Equipment for automatically cleaning graphite boat electrode base

Abstract

The utility model belongs to processing of solar cells, and particularly relates to equipment for automatically cleaning an electrode base of a graphite boat, which comprises sleeve rods, two sleeve rods are arranged in parallel, a movable rod is arranged at one end of each sleeve rod in a telescopic manner, laser transmitters are arranged on the opposite sides of the two sleeve rods, and a screw rod in threaded connection with the end part of the movable rod is rotationally arranged in an inner cavity of each sleeve rod; mounting frames are arranged at the other ends of the movable rods, and mechanical grippers are symmetrically mounted on the two mounting frames; the ends, away from the movable rod, of the two lead screws extend, rotationally penetrate through the side wall of the sleeve rod and are provided with worm wheels. According to the utility model, the distance between the mechanical grippers can be adjusted according to the electrode bases with different widths, so that the overall universal performance is improved; high-energy laser is emitted through the laser emitter, the amorphous silicon film forms powder to be separated from the electrode base, the double-head positive and negative motor can be started, the positions of the sleeve rod and the laser emitter can be adjusted, and the laser emitter can comprehensively clean the amorphous silicon film on the electrode base.

Description

Technical Field

[0001] The utility model relates to solar cell chip processing, in particular to a device for automatically cleaning a graphite boat electrode base. Background Art

[0002] At present, the PE-POLY process plays a vital role in the production process of TOPCon cells of solar cells. In this process, amorphous silicon film is accurately applied to the surface of the cell through plasma deposition technology. When the amorphous silicon film is deposited too much on the electrode base, the original ceramic insulating base will be transformed into a conductive state. This phenomenon may not only lead to the early termination of the process, but also pose a serious threat to product quality. In order to deal with this problem, the industry urgently needs to find a professional and efficient tool and method to clean the amorphous silicon film on the electrode base. Therefore, it is necessary to develop a device that automatically cleans the graphite boat electrode base. Utility Model Content

[0003] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0004] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0005] A device for automatically cleaning a graphite boat electrode base, comprising:

[0006] A sleeve rod, two sleeve rods are arranged in parallel, and a movable rod is telescopically arranged at one end, a laser emitter is arranged on one side of the two sleeve rods facing each other, and a screw rod threadedly connected to the end of the movable rod is rotatably arranged in the inner cavity of the sleeve rod;

[0007] A mounting frame, the other end of the movable rod is provided with a mounting frame, and two mounting frames are symmetrically provided with mechanical grippers;

[0008] A worm wheel, the two screw rods extend from the ends of the movable rod and rotate through the side wall of the sleeve rod and are provided with a worm wheel. Each sleeve rod is provided with a mounting frame below the worm wheel. The side walls of the two mounting frames rotate and penetrate a horizontal driving rod. A worm that engages with the worm wheel is provided on the rod body of the driving rod. The other ends of the two driving rods are respectively connected to the two output ends of the double-headed forward and reverse motor.

[0009] As a preferred solution of the device for automatically cleaning the graphite boat electrode base described in the utility model, wherein: the movable rod is located at one end of the inner cavity of the sleeve rod and a limit plate with an outer diameter larger than the movable rod is provided, and the inner cavity of each sleeve rod is symmetrically provided with a limit rod about the movable rod, and the rod body of the limit rod slides through the side wall of the limit plate.

[0010] As a preferred solution of the equipment for automatically cleaning the graphite boat electrode base described in the utility model, the mechanical gripper includes a fixed plate arranged on the side of the mounting frame away from the movable rod, and two half gears that are rotatably arranged to mesh with each other are arranged on the other side of the fixed plate, and symmetrical grab bars are movably arranged on the outer sides of the two half gears, and a servo motor is arranged on the inner side of the mounting frame, and the output shaft of the servo motor rotates through the side wall of the fixed plate and is connected to the center of the side wall of a half gear.

[0011] As a preferred solution of the device for automatically cleaning the graphite boat electrode base described in the utility model, a connecting rod is rotatably arranged at the middle of the grabbing rod, and the other end of the connecting rod is rotatably arranged on the side wall of the fixing plate.

[0012] As a preferred solution of the equipment for automatically cleaning the graphite boat electrode base described in the utility model, a horizontal electric telescopic rod is arranged between the two mounting frames, and the driving rod includes a spline sleeve that rotates and passes through the side wall of the mounting frame, and a spline rod that slides and fits into the other end of the spline sleeve, and the spline rod is connected to the output shaft of the double-headed forward and reverse motor.

[0013] As a preferred solution of the device for automatically cleaning the graphite boat electrode base described in the utility model, a protective shell is arranged on the outer side of the two mounting frames, the inner cavity of the protective shell accommodates the worm and the worm wheel, and the rod body of the driving rod rotates and passes through the side wall of the protective shell.

[0014] As a preferred solution of the device for automatically cleaning the graphite boat electrode base described in the utility model, a telescopic plate is arranged between the two protective shells, and the telescopic plate includes a middle sleeve plate and movable plates sliding at both ends of the sleeve plate inner cavity.

[0015] As a preferred solution of the device for automatically cleaning the graphite boat electrode base described in the utility model, wherein: the double-headed forward and reverse motor is fixed below the sleeve plate, and a handle is provided on the top of the sleeve plate.

[0016] The beneficial effects of the utility model are:

[0017] 1. The spacing of the mechanical gripper can be adjusted according to the electrode base of different widths, which increases the overall universal performance;

[0018] 2. The laser emitter emits high-energy laser to make the amorphous silicon film form powder and separate from the electrode base. The double-head forward and reverse motor can also be started to adjust the position of the sleeve rod and the laser emitter, so that the laser emitter can clean the amorphous silicon film on the electrode base more comprehensively. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0020] Figure 1 It is a structural schematic diagram of the utility model;

[0021] Figure 2 It is a schematic diagram of the structure inside the cross section of the sleeve rod of the utility model;

[0022] Figure 3 It is a schematic diagram of the structure of the double-headed forward and reverse motor and the driving rod and other components of the utility model;

[0023] Figure 4 For this utility model Figure 3 A schematic diagram of the structure in the rear-view direction;

[0024] Figure 5 This is a schematic diagram of the structure of the movable rod and the limit plate of the utility model in the rear view direction;

[0025] Figure 6 This is a schematic diagram of the structure of the mechanical gripper of the utility model;

[0026] Figure 7 This is an exploded view of the spline sleeve and spline rod of the utility model.

[0027] In the figure: a sleeve rod 100, a movable rod 110, a laser transmitter 120, a screw rod 130, a limit plate 140, a limit rod 150, a mounting frame 200, a mechanical gripper 210, a fixed plate 220, a half gear 230, a gripping rod 240, a servo motor 250, a connecting rod 260, a worm gear 300, a mounting frame 310, a driving rod 320, a spline sleeve 321, a spline rod 322, a worm 330, a double-headed forward and reverse motor 340, an electric telescopic rod 350, a protective shell 360, a telescopic plate 370, a sleeve plate 371, a movable plate 372, and a handle 380. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0029] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below.

[0030] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0031] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0032] See also Figure 1-Figure 7 , which shows a schematic diagram of the structure of an automatic cleaning device for the graphite boat electrode base of the utility model, please refer to Figure 1-Figure 7 , a device for automatically cleaning the graphite boat electrode base is introduced in detail.

[0033] A device for automatically cleaning a graphite boat electrode base, comprising a sleeve rod 100, two sleeve rods 100 are arranged in parallel, and a movable rod 110 is telescopically arranged at one end, a laser emitter 120 is arranged on one side of the two sleeve rods 100 facing each other, a screw rod 130 screwed to the end of the movable rod 110 is rotatably arranged in the inner cavity of the sleeve rod 100; a limit plate 140 with an outer diameter greater than that of the movable rod 110 is arranged at one end of the inner cavity of the sleeve rod 100, and a limit rod 150 is symmetrically arranged in the inner cavity of each sleeve rod 100 about the movable rod 110, the rod body of the limit rod 150 slides through the side wall of the limit plate 140, and the movable rod 110 is limited by the limit plate 140, and when the screw rod 130 rotates, the movable rod 110 and the sleeve rod 100 can be relatively displaced;

[0034] A mounting frame 200 is provided at the other end of the movable rod 110, and two of the mounting frames 200 are symmetrically provided with mechanical grippers 210; the mechanical grippers 210 include a fixed plate 220 provided on the side of the mounting frame 200 away from the movable rod 110, and two half gears 230 meshing with each other are rotatably provided on the other side of the fixed plate 220, and symmetrical gripping rods 240 are movably provided on the outer sides of the two half gears 230, and a servo motor 250 is provided on the inner side of the mounting frame 200, and the output shaft of the servo motor 250 rotates through the side wall of the fixed plate 220 and is connected to the center of the side wall of a half gear 230, and a connecting rod 260 is rotatably provided in the middle of the gripping rod 240, and the other end of the connecting rod 260 is rotatably provided on the side wall of the fixed plate 220, and the servo motor 250 is started to drive the half gear 230 to rotate, so that the two gripping rods 240 gradually approach and clamp on both sides of the electrode base;

[0035] The two screw rods 130 extend from the ends of the movable rod 110 and rotate through the side wall of the sleeve rod 100 and are provided with a worm gear 300. Each sleeve rod 100 is provided with a mounting frame 310 below the worm gear 300. The side walls of the two mounting frames 310 are rotated and penetrated with a transverse driving rod 320. The rod body of the driving rod 320 is provided with a worm 330 that meshes with the worm gear 300. The other ends of the two driving rods 320 are respectively connected to the two output ends of the double-headed forward and reverse motor 340. A transverse electric telescopic rod 330 is provided between the two mounting frames 310. 50, the driving rod 320 includes a spline sleeve 321 that rotates and penetrates the side wall of the mounting frame 310, and a spline rod 322 that slides and fits into the other end of the spline sleeve 321. The spline rod 322 is connected to the output shaft of the double-head forward and reverse motor 340. After the electric telescopic rod 350 is started, the distance between the two sleeve rods 100 can be adjusted, so as to adjust the distance between the two sleeve rods 100 according to the different widths of the electrode base. During the adjustment, the spline rod 322 slides inside the spline sleeve 321, and the spline rod 322 can still drive the spline sleeve 321 to rotate;

[0036] A protective shell 360 is provided on the outer side of the two mounting frames 310, and the inner cavity of the protective shell 360 accommodates the worm 330 and the worm wheel 300. The rod body of the driving rod 320 rotates and passes through the side wall of the protective shell 360 to prevent the components from being exposed to the outside world; a telescopic plate 370 is provided between the two protective shells 360, and the telescopic plate 370 includes a middle sleeve plate 371 and a movable plate 372 sliding on both ends of the inner cavity of the sleeve plate 371. When the two sleeve rods 100 adjust the distance, the overall length of the telescopic plate 370 is adjusted accordingly. The double-headed forward and reverse motor 340 is fixed under the sleeve plate 371, and a handle 380 is provided on the top of the sleeve plate 371, which is convenient for carrying and holding.

[0037] In the specific use process, after the furnace tube is cooled down, the furnace tube is opened, the movable rod 110 is extended into the furnace tube, the electric telescopic rod 350 is started first, and then the distance between the two sleeve rods 100 is adjusted so that the distance between the two mechanical grippers 210 is adapted to the electrode bases of different widths. The two mechanical grippers 210 are located on both sides of the edge of the electrode base, and then the double-headed forward and reverse motor 340 is started to drive the driving rod 320 to rotate, and the two lead screws 130 are rotated at the same time through the worm 330 and the worm wheel 300, so that the two mechanical grippers 210 move to the outer edge of the end of the electrode base, and then the servo motor 2 50 drives the half gear 230 to rotate, so that the two grab bars 240 are clamped at the outer edge of the electrode base. Then, the laser emitter 120 is turned on to emit high energy of laser to make the amorphous silicon film form powder and separate from the electrode base. During this period, the double-headed forward and reverse motor 340 can be started to drive the driving rod 320 to rotate. When the lead screw 130 is driven to rotate by the worm gear 300 and the worm 330, the movable rod 110 and the sleeve rod 100 can be relatively displaced, that is, the positions of the sleeve rod 100 and the laser emitter 120 can be adjusted, so as to achieve more comprehensive cleaning of the amorphous silicon film on the electrode base.

[0038] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A device for automatically cleaning a graphite boat electrode base, characterized in that: include: A sleeve rod (100), two sleeve rods (100) are arranged in parallel, and a movable rod (110) is telescopically arranged at one end, a laser emitter (120) is arranged on one side of the two sleeve rods (100) facing each other, and a screw rod (130) is rotatably arranged in the inner cavity of the sleeve rod (100) and is screwed to the end of the movable rod (110); A mounting frame (200), wherein the other end of the movable rod (110) is provided with a mounting frame (200), and mechanical grippers (210) are symmetrically mounted on two mounting frames (200); A worm wheel (300), two screw rods (130) extending from the end of the movable rod (110) and rotating through the side wall of the sleeve rod (100) and provided with a worm wheel (300), each sleeve rod (100) being provided with a mounting frame (310) located below the worm wheel (300), the side walls of the two mounting frames (310) being rotating through and provided with a transverse driving rod (320), the rod body of the driving rod (320) being provided with a worm (330) meshing with the worm wheel (300), and the other ends of the two driving rods (320) being respectively connected to the two output ends of a double-headed forward and reverse motor (340).

2. The device for automatically cleaning the graphite boat electrode base according to claim 1, characterized in that: A limit plate (140) having an outer diameter greater than that of the movable rod (110) is disposed at one end of the inner cavity of the sleeve rod (100), and a limit rod (150) is symmetrically disposed in the inner cavity of each sleeve rod (100) with respect to the movable rod (110), and the rod body of the limit rod (150) slides through the side wall of the limit plate (140).

3. The device for automatically cleaning the graphite boat electrode base according to claim 1, characterized in that: The mechanical gripper (210) comprises a fixed plate (220) arranged on a side of a mounting frame (200) away from a movable rod (110); two half gears (230) meshing with each other are rotatably arranged on the other side of the fixed plate (220); symmetrical gripping rods (240) are movably arranged on the outer sides of the two half gears (230); a servo motor (250) is arranged on the inner side of the mounting frame (200); an output shaft of the servo motor (250) rotatably penetrates the side wall of the fixed plate (220) and is connected to the center of the side wall of a half gear (230).

4. The device for automatically cleaning the graphite boat electrode base according to claim 3, characterized in that: A connecting rod (260) is rotatably disposed in the middle of the grab bar (240), and the other end of the connecting rod (260) is rotatably disposed on the side wall of the fixing plate (220).

5. The device for automatically cleaning the graphite boat electrode base according to claim 1, characterized in that: A transverse electric telescopic rod (350) is arranged between the two mounting frames (310); the driving rod (320) comprises a spline sleeve (321) that rotates and penetrates the side wall of the mounting frame (310), and a spline rod (322) that slides and fits into the other end of the spline sleeve (321); the spline rod (322) is connected to the output shaft of the double-head forward and reverse motor (340).

6. The device for automatically cleaning the graphite boat electrode base according to claim 1, characterized in that: A protective shell (360) is arranged outside the two mounting frames (310); the inner cavity of the protective shell (360) accommodates the worm (330) and the worm wheel (300); and the shaft of the driving rod (320) rotates and penetrates the side wall of the protective shell (360).

7. The device for automatically cleaning the graphite boat electrode base according to claim 6, characterized in that: A telescopic plate (370) is provided between the two protective shells (360), and the telescopic plate (370) comprises a middle sleeve plate (371) and movable plates (372) sliding on both ends of the inner cavity of the sleeve plate (371).

8. The device for automatically cleaning the graphite boat electrode base according to claim 7, characterized in that: The double-head forward and reverse motor (340) is fixed below the sleeve plate (371), and a handle (380) is provided on the top of the sleeve plate (371).

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