Platform vacuumizing device suitable for parallel light or astigmatism equipment

Abstract

The utility model discloses a platform vacuum-pumping device suitable for parallel light or astigmatism equipment, comprising a platform and an upper shielding film, one side of the platform is provided with a plurality of vacuum suction mechanisms, the plurality of vacuum suction mechanisms are respectively arranged along a plurality of edges of the platform, the upper shielding film is covered on the platform and the vacuum suction mechanisms, and the vacuum suction mechanisms are arranged on the upper shielding film. A pressing buckle for fixing the upper shielding film is arranged on the platform; the platform is provided with a plurality of partition plates arranged close to the vacuum suction mechanism, the partition plates define a plurality of vacuumizing areas used for containing photosensitive material products, and a gap is formed between every two adjacent partition plates. According to the utility model, the partition plates arranged close to the vacuum suction mechanism are arranged, so that the problems that the air at the edge position is emptied by the vacuum suction mechanism firstly, and the air at the middle position is remained and is difficult to emptied can be avoided, and a plurality of vacuumizing areas are enclosed by the partition plates, so that the area of the area needing to be vacuumized can be reduced, and the vacuumizing efficiency is improved. And the vacuum degree in the vacuumizing area can be better ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, in particular to a platform vacuum device suitable for parallel light or scattered light equipment. Background Art

[0002] The platform vacuum device suitable for parallel light or scattered light equipment is used to evacuate the air between the upper cover film, the photosensitive material product (the product bonded with the photosensitive material), and the platform to prevent the air from affecting the refraction of the light source.

[0003] When the area to be vacuumed is large, the existing vacuum pumping device cannot completely exhaust the gas in the vacuum area. Air will remain in the middle of the vacuum area. The residual air will refract the light source, causing various defects in the product after exposure. Utility Model Content

[0004] The main purpose of the utility model is to provide a platform vacuuming device suitable for parallel light or scattered light equipment, aiming to solve the problem that the existing vacuuming device is affected by the flatness of the product, resulting in poor vacuuming effect.

[0005] To achieve the above-mentioned purpose, the utility model proposes a platform vacuum pumping device suitable for parallel light or scattered light equipment, comprising a platform and an upper shielding film, a plurality of vacuum suction mechanisms are arranged on one side of the platform, and the plurality of vacuum suction mechanisms are arranged along a plurality of edges of the platform respectively, the upper shielding film is covered on the platform and the vacuum suction mechanism, and a buckle for fixing the upper shielding film is provided on the platform;

[0006] The platform is provided with a plurality of partition plates arranged close to the vacuum suction mechanism, the plurality of partition plates enclose a plurality of vacuum zones for accommodating photosensitive material products, a gap is provided between two adjacent partition plates, and the partition plates are spaced apart from the photosensitive material products.

[0007] Optionally, the interval between the partition plate and the photosensitive material product is greater than or equal to 5 cm.

[0008] Optionally, the thickness of the partition plate is 1 mm, and the width of the partition plate is 15 mm.

[0009] Optionally, the upper side of the platform is square, and the number of the vacuum suction mechanisms is set to four.

[0010] Optionally, the partition plate is arranged parallel to the edge of the platform, and the interval between the partition plate and the edge of the platform is 10 cm.

[0011] Optionally, the upper shielding film is a PE film.

[0012] Optionally, a first magnetic attraction component is provided at one end of the partition plate, and a second magnetic attraction component for magnetically attracting the first magnetic attraction component is provided at the other end of the partition plate.

[0013] Optionally, a third magnetic component is provided on the lower side of the partition plate, and an electromagnetic component corresponding to the third magnetic component is provided on the lower side of the platform.

[0014] Optionally, the electromagnetic component is provided with a countersunk hole and a screw located in the countersunk hole, and a screw hole is provided on the lower side of the platform, and the screw passes through the countersunk hole and is connected to the screw hole.

[0015] Optionally, a button is provided on one side of the platform, and the button is used to control the switch of the electromagnetic component.

[0016] Compared with the prior art, the utility model has the following beneficial effects: the utility model can avoid the problem that the vacuum suction mechanism first evacuates the air at the edge position, resulting in residual air in the middle position that is difficult to evacuate, by arranging a partition plate arranged close to the vacuum suction mechanism; and the plurality of partition plates enclose a plurality of vacuum zones, which can reduce the area of ​​the region to be vacuumed and better ensure the vacuum degree in the vacuum zone. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall decomposition of the utility model;

[0019] Figure 2 It is a top view of the utility model.

[0020] Description of Figure Numbers:

[0021] 1. Platform; 2. Upper shielding film; 3. Vacuum suction mechanism; 4. Partition plate; 5. Vacuum extraction area; 6. Photosensitive material products.

[0022] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if the meaning of "and / or" appearing in the full text is to include three parallel schemes, taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0026] At present, when the area to be vacuumed is large, the existing vacuum pumping device cannot completely exhaust the gas in the vacuum area. Air will remain in the middle of the vacuum area. The residual air will refract the light source, causing various defects in the product after exposure.

[0027] In order to solve the above problems, the utility model provides a platform 1 vacuum pumping device suitable for parallel light or scattered light equipment. Figure 1 and Figure 2 This is a specific embodiment of the vacuum pumping device for platform 1 of the utility model, which is suitable for parallel light or scattered light equipment.

[0028] Reference Figure 1 and Figure 2The platform 1 vacuum pumping device suitable for parallel light or scattered light equipment includes a platform 1 and an upper shielding film 2, a plurality of vacuum suction mechanisms 3 are arranged on one side of the platform 1, and the plurality of vacuum suction mechanisms 3 are arranged along a plurality of edges of the platform 1, the upper shielding film 2 is covered on the platform 1 and the vacuum suction mechanisms 3, and a buckle for fixing the upper shielding film 2 is provided on the platform 1;

[0029] The platform 1 is provided with a plurality of partition plates 4 arranged near the vacuum suction mechanism 3, and the plurality of partition plates 4 enclose a plurality of vacuum areas 5 for accommodating photosensitive material products 6, and a gap is provided between two adjacent partition plates 4, and the partition plates 4 are spaced apart from the photosensitive material products 6.

[0030] The utility model can slow down the air emptying speed near the partition plate 4, that is, slow down the vacuum forming speed near the vacuum suction mechanism 3, by arranging the partition plate 4 near the vacuum suction mechanism 3, to ensure that the vacuum suction mechanism 3 empties the air in the central position first, thereby avoiding the problem that the vacuum suction mechanism 3 empties the air at the edge position first, resulting in residual air in the middle position that is difficult to empty, and the multiple partition plates 4 enclose a plurality of vacuum zones 5, which can reduce the area of ​​the region to be vacuumed and better ensure the vacuum degree in the vacuum zone 5.

[0031] Since the vacuum forming speed near the partition plate 4 is relatively slow, if the partition plate 4 is close to the photosensitive material product 6, the vacuum forming speed at the photosensitive material product 6 will be slowed down, so the partition plate 4 needs to be separated from the photosensitive material product 6. Specifically, the interval between the partition plate 4 and the photosensitive material product 6 is greater than or equal to 5 cm. Preferably, the interval between the partition plate 4 and the photosensitive material product 6 is set to 5 cm.

[0032] The thickness of the partition plate 4 should not be set too thick, otherwise it will affect the vacuum forming speed, or even make the vacuum unable to be formed. Specifically, the thickness of the partition plate 4 is set to 1 mm. The width of the partition plate 4 should not be set too wide, otherwise the gap length between the partition plates 4 is too long, which will also affect the vacuum forming speed. Specifically, the width of the partition plate 4 is 15 mm.

[0033] The upper side of the platform 1 is square, and the number of the vacuum suction mechanisms 3 is set to four. The area enclosed by the vacuum suction mechanisms 3 is square, and the vacuum area 5 enclosed by the partition plate 4 is also square; since the shape of the photosensitive material product 6 is generally square, the vacuum area 5 is set to be square so that the area of ​​the vacuum area 5 can be set to the minimum, thereby accelerating the vacuum forming speed at the position of the photosensitive material product 6 and making the vacuum degree better.

[0034] The partition plate 4 should not be too far away from the vacuum suction mechanism 3, otherwise the partition plate 4 cannot slow down the speed of vacuum formation at the edge; the partition plate 4 should not be too close to the vacuum suction mechanism 3, otherwise the partition plate 4 will cause the exhaust speed of the exhaust port of the vacuum suction mechanism 3 to slow down, resulting in a slow vacuum speed in the middle. Specifically, the partition plate 4 is arranged parallel to the edge of the platform 1, and the interval between the partition plate 4 and the edge of the platform 1 is 10 cm. That is, the partition plate 4 is arranged parallel to the vacuum suction mechanism 3, and the interval between the partition plate 4 and the vacuum suction mechanism 3 is also 10 cm.

[0035] The upper shielding film 2 is a PE film. The PE film is light, has good wear resistance and impact resistance, and will not rub against the corners of the partition plate 4 during vacuuming to cause cracking. The PE film has good transparency and will not affect the penetration of light.

[0036] A first magnetic member is provided at one end of the partition plate 4, and a second magnetic member for magnetic attraction with the first magnetic member is provided at the other end of the partition plate 4. Through the first magnetic member and the second magnetic member, a plurality of partition plates 4 can be assembled together to form different sizes, so that they can be applied to photosensitive material products 6 of different sizes, and have higher versatility.

[0037] A third magnetic member is provided on the lower side of the partition plate 4, and an electromagnetic member corresponding to the third magnetic member is provided on the lower side of the platform 1. The electromagnetic member is connected to a power source, and when the electromagnetic member is powered on, the electromagnetic member has magnetism, and the partition plate 4 can be fixed on the platform 1 through the magnetic attraction of the electromagnetic member and the third magnetic member, which is convenient to install and has a flexible installation position.

[0038] The electromagnetic component is provided with a countersunk hole and a screw located in the countersunk hole, and a screw hole is provided on the lower side of the platform 1, and the screw passes through the countersunk hole and is connected to the screw hole. The electromagnetic component is fixed to the lower side of the platform 1 by screws, and installation and disassembly are convenient. Specifically, the lower side of the platform 1 is provided with multiple groups of screw holes for fixing the electromagnetic component, and the electromagnetic component can be fixed to multiple positions through the multiple groups of screw holes, so that the electromagnetic component corresponds to the position of the partition plate 4.

[0039] A button is provided on one side of the platform 1, and the button is used to control the switch of the electromagnetic component. Specifically, the button is provided between the electromagnetic component and the power supply, and the connection or disconnection of the electrical connection between the power supply and the electromagnetic component can be controlled by the button. When the partition plate 4 needs to be disassembled or the position of the partition plate 4 needs to be adjusted, the button is pressed to disconnect the electrical connection between the electromagnetic component and the power supply, so that the electromagnetic component can be demagnetized.

[0040] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A platform vacuum pumping device suitable for parallel light or scattered light equipment, characterized in that: It comprises a platform and an upper shielding film, a plurality of vacuum suction mechanisms are arranged on one side of the platform, and the plurality of vacuum suction mechanisms are arranged along a plurality of edges of the platform respectively, the upper shielding film is covered on the platform and the vacuum suction mechanisms, and a buckle for fixing the upper shielding film is provided on the platform; The platform is provided with a plurality of partition plates arranged close to the vacuum suction mechanism, the plurality of partition plates enclose a plurality of vacuum zones for accommodating photosensitive material products, a gap is provided between two adjacent partition plates, and the partition plates are spaced apart from the photosensitive material products.

2. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 1, characterized in that: The interval between the partition plate and the photosensitive material product is greater than or equal to 5 cm.

3. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 1, characterized in that: The thickness of the partition plate is 1 mm, and the width of the partition plate is 15 mm.

4. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 1, characterized in that: The upper side surface of the platform is square, and the number of the vacuum suction mechanisms is set to four.

5. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 4, characterized in that: The partition plate is arranged parallel to the edge of the platform, and the interval between the partition plate and the edge of the platform is 10 cm.

6. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 1, characterized in that: The upper shielding film is a PE film.

7. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 1, characterized in that: A first magnetic attraction component is disposed at one end of the partition plate, and a second magnetic attraction component for magnetically attracting the first magnetic attraction component is disposed at the other end of the partition plate.

8. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 1, characterized in that: A third magnetic attraction component is disposed on the lower side of the partition plate, and an electromagnetic component corresponding to the third magnetic attraction component is disposed on the lower side of the platform.

9. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 8, characterized in that: The electromagnetic component is provided with a countersunk hole and a screw located in the countersunk hole, and the lower side of the platform is provided with a screw hole, and the screw passes through the countersunk hole and is connected with the screw hole.

10. The platform vacuum pumping device suitable for parallel light or scattered light equipment according to claim 8, characterized in that: A button is arranged on one side of the platform, and the button is used to control the switch of the electromagnetic component.

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