Vacuum gauge dynamic comparison device

Abstract

The utility model belongs to the technical field of vacuum gauge detection, and discloses a vacuum gauge dynamic comparison device which comprises a controller and a vacuum chamber, and the vacuum chamber is communicated with a standard vacuum gauge and a vacuum gauge to be detected. The vacuum chamber is further communicated with an inflation device and a vacuumizing device. The vacuumizing device comprises a first support and a second support, the first support is connected with a first vacuum pump, the output end of the first vacuum pump is communicated with the vacuum chamber through a first pipeline, the second support is connected with a second vacuum pump, and the output end of a third vacuum pump is communicated with the vacuum chamber through a second pipeline; a first valve is arranged on the first pipeline, and a second valve is arranged on the second pipeline; the controller is respectively connected with the first vacuum pump, the second vacuum pump, the third vacuum pump, the standard vacuum gauge and the to-be-tested vacuum gauge; according to the utility model, the vacuum gauge can be compared under the ultrahigh vacuum condition, the comparison precision is improved, the structure is simple and compact, and the operation is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum gauge detection, in particular to a vacuum gauge dynamic comparison device. Background Art

[0002] A vacuum gauge is an instrument for measuring gas pressure (vacuum degree) and is widely used in scientific research, industrial production, and laboratories. Since the accuracy of the vacuum gauge measurement results is directly related to the accuracy of experiments and production, it is particularly important to regularly compare and calibrate the vacuum gauge. During the comparison process, one or more standard vacuum gauges with known accuracy are usually used as references. The non-calibrated vacuum gauge is measured under the same conditions as the standard vacuum gauge to compare the difference in readings between the two.

[0003] However, the existing vacuum gauge comparison device generally compares the vacuum gauges under medium vacuum or high vacuum conditions, and has a complex structure, inconvenient operation and low comparison accuracy. Utility Model Content

[0004] The utility model aims to provide a vacuum gauge dynamic comparison device, so as to realize comparison of vacuum gauges under ultra-high vacuum conditions, improve comparison accuracy, and has a simple and compact structure and convenient operation.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The basic technical solution provided by the utility model is:

[0007] A vacuum gauge dynamic comparison device comprises a controller and a spherical vacuum chamber, wherein a plurality of standard vacuum gauges and a plurality of vacuum gauges to be tested are connected to the vacuum chamber; the vacuum chamber is also connected to an air filling device and a vacuum pumping device respectively; the vacuum pumping device comprises a first bracket and a second bracket, wherein a first vacuum pump is detachably connected to the first bracket, and an output end of the first vacuum pump is connected to the vacuum chamber through a first pipeline, and a second vacuum pump is detachably connected to the second bracket, and a third vacuum pump is connected in series to the second vacuum pump, and an output end of the third vacuum pump is connected to the vacuum chamber through a second pipeline; and a first switch valve is arranged on the first pipeline, and a second switch valve is arranged on the second pipeline; the controller is respectively connected to the first vacuum pump, the second vacuum pump, the third vacuum pump, a plurality of the standard vacuum gauges and a plurality of the vacuum gauges to be tested.

[0008] Principles of basic technical solutions:

[0009] The second vacuum pump and the third vacuum pump are used in series, the exhaust port of the second vacuum pump is connected with the exhaust port of the third vacuum pump, the second vacuum pump is connected with the vacuum chamber through the third vacuum pump, first turn on the second vacuum pump to evacuate, when the pressure in the vacuum chamber reaches a certain value, the start condition of the third vacuum pump is met, turn off the second vacuum pump, and then turn on the third vacuum pump to evacuate, when the pressure in the vacuum chamber reaches a certain value, turn off the third vacuum pump, and then turn on the first vacuum pump to evacuate, and evacuate to the ultimate vacuum that the first vacuum pump can reach. The three vacuum pumps can create ultra-high vacuum conditions in the vacuum chamber; the inflation device is connected to the vacuum chamber, and can adjust the pressure in the vacuum chamber so that the pressure in the vacuum chamber reaches the required pressure; on the first pipeline The first switch valve and the second switch valve on the second pipeline can maintain the vacuum degree in the vacuum chamber and prevent outside air from entering the vacuum chamber, which causes the pressure in the vacuum chamber to change; the spherical vacuum chamber can make the internal pressure uniform, and the spherical vacuum chamber is connected to the standard vacuum gauge and the vacuum gauge to be tested respectively. By comparing the readings detected by the vacuum gauge to be tested with the readings detected by the standard vacuum gauge, possible errors in the vacuum gauge to be tested can be found; the controller is respectively connected to the first vacuum pump, the second vacuum pump and the third vacuum pump. The controller integrates the switches of the three vacuum pumps in the controller, and can control the opening and closing of the three vacuum pumps by operating the controller; the controller is connected to several standard vacuum gauges and several vacuum gauges to be tested, and can control the exhaust of the vacuum gauges.

[0010] The beneficial effects of the basic technical solution are:

[0011] By setting three vacuum pumps, a standard vacuum gauge and a vacuum gauge to be tested, an ultra-high vacuum condition can be formed in the vacuum chamber, and the vacuum gauge to be tested used under ultra-high vacuum conditions can be compared. By comparing the indication of the vacuum gauge to be tested with the indication of the standard vacuum gauge, possible errors of the vacuum gauge to be tested can be found, and corresponding adjustments or corrections can be made, thereby improving its measurement accuracy, and the comparison method is simple and easy to operate; the inflation device is connected to the vacuum chamber, and the pressure in the vacuum chamber can be adjusted so that the pressure in the vacuum chamber reaches the required pressure, and pressures in different ranges can be measured, thereby increasing the applicable scope of the device; the setting of the first switch valve and the second switch valve can preserve the vacuum degree in the vacuum chamber, prevent outside air from entering the vacuum chamber, causing the pressure in the vacuum chamber to change, thereby improving the comparison accuracy; by integrating the switches of the three vacuum pumps in the controller, the opening and closing of the three vacuum pumps can be controlled by operating the controller, thereby increasing the compactness of the device structure and convenient operation; the controller is connected to a plurality of standard vacuum gauges and a plurality of vacuum gauges to be tested, and can control the exhaust of the vacuum gauges, further increasing the comparison accuracy and the convenience of operation.

[0012] Preferably, the inflation device comprises a nitrogen bottle, which is connected to the lower side of the vacuum chamber via an inflation pipeline, a pressure reducing valve is connected to one end of the inflation pipeline close to the nitrogen bottle, and a vacuum micro-leak valve is connected to one end of the inflation pipeline close to the vacuum chamber.

[0013] Through the above settings, a pressure reducing valve is arranged at the outlet of the nitrogen bottle, which can control the pressure of the nitrogen in the charging pipeline, avoid excessive pressure from damaging the device or affecting the measurement results, and further increase the comparison accuracy and convenience of operation; a vacuum micro-leakage valve is arranged on the charging pipeline, and the vacuum micro-leakage valve is a device for controlling and adjusting the pressure of the vacuum system. Its main function is to allow gas to flow out of the vacuum system so as to maintain a stable pressure of the system, and the continuous changes of the measured values ​​of the standard vacuum gauge and the non-standard vacuum gauge can be observed; when the required pressure is reached, the vacuum degree in the vacuum chamber can be maintained to avoid air inflow affecting the pressure in the vacuum chamber, and further increase the comparison accuracy.

[0014] Preferably, the number of the vacuum gauges to be tested is six, and the vacuum gauges to be tested are evenly spaced along the equator of the vacuum chamber; the number of the standard vacuum gauge is one, and the standard vacuum gauge is arranged at the top of the vacuum chamber, and the distance between the standard vacuum gauge and each of the vacuum gauges to be tested is equal.

[0015] Through the above arrangement, six vacuum gauges to be tested can be compared at one time, which increases efficiency, further increases the convenience of operation, and saves time and cost; the vacuum gauges to be tested are evenly spaced along the equator of the spherical vacuum chamber and are at an equal distance from the standard vacuum gauge, so that the detection conditions of each vacuum gauge to be tested are the same, reducing measurement errors and further increasing the comparison accuracy.

[0016] Preferably, the standard vacuum gauge is connected to the vacuum chamber via a first vacuum bypass; wherein an inlet of the first vacuum bypass is connected to the vacuum chamber, and an outlet of the first vacuum bypass is connected to the standard vacuum gauge via a first flange.

[0017] Through the above arrangement, the standard vacuum gauge is connected to the vacuum chamber through the first vacuum bypass, and the standard vacuum gauge is connected to the first vacuum bypass through the first flange. While convenient operation, it can also ensure the vacuum degree in the vacuum chamber and avoid air infiltration, further increasing the comparison accuracy.

[0018] Preferably, the vacuum gauge to be tested is connected to the vacuum chamber via a second vacuum bypass; wherein the inlet of the second vacuum bypass is connected to the vacuum chamber, and the outlet of the second vacuum bypass is connected to the vacuum gauge to be tested via a second flange.

[0019] Through the above arrangement, the vacuum gauge to be tested is connected to the vacuum chamber through the second vacuum bypass, and the vacuum gauge to be tested is connected to the second vacuum bypass through the second flange. While convenient operation, it can also ensure the vacuum degree in the vacuum chamber and avoid air infiltration, further increasing the comparison accuracy.

[0020] Preferably, the switch valves on the second pipeline are a first angle valve and a second angle valve, the first angle valve is arranged close to the third vacuum pump, and the second angle valve is arranged close to the vacuum chamber.

[0021] Through the above arrangement, by arranging the first angle valve and the second angle valve, the vacuum degree of the vacuum chamber is further guaranteed, thereby further increasing the comparison accuracy.

[0022] Preferably, the first switching valve is a gate valve.

[0023] Through the above arrangement, the gate valve has a simple process, compact structure design, long service life, and increases the compactness of the device. When closing or opening the gate valve, it is always in a close fit state, so that the valve can be more stable when starting, and when cutting off the medium, it can be done quickly without dragging, further ensuring the vacuum degree of the vacuum chamber and increasing the comparison accuracy.

[0024] Preferably, a fan is provided on the second bracket, and the fan is connected to the controller.

[0025] Through the above settings, the fan can dissipate heat for the second vacuum pump and the third vacuum pump to prevent the vacuum pumps from being damaged by excessive temperature and affecting the test results.

[0026] Preferably, the first vacuum pump is an ion vacuum pump, the second vacuum pump is a molecular vacuum pump, and the third vacuum pump is a mechanical vacuum pump.

[0027] Through the above settings, three different pumps are used in combination. The mechanical pump creates starting pressure for the molecular pump, and the molecular pump creates pre-pressure for the ion pump, creating ultra-high vacuum conditions for the vacuum chamber.

[0028] Preferably, the vacuum gauge to be tested is connected to a first sensor, which is connected to the controller; the standard vacuum gauge is connected to a second sensor, which is connected to the controller; the controller is connected to an output module, which is used to store and display the pressure values ​​detected by the standard vacuum gauge and the vacuum gauge to be tested.

[0029] Through the above-mentioned setting, the first sensor can detect the indication of the vacuum gauge to be tested, and the second sensor can detect the indication of the standard vacuum gauge. The first sensor and the second sensor transmit electrical signals to the controller, and the controller converts the electrical signals into indications and transmits them to the output module. The output module stores and displays the indications, thereby increasing the convenience of operation and the comparison accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a structural schematic diagram of a vacuum gauge dynamic comparison device of the utility model;

[0031] The names of the corresponding marks in the accompanying drawings are:

[0032] The first bracket 1, the first vacuum pump 2, the first switch valve 21, the second bracket 3, the second vacuum pump 4, the third vacuum pump 5, the fan 51, the first angle valve 52, the vacuum chamber 6, the second angle valve 61, the second vacuum bypass 62, the vacuum gauge to be tested 621, the first vacuum bypass 63, the standard vacuum gauge 631, the vacuum micro-leak valve 64, the pressure reducing valve 7, the nitrogen bottle 8, and the controller 9. DETAILED DESCRIPTION

[0033] The present invention is further described in detail below in conjunction with the accompanying drawings and implementation examples:

[0034] like Figure 1 As shown, a vacuum gauge dynamic comparison device includes a controller 9 and a spherical vacuum chamber 6, wherein a standard vacuum gauge 631 and six vacuum gauges to be tested 621 are connected to the vacuum chamber 6, and the vacuum gauges to be tested 621 are evenly spaced along the equator of the vacuum chamber 6, and the standard vacuum gauge 631 is arranged at the top of the vacuum chamber 6, and the distance between the standard vacuum gauge 631 and each vacuum gauge to be tested 621 is equal. The standard vacuum gauge 631 is connected to the vacuum chamber 6 through a first vacuum bypass 63, wherein the inlet of the first vacuum bypass 63 is connected to the vacuum chamber 6, and the outlet of the first vacuum bypass 63 is connected to the standard vacuum gauge 631 through a first flange, and the first flange is welded to the first vacuum bypass 63; the vacuum gauge to be tested 621 is connected to the vacuum chamber 6 through a second vacuum bypass 62; wherein the inlet of the second vacuum bypass 62 is connected to the vacuum chamber 6, and the outlet of the second vacuum bypass 62 is connected to the vacuum gauge to be tested 621 through a second flange, and the second flange is welded to the second vacuum bypass 62.

[0035] The vacuum chamber 6 is also connected to an air filling device and a vacuum pumping device respectively. The vacuum pumping device includes a first bracket 1 and a second bracket 3. An ion vacuum pump is threadedly connected to the first bracket 1. The output end of the ion vacuum pump is connected to the vacuum chamber 6 through a first pipeline. A plug valve is arranged on the first pipeline. A mechanical vacuum pump is threadedly connected to the second bracket 3. The mechanical vacuum pump is connected in series with a molecular vacuum pump. The air extraction port of the mechanical vacuum pump is connected to the air outlet of the molecular vacuum pump. The output end of the molecular vacuum pump is connected to the vacuum chamber 6 through a second pipeline, and the mechanical vacuum pump is connected to the vacuum chamber 6 through the molecular vacuum pump. A first angle valve 52 and a second angle valve 61 are arranged on the second pipeline. The first angle valve 52 is arranged close to the third vacuum pump 5, and the second angle valve 61 is arranged close to the vacuum chamber 6. A fan 51 is arranged on the second bracket 3, and the fan 51 is connected to the controller 9.

[0036] The inflation device includes a nitrogen bottle 8, which is connected to the lower side of the vacuum chamber 6 through an inflation pipeline. The end of the inflation pipeline close to the nitrogen bottle 8 is connected to a pressure reducing valve 7 for controlling the inflation pressure, and the end of the inflation pipeline close to the vacuum chamber 6 is connected to a vacuum micro-leak valve 64. The controller 9 is respectively connected to the first vacuum pump 2, the second vacuum pump 4, the third vacuum pump 5, a number of standard vacuum gauges 631 and a number of vacuum gauges to be tested 621. The vacuum gauge to be tested 621 is connected to a first sensor, and the first sensor is connected to the controller 9. In the embodiment of the present application, the standard vacuum gauge 631 is connected to a second sensor, and the second sensor is connected to the controller 9; the controller 9 is connected to an output module, and the output module is used to store and display the pressure values ​​detected by the standard vacuum gauge 631 and the vacuum gauge to be tested 621.

[0037] The specific implementation process is as follows:

[0038] The vacuum gauge 621 to be tested is connected to the vacuum chamber 6 through the vacuum flange on the second vacuum bypass 62; then the switch of the mechanical vacuum pump on the controller 9 is turned on, and the first angle valve 52 and the second angle valve 61 are opened; the mechanical vacuum pump starts to evacuate, and when the pump port pressure is 3-5Pa, the switch of the molecular vacuum pump on the controller 9 is turned on, and the vacuum chamber 6 is evacuated for a period of time; when the pressure of the vacuum chamber 6 is 3.0×10 -6 -5.0×10 -6 Pa, turn on the switch of the ion vacuum pump and the switch of the gate valve on the controller 9; after the vacuum chamber 6 is evacuated to the ultimate vacuum that the third vacuum pump 5 can reach (6.0×10 -9 -7.0×10 -9Pa), close the switch of the plug valve and the switch of the ion vacuum pump; then open the vacuum micro-leakage valve 64 to pass nitrogen until the indication of the standard vacuum gauge 631 reaches the required measurement value; close the vacuum micro-leakage valve 64, the first sensor and the second sensor transmit the detected reading electrical signals to the controller 9 respectively, the controller 9 converts the reading electrical signals into indications and transmits them to the output module, the output module stores and displays the indications, through comparison, the possible errors of the vacuum gauge to be calibrated can be found, and corresponding adjustments or corrections can be made, so as to improve its measurement accuracy.

[0039] Among them, by setting up three vacuum pumps, a standard vacuum gauge 631 and a vacuum gauge to be tested 621, an ultra-high vacuum condition can be formed in the vacuum chamber 6, and the vacuum gauge to be tested 621 used under ultra-high vacuum conditions can be compared. By comparing the reading of the vacuum gauge to be tested 621 with the reading of the standard vacuum gauge 631, possible errors of the vacuum gauge to be tested 621 can be found, and corresponding adjustments or corrections can be made, thereby improving its measurement accuracy, and the comparison method is simple and easy to operate; the inflation device is connected to the vacuum chamber 6, and can adjust the pressure in the vacuum chamber 6 so that the pressure in the vacuum chamber 6 reaches the required pressure, and can measure Different ranges of pressure increase the application range of the device; the setting of the first opening and closing valve and the second switch valve can maintain the vacuum degree in the vacuum chamber 6, prevent outside air from entering the vacuum chamber 6, and cause the pressure in the vacuum chamber 6 to change, thereby improving the comparison accuracy; by integrating the switches of the three vacuum pumps in the controller 9, the opening and closing of the three vacuum pumps can be controlled by operating the controller 9, thereby increasing the compactness of the device structure and facilitating operation; the controller 9 is connected to several standard vacuum gauges 631 and several vacuum gauges to be tested 621, and can control the exhaust of the vacuum gauges, further increasing the comparison accuracy and convenience of operation.

[0040] The above is only an embodiment of the utility model, and the common knowledge such as the known specific technical scheme or characteristics in the scheme is not described in detail here. It should be pointed out that for those skilled in the art, several deformations and improvements can be made without departing from the technical scheme of the utility model, which should also be regarded as the protection scope of the utility model, and these will not affect the effect of the implementation of the utility model and the practicality of the patent. The scope of protection required by this application shall be based on the content of its claims, and the specific implementation methods and other records in the specification can be used to interpret the content of the claims.

Claims

1. A vacuum gauge dynamic comparison device, characterized in that: The invention comprises a controller (9) and a spherical vacuum chamber (6), wherein the vacuum chamber (6) is connected to a plurality of standard vacuum gauges (631) and a plurality of vacuum gauges to be tested (621); the vacuum chamber (6) is also connected to an air filling device and a vacuum pumping device respectively; the vacuum pumping device comprises a first bracket (1) and a second bracket (3); the first bracket (1) is detachably connected to a first vacuum pump (2); the output end of the first vacuum pump (2) is connected to the vacuum chamber (6) through a first pipeline; the second bracket (3) is detachably connected to a second vacuum pump (4); the second vacuum pump (4) is connected in series to a third vacuum pump (5); the output end of the third vacuum pump (5) is connected to the vacuum chamber (6) through a second pipeline; and a first switch valve (21) is provided on the first pipeline, and a second switch valve is provided on the second pipeline; the controller (9) is respectively connected to the first vacuum pump (2), the second vacuum pump (4), the third vacuum pump (5), the plurality of standard vacuum gauges (631) and the plurality of vacuum gauges to be tested (621).

2. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The inflation device comprises a nitrogen bottle (8), the nitrogen bottle (8) being connected to the lower side of the vacuum chamber (6) via an inflation pipeline, the inflation pipeline being connected to a pressure reducing valve (7) and a vacuum micro-leakage valve (64), and the vacuum micro-leakage valve (64) being arranged between the pressure reducing valve (7) and the vacuum chamber (6).

3. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The number of the vacuum gauges (621) to be tested is six, and the vacuum gauges (621) to be tested are evenly spaced along the equator of the vacuum chamber (6); the number of the standard vacuum gauge (631) is one, and the standard vacuum gauge (631) is arranged at the top of the vacuum chamber (6), and the distance between the standard vacuum gauge (631) and each of the vacuum gauges (621) to be tested is equal.

4. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The standard vacuum gauge (631) is connected to the vacuum chamber (6) via a first vacuum bypass (63); wherein the inlet of the first vacuum bypass (63) is connected to the vacuum chamber (6), and the outlet of the first vacuum bypass (63) is connected to the standard vacuum gauge (631) via a first flange.

5. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The vacuum gauge to be tested (621) is connected to the vacuum chamber (6) via a second vacuum bypass (62); wherein the inlet of the second vacuum bypass (62) is connected to the vacuum chamber (6), and the outlet of the second vacuum bypass (62) is connected to the vacuum gauge to be tested (621) via a second flange.

6. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The second switch valve comprises a first angle valve (52) and a second angle valve (61), wherein the first angle valve (52) is arranged close to the third vacuum pump (5), and the second angle valve (61) is arranged close to the vacuum chamber (6).

7. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The first switch valve (21) is a gate valve.

8. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: A fan (51) is provided on the second bracket (3), and the fan (51) is connected to the controller (9).

9. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The first vacuum pump (2) is an ion vacuum pump, the second vacuum pump (4) is a molecular vacuum pump, and the third vacuum pump (5) is a mechanical vacuum pump.

10. The vacuum gauge dynamic comparison device according to claim 1, characterized in that: The vacuum gauge to be tested (621) is connected to a first sensor, and the first sensor is connected to the controller (9); the standard vacuum gauge (631) is connected to a second sensor, and the second sensor is connected to the controller (9); the controller (9) is connected to an output module, and the output module is used to store and display the pressure values ​​detected by the standard vacuum gauge (631) and the vacuum gauge to be tested (621).

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