Anti-deformation adjusting device for sapphire heater

Abstract

The utility model provides a sapphire heater anti-deformation adjusting device which comprises a guide mechanism, a sealing mechanism, a telescopic sliding mechanism, a moving auxiliary mechanism and a locking mechanism, and the guide mechanism comprises an upper guide plate and a lower guide plate which are in threaded connection through a pre-tightening connecting piece; the sealing mechanism comprises a sealing groove and a sealing ring which are arranged on the upper guide plate and the lower guide plate; the telescopic sliding mechanism comprises sliding grooves formed in the upper guide plate and the lower guide plate, and telescopic springs, sliding blocks and sliding balls are arranged in the sliding grooves. The moving auxiliary mechanism comprises a fixing block and a lead screw in threaded fit with the fixing block. The locking mechanism comprises a locking supporting frame and a lifting locking column. The heating body is installed at the bottom of the furnace chamber through the device, the heating body is stably stressed, the upper portion of the heating body is connected with the side wall of the furnace chamber through the supporting piece, the heating body is adjusted by moving the guide plate, and deformation of the heating body under the self-weight condition can be effectively prevented; stability reduction and other abnormal conditions in the crystal growth process are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of sapphire processing, in particular to an anti-deformation adjustment device for a sapphire heater. Background Art

[0002] At present, the weight of sapphire crystals in the world is generally below 400kg. With the continuous development of the sapphire industry, it is gradually developing towards larger sizes. Since the use of large-size sapphire substrates can reduce the cost of LED chips, increase the chip yield rate and the output of single-machine chips, the market demand for large-size sapphire substrates is increasing, and the quality requirements are getting higher and higher. The market share of 6-8 inch sapphire substrates in the entire sapphire substrate market will continue to grow.

[0003] The problems existing in the prior art are: first, the increase in crystal weight causes the furnace body, heat field, and heating body to become larger and larger, and the weight also increases accordingly. The original installation mode is not sufficient to meet the needs of furnace adjustment; second, the current heating body installation mode can only be adjusted in the furnace during manual installation, and the deformation of the heating body cannot be accurately adjusted and the overall movement is difficult.

[0004] Therefore, in order to solve the technical shortcomings of the deformation of the heating body of large-kilogram crystals in the current market and meet the development needs of large-kilogram sapphire production technology, it is urgently necessary to improve the deformation control technology of the heating body so as to better ensure the efficient production of wafers and promote the development of the sapphire crystal industry. Summary of the invention

[0005] The technical problem to be solved by the utility model is to provide a sapphire heater anti-deformation adjustment device to solve the problem of deformation of large-kilogram crystal heating body in the prior art, so as to better ensure the efficient production of wafers and promote the development of the sapphire crystal industry.

[0006] The utility model provides a sapphire heater anti-deformation adjustment device, comprising a guide mechanism, a sealing mechanism, a telescopic sliding mechanism, a movement auxiliary mechanism and a locking mechanism, wherein:

[0007] The guide mechanism comprises an upper guide plate and a lower guide plate which are respectively arranged horizontally on the upper and lower sides of the bottom wall of the furnace chamber, and the upper guide plate and the lower guide plate are threadedly connected by a pre-tightening connector;

[0008] The sealing mechanism comprises a sealing groove provided on the lower side of the upper guide plate and the upper side of the lower guide plate, and a sealing ring is provided in the sealing groove;

[0009] The telescopic sliding mechanism comprises a sliding groove provided on the lower side of the upper guide plate and the upper side of the lower guide plate, a telescopic spring is provided in the sliding groove, the other end of the telescopic spring is connected to the sliding block, and a sliding ball is provided in the sliding block;

[0010] The movement auxiliary mechanism comprises a fixed block fixedly mounted on the lower side of the bottom wall of the furnace chamber, wherein a threaded through hole is provided in the fixed block, a screw rod is arranged in the threaded through hole, and the other end of the screw rod is opposite to the side wall of the lower guide plate;

[0011] The locking mechanism comprises a locking support frame, and a lifting locking column is arranged on the upper side of the locking support frame.

[0012] Preferably, the middle of the upper guide plate and the lower guide plate are respectively provided with electrode mounting holes, an electrode body is vertically arranged in the electrode mounting hole, a heating body is vertically arranged on the upper side of the electrode body, and the upper part of the heating body is connected to the inner side of the furnace chamber side wall through a support.

[0013] Preferably, the locking support frame is provided with a mounting hole, a locking motor is installed below the mounting hole, a guide groove is provided on the inner wall of the lifting guide hole, a lifting locking column is threadedly mounted on the power output end of the locking motor, a guide block is provided on the outer wall of the lifting locking column, and the guide block is movably mounted in the guide groove.

[0014] Preferably, the bottom wall of the furnace cavity is provided with an adjustment hole, the upper part of the upper guide plate is located on the upper side of the bottom wall of the furnace cavity, the lower part of the upper guide plate is arranged in the adjustment hole, the upper part of the lower guide plate is arranged in the adjustment hole, and the lower part of the lower guide plate is located on the lower side of the bottom wall of the furnace cavity.

[0015] Preferably, the sealing groove is an annular groove with a trapezoidal cross section, and the sliding groove is an annular groove with a rectangular cross section.

[0016] Preferably, the movement assisting mechanisms are provided in four groups, and the movement assisting mechanisms are evenly distributed around the lower guide plate.

[0017] Preferably, there are eight groups of telescopic sliding mechanisms, and the telescopic sliding mechanisms are evenly distributed in the sliding groove.

[0018] Working principle of the utility model: When using the anti-deformation adjustment device of the sapphire heater of the utility model, first adjust the tightness of the pre-tightening connector to make the telescopic sliding mechanism shrink slightly, and the sealing mechanism is about to contact the bottom wall of the furnace chamber, ensuring that the upper and lower guide plates can easily switch between sealing and sliding. After installing the heating body to the electrode body, check the deformation of the heating body, adjust the moving auxiliary mechanism, and push the guide plate on the bottom wall of the furnace chamber through the screw rod. When each electrode body moves into place and the deformation of the heating body is minimized, start the locking mechanism. The locking motor of the locking mechanism works, the power output end of the motor rotates, and the lifting and locking column threadedly mounted therewith moves upward under the guidance of the guide groove, squeezing the lower guide plate, so that the telescopic sliding mechanism on one side of the lower guide plate is further compressed, and the sealing mechanism on the same side is in close contact with the bottom wall of the furnace chamber to play a sealing role. After the crystal growth is completed, if the heating body is deformed, the lifting and locking column of the locking mechanism is operated to shrink downward, so that the sealing mechanism is separated from the bottom wall of the furnace chamber, and the moving auxiliary mechanism is adjusted again to improve the deformation of the heating body. When the deformation is minimal, the locking mechanism is operated to seal the bottom wall of the furnace chamber.

[0019] Beneficial effects of the utility model: The anti-deformation adjustment device of the sapphire heater of the utility model, first, installs the heating body at the bottom of the furnace cavity, so that the heating body is subjected to stable force, and a support is installed on the upper part of the heating body, and the other end of the support is connected to the side wall of the furnace cavity, which can effectively prevent the deformation of the heating body under the condition of dead weight, and avoid the decrease of stability and other abnormal conditions during the crystal growth process. Secondly, the heating body is installed at the bottom of the furnace cavity by using a movable and adjustable guide mechanism and a pre-tightening sealing mechanism. After installation, the position of the guide mechanism can be adjusted by a mobile auxiliary mechanism to ensure that the deformation of the heating body is stable, so that the efficient production of crystals can be better guaranteed. Thirdly, the heating body can be adjusted outside the furnace body by the mobile auxiliary mechanism acting on the pre-tightening sealing mechanism and the guide mechanism, which effectively simplifies the method and steps of adjusting the heating body, and helps to ensure that the deformation of the heating body can be controlled without disassembly. Finally, the device ensures the airtightness of the furnace cavity while the heating body can be moved and adjusted, and a telescopic sliding mechanism is designed in the guide mechanism to effectively solve the friction movement of rigid parts. The device fills the gap in the industry and can effectively promote the development of large-size sapphire substrate manufacturing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of the anti-deformation adjustment device for a sapphire heater of the utility model;

[0021] Figure 2 for Figure 1 A partial enlarged view of middle A;

[0022] Figure 3 for Figure 2 A top view of the middle and lower guide plates;

[0023] Figure 4 for Figure 2 Cross-sectional view of the locking mechanism.

[0024] In the figure: guiding mechanism 1, upper guide plate 11, lower guide plate 12, pre-tightening connector 13, electrode mounting hole 14; sealing mechanism 2, sealing groove 21, sealing ring 22; telescopic sliding mechanism 3, sliding groove 31, telescopic spring 32, sliding block 33, sliding ball 34; moving auxiliary mechanism 4, fixing block 41, screw rod 42; locking mechanism 5, locking support frame 51, lifting locking column 52, lifting guide hole 53, locking motor 54, guide groove 55, lifting locking column 52, guide block 56; furnace chamber 6, adjusting hole 61; electrode body 7; heating body 8; support member 9. DETAILED DESCRIPTION

[0025] In order to make the technical solution of the present utility model easier to understand, the technical solution of the present utility model is now clearly and completely described in the form of specific embodiments in combination with the accompanying drawings.

[0026] Embodiment 1:

[0027] like Figures 1 to 4 As shown, the sapphire heater anti-deformation adjustment device of this embodiment includes a guide mechanism 1, a sealing mechanism 2, a telescopic sliding mechanism 3, a movement auxiliary mechanism 4 and a locking mechanism 5, wherein:

[0028] The guide mechanism 1 comprises an upper guide plate 11 and a lower guide plate 12 which are respectively arranged horizontally on the upper and lower sides of the bottom wall of the furnace chamber 6, and the upper guide plate 11 and the lower guide plate 12 are threadedly connected via a pre-tightening connector 13;

[0029] The sealing mechanism 2 includes a sealing groove 21 provided on the lower side of the upper guide plate 11 and the upper side of the lower guide plate 12, and a sealing ring 22 is provided in the sealing groove 21;

[0030] The telescopic sliding mechanism 3 includes a sliding groove 31 provided on the lower side of the upper guide plate 11 and the upper side of the lower guide plate 12, a telescopic spring 32 is provided in the sliding groove 31, the other end of the telescopic spring 32 is connected to a sliding block 33, and a sliding ball 34 is provided in the sliding block 33;

[0031] The movement auxiliary mechanism 4 includes a fixed block 41 fixedly mounted on the lower side of the bottom wall of the furnace chamber 6, wherein a threaded through hole is provided in the fixed block 41, a screw rod 42 is arranged in the threaded through hole, and the other end of the screw rod 42 is opposite to the side wall of the lower guide plate 12;

[0032] The locking mechanism 5 comprises a locking support frame 51 , and a lifting locking column 52 is disposed on the upper side of the locking support frame 5 .

[0033] Embodiment 2:

[0034] like Figures 1 to 4 As shown, the sapphire heater anti-deformation adjustment device of this embodiment includes a guide mechanism 1, a sealing mechanism 2, a telescopic sliding mechanism 3, a movement auxiliary mechanism 4 and a locking mechanism 5, wherein:

[0035] The guide mechanism 1 includes an upper guide plate 11 and a lower guide plate 12 which are horizontally arranged on the upper and lower sides of the bottom wall of the furnace chamber 6 respectively, and the upper guide plate 11 and the lower guide plate 12 are threadedly connected by a pre-tightening connector 13; the middle parts of the upper guide plate 11 and the lower guide plate 12 are respectively provided with electrode mounting holes 14, and the electrode main body 7 is vertically arranged in the electrode mounting hole 14, and a heating main body 8 is vertically arranged on the upper side of the electrode main body 7, and the upper part of the heating main body 8 is connected to the inner side of the side wall of the furnace chamber 6 through a support member 9.

[0036] The sealing mechanism 2 includes a sealing groove 21 provided on the lower side of the upper guide plate 11 and the upper side of the lower guide plate 12, and a sealing ring 22 is provided in the sealing groove 21; the sealing groove 21 is an annular groove with a trapezoidal cross section, and the sliding groove 31 is an annular groove with a rectangular cross section;

[0037] The telescopic sliding mechanism 3 includes a sliding groove 31 provided on the lower side of the upper guide plate 11 and the upper side of the lower guide plate 12, a telescopic spring 32 is provided in the sliding groove 31, the other end of the telescopic spring 32 is connected to a sliding block 33, and a sliding ball 34 is provided in the sliding block 33;

[0038] The movement auxiliary mechanism 4 includes a fixed block 41 fixedly mounted on the lower side of the bottom wall of the furnace chamber 6, wherein a threaded through hole is provided in the fixed block 41, a screw rod 42 is arranged in the threaded through hole, and the other end of the screw rod 42 is opposite to the side wall of the lower guide plate 12;

[0039] The locking mechanism 5 comprises a locking support frame 51, and a lifting locking column 52 is arranged on the upper side of the locking support frame 51; a lifting guide hole 53 is arranged inside the locking support frame 51, and a locking motor 54 is installed below the lifting guide hole 53, and a guide groove 55 is arranged on the inner wall of the lifting guide hole 53, and the power output end of the locking motor 54 is threadedly fitted with the lifting locking column 52, and a guide block 56 is arranged on the outer wall of the lifting locking column 52, and the guide block is movably fitted with the guide groove 55; the moving auxiliary mechanism 4 is provided with four groups, and the moving auxiliary mechanism 4 is evenly distributed around the lower guide plate 12;

[0040] The bottom wall of the furnace cavity 6 is provided with an adjustment hole 61, the upper part of the upper guide plate 11 is located on the upper side of the bottom wall of the furnace cavity 6, the lower part of the upper guide plate 11 is arranged in the adjustment hole 61, the upper part of the lower guide plate 12 is arranged in the adjustment hole 61, and the lower part of the lower guide plate 12 is located on the lower side of the bottom wall of the furnace cavity 6.

[0041] There are eight groups of telescopic sliding mechanisms 3 , and the telescopic sliding mechanisms 3 are evenly distributed in the sliding grooves 31 .

[0042] It should be noted that the embodiments described herein are only partial embodiments of the present invention, rather than all implementations of the present invention, and the embodiments are only exemplary, and their role is only to provide a more intuitive and clear way to understand the content of the present invention, rather than to limit the technical solutions described in the present invention. Without departing from the concept of the present invention, all other implementation methods that ordinary technicians in the field can think of without creative work, and other simple replacements and various changes to the technical solutions of the present invention, all belong to the protection scope of the present invention.

Claims

1. A sapphire heater anti-deformation adjustment device, characterized in that: It comprises a guiding mechanism (1), a sealing mechanism (2), a telescopic sliding mechanism (3), a movement assisting mechanism (4) and a locking mechanism (5), wherein: The guide mechanism (1) comprises an upper guide plate (11) and a lower guide plate (12) which are respectively arranged horizontally on the upper and lower sides of the bottom wall of the furnace chamber (6); the upper guide plate (11) and the lower guide plate (12) are threadedly connected via a pre-tightening connector (13); The sealing mechanism (2) comprises a sealing groove (21) provided on the lower side of the upper guide plate (11) and the upper side of the lower guide plate (12), and a sealing ring (22) is provided in the sealing groove (21); The telescopic sliding mechanism (3) comprises a sliding groove (31) provided on the lower side of the upper guide plate (11) and the upper side of the lower guide plate (12), a telescopic spring (32) is provided in the sliding groove (31), the other end of the telescopic spring (32) is connected to a sliding block (33), and a sliding ball (34) is provided in the sliding block (33); The movement auxiliary mechanism (4) comprises a fixed block (41) fixedly mounted on the lower side of the bottom wall of the furnace chamber (6), a threaded through hole is arranged in the fixed block (41), a screw rod (42) is arranged in the threaded through hole, and the other end of the screw rod (42) is opposite to the side wall of the lower guide plate (12); The locking mechanism (5) comprises a locking support frame (51), and a lifting locking column (52) is provided on the upper side of the locking support frame (51).

2. The sapphire heater anti-deformation adjustment device according to claim 1, characterized in that: The middle parts of the upper guide plate (11) and the lower guide plate (12) are respectively provided with electrode mounting holes (14), an electrode body (7) is vertically arranged in the electrode mounting hole (14), a heating body (8) is vertically arranged on the upper side of the electrode body (7), and the upper part of the heating body (8) is connected to the inner side of the side wall of the furnace chamber (6) through a support member (9).

3. The sapphire heater anti-deformation adjustment device according to claim 1, characterized in that: The locking support frame (51) is provided with a lifting guide hole (53), a locking motor (54) is installed below the lifting guide hole (53), a guide groove (55) is provided on the inner wall of the lifting guide hole (53), a lifting locking column (52) is threadedly mounted on the power output end of the locking motor (54), a guide block (56) is provided on the outer wall of the lifting locking column (52), and the guide block is movably mounted on the guide groove (55).

4. The sapphire heater anti-deformation adjustment device according to claim 1, characterized in that: The bottom wall of the furnace cavity (6) is provided with an adjustment hole (61); the upper portion of the upper guide plate (11) is located on the upper side of the bottom wall of the furnace cavity (6); the lower portion of the upper guide plate (11) is arranged in the adjustment hole (61); the upper portion of the lower guide plate (12) is arranged in the adjustment hole (61); and the lower portion of the lower guide plate (12) is located on the lower side of the bottom wall of the furnace cavity (6).

5. The sapphire heater anti-deformation adjustment device according to claim 1, characterized in that: The sealing groove (21) is an annular groove with a trapezoidal cross section, and the sliding groove (31) is an annular groove with a rectangular cross section.

6. The sapphire heater anti-deformation adjustment device according to claim 1, characterized in that: The movement auxiliary mechanisms (4) are provided in four groups, and the movement auxiliary mechanisms (4) are evenly distributed around the lower guide plate (12).

7. The sapphire heater anti-deformation adjustment device according to claim 1, characterized in that: The telescopic sliding mechanisms (3) are in eight groups, and the telescopic sliding mechanisms (3) are evenly distributed in the sliding grooves (31).

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