grooves, the top surface of the thickened heat shield solid felt is provided with a solid felt slot, and the inner walls of the solid felt slot are fixedly connected with connecting slide rods on both sides.

[0008] Preferably, the solid felt block matches the solid felt slot, and the connecting slide rod is slidably connected to the connecting slide slot.

[0009] Preferably, the thickness of the upper heat shield solid felt is the same as that of the lower heat shield solid felt, and the number of the connecting slide rods and the number of the connecting slide grooves are both set to be multiple.

[0010] Preferably, the upper heat shield solid felt and the lower heat shield solid felt each include, from top to bottom, a first heat insulating outer layer, a heat conducting layer, a high temperature resistant layer, an anti-oxidation layer and a second heat insulating outer layer, and the first heat insulating outer layer and the heat conducting layer have the same thickness.

[0011] Preferably, the first heat-insulating outer layer is made of a high-temperature sintering-resistant ceramic material, and the second heat-insulating outer layer is made of a high-temperature sintering-resistant polymer composite material.

[0012] Preferably, the heat conduction layer is made of silicon carbide, the high temperature resistant layer is made of graphite, and the anti-oxidation layer is made of aluminum oxide.

[0013] Preferably, the upper heat shield solid felt, the lower heat shield solid felt and the thickened heat shield solid felt are all formed by impregnating soft felt with resin and then laminating and graphitizing.

[0014] Technical effects and advantages of the utility model:

[0015] 1. By setting a splicing mechanism, the connecting slide bars fixed on both sides of the inner wall of the felt card slot are aligned with the connecting slide bars on both sides of the surface of the felt card block, so as to push the upper heat screen felt, so that the two felt card blocks at the bottom of the upper heat screen felt are inserted into the felt card slot, and at the same time, the connecting slide bars slide in the connecting slide bars, so that the upper heat screen felt, the lower heat screen felt and the thickened heat screen felt are spliced. Compared with the prior art, the spliced ​​felt can increase the overall stability and structural strength of the felt, reduce the deformation and damage of the felt in a high temperature environment, and when damaged, one of the felts can be replaced separately without replacing the entire felt structure, which is convenient for maintenance and management. At the same time, the felt is used instead of the heat screen quartz ring, which solves the problem that the heat screen quartz ring is easily broken when impacted by external force;

[0016] 2. The first and second thermal insulation outer layers are used to reduce the outward conduction of the heat field and reduce energy loss. The heat is conducted to the entire single crystal growth area through the heat conduction layer to ensure the uniformity of the thermal field. The high-temperature resistant layer enables the entire solid felt to withstand the high temperature environment. The anti-oxidation layer prevents oxidation and corrosion of the material, which can effectively prevent oxidation and corrosion of the thermal field solid felt in a high temperature environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0018] Figure 2It is a schematic diagram of the structure of the splicing state of the utility model.

[0019] Figure 3 For the utility model Figure 2 Schematic diagram of the structure viewed from above.

[0020] Figure 4 It is a schematic diagram of the upper heat shield felt structure of the utility model when viewed from above.

[0021] Figure 5 It is a schematic diagram of the internal structure of the upper heat shield felt of the utility model.

[0022] The accompanying drawings are marked as follows: 1. upper heat shield solid felt; 2. lower heat shield solid felt; 3. thickened heat shield solid felt; 4. sealing felt; 5. solid felt block; 6. connecting slide groove; 7. solid felt slot; 8. connecting slide rod; 9. first thermal insulation outer layer; 10. heat conduction layer; 11. high temperature resistant layer; 12. anti-oxidation layer; 13. second thermal insulation outer layer. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] As attached Figure 1-5 A new type of heat shield felt for a single crystal furnace thermal field is shown, comprising an upper heat shield felt 1, a lower heat shield felt 2 is arranged at the bottom of the upper heat shield felt 1, and a splicing mechanism is arranged between the upper heat shield felt 1 and the lower heat shield felt 2;

[0025] The splicing mechanism includes a thickened heat screen felt 3, the bottom of the thickened heat screen felt 3 is fixedly connected to the top of the lower heat screen felt 2, the upper heat screen felt 1 and the lower heat screen felt 2 are fixedly connected with sealing felt 4, both sides of the bottom of the upper heat screen felt 1 are fixedly connected with felt blocks 5, both side surfaces of the felt block 5 are provided with connecting slide grooves 6, the top surface of the thickened heat screen felt 3 is provided with a felt slot 7, and both sides of the inner wall of the felt slot 7 are fixedly connected with connecting slide rods 8.

[0026] As attached Figure 1-4 As shown, the solid felt block 5 matches the solid felt slot 7, the connecting slide bar 8 is slidably connected to the connecting slide slot 6, the thickness of the upper heat shield solid felt 1 and the lower heat shield solid felt 2 are the same, and the number of the connecting slide bar 8 and the connecting slide slot 6 are both set to multiple, which is convenient for splicing the upper heat shield solid felt 1, the lower heat shield solid felt 2 and the thickened heat shield solid felt 3 to increase their thermal insulation effect.

[0027] As attached Figure 1-5As shown, the interior of the upper heat shield solid felt 1 and the lower heat shield solid felt 2 includes a first heat insulating outer layer 9, a heat conducting layer 10, a high temperature resistant layer 11, an anti-oxidation layer 12 and a second heat insulating outer layer 13 from top to bottom. The thickness of the first heat insulating outer layer 9 and the heat conducting layer 10 is the same. The first heat insulating outer layer 9 is made of high temperature resistant sintered ceramic material, and the second heat insulating outer layer 13 is made of high temperature resistant polymer composite material, which improves the high temperature resistance of the upper heat shield solid felt 1 and the lower heat shield solid felt 2. The heat conducting layer 10 is made of silicon carbide, the high temperature resistant layer 11 is made of graphite, and the anti-oxidation layer 12 is made of aluminum oxide. The upper heat shield solid felt 1, the lower heat shield solid felt 2 and the thickened heat shield solid felt 3 are all made of soft felt impregnated with resin and then laminated and graphitized to improve the heat insulation, high temperature resistance and anti-oxidation effects of the upper heat shield solid felt 1 and the lower heat shield solid felt 2, and improve the use effect of the overall solid felt.

[0028] Working principle of the utility model: During the use of a new type of heat shield felt for the thermal field of a single crystal furnace provided by the utility model, firstly, the connecting slide bars 8 fixed on both sides of the inner wall of the felt card slot 7 are aligned with the connecting slide bars 6 on both sides of the surface of the felt card block 5, thereby pushing the upper heat shield felt 1, so that the two felt card blocks 5 at the bottom of the upper heat shield felt 1 are inserted into the felt card slot 7, and at the same time, the connecting slide bar 8 slides inside the connecting slide bar 6, so that the upper heat shield felt 1, the lower heat shield felt 2 and the thickened heat shield felt 3 are spliced, so that the upper heat shield felt 1, the lower heat shield felt 2 and the thickened heat shield felt 3 form a whole, thereby increasing the overall stability and structural strength of the felt, and reducing the deformation and damage of the felt in a high temperature environment;

[0029] At the same time, the first thermal insulation outer layer 9 and the second thermal insulation outer layer 13 are used to reduce the outward conduction of the heat field and reduce energy loss. The heat is conducted to the entire single crystal growth area through the heat conduction layer 10 to ensure the uniformity of the thermal field. The high-temperature resistant layer 11 enables the entire solid felt to withstand the high temperature environment. The anti-oxidation layer 12 prevents oxidation and corrosion of the material, which can effectively prevent oxidation and corrosion of the thermal field solid felt in a high temperature environment.

[0030] Finally: The above embodiments are only illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the relevant technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A new type of heat shield felt for a single crystal furnace thermal field, comprising an upper heat shield felt (1), characterized in that: A lower heat shield fixing felt (2) is arranged at the bottom of the upper heat shield fixing felt (1), and a splicing mechanism is arranged between the upper heat shield fixing felt (1) and the lower heat shield fixing felt (2); The splicing mechanism comprises a thickened heat shield felt (3), the bottom of the thickened heat shield felt (3) is fixedly connected to the top of the lower heat shield felt (2), the upper heat shield felt (1) and the lower heat shield felt (2) are fixedly connected with sealing felts (4) inside, the bottom of the upper heat shield felt (1) is fixedly connected with felt blocks (5) on both sides, the surfaces of both sides of the felt blocks (5) are provided with connecting slide grooves (6), the top surface of the thickened heat shield felt (3) is provided with a felt slot (7), and the inner walls of the felt slot (7) are fixedly connected with connecting slide rods (8) on both sides.

2. The novel heat shield felt for the thermal field of a single crystal furnace according to claim 1, characterized in that: The solid felt block (5) matches the solid felt slot (7), and the connecting slide bar (8) is slidably connected to the connecting slide slot (6).

3. The novel heat shield felt for thermal field of single crystal furnace according to claim 1, characterized in that: The upper heat shield solid felt (1) and the lower heat shield solid felt (2) have the same thickness, and the number of the connecting slide rods (8) and the number of the connecting slide grooves (6) are both set to be multiple.

4. The novel heat shield felt for the thermal field of a single crystal furnace according to claim 1, characterized in that: The upper heat shield solid felt (1) and the lower heat shield solid felt (2) each include, from top to bottom, a first heat insulating outer layer (9), a heat conducting layer (10), a high temperature resistant layer (11), an anti-oxidation layer (12) and a second heat insulating outer layer (13); the first heat insulating outer layer (9) and the heat conducting layer (10) have the same thickness.

5. The novel heat shield felt for the thermal field of a single crystal furnace according to claim 4, characterized in that: The first heat-insulating outer layer (9) is made of a high-temperature sintering-resistant ceramic material, and the second heat-insulating outer layer (13) is made of a high-temperature sintering-resistant polymer composite material.

6. The novel heat shield felt for the thermal field of a single crystal furnace according to claim 4, characterized in that: The heat conduction layer (10) is made of silicon carbide, the high temperature resistant layer (11) is made of graphite, and the anti-oxidation layer (12) is made of aluminum oxide.

7. The novel heat shield felt for the thermal field of a single crystal furnace according to claim 1, characterized in that: The upper heat shield solid felt (1), the lower heat shield solid felt (2) and the thickened heat shield solid felt (3) are all made of soft felt impregnated with resin and then laminated and graphitized.

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