Tank cover linkage mechanism and cleaning equipment

Abstract

The utility model provides a tank cover linkage mechanism and cleaning equipment, and the tank cover linkage mechanism comprises a lifting device which is used for placing a wafer and driving the wafer to lift so as to enable the wafer to move out of or enter a cleaning tank; the tank cover is used for being movably connected to the cleaning tank and used for opening or closing a tank opening of the cleaning tank, the tank cover in the open state avoids the moving path of the lifting device, and the tank cover in the closed state is located in the moving path of the lifting device; and the linkage assembly is in driving connection with the tank cover and the lifting device, and when the lifting device ascends or descends, the tank cover is driven by the linkage assembly to be synchronously opened or closed, so that the tank cover avoids the lifting device in the lifting process.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a slot cover linkage mechanism and cleaning equipment. Background Art

[0002] In the wafer tank wet cleaning equipment in the semiconductor industry, a tank cleaning equipment is usually used to clean the wafer.

[0003] like Figure 1 and Figure 2 As shown, the tank cleaning device in the related art includes: a tank cover 2 connected to the notch of the cleaning tank 1, a cylinder 3 driving the tank cover 2 to open and close, and a lifting device 4. Among them, the lifting device 4 includes: a bracket 5 and a driving part 6 driving the bracket 5 to rise or fall. Among them, it can be seen that when the tank cover 2 is closed, the position of the tank cover 2 is on the moving path of the bracket 5. Therefore, during the lifting process of the bracket 5, the tank cover 2 needs to be opened first so that the bracket 5 can pass through the notch without obstruction.

[0004] Normally, a solenoid valve is used to control the opening and closing of the slot cover 2, and a position sensor is used as a detection signal to ensure that the slot cover 2 is in an open state when the vertical lifting device 4 is lifted or lowered. However, during the operation of the equipment process, due to some abnormal reasons (such as software abnormal bugs, signal acquisition failure, etc.), the system misjudges the state of the slot cover 2 or the motor operation state, which will lead to the risk of collision between the bracket 5 and the slot cover 2, which is easy to damage the wafer batch or the mechanical mechanism and components of the equipment. Utility Model Content

[0005] The utility model aims to at least solve the problem that there is a collision risk between the bracket and the slot cover in the prior art, which easily causes damage to the wafer or equipment, and proposes a slot cover linkage mechanism and a slot type cleaning device.

[0006] In order to achieve the purpose of the utility model, a slot cover linkage mechanism is provided, which is used to be connected to the cleaning slot of a slot-type cleaning device, and the slot cover linkage mechanism includes: a lifting device, which is used to place wafers and drive the wafers to lift and lower, so that the wafers can be moved out of or into the cleaning slot; a slot cover, which is used to be movably connected to the cleaning slot and is used to open or close the slot of the cleaning slot, the slot cover in the open state avoids the moving path of the lifting device, and the slot cover in the closed state is located in the moving path of the lifting device; a linkage component, which is respectively driven and connected to the slot cover and the lifting device, and when the lifting device rises or descends, the slot cover is driven to be opened or closed synchronously by the linkage component, so that the slot cover avoids the lifting device during the lifting process.

[0007] Optionally, the lifting device includes: a bracket for placing the wafer, the bracket being configured to be liftable at the position of the cleaning tank, the bracket being moved out of or into the cleaning tank by lifting; a driving unit being configured to be liftable outside the cleaning tank, the driving unit being respectively connected to the bracket and the linkage assembly, the driving unit drives the bracket to be lifted and lowered and also drives the tank cover to be opened or closed through the linkage assembly, so that the tank cover avoids the bracket.

[0008] Optionally, the slot cover includes: a cover body, which is rotatably connected to the cleaning slot, the cover body having a first end and a second end along a first horizontal direction, and the driving part is located at the first end of the cover body; a driving shaft, which is fixedly connected to the first end of the cover body, and the driving shaft drives the cover body to rotate by rotating so that the slot cover is opened or closed, and the linkage assembly is drivingly connected to the driving shaft.

[0009] Optionally, the linkage assembly includes: a rack, which is drivingly connected to the driving part, and the driving part is used to drive the rack to move along its own length direction; a driving gear, which is meshed with the rack, and the driving gear is also drivingly connected to the driving shaft. The rack drives the driving gear to rotate during movement, and the rotating driving gear drives the driving shaft to rotate synchronously to open or close the slot cover.

[0010] Optionally, the driving unit drives the rack to move away from the driving shaft while rising up, and the rack drives the driving gear to rotate along a first rotation direction while moving away from the driving shaft, so as to drive the slot cover to open; the driving unit drives the rack to move towards the driving shaft while descending close to the driving shaft, and the rack drives the driving gear to rotate along a second rotation direction while moving close to the driving shaft, so as to drive the slot cover to close, wherein the second rotation direction is opposite to the first rotation direction.

[0011] Optionally, the linkage assembly also includes: a shell having a first end and a second end, the drive shaft is rotatably inserted into the first end of the shell, the second end of the shell is provided with an opening structure facing the driving part, the driving gear and the rack are located in the shell, and the rack is slidably connected to the shell along the direction from the first end to the second end of the shell; a transmission rod is inserted into the opening structure, one end of the transmission rod is connected to the rack, and the other end of the transmission rod is connected to the driving part, and the rack is drivingly connected to the driving part through the transmission rod.

[0012] Optionally, the transmission rod is rotatably connected to the driving portion.

[0013] Optionally, the linkage assembly further includes: a transmission belt connected between the driving gear and the driving shaft, and the driving gear and the driving shaft are driven and connected via the transmission belt.

[0014] Optionally, there are two slot covers, which are arranged opposite to each other; there are two linkage components, which are arranged one by one to the slot covers and the linkage structures, each slot cover is drivingly connected to the corresponding linkage component, and both linkage components are drivingly connected to the lifting device.

[0015] According to the second aspect of the utility model, a tank-type cleaning device is also disclosed, comprising: a cleaning tank and the above-mentioned tank cover linkage mechanism, wherein the tank cover linkage mechanism is arranged on the cleaning tank.

[0016] The slot cover linkage mechanism of the utility model can realize linkage between the slot cover and the lifting device through the linkage component by setting a linkage component, and the slot cover is opened and closed synchronously by the lifting of the lifting device, thereby effectively avoiding the collision problem caused by the system's misjudgment of the slot cover position. Moreover, since the lifting device and the linkage component, and the linkage component and the slot cover are mechanically matched, after being assembled in place, as long as the positional relationship and connection relationship between the components remain unchanged, the matching relationship between the components will not change easily. Compared with the method of realizing linkage matching by electronic control, there are fewer uncontrollable factors, so a reliable linkage matching relationship can be guaranteed. Moreover, the cumbersome control process is omitted, so that there is no jamming phenomenon during the matching process between the slot cover and the lifting device, the linkage matching process is smoother, and the reaction time is saved, which reduces the equipment cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is an assembly diagram of a slot cover linkage mechanism in the related art;

[0018] Figure 2 It is a three-dimensional diagram of a slot cover linkage mechanism in the related art;

[0019] Figure 3 It is an assembly diagram of the slot cover linkage mechanism of the embodiment of the utility model;

[0020] Figure 4 A three-dimensional diagram of the slot cover linkage mechanism of an embodiment of the utility model;

[0021] Figure 5 It is a structural schematic diagram of the linkage assembly of the slot cover linkage mechanism of an embodiment of the utility model;

[0022] Figure 6 A comparison diagram of the dimensional relationships in the linkage components of the slot cover linkage mechanism of the embodiment of the utility model;

[0023] Figure 7It is a side view of the slot cover linkage mechanism of the embodiment of the utility model; DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the technical solution of the present invention, the slot cover linkage mechanism and the cleaning device provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0025] like Figure 1 and Figure 2 As shown, the tank cleaning equipment in the related art includes: a cleaning tank 1, a tank cover 2, a cylinder 3 and a lifting device 4. The tank cover 2 is connected to the cleaning tank 1, and is used to open or close the slot. The cylinder 3 is connected to the tank cover 2 to drive the tank cover 2 to open and close. Among them, the lifting device 4 includes: a bracket 5, a driving part 6 and a displacement mechanism 7. The displacement mechanism 7 is vertically arranged, and the driving part 6 is arranged on the displacement mechanism 7. The displacement mechanism 7 drives the bracket 5 and the driving part 6 to rise and fall. The driving part 6 is fixedly connected to the bracket 5 to drive the bracket 5 to rise or fall. It can be seen that the position of the tank cover 2 is on the moving path of the bracket 5. Therefore, during the lifting process of the bracket 5, the tank cover 2 needs to be opened first so that the bracket 5 can pass through the slot without hindrance.

[0026] Normally, a solenoid valve is used to control the cylinder to open and close the slot cover 2, and a position sensor is used as a detection signal to ensure that the slot cover 2 is in an open state when the lifting device 4 is lifted.

[0027] The whole process is as follows:

[0028] When the bracket 5 carries the wafer and is ready to enter the cleaning tank 1, the lifting device 4 is at a high position, the cylinder 3 extends and pushes the tank cover 2 to rotate along the first rotation direction, so that the tank cover 2 is opened.

[0029] At the same time, the position sensor detects whether the tank cover 2 is opened. If the tank cover 2 is opened, the lifting device 4 starts to descend, so that the wafer enters the cleaning tank 1.

[0030] When the bracket 5 is carrying the wafer and preparing to leave the cleaning tank 1, the lifting device 4 is at a low position, the cylinder 3 extends and pushes the tank cover 2 to rotate along the first rotation direction, so that the tank cover 2 is opened, and at the same time, the position sensor detects whether the tank cover 2 is opened. If the tank cover 2 is opened, the lifting device 4 starts to rise, and the lifting device 4 rises, so that the wafer leaves the cleaning tank 1.

[0031] When the slot cover 2 is actually in a closed state, if the power supply circuit of the position sensor fails, the signal is lost, or the position sensor is loosely installed and slides down, it is easy for the system to misjudge the closed state of the slot cover 2 as an open state, causing an accident in which the slot cover 2 collides with the bracket 5.

[0032] That is to say, since the process of opening and closing the slot cover 2 is controlled by software and electrical signals, the control is complex, the safety level is low, and the reliability is poor. Certain abnormal reasons (such as software abnormal bugs, signal acquisition failure, etc.) will cause the system to misjudge the state of the slot cover 2 or the operating state of the motor, which will cause the risk of collision between the bracket 5 and the slot cover 2, which may easily cause batch damage to wafers or damage to the mechanical structure and devices of the equipment.

[0033] In order to solve the above problems, Figure 3 The embodiment of the utility model shown discloses a slot cover linkage mechanism, which is used to be connected to the cleaning slot 40 of the slot type cleaning equipment, and the slot cover 20 is synchronously opened or closed by the lifting control of the lifting device 10 to avoid collision between the lifting device 10 and the slot cover 20.

[0034] like Figure 3 As shown, the slot cover linkage mechanism includes: a lifting device 10, a slot cover 20 and a linkage assembly 30. The lifting device 10 is used to place wafers and drive the wafers to move up and down so that the wafers can be moved out of or into the cleaning tank 40; the slot cover 20 is used to be movably connected to the cleaning tank 40 and is used to open or close the notch of the cleaning tank 40. The slot cover 20 in the open state avoids the moving path of the lifting device 10, and the slot cover 20 in the closed state is located in the moving path of the lifting device 10; the linkage assembly 30 is respectively connected to the slot cover 20 and the lifting device 10. When the lifting device 10 rises or falls, the slot cover 20 is driven to open or close synchronously through the linkage assembly 30, so that the slot cover 20 avoids the lifting device 10 during the lifting process.

[0035] When in use, when the lifting device 10 drives the wafer to rise and leave the cleaning tank 40, the lifting device 10 drives the tank cover 20 to open through the linkage assembly 30, and the tank cover 20 moves to a position that avoids the moving path of the lifting device 10, so as to avoid the tank cover 20 from colliding with the lifting device 10 and the wafer during the rising process. When the lifting device 10 drives the wafer to descend into the cleaning tank 40, the lifting device 10 drives the tank cover 20 to gradually close through the linkage assembly 30. When the lifting device 10 completely lowers the wafer into the cleaning tank 40, the tank cover 20 is completely closed, so as to avoid the tank cover 20 from colliding with the lifting device 10 during the descending process.

[0036] The slot cover linkage mechanism of the utility model can realize linkage between the slot cover 20 and the lifting device 10 through the linkage component 30 by setting the linkage component 30, that is, the slot cover 20 is opened and closed by the lifting and lowering of the lifting device 10, so that when the wafer passes through the notch of the cleaning slot, the slot cover 20 can avoid the lifting device 10 and the wafer. It effectively avoids the collision problem caused by the system's misjudgment of the position of the slot cover 20, prevents the slot cover 20 from colliding with the lifting device 10, and further avoids the process liquid from spilling into or outside the machine, thereby improving the safety and reliability of the process. Moreover, since the lifting device 10 and the linkage component 30, and the linkage component 30 and the slot cover 20 are mechanically matched, after the components are assembled in place, as long as the positional relationship and connection relationship between the components remain unchanged, the matching relationship between the components will not change easily. Compared with the method of realizing linkage matching by electronic control, there are fewer uncontrollable factors, so a reliable linkage matching relationship can be guaranteed. Moreover, the cumbersome control process is omitted, so that there is no jamming phenomenon during the cooperation between the slot cover 20 and the lifting device 10, the linkage cooperation process is smoother, the reaction time is saved, and the equipment cost is reduced.

[0037] It should be noted that, in this embodiment, the vertical direction, the first horizontal direction and the second horizontal direction are perpendicular to each other. In the various drawings of the embodiments of the utility model, the X-axis, the Y-axis and the Z-axis are perpendicular to each other. The direction of the X-axis represents the vertical direction, the direction of the Y-axis represents the first horizontal direction, and the direction of the Z-axis represents the second horizontal direction.

[0038] In a possible embodiment, Figure 4 As shown, the lifting device 10 includes: a bracket 11, a driving unit 12, a connecting plate 13, a displacement mechanism 14 and a driving motor. The bracket 11 is used to place the wafer, and the bracket 11 is used to be arranged at the position of the cleaning tank 40 in a liftable manner. The bracket 11 moves out of or into the cleaning tank 40 by lifting and moving; the connecting plate 13 is arranged along the vertical direction X, the bottom of the connecting plate 13 is fixedly connected to the bracket 11, and the top of the connecting plate 13 is fixedly connected to the driving unit 12. The driving unit 12 is located outside the cleaning tank 40 and connected to the displacement mechanism 14. The displacement mechanism 14 is arranged vertically and is connected to the driving motor. The displacement mechanism 14 is used to move the driving unit along the vertical direction X. Under the drive of the driving motor, the displacement mechanism 14 drives the driving unit 12 to rise and fall. During the lifting process, the driving unit 12 drives the bracket 11 to rise or fall synchronously through the connecting plate 13.

[0039] The linkage assembly 30 is drivingly connected to the driving unit 12 . The driving unit 12 drives the bracket 11 to rise and fall while driving the slot cover 20 to open or close through the linkage assembly 30 , so that the slot cover 20 avoids the bracket 11 .

[0040] It should be noted that, when the tank cover 20 is closed, the bracket 11 is located inside the cleaning tank 40, and the driving unit 12 is always located outside the cleaning tank 40. In order to avoid interference between the tank cover 20 and the connecting plate 13, an avoidance groove 211 is provided on the tank cover 20. When the tank cover 20 is closed, the connecting plate 13 is located in the avoidance groove 211, so that a part of the connecting plate 13 is located inside the cleaning tank 40, and the other part is located outside the cleaning tank 40.

[0041] like Figure 3 and Figure 4 As shown, the slot cover 20 includes: a cover body 21 and a drive shaft 22. The cover body 21 has a first end and a second end along the first horizontal direction Y, and the drive shaft 22 is fixedly connected to the first end of the cover body 21. The first end of the cover body 21 is rotatably connected to the cleaning tank 40 through the drive shaft 22, and the driving part 12 is located at the first end of the cover body 21; the drive shaft 22 drives the cover body 21 to rotate by rotating, so that the slot cover 20 is opened or closed, and the linkage assembly 30 is drivingly connected to the drive shaft 22. Through the driving connection between the linkage assembly 30 and the drive shaft 22, the drive shaft 22 can be driven to rotate by the linkage assembly 30, so that the rotating drive shaft 22 drives the cover body 21 to rotate, and then the slot cover 20 is opened or closed, realizing the mechanical linkage between the bracket 11 and the slot cover 20, thereby effectively avoiding the collision between the bracket 11 and the slot cover 20.

[0042] It can be understood that, in this embodiment, the slot cover 20 also includes: a driven shaft 23, the driven shaft 23 is connected to the second end of the cover body 21, the second end of the cover body 21 is rotatably connected to the cleaning slot 40 through the driven shaft 23, and an avoidance groove 211 is provided on the cover body 21 to avoid the connecting plate 13 to prevent the cover body 21 from interfering or colliding with the connecting plate 13.

[0043] like Figure 4 and Figure 5 As shown, in a possible embodiment, the linkage assembly 30 includes: a rack 31 and a driving gear 32. The rack 31 is movably arranged and drivingly connected to the driving portion 12, the driving gear 32 is meshed with the rack 31, and the driving gear 32 is also drivingly connected to the driving shaft 22. Driven by the driving portion 12, the rack 31 moves along its own length direction, and the rack 31 drives the driving gear 32 to rotate during the movement, and the rotating driving gear 32 drives the driving shaft 22 to rotate synchronously, so that the slot cover 20 is opened or closed.

[0044] The slot cover linkage mechanism of the utility model is provided with a rack 31 and a driving gear 32. Through the cooperation of the rack 31 and the driving gear 32, the linear motion of the driving part 12 used to drive the bracket 11 to rise and fall can be converted into the circumferential rotation required to drive the slot cover 20 to open and close, thereby forming a linkage between the slot cover 20 and the bracket 11 to avoid collision between the slot cover 20 and the bracket 11.

[0045] like Figure 4 and Figure 5 As shown, in a possible embodiment, the linkage assembly 30 further includes: a housing 33, a transmission rod 34 and a slide rail 36. The housing 33 has a first end and a second end, the drive shaft 22 is rotatably disposed through the first end of the housing 33, and the second end of the housing 33 is provided with an opening structure 331 facing the drive unit 12.

[0046] The driving gear 32 and the rack 31 are located in the housing 33. The slide rail 36 is arranged on the inner wall of the housing 33, and the slide rail 36 extends from the first end of the housing 33 to the second end of the housing 33. The rack 31 is slidably connected to the slide rail 36, so that the rack 31 can reciprocate along the extension direction of the slide rail 36. The driving gear 32 is rotatably connected to the inner wall of the housing 33 and meshes with the rack 31. The rack 31 can drive the driving gear 32 to rotate during the movement along the slide rail 36. The transmission rod 34 is arranged in the opening structure 331, one end of the transmission rod 34 is fixedly connected to one end of the rack 31 close to the opening structure 331, and the other end of the transmission rod 34 is connected to the driving part 12. The rack 31 is drivingly connected to the driving part 12 through the transmission rod 34.

[0047] It should be noted that, in the present embodiment, the transmission rod 34 and the rack 31 are fixedly connected, but this is not restrictive. In some other embodiments not shown in the figure, the transmission rod 34 and the rack 31 can also be elastically connected. As long as the drive part 12 can drive the rack 31 to move synchronously through the transmission rod 34 while moving, so as to ensure that the slot cover 20 is fully opened and closed during the lifting and lowering process of the tray 11, it is within the protection scope of the present utility model.

[0048] When the driving part 12 drives the bracket 11 to rise, the driving part 12 gradually moves away from the driving shaft 22. Driven by the driving part 12, the transmission rod 34 drives the rack 31 to move away from the driving shaft 22. While the rack 31 gradually moves away from the driving shaft 22, it drives the driving gear 32 to rotate along the first rotation direction. The rotating driving gear 32 drives the driving shaft 22 to rotate synchronously, so that the slot cover 20 opens. When the bracket 11 rises to below the slot opening of the cleaning slot 40, the slot cover 20 just avoids the rising path of the bracket 11, so that the bracket 11 passes through the slot to avoid collision.

[0049] When the driving part 12 descends, the driving part 12 gradually approaches the driving shaft 22. Driven by the driving part 12, the transmission rod 34 drives the rack 31 to move toward the driving shaft 22. While gradually approaching the driving shaft 22, the rack 31 drives the driving gear 32 to rotate along the second rotation direction. The rotating driving gear 32 drives the driving shaft 22 to rotate synchronously, so that the slot cover 20 is closed. When the bracket 11 is close to the slot opening of the cleaning slot 40, the slot cover 20 is still in a position to avoid the moving path of the bracket 11, so that the bracket 11 can pass through and enter the cleaning slot 40. After the bracket 11 enters the cleaning slot 40, the slot cover 20 closes the slot opening of the cleaning slot 40.

[0050] It should be noted that, in this embodiment, Figure 6 As shown, the direction of the linkage assembly 30 is not perpendicular to the second horizontal direction Z. This causes the linkage assembly 30 to change the angle between the linkage assembly 30 and the second horizontal direction Z during the lifting process of the driving part 12, so that torsional stress is generated at the connection position between the linkage assembly 30 and the driving part 12. By making the transmission rod 34 rotatably connected to the driving part 12, when the driving part 12 moves away from the driving shaft 22, a slight rotation will occur between the transmission rod 34 and the driving part 12, thereby avoiding the generation of torsional stress and improving the reliability of the connection.

[0051] It should also be noted that, in this embodiment, the rack 31 is movably disposed on the slide rail 36, so as to achieve a sliding connection with the housing 33. However, this is not restrictive. In some other embodiments not shown in the figure, a sliding groove can be provided on the housing 33, and the rack 31 can be movably disposed in the sliding groove to achieve a sliding connection with the housing 33. In other words, without violating the inventive concept and principle of the utility model, as long as the rack 31 is slidably connected with the housing 33, it is within the protection scope of the utility model.

[0052] In this embodiment, if Figure 5 As shown, the linkage assembly 30 further includes a transmission belt 35. The transmission belt 35 is connected between the driving gear 32 and the driving shaft 22, and the driving gear 32 and the driving shaft 22 are driven and connected by the transmission belt 35. Driven by the transmission rod 34, the rack 31 moves relative to the driving gear 32, so that the driving gear 32 rotates, and the rotating driving gear 32 drives the driving shaft 22 to rotate through the transmission belt 35, thereby realizing the opening or closing of the slot cover 20.

[0053] It is understandable that if Figure 6As shown, the linkage assembly 30 also includes: a transmission shaft (not shown in the figure), a first pulley 37 and a second pulley 38. The transmission shaft is rotatably connected to the inner wall of the housing 33, and the driving gear 32 is fixedly connected to the transmission shaft and rotatably connected to the inner wall of the housing 33 through the transmission shaft. The first pulley 37 is fixedly connected to the transmission shaft, and the transmission belt 35 is sleeved on the first pulley 37 to achieve a driving connection with the driving gear 32. The second pulley 38 is used to be fixed on the driving shaft 22 located in the housing 33, and the transmission belt 35 is sleeved on the second pulley 38 to achieve a driving connection with the driving shaft 22.

[0054] In order to ensure that the slot cover 20 is fully opened and closed during the lifting process of the tray 11, the following relationship should be satisfied when setting the linkage assembly 30:

[0055] L / (A / 360°×π×d2)=d3 / d1 Equation 1

[0056] Among them, Figure 6 As shown,

[0057] L is the distance that the rack 31 moves relative to the driving gear 32;

[0058] A is the angle that the slot cover 20 needs to rotate when opening and closing;

[0059] d1 is the diameter of the first pulley 37;

[0060] d2 is the diameter of the second pulley 38;

[0061] d3 is the diameter of the driving gear 32 .

[0062] Generally, the angle that the slot cover 20 needs to rotate from fully open to fully closed is at least 90°. Substituting into formula 1, we can get

[0063] 4L / (π×d2)=d3 / d1 Equation 2

[0064] That is to say, when setting the linkage assembly 30, the moving distance L of the rack 31 relative to the driving gear 32 can be controlled as needed, and then the diameter d1 of the first pulley 37, the diameter d2 of the second pulley 38, and the diameter d3 of the driving gear 32 are considered based on L, so that the above-mentioned relationship is satisfied among L, d1, d2, and d3, thereby ensuring that the slot cover 20 is fully opened or closed during the lifting and lowering process of the tray 11.

[0065] In the embodiment described above, the driving gear 32 and the driving shaft 22 are connected by a driving belt 35, but this is not restrictive. In some other embodiments not shown in the figure, other transmission modes may be used between the driving gear 32 and the driving shaft 22, such as gear transmission, etc. As long as the transmission between the driving shaft 22 and the driving gear 32 can be achieved, it is within the protection scope of the present invention without violating the inventive concept and principle of the present invention.

[0066] like Figure 7 As shown, in this embodiment, there are two slot covers 20, and the two slot covers 20 are arranged oppositely along the second horizontal direction Z; there are two linkage components 30, and the slot covers 20 and the linkage structures are arranged one by one, each slot cover 20 is drivingly connected to the corresponding linkage component 30, and the two linkage components 30 are both drivingly connected to the lifting device 10. That is to say, in this embodiment, each slot cover 20 includes a cover body 21, a driving shaft 22 and a driven shaft 23, and the cover bodies 21 of the two slot covers 20 are arranged oppositely along the second horizontal direction Z, and the two ends of each cover body 21 are rotatably connected to the cleaning tank 40 through their respective driving shafts 22 and driven shafts 23. The two linkage components 30 are drivingly connected to the driving shafts 22 of the two slot covers 20, and the lifting device 10 is drivingly connected to the two linkage components 30, so that the lifting device 10 can drive the corresponding slot cover 20 to be opened or closed through the two linkage components 30 during the lifting process.

[0067] The utility model also discloses a cleaning device, comprising: a cleaning tank 40 and the above-mentioned tank cover linkage mechanism, wherein the tank cover linkage mechanism is arranged on the cleaning tank 40. The tank-type cleaning device of the utility model adopts the tank cover linkage mechanism so that the tank cover 20 and the lifting device 10 can be linked. While the lifting device 10 is lifted, the tank cover 20 can also be synchronously controlled to be opened and closed, thereby realizing the coordination between the tank cover 20 and the lifting device 10 in a mechanical manner. It can be understood that in this embodiment, the cleaning device is a tank-type cleaning device.

[0068] This method effectively avoids the collision problem caused by the system misjudging the position of the slot cover 20, and can not only prevent the slot cover 20 from colliding with the lifting device 10. Moreover, since the lifting device 10 and the linkage assembly 30, and the linkage assembly 30 and the slot cover 20 are mechanically matched, after the components are assembled in place, as long as the position relationship and connection relationship between the components remain unchanged, the matching relationship between the components will not change easily. Compared with the method of using electric control to achieve linkage matching, there are fewer uncontrollable factors, so a reliable linkage matching relationship can be guaranteed. In addition, the cumbersome control process is omitted, so that there is no jamming phenomenon during the matching process between the slot cover 20 and the lifting device 10, the linkage matching process is smoother, and the reaction time is saved, which reduces the equipment cost.

[0069] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A tank cover linkage mechanism, used to connect to a cleaning tank of a tank-type cleaning device, characterized in that: The slot cover linkage mechanism comprises: A lifting device (10) is used to place the wafer and drive the wafer to move up and down so that the wafer moves out of or into the cleaning tank; a slot cover (20) for being movably connected to the cleaning slot and for opening or closing the slot of the cleaning slot; the slot cover (20) in an open state avoids the moving path of the lifting device (10); and the slot cover (20) in a closed state is located in the moving path of the lifting device (10); A linkage assembly (30) is respectively connected to the slot cover (20) and the lifting device (10) in driving relation, and when the lifting device (10) is lifted or lowered, the slot cover (20) is driven to be opened or closed synchronously by the linkage assembly (30), so that the slot cover (20) avoids the lifting device (10) during the lifting process.

2. The slot cover linkage mechanism according to claim 1, characterized in that: The lifting device (10) comprises: A bracket (11) for placing the wafer, the bracket (11) being arranged at the cleaning tank in a liftable manner, and the bracket (11) being moved out of or into the cleaning tank by lifting; A driving part (12) is arranged outside the cleaning tank in a liftable manner. The driving part (12) is respectively connected to the bracket (11) and the linkage assembly (30). While driving the bracket (11) to rise and fall, the driving part (12) also drives the tank cover (20) to open or close through the linkage assembly (30), so that the tank cover (20) avoids the bracket (11).

3. The slot cover linkage mechanism according to claim 2, characterized in that: The slot cover (20) comprises: A cover body (21) is used to be rotatably connected to the cleaning tank, the cover body (21) has a first end and a second end along a first horizontal direction, and the driving part (12) is located at the first end of the cover body (21); A drive shaft (22) is fixedly connected to the first end of the cover body (21); the drive shaft (22) drives the cover body (21) to rotate by rotating, so that the slot cover (20) is opened or closed; and the linkage assembly (30) is drivingly connected to the drive shaft (22).

4. The slot cover linkage mechanism according to claim 3, characterized in that: The linkage assembly (30) comprises: The rack (31) is drivingly connected to the driving unit (12), and the driving unit (12) is used to drive the rack (31) to move along its own length direction; The driving gear (32) is meshed with the rack (31), and the driving gear (32) is also connected to the driving shaft (22). The rack (31) drives the driving gear (32) to rotate during the movement, and the rotating driving gear (32) drives the driving shaft (22) to rotate synchronously, so that the slot cover (20) is opened or closed.

5. The slot cover linkage mechanism according to claim 4, characterized in that: The driving part (12) moves upward and away from the driving shaft (22), driving the rack (31) to move in a direction away from the driving shaft (22); the rack (31) moves away from the driving shaft (22) and drives the driving gear (32) to rotate in a first rotation direction, thereby driving the slot cover (20) to open; The driving portion (12) drives the rack (31) to move toward the driving shaft (22) while descending and approaching the driving shaft (22); the rack (31) drives the driving gear (32) to rotate along a second rotation direction while approaching the driving shaft (22), so as to drive the slot cover (20) to close, wherein the second rotation direction is opposite to the first rotation direction.

6. The slot cover linkage mechanism according to claim 5, characterized in that: The linkage component (30) further comprises: A housing (33) having a first end and a second end, wherein the drive shaft (22) is rotatably arranged through the first end of the housing (33), and the second end of the housing (33) is provided with an opening structure facing the drive unit (12). The drive gear (32) and the rack (31) are located in the housing (33), and the rack (31) is slidably connected to the housing (33) along a direction from the first end to the second end of the housing (33); A transmission rod (34) is inserted into the opening structure, one end of the transmission rod (34) is connected to the rack (31), the other end of the transmission rod (34) is connected to the driving part (12), and the rack (31) is drivingly connected to the driving part (12) via the transmission rod (34).

7. The slot cover linkage mechanism according to claim 6, characterized in that: The transmission rod (34) is rotatably connected to the driving part (12).

8. The slot cover linkage mechanism according to claim 6, characterized in that: The linkage component (30) further comprises: A transmission belt (35) is connected between the driving gear (32) and the driving shaft (22); the driving gear (32) and the driving shaft (22) are drivingly connected via the transmission belt (35).

9. The slot cover linkage mechanism according to claim 1, characterized in that: There are two slot covers (20), and the two slot covers (20) are arranged opposite to each other; There are two linkage assemblies (30), the slot covers (20) and the linkage assemblies (30) are arranged in one-to-one correspondence, each slot cover (20) is drivingly connected to the corresponding linkage assembly (30), and both linkage assemblies (30) are drivingly connected to the lifting device (10).

10. A cleaning device, characterized in that: include: A cleaning tank (40) and a tank cover linkage mechanism according to any one of claims 1 to 9, wherein the tank cover linkage mechanism is arranged on the cleaning tank (40).

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