Bearing device

Abstract

The utility model provides a bearing device, and the device comprises a carrying platform assembly which is used for bearing a wafer; the base and the carrying table assembly are arranged in a spaced mode in the preset direction; the connecting assembly is located between the carrying table assembly and the base and comprises a first positioning piece, a second positioning piece and a positioning connecting piece, the first positioning piece is connected with the carrying table assembly, the second positioning piece is connected with the base, and the first positioning piece is arranged on the second positioning piece in a sleeving mode; the positioning connecting piece sequentially penetrates through at least partial structures of the first positioning piece and the second positioning piece from the outer side of the first positioning piece, and the first positioning piece and the second positioning piece are connected in a fastened mode. According to the bearing device provided by the invention, when the carrying table assembly needs to be detached for replacement or maintenance, a worker can detach the positioning connecting piece from the side part of the bearing device so as to release the fastening connection between the first positioning piece and the second positioning piece, so that the carrying table assembly is detached, and the convenience of detaching the carrying table assembly can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor processing, and in particular to a carrier device. Background Art

[0002] Before wafers are loaded on semiconductor products, they need to be tested on a probe test device. When the wafer is tested, it needs to be placed on a carrier, which can adsorb a wafer tray loaded with multiple wafers on the upper surface through negative pressure or static electricity, and then the probe can touch each wafer to achieve a probe test on each wafer.

[0003] At present, the carrier can be installed on the probe test equipment through the base. The carrier can be fixed to the base through bolts that penetrate the carrier from top to bottom. When the carrier needs to be replaced or maintained, the staff needs to remove and install the bolts from the surface of the carrier, which has the defect of inconvenient disassembly and assembly of the carrier. Utility Model Content

[0004] In view of the above, it is necessary to provide a carrying device to solve the above defects.

[0005] An embodiment of the present application provides a carrying device, which includes: a stage assembly, which is used to carry a wafer; a base, which is spaced apart from the stage assembly in a preset direction; a connecting assembly, which is located between the stage assembly and the base, and includes a first positioning member, a second positioning member and a positioning connecting member, the first positioning member is connected to the stage assembly, the second positioning member is connected to the base, the first positioning member is sleeved on the second positioning member, and the positioning connecting member passes through the first positioning member and at least a portion of the structure of the second positioning member in sequence from the outside of the first positioning member, and fastens the first positioning member and the second positioning member.

[0006] Optionally, the positioning connecting piece passes through the outer side of the first positioning piece to the inner side of the first positioning piece and is threadedly connected to the first positioning piece. An annular groove is opened on the outer side of the second positioning piece. The positioning connecting piece is used to enter the annular groove and abut against the inner wall of the annular groove to limit the relative movement of the first positioning piece and the second positioning piece.

[0007] Optionally, a first positioning groove is opened on the inner side of the first positioning member, and a second positioning groove is opened on the outer side of the second positioning member, and the first positioning groove corresponds to and is connected to the second positioning groove; the connecting component also includes a connecting block, which is accommodated in the first positioning groove and the second positioning groove to limit the relative rotation of the first positioning member and the second positioning member.

[0008] Optionally, a base connecting piece is provided on the second positioning piece, the base connecting piece passes through the second positioning piece in a preset direction, and is threadedly connected to the base.

[0009] Optionally, the carrier assembly includes: a carrier platform, the carrier platform includes a relative bearing surface and a connecting surface, the bearing surface is used to abut against the wafer; an isolation seat, the isolation seat is made of an insulating material, the isolation seat and the carrier platform are arranged side by side in a preset direction, the connecting surface is a side of the carrier platform facing the isolation seat, a bearing connector is arranged on the isolation seat, the bearing connector passes through the isolation seat in the preset direction, and is threadedly connected to the carrier platform through the connecting surface.

[0010] Optionally, a gasket is arranged on the side of the isolation seat away from the bearing platform, the bearing connection member is a bolt, the gasket is sleeved on the bearing connection member, and the head of the bearing connection member abuts against the gasket.

[0011] Optionally, an isolation connector is provided on the isolation seat, the isolation connector passes through the isolation seat in a preset direction, and is threadedly connected to the first positioning member.

[0012] Optionally, a gasket is provided on the side of the isolation seat facing the supporting platform, the isolation connecting piece is a bolt, the gasket is sleeved on the isolation connecting piece, and the head of the isolation connecting piece abuts against the gasket.

[0013] Optionally, a plurality of air grooves are provided on the connection surface, and the plurality of air grooves are arranged at intervals along the diameter direction of the bearing platform.

[0014] Optionally, a groove is provided on a side of the isolation seat facing the supporting platform, and the groove is located in the middle of the isolation seat.

[0015] With the carrying device provided by the present application, when the stage assembly needs to be disassembled for replacement or maintenance, the staff can disassemble the positioning connector from the side of the carrying device to release the fastening connection between the first positioning member and the second positioning member, and then the staff can move the first positioning member to remove the stage assembly from the base. In this way, the staff can operate on the side of the carrying device to realize the disassembly and installation of the stage assembly, which can improve the convenience of disassembly and assembly of the stage assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the carrying device in the embodiment of the present application.

[0017] Figure 2 It is a structural disassembly diagram of the carrying device in the embodiment of the present application.

[0018] Figure 3 It is a cross-sectional view of the carrying device in the embodiment of the present application.

[0019] Figure 4 yes Figure 3 Enlarged view of IV in the middle.

[0020] Description of Reference Numerals

[0021] Carrying device 100

[0022] Stage assembly 10

[0023] Loading platform 11

[0024] Gas tank 111

[0025] Isolation seat 12

[0026] Groove 121

[0027] Load bearing connector 13

[0028] First gasket 14

[0029] Isolation connector 15

[0030] Second gasket 16

[0031] Base 20

[0032] Connecting components 30

[0033] First positioning member 31

[0034] First positioning groove 311

[0035] Second positioning member 32

[0036] Ring groove 321

[0037] The second positioning groove 322

[0038] Base connector 323

[0039] Positioning connector 33

[0040] Connection block 34 DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0042] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0043] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0044] See also Figure 1 , Figure 1 A carrier device 100 provided by an embodiment of the present application is shown. The carrier device 100 can be installed on a probe test device (not shown). The carrier device 100 can carry a wafer tray, and a plurality of wafers are loaded on the wafer tray. After the wafer tray is carried on the carrier device 100, the probe test device can perform a needle test on the plurality of wafers on the wafer tray.

[0045] It can be understood that the principle of the probe testing equipment to perform a needle test on the wafer through the conductive probe is a common principle in the relevant field and will not be repeated here.

[0046] In one embodiment, the carrying device 100 may include a carrier assembly 10, a base 20 and a connecting assembly 30. The carrier assembly 10 has a bearing surface that can abut against a wafer disc, so as to realize the carrier assembly 10 to carry the wafer disc. The carrier assembly 10 can adsorb the wafer disc by means of negative pressure or the like, so that the wafer disc is fixed on the carrier assembly 10. The carrier assembly 10 and the base 20 are spaced apart in a preset direction. The base 20 can be fixedly connected to a probe test device to realize the fixed installation of the carrying device 100 on the probe test device. The connecting assembly 30 is located between the carrier assembly 10 and the base 20 in a preset direction, and is fixedly connected to the carrier assembly 10 and the base 20. The connecting assembly 30 realizes the fixed connection between the base 20 and the carrier assembly 10.

[0047] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, bolt fixing, welding fixing, buckle fixing, etc.

[0048] In the embodiments of the present application, the preset direction is not specifically limited. For example, the preset direction may be the height direction of the carrying device 100, that is, the height direction of the stage assembly 10, the base 20, and the connecting assembly 30. For example, the preset direction may be as follows: Figure 1 The X direction and its opposite direction are shown.

[0049] In some embodiments, the carrier assembly 10 may include a carrier 11 and an isolation seat 12. The two surfaces of the carrier 11 in a preset direction are a carrier surface and a connection surface, and the carrier surface and the connection surface are arranged opposite to each other. The isolation seat 12 is located on the side facing the connection surface of the carrier 11, and the isolation seat 12 is fixedly connected to the carrier 11 at the connection surface. The isolation seat 12 is fixedly connected to the connection assembly 30.

[0050] It is understood that the isolation seat 12 can be made of insulating material. The isolation seat 12 can reduce the leakage of the energized probe when performing a needle test on the wafer, thereby improving the accuracy of the needle test.

[0051] In the embodiment of the present application, there is no specific limitation on the material of the isolation seat 12. For example, the material of the isolation seat 12 can be, but is not limited to, ceramic, polyetheretherketone [poly (ether-ether-ketone), PEEK], etc.

[0052] In the embodiment of the present application, there is no specific limitation on the shapes of the support platform 11 and the isolation seat 12. For example, as shown in the figure, the support platform 11 and the isolation seat 12 can both be in the form of discs.

[0053] In some embodiments, a plurality of air grooves 111 are provided on the carrier 11. An air flow channel (not shown) is provided in the carrier 11. The air flow channel is connected to the plurality of air grooves 111. The carrier 11 can be connected to an air pump (not shown), and the air pump can evacuate air on the carrier surface through the air flow channel and the plurality of air grooves 111 to form a negative pressure, so that the carrier 11 can adsorb the wafer disk through the negative pressure.

[0054] In the embodiment of the present application, the opening shapes of the plurality of air slots 111 are not specifically limited. Figure 1 As shown, the multiple air grooves 111 can be annular, and the multiple air grooves 111 can be spaced apart in the diameter direction of the carrier 11. Among two adjacent air grooves 111, the diameter of the air groove 111 near the center of the carrier 11 is smaller than the diameter of the air groove 111 near the edge of the carrier 11.

[0055] In other embodiments, a suction cup (not shown) may be provided on the carrier 11, and the wafer disk may be adsorbed by the suction cup. The principle of the suction cup adsorbing the wafer disk is a common principle in the relevant field, and will not be described in detail here.

[0056] In yet other embodiments, the carrier 11 can achieve adsorption of the wafer disk by electrostatic adsorption. The principle of electrostatic adsorption is a common principle in the relevant field and will not be described in detail here.

[0057] Please also read Figure 2In some embodiments, the bearing platform 11 and the isolation seat 12 may be connected by a plurality of bearing connectors 13. The bearing connectors 13 may be bolts. The plurality of bearing connectors 13 may penetrate the isolation seat 12 along a preset direction, and a part of the structure may be threadedly connected to the bearing platform 11 through a connection surface. The plurality of bearing connectors 13 may be spaced apart along the circumferential direction.

[0058] A plurality of first gaskets 14 may be disposed on the isolation seat 12. The plurality of first gaskets 14 may correspond one to one with the plurality of bearing connectors 13. The first gaskets 14 may be in a circular ring configuration. Each first gasket 14 may be sleeved on the corresponding bearing connector 13, and the head of each bearing connector 13 abuts against the first gasket 14.

[0059] It can be understood that the width of the head of the load-bearing connecting member 13 can be greater than the diameter of the screw of the load-bearing connecting member 13 .

[0060] For example, the support platform 11 can be located above the isolation seat 12. Multiple support connectors 13 can pass through the isolation seat 12 from bottom to top and be threadedly connected to the support platform 11. Multiple support connectors 13 do not penetrate the support platform 11. The head of each support connector 13 is located on a side away from the support platform 11, and the head of each support connector 13 can clamp the corresponding first gasket 14 with the isolation seat 12.

[0061] It can be understood that the multiple first gaskets 14 can buffer the locking force of the bolts, thereby achieving buffering of the locking force between the load-bearing connector 13 and the load-bearing platform 11 and the isolation seat 12, thereby improving the uniformity of the force on the isolation seat 12 and the load-bearing platform 11 at the locations connected to the load-bearing connector 13. In this way, the probability of deformation of the locations on the isolation seat 12 and the load-bearing platform 11 connected to the load-bearing connector 13 can be reduced, the probability of damage to the isolation seat 12 and the load-bearing platform 11 can be reduced, and the flatness of the load-bearing surface can be improved.

[0062] In the embodiment of the present application, there is no specific limitation on the material of the first gasket 14. For example, the material of the first gasket 14 can be, but is not limited to, aluminum alloy, copper alloy, etc.

[0063] In some cases, a plurality of countersunk grooves may be provided on a side of the isolation seat 12 facing away from the support platform 11 , and each countersunk groove may accommodate a head of a support connector 13 .

[0064] In other cases, the head of the supporting connector 13 protrudes out of the isolation seat 12 toward the side facing away from the supporting platform 11 .

[0065] In some embodiments, a groove 121 is formed on a side of the isolation seat 12 facing the supporting platform 11 . The groove 121 is located in the middle of the isolation seat 12 , and the groove 121 is spaced apart from each supporting connector 13 .

[0066] It can be understood that the side of the isolation seat 12 facing the carrier 11 needs to be polished to reduce the impact of the burrs on the isolation seat 12 on the stability of the carrier 11. The opening of the groove 121 can reduce the area of ​​the isolation seat 12 used for contact with the carrier 11, and reduce the area on the isolation seat 12 that needs to be polished, thereby improving the production efficiency of the isolation seat 12. At the same time, the setting of the groove 121 can improve the lightweight of the carrier 100 and reduce the material cost of the carrier 100.

[0067] Please also read Figure 3 and Figure 4 In some embodiments, the connecting assembly 30 may include a first positioning member 31, a second positioning member 32 and a positioning connecting member 33. The first positioning member 31 is in the form of a circular ring. The second positioning member 32 is in the form of a circular ring or a disc. The first positioning member 31 may be sleeved on the second positioning member 32, and the first positioning member 31 is concentric with the second positioning member 32. The first positioning member 31 may be fixedly connected to the isolation seat 12, thereby achieving a fixed connection with the carrier assembly 10. The second positioning member 32 may be fixedly connected to the base 20. The first positioning member 31 and the second positioning member 32 may be fastened together by the positioning connecting member 33. The positioning connecting member 33 may pass through the first positioning member 31 from the outside of the first positioning member 31 in sequence, and penetrate into at least a portion of the structure of the second positioning member 32.

[0068] It can be understood that the positioning connecting member 33 can pass through the first positioning member 31 so as to be relatively fixed to the first positioning member 31, and the positioning connecting member 33 can abut or connect with at least a portion of the structure located on the outside of the second positioning member 32, thereby limiting the relative rotation and / or relative movement of the second positioning member 32 and the first positioning member 31 through the fastening action between the positioning connecting member 33 and the second positioning member 32, so as to achieve a fastening connection between the first positioning member 31 and the second positioning member 32.

[0069] In some embodiments, an annular groove 321 is formed on the outer side of the second positioning member 32. The positioning connector 33 may be a top screw. The positioning connector 33 may penetrate the first positioning member 31 in the diameter direction of the first positioning member 31 and be threadedly connected with the first positioning member 31. The positioning connector 33 may enter the annular groove 321 and abut against the inner wall of the annular groove 321.

[0070] It can be understood that the positioning connecting member 33 can limit the relative rotation of the first positioning member 31 and the second positioning member 32 through the friction force between the inner wall of the annular groove 321, and the inner wall of the annular groove 321 can block the positioning connecting member 33 in a preset direction, thereby limiting the relative movement of the first positioning member 31 and the second positioning member 32 in the preset direction.

[0071] In the embodiment of the present application, there is no specific limitation on the number of the positioning connectors 33. When there are multiple positioning connectors 33, multiple first positioning members 31 can be arranged at intervals in the circumferential direction of the first positioning member 31, and each positioning connector 33 can penetrate the first positioning member 31 along the diameter direction of the first positioning member 31.

[0072] It can be understood that when the carrier 11 needs to be disassembled for replacement or maintenance, the staff can release the fastening connection between the first positioning member 31 and the second positioning member 32 by disassembling the positioning connector 33, and then the staff can move the first positioning member 31 in a preset direction, so as to remove the carrier assembly 10 connected to the first positioning member 31 from the base 20. In this way, the staff can operate on the side of the carrier device 100 to realize the disassembly and installation of the carrier 11, which can improve the convenience of disassembly and installation of the carrier 11.

[0073] At the same time, compared with the general solution in the related field of using bolts to penetrate the carrier 11 and the isolation seat 12 from top to bottom, and then threading the bolts to the base 20, connecting the carrier assembly 10 and the base 20 through the connecting assembly 30 can reduce the setting of the countersunk holes on the bearing surface of the carrier 11, and can reduce the deformation of the bearing surface due to the locking force of the bolts, thereby making the bearing surface uneven. In this way, the flatness of the bearing surface can be improved, the situation where the bottom of the wafer on the wafer disk is suspended due to the unevenness of the bearing surface can be reduced, the situation where the wafer is pierced by the probe due to the lack of support at the bottom can be reduced, and the probability of the wafer being damaged during testing can be reduced.

[0074] It can be understood that when the head of the bearing connector 13 protrudes out of the isolation seat 12 toward the side away from the bearing platform 11 , the head of each bearing connector 13 can be located inside the first positioning member 31 and is arranged to avoid the second positioning member 32 .

[0075] In some embodiments, the first positioning member 31 and the second positioning member 32 may be keyed.

[0076] It can be understood that after the first positioning member 31 and the second positioning member 32 are key-connected, the relative rotation of the first positioning member 31 and the second positioning member 32 is restricted, which can further achieve the relative fixation of the first positioning member 31 and the second positioning member 32, and improve the stability of the fixed connection between the carrier assembly 10 connected to the first positioning member 31 and the base 20 connected to the second positioning member 32.

[0077] In some embodiments, a first positioning groove 311 is provided inside the first positioning member 31. The first positioning groove 311 can penetrate the first positioning member 31 along a preset direction. A second positioning groove 322 is provided outside the second positioning member 32. The second positioning groove 322 can penetrate the second positioning member 32 along a preset direction. The first positioning groove 311 and the second positioning groove 322 are correspondingly arranged and connected. The connecting component 30 may further include a connecting block 34. The connecting block 34 may be accommodated in the connected first positioning groove 311 and the second positioning groove 322, and part of the structure of the connecting block 34 is located in the first positioning groove 311, and the remaining structure is located in the second positioning groove 322.

[0078] In some cases, the connection block 34 may be interference fit with the first positioning groove 311 and the second positioning groove 322. When assembling the connection assembly 30, the staff may engage the connection block 34 with the second positioning groove 322, and then move the first positioning member 31 so that the connection block 34 engages with the first positioning groove 311 along a preset direction, thereby achieving connection between the first positioning member 31 and the second positioning member 32.

[0079] In other cases, a countersunk hole may be provided on the connection block 34, and a bolt may be received in the countersunk hole. The bolt may pass through the connection block 34 through the countersunk hole and be threadedly connected with the second positioning member 32. When assembling the connection assembly 30, the staff may first fix the connection block 34 and the second positioning member 32 with the bolt, and then move the first positioning member 31 so that the connection block 34 enters the first positioning groove 311 along a preset direction, thereby realizing the connection between the first positioning member 31 and the second positioning member 32.

[0080] In the embodiment of the present application, there is no specific limitation on the number of the connection blocks 34, the first positioning grooves 311, and the second positioning grooves 322. The number of the connection blocks 34, the first positioning grooves 311, and the second positioning grooves 322 is equal. When the number of the connection blocks 34, the first positioning grooves 311, and the second positioning grooves 322 is plural, the plurality of connection blocks 34 are arranged at intervals in the circumferential direction of the first positioning member 31, the plurality of first positioning grooves 311 are arranged at intervals in the circumferential direction of the first positioning member 31, and the plurality of second positioning grooves 322 are arranged at intervals in the circumferential direction of the second positioning member 32.

[0081] In some embodiments, the isolation seat 12 and the first positioning member 31 can be connected by a plurality of isolation connectors 15. The isolation connectors 15 can be bolts. The plurality of isolation connectors 15 can penetrate the isolation seat 12 along a preset direction, and part of the structure is threadedly connected to the first positioning member 31. The plurality of isolation connectors 15 can be spaced apart in the circumferential direction. And each isolation connector 15 is spaced apart from the plurality of isolation connectors 15.

[0082] A plurality of second gaskets 16 may be provided on one side of the isolation seat 12 facing the support platform 11. The plurality of second gaskets 16 may correspond one to one with the plurality of isolation connectors 15. The second gaskets 16 may be in a circular ring configuration. Each second gasket 16 may be sleeved on the corresponding isolation connector 15, and the head of each isolation connector 15 abuts against the second gasket 16.

[0083] It can be understood that the width of the head of the isolation connector 15 can be greater than the diameter of the screw of the isolation connector 15 .

[0084] For example, the first positioning member 31 can be located below the isolation seat 12. Multiple isolation connectors 15 can pass through the isolation seat 12 from top to bottom and be threadedly connected to the first positioning member 31. Multiple isolation connectors 15 do not penetrate the first positioning member 31. The head of each isolation connector 15 is located on the side of the isolation seat 12 close to the support platform 11, and the head of each isolation connector 15 can clamp the corresponding second gasket 16 with the isolation seat 12.

[0085] It can be understood that the plurality of second washers 16 can buffer the locking force of the bolts, thereby achieving buffering of the locking force between the isolation connector 15 and the first positioning member 31 and the isolation seat 12, thereby improving the uniformity of the force on the isolation seat 12 and the first positioning member 31 at the locations connected to the isolation connector 15. In this way, the probability of deformation of the locations on the isolation seat 12 and the first positioning member 31 connected to the isolation connector 15 can be reduced, and the probability of damage to the isolation seat 12 and the first positioning member 31 can be reduced.

[0086] In the embodiment of the present application, there is no specific limitation on the material of the second gasket 16. For example, the material of the second gasket 16 can be, but is not limited to, aluminum alloy, copper alloy, etc.

[0087] In some cases, a plurality of countersunk grooves may be provided on a side of the isolation seat 12 facing the support platform 11 , and each countersunk groove may accommodate a head of an isolation connector 15 .

[0088] In other cases, the head of the isolation connector 15 protrudes from the isolation seat 12 toward the side facing away from the support platform 11, and the support platform 11 has a plurality of countersunk grooves on the connection surface, each of which can accommodate the head of one isolation connector 15.

[0089] In some embodiments, the base 20 and the second positioning member 32 may be connected by a plurality of base connectors 323. The base connectors 323 may be bolts. The plurality of base connectors 323 may penetrate the second positioning member 32 along a preset direction, and some structures may be threadedly connected to the base 20. The plurality of base connectors 323 may be spaced apart along the circumferential direction.

[0090] For example, the base 20 can be located below the second positioning member 32. A plurality of base connectors 323 can pass through the second positioning member 32 from top to bottom and be threadedly connected to the base 20. The plurality of base connectors 323 do not penetrate the base 20. The head of each base connector 323 is located on a side of the second positioning member 32 away from the base 20.

[0091] In some cases, a plurality of countersunk grooves may be provided on a side of the second positioning member 32 facing away from the base 20 , and each countersunk groove may accommodate a head of a base connector 323 .

[0092] In other cases, the head of the base connecting member 323 protrudes from the side of the second positioning member 32 facing away from the base 20 , and the heads of the plurality of base connecting members 323 are located on the inner side of the first positioning member 31 .

[0093] It can be understood that each base connector 323 can be penetrated by a gasket, and the connection method between the base connector 323 and the gasket can refer to the connection method between the load-bearing connector 13 and the first gasket 14, which will not be repeated here.

[0094] In the carrying device 100 provided in the embodiment of the present application, when the carrying platform 11 needs to be disassembled for replacement or maintenance, the staff can release the fastening connection between the first positioning member 31 and the second positioning member 32 by disassembling the positioning connector 33, and then the staff can move the first positioning member 31 in a preset direction, so as to remove the carrying platform assembly 10 connected to the first positioning member 31 from the base 20. In this way, the staff can operate on the side of the carrying device 100 to realize the disassembly and installation of the carrying platform 11, which can improve the convenience of disassembly and installation of the carrying platform 11.

[0095] At the same time, no countersunk holes are provided on the bearing surface of the carrier 11, the carrier assembly 10 is connected to the base 20 via a connecting assembly 30, and the isolation seat 12 is connected to the carrier 11 via a bearing connector 13 on which a first gasket 14 is provided, which can reduce the probability of unevenness on the carrier 11 and reduce the probability of damage to the wafer during testing.

[0096] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. A carrying device, characterized in that: The carrying device comprises: A stage assembly, wherein the stage assembly is used to carry a wafer; A base, wherein the base and the stage assembly are spaced apart in a preset direction; A connecting component, wherein the connecting component is located between the platform component and the base, and the connecting component includes a first positioning member, a second positioning member and a positioning connecting member, wherein the first positioning member is connected to the platform component, the second positioning member is connected to the base, the first positioning member is sleeved on the second positioning member, and the positioning connecting member passes through the first positioning member and at least part of the structure of the second positioning member in sequence from the outside of the first positioning member, and fastens the first positioning member and the second positioning member.

2. The carrying device according to claim 1, characterized in that: The positioning connecting piece passes through the outer side of the first positioning piece to the inner side of the first positioning piece and is threadedly connected to the first positioning piece. An annular groove is provided on the outer side of the second positioning piece. The positioning connecting piece is used to enter the annular groove and abut against the inner wall of the annular groove to limit the relative movement of the first positioning piece and the second positioning piece.

3. The carrying device according to claim 1, characterized in that: A first positioning groove is formed on the inner side of the first positioning member, and a second positioning groove is formed on the outer side of the second positioning member, wherein the first positioning groove corresponds to and is connected to the second positioning groove; The connecting assembly further includes a connecting block, and the connecting block is received in the first positioning groove and the second positioning groove to limit the relative rotation of the first positioning member and the second positioning member.

4. The carrying device according to claim 1, characterized in that: A base connecting piece is arranged on the second positioning piece. The base connecting piece passes through the second positioning piece in the preset direction and is threadedly connected to the base.

5. The carrying device according to claim 1, characterized in that: The stage assembly comprises: A carrying platform, the carrying platform comprising a relative carrying surface and a connecting surface, the carrying surface being used for abutting against the wafer; The isolation seat is made of insulating material. The isolation seat and the supporting platform are arranged side by side in the preset direction. The connecting surface is the side of the supporting platform facing the isolation seat. A supporting connector is arranged on the isolation seat. The supporting connector passes through the isolation seat in the preset direction and is threadedly connected to the supporting platform through the connecting surface.

6. The carrying device according to claim 5, characterized in that: A gasket is arranged on the side of the isolation seat away from the bearing platform, the bearing connection member is a bolt, the gasket is sleeved on the bearing connection member, and the head of the bearing connection member abuts against the gasket.

7. The carrying device according to claim 5, characterized in that: An isolation connector is disposed on the isolation seat. The isolation connector passes through the isolation seat in the preset direction and is threadedly connected to the first positioning member.

8. The carrying device according to claim 7, characterized in that: A gasket is arranged on one side of the isolation seat facing the supporting platform, the isolation connecting member is a bolt, the gasket is sleeved on the isolation connecting member, and the head of the isolation connecting member abuts against the gasket.

9. The carrying device according to claim 5, characterized in that: A plurality of air grooves are formed on the connection surface, and the plurality of air grooves are arranged at intervals along the diameter direction of the bearing platform.

10. The carrying device according to claim 5, characterized in that: A groove is formed on one side of the isolation seat facing the supporting platform, and the groove is located in the middle of the isolation seat.

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