Wafer automatic loading detection device

Abstract

The utility model relates to the technical field of wafer processing, in particular to an automatic wafer loading detection device, which comprises a detection frame, a horizontal mechanism and a longitudinal driving mechanism are mounted on the detection frame, the horizontal mechanism is in driving connection with the longitudinal driving mechanism, and an output end of the horizontal mechanism is connected with a moving frame. A containing space for the box body opening and closing mechanism to move penetrates through the moving frame front and back, a detection piece is installed at the top of the moving frame, the horizontal mechanism drives the moving frame to move front and back to be close to or away from the wafer box, and the longitudinal driving mechanism drives the moving frame to move upwards or downwards to enable the detection piece to detect wafers in the wafer box. According to the utility model, the movement of the box body opening and closing mechanism and the movement of the detection piece can be mutually independent, the waiting time for the box body opening and closing mechanism during the movement of the detection piece is saved, the separation of the box cover and the detection of the wafer by the detection piece can be synchronously carried out, the structural arrangement is ingenious, and the wafer detection quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to an automatic wafer loading and testing device. Background Art

[0002] Wafer boxes are storage devices used to temporarily store wafers during the wafer transportation process and maintain their closed state. Wafer boxes usually include a box body with a side opening and a box cover that can cover the side opening in a sealed manner, and the box cover can be completely detached from the box body.

[0003] Currently, the most commonly used type is the front-opening wafer box. Usually, a wafer box loading and opening mechanism is set in front of the wafer process equipment, and cooperates with the wafer box transfer robot arm and the process equipment wafer transfer robot arm to realize wafer placement.

[0004] In existing equipment, the mapping mechanism for wafer inspection is usually set on one side of the loading and opening mechanism, which results in a long waiting time before the mapping mechanism can be started after the loading and opening mechanism of the wafer clamps the box cover of the wafer box, until a sufficient mapping mechanism operating area is provided between the box cover and the opening end of the wafer box, affecting the wafer inspection efficiency. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides an automatic wafer loading and testing device, which drives the testing piece to move toward the open end of the wafer box through a horizontal mechanism and a longitudinal driving mechanism. The movement of the box opening and closing mechanism and the movement of the testing piece can be independent of each other, thus saving the waiting time for the box opening and closing mechanism when the testing piece moves. The separation of the box cover and the testing of the wafer by the testing piece can be carried out simultaneously. The structural arrangement is ingenious, and the wafer testing quality is improved.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The utility model provides a wafer automatic loading and testing device, comprising a testing frame, wherein the testing frame is provided with a horizontal mechanism and a longitudinal driving mechanism, the horizontal mechanism is drivingly connected to the longitudinal driving mechanism, the output end of the horizontal mechanism is connected to a moving frame, the moving frame is penetrated by a containing space for a box opening and closing mechanism to move, a testing component is installed on the top of the moving frame, the horizontal mechanism drives the moving frame to move forward and backward to approach or away from a wafer box, and the longitudinal driving mechanism drives the moving frame to move upward or downward so that the testing component can detect the wafers in the wafer box.

[0008] Among them, the detection frame includes a detection bracket and a back plate, the detection bracket is connected to the back plate, the detection bracket is provided with an installation space, the longitudinal drive mechanism is installed on the back plate and located in the installation space, and part of the stroke of the horizontal mechanism is retracted into the detection bracket.

[0009] Among them, the longitudinal driving mechanism includes a first guide rail, a longitudinal module and a slide seat. The number of the first guide rails is multiple and they are installed in parallel longitudinally on the detection frame. The slide seat is slidably connected to the first guide rail. The longitudinal module is installed on the detection frame and is located outside the first guide rail. The longitudinal module is drivingly connected to the slide seat, and the horizontal mechanism is installed on the slide seat.

[0010] The slide seat is enclosed within a driving space, the horizontal mechanism is located in the driving space, and the bottom of the movable frame passes through the driving space.

[0011] Among them, the horizontal mechanism includes a second guide rail, a horizontal module and an adapter frame, the number of the second guide rails is at least two and they are symmetrically installed on the slide, the adapter frame is slidably connected to the second guide rail, a storage space is provided in the middle of the bottom end of the adapter frame, the horizontal module is installed on the slide and is located in the storage space, the output end of the horizontal module is drive-connected to the adapter frame, the movable frame is connected to the adapter frame, and the second guide rail, the horizontal module and the adapter frame are all located in the driving space.

[0012] Wherein, a movable bracket is connected to the top of the movable frame, an outer end of the movable bracket extends toward the wafer box, and the detection component is installed on the outer end of the movable bracket.

[0013] The detection frame is provided with a detection space which runs through the front and the back, and the detection space is used for the movement of the box body opening and closing mechanism.

[0014] Beneficial effects of the utility model:

[0015] The utility model drives the detection part to move toward the open end of the wafer box through the horizontal mechanism and the longitudinal driving mechanism. The movement of the box opening and closing mechanism and the movement of the detection part can be independent of each other, saving the waiting time for the box opening and closing mechanism when the detection part moves. The separation of the box cover and the detection of the wafer by the detection part can be carried out simultaneously. The structural arrangement is ingenious, and the wafer detection quality is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the explosion structure of the wafer box.

[0017] Figure 2 This is a schematic diagram of the structure of the wafer automatic loading and testing device.

[0018] Figure 3 A schematic diagram of the three-dimensional structure of the detection frame.

[0019] Figure 4 It is a structural schematic diagram of the longitudinal drive mechanism.

[0020] Figure 5 It is a structural diagram of the horizontal mechanism.

[0021] Figure 6 It is a schematic diagram of the three-dimensional structure of the horizontal mechanism.

[0022] Figure 7 It is a schematic diagram of the three-dimensional structure of the mobile rack.

[0023] 01. Wafer box;

[0024] 1. Detection frame; 101. Detection bracket; 1011. Installation space; 102. Back plate; 103. Detection space;

[0025] 2. Horizontal mechanism; 201. Second guide rail; 202. Horizontal module; 203. Adapter frame; 2031. Storage space;

[0026] 3. Longitudinal drive mechanism; 301. First guide rail; 302. Longitudinal module; 303. Sliding seat; 3031. Driving space;

[0027] 4. Mobile rack; 41. Accommodating space; 42. Testing piece; 43. Mobile bracket. DETAILED DESCRIPTION

[0028] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with the examples and drawings. The specific implementation methods of the present invention will be described below. It should be noted that in the specific description of these implementation methods, in order to provide a concise description, this specification cannot provide a detailed description of all the features of the actual implementation methods. It should be understood that in the actual implementation of any one of the implementation methods, it should be understood that for those of ordinary skill in the art related to the content disclosed in the present invention, some changes such as design, manufacturing or production based on the technical content disclosed in the present invention are only conventional technical means, and should not be understood as the content of the present disclosure being insufficient. The present utility model is described in detail below in conjunction with the drawings.

[0029] refer to Figures 1 to 3As shown, the utility model provides an automatic wafer loading and testing device, including a testing frame 1, wherein the testing frame 1 is equipped with a horizontal mechanism 2 and a longitudinal driving mechanism 3, wherein the horizontal mechanism 2 is drivingly connected to the longitudinal driving mechanism 3, wherein the output end of the horizontal mechanism 2 is connected to a moving frame 4, wherein the moving frame 4 is penetrated by a containing space 41 for movement of a box body opening and closing mechanism, wherein a detection member 42 is installed on the top of the moving frame 4, wherein the horizontal mechanism 2 drives the moving frame 4 to move forward and backward to approach or move away from a wafer box 01, wherein the longitudinal driving mechanism 3 drives the moving frame 4 to move upward or downward so that the detection member 42 detects the wafers in the wafer box; in actual application, the wafer box 01 is first loaded and positioned so that the wafer box 01 and the testing frame 1 are relatively fixed, and the opening side of the wafer box 01 is facing the containing space 41 of the testing frame 1, and when the box body opening and closing mechanism clamps and takes away the wafer box 01 After the box cover is put on, the detection part 42 is driven by the horizontal mechanism 2 to move toward the open end of the wafer box 01. Since the accommodating space 41 is provided for the movement of the box body opening and closing mechanism, the movement of the box body opening and closing mechanism and the movement of the detection part 42 can be independent of each other, saving the waiting time for the box body opening and closing mechanism when the detection part 42 moves. When the detection part 42 corresponds to the wafer in the wafer box 01, the longitudinal driving mechanism 3 drives the detection part 42 to move downward, and the wafer is inspected from top to bottom. The separation of the box cover and the inspection of the wafer by the detection part 42 can be carried out simultaneously. The structural arrangement is ingenious, which improves the wafer inspection quality. Specifically, the detection part 42 has a mapping inspection function. The detection part 42 has a wafer mapping function and can automatically detect the status of the wafers in each slot in the wafer box 01, such as single wafer and cross wafer. It has the function of automatically identifying the size of the wafer in the box when the box is opened, and is quick to use.

[0030] refer to Figure 3 As shown, in this embodiment, the detection frame 1 includes a detection bracket 101 and a back plate 102, the detection bracket 101 is connected to the back plate 102, the detection bracket 101 is provided with an installation space 1011, the longitudinal drive mechanism 3 is installed on the back plate 102 and is located in the installation space 1011, and part of the stroke of the horizontal mechanism 2 is retracted into the detection bracket 101; in actual application, the detection frame 1 can be smoothly docked within the moving stroke of the detection member 42, and the opening side of the wafer box 01 can be placed within the stroke of the detection member 42 when performing wafer detection, so that the detection member 42 can smoothly detect the opening side of the wafer box 01, and the longitudinal drive mechanism 3 is cleverly hidden by the set installation space 1011, and the longitudinal drive mechanism 3 is smoothly hidden in the detection bracket 101, and the structure is compact.

[0031] refer to Figure 4As shown, in the present embodiment, the longitudinal driving mechanism 3 comprises a first guide rail 301, a longitudinal module 302 and a slide 303, the number of the first guide rails 301 is multiple and they are longitudinally installed in parallel on the detection frame 1, the slide 303 is slidably connected to the first guide rail 301, the longitudinal module 302 is installed on the detection frame 1 and is located outside the first guide rail 301, the longitudinal module 302 is drivingly connected to the slide 303, and the horizontal mechanism 2 is installed on the slide 303; in actual use, the longitudinal module 302 is a screw motor module, which meets the longitudinal driving requirements of the slide 303, accurately controls the moving distance of the slide 303, drives the slide 303 to move along the first guide rail 301 through the longitudinal module 302, drives the horizontal mechanism 2 to move longitudinally synchronously, and effectively controls the height of the horizontal mechanism 2; by installing the longitudinal module 302 on the detection frame 1 and being located outside the first guide rail 301, the longitudinal module 302 and the first guide rail 301 are compact in structure, reducing the overall space occupancy.

[0032] refer to Figure 5 As shown, in this embodiment, the slide 303 is surrounded by a driving space 3031, the horizontal mechanism 2 is located in the driving space 3031, and the bottom of the movable frame 4 is passed through the driving space 3031. Through the setting of the driving space 3031, it is convenient to hide the horizontal mechanism 2 in the slide 303, and the structure is compact.

[0033] refer to Figure 6 As shown, in this embodiment, the horizontal mechanism 2 includes a second guide rail 201, a horizontal module 202 and an adapter frame 203. The number of the second guide rails 201 is at least two and they are symmetrically installed on the slide 303. The adapter frame 203 is slidably connected to the second guide rail 201. A storage space 2031 is provided in the middle of the bottom end of the adapter frame 203. The horizontal module 202 is installed on the slide 303 and is located in the storage space 2031. The output end of the horizontal module 202 is drivingly connected to the adapter frame 203. The movable frame 4 is connected to the adapter frame 203, and the second guide rail 201, the horizontal module 202 and the adapter frame 203 are all located in the driving space 3031; when the movable frame 4 is adjusted horizontally, the adapter frame 203 and the movable frame 4 are driven to move horizontally by the horizontal module 202, and the horizontal module 202 is cleverly installed in the space between the adapter frame 203 and the second guide rail 201 through the set storage space 2031, and the space between the second guide rails 201 is cleverly utilized, without affecting the structural stability of the second guide rail 201, and the structural arrangement is clever.

[0034] refer to Figure 7As shown, in this embodiment, a movable bracket 43 is connected to the top of the movable frame 4, and the outer end of the movable bracket 43 extends toward the wafer box 01. The detection component 42 is installed on the outer end of the movable bracket 43. When the movable frame 4 abuts against the detection frame 1, the detection component 42 can smoothly extend into the detection frame 1, which facilitates the detection component 42 to extend into the wafer box 01, thereby improving the detection quality of the wafer.

[0035] refer to Figure 3 As shown, in this embodiment, the detection frame 1 is provided with a detection space 103 which runs through the front and back, and the detection space 103 is used for the movement of the box body opening and closing mechanism. The box body opening and closing mechanism can move smoothly in the detection space 103, and it is also convenient for the wafer box 01 and the box cover to move in the detection space 103. The wafer box 01 can be installed at the opening of the detection space 103, which is conducive to the box body opening and closing mechanism to smoothly clamp the box cover.

[0036] The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Although the utility model is disclosed as a preferred embodiment as above, it is not used to limit the utility model. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical content disclosed above without departing from the scope of the technical solution of the utility model. However, any simple modification, equivalent change and modification made to the above embodiments according to the technology of the utility model, which does not depart from the content of the technical solution of the utility model, belongs to the scope of the technical solution of the utility model.

Claims

1. A wafer automatic loading and testing device, characterized in that: The invention comprises a detection frame (1), wherein the detection frame (1) is provided with a horizontal mechanism (2) and a longitudinal driving mechanism (3), wherein the horizontal mechanism (2) is connected to the longitudinal driving mechanism (3) by driving, wherein the output end of the horizontal mechanism (2) is connected to a moving frame (4), wherein a receiving space (41) for a box body opening and closing mechanism to move is passed through the moving frame (4) from front to back, and a detection component (42) is installed on the top of the moving frame (4), wherein the horizontal mechanism (2) drives the moving frame (4) to move forward and backward to approach or move away from a wafer box (01), and the longitudinal driving mechanism (3) drives the moving frame (4) to move upward or downward so that the detection component (42) detects wafers in the wafer box.

2. The wafer automatic loading and testing device according to claim 1, characterized in that: The detection frame (1) comprises a detection bracket (101) and a back plate (102); the detection bracket (101) is connected to the back plate (102); the detection bracket (101) is provided with an installation space (1011); the longitudinal drive mechanism (3) is installed on the back plate (102) and is located in the installation space (1011); and a part of the stroke of the horizontal mechanism (2) is retracted into the detection bracket (101).

3. The wafer automatic loading and testing device according to claim 1, characterized in that: The longitudinal driving mechanism (3) comprises a first guide rail (301), a longitudinal module (302) and a slide seat (303); the first guide rail (301) is in plurality and is longitudinally mounted in parallel on the detection frame (1); the slide seat (303) is slidably connected to the first guide rail (301); the longitudinal module (302) is mounted on the detection frame (1) and is located outside the first guide rail (301); the longitudinal module (302) is drivingly connected to the slide seat (303); and the horizontal mechanism (2) is mounted on the slide seat (303).

4. The wafer automatic loading and testing device according to claim 3, characterized in that: The slide seat (303) defines a driving space (3031) therein, the horizontal mechanism (2) is located in the driving space (3031), and the bottom of the movable frame (4) is disposed in the driving space (3031).

5. The wafer automatic loading and testing device according to claim 4, characterized in that: The horizontal mechanism (2) comprises a second guide rail (201), a horizontal module (202) and an adapter frame (203); the number of the second guide rails (201) is at least two and they are symmetrically mounted on a slide seat (303); the adapter frame (203) is slidably connected to the second guide rail (201); a storage space (2031) is provided in the middle of the bottom end of the adapter frame (203); the horizontal module (202) is mounted on the slide seat (303) and is located in the storage space (2031); the output end of the horizontal module (202) is drivingly connected to the adapter frame (203); the mobile frame (4) is connected to the adapter frame (203); the second guide rail (201), the horizontal module (202) and the adapter frame (203) are all located in the driving space (3031).

6. The wafer automatic loading and testing device according to claim 2, characterized in that: A movable bracket (43) is connected to the top of the movable frame (4), an outer end of the movable bracket (43) extends toward the wafer box (01), and the detection component (42) is mounted on the outer end of the movable bracket (43).

7. According to the wafer automatic loading and testing device of claim 6, the testing frame (1) is provided with a testing space (103) penetrating from front to back, and the testing space (103) is used for the movement of the box opening and closing mechanism.

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