Anti-overloading Z-axis platform

Abstract

The embodiment of the utility model discloses an anti-overload Z-axis platform which comprises a base, a Z-axis motor, a first guide rail, a first sliding table, a suction nozzle assembly and a tension spring, the first guide rail is correspondingly arranged on the base, the first sliding table is connected with the first guide rail and a rotor of the Z-axis motor, the Z-axis platform further comprises a second guide rail vertically arranged on the first sliding table, and the suction nozzle assembly is arranged on the second guide rail. A second sliding table is arranged on the second guide rail, the suction nozzle assembly is installed on the second sliding table, the two ends of the tension spring act on the first sliding table and the second sliding table respectively, and the tension spring exerts downward tension on the second sliding table. The guide rail and the tension spring are adopted, high-precision guiding is achieved, meanwhile, pressure damage of the suction nozzle probe to a product during overload is avoided, and the product can be well protected.

Description

Technical Field

[0001] The utility model relates to the technical field of picking up and mounting semiconductor chips, in particular to an overload-proof Z-axis platform. Background Art

[0002] In automated production, the application of manipulators has become more and more widespread. In the process of grasping some small products (such as small ICs, especially some semiconductor chips with length and width at the micron level), there are high requirements for the overall structure of the manipulator and the control of the accuracy, strength, stability, etc. of the manipulator's Z-axis direction.

[0003] The control current of the existing manipulator is too large. When the control current of the Z-axis motor is too large, the output power will be too large, so that the suction nozzle will exert too much pressure on the product when sucking the product, causing the product to be crushed. Utility Model Content

[0004] The technical problem to be solved by the embodiments of the present utility model is to provide an overload-proof Z-axis platform to achieve overpressure protection for products.

[0005] In order to solve the above technical problems, an embodiment of the utility model proposes an anti-overload Z-axis platform, including a base, a Z-axis motor, a first guide rail, a first slide, and a nozzle assembly. The Z-axis motor and the first guide rail are correspondingly arranged on the base, the first slide connects the first guide rail and the mover of the Z-axis motor, the Z-axis platform also includes a tension spring, a second guide rail is vertically arranged on the first slide, a second slide is arranged on the second guide rail, the nozzle assembly is installed on the second slide, and both ends of the tension spring act on the first slide and the second slide respectively, and the tension spring applies a downward pulling force to the second slide.

[0006] Furthermore, the nozzle assembly includes a nozzle probe, a nozzle seat, a nozzle mounting seat, and a pressure sensor. The nozzle mounting seat is arranged on the second slide, the pressure sensor is arranged on the nozzle mounting seat, the nozzle probe is arranged on the nozzle seat, and the nozzle seat is connected to the pressure sensor.

[0007] Furthermore, the Z-axis motor is a voice coil linear motor.

[0008] Furthermore, the first guide rail and the second guide rail are cross roller guide rails.

[0009] Furthermore, a first sensing sheet is disposed on the second slide, and a first photoelectric sensor for detecting the position of the first sensing sheet is correspondingly disposed on the first slide.

[0010] Furthermore, a grating ruler is provided on the side of the first slide, and a reading head is correspondingly provided on the base.

[0011] Furthermore, the tension springs are composed of two groups, which are respectively arranged on the left and right sides of the first slide.

[0012] Furthermore, there are multiple groups of first guide rails and second guide rails.

[0013] Furthermore, a magnetic spring for counterweight is provided on the base, and the magnetic spring is connected to the first slide.

[0014] The beneficial effects of the utility model are as follows: the utility model adopts the guide rail and the tension spring, which can provide high-precision guidance while avoiding pressure damage to the product by the suction nozzle probe when overloaded, and can well protect the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional structural diagram of an anti-overload Z-axis platform at one angle according to an embodiment of the utility model.

[0016] Figure 2 It is a three-dimensional structural diagram of the anti-overload Z-axis platform of an embodiment of the utility model from another angle.

[0017] Description of Figure Numbers

[0018] Base 1, Z-axis motor 2, first guide rail 3, first slide 4, tension spring 5, second guide rail 6, second slide 7, nozzle probe 8, nozzle seat 9, nozzle mounting seat 10, pressure sensor 11, first sensor sheet 12, first photoelectric sensor 13, grating ruler 14, reader 15, magnetic spring 16, second sensor sheet 17, second photoelectric sensor 18. DETAILED DESCRIPTION

[0019] It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present utility model is further described in detail below in conjunction with the drawings and specific embodiments.

[0020] In the embodiments of the present invention, if there are directional indications (such as up, down, left, right, front, back, etc.), they are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0021] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0022] Please refer to Figure 1-2 The anti-overload Z-axis platform of the embodiment of the utility model includes a base, a Z-axis motor, a first guide rail, a first slide, a nozzle assembly, and a tension spring.

[0023] The Z-axis motor and the first guide rail are correspondingly arranged on the base, and the first slide is connected to the first guide rail and the mover of the Z-axis motor. The first guide rail is the movement guide of the first slide, and the Z-axis motor drives the first slide to move.

[0024] The first slide is vertically provided with a second guide rail, the second slide is provided with a second slide on the second guide rail, and the suction nozzle assembly is mounted on the second slide. The second guide rail is a movement guide for the second slide.

[0025] The two ends of the tension spring act on the first slide and the second slide respectively ( Figure 1 and 2 The tension spring in the suction nozzle is not assembled and stretched), that is, the two ends of the tension spring are connected to the first slide and the second slide respectively, and the tension spring applies a downward pulling force to the second slide. When the pressure of the nozzle probe on the product is greater than the tension of the tension spring, the suction nozzle assembly moves upward as a whole, thereby preventing the product from being crushed.

[0026] As an implementation method, the nozzle assembly includes a nozzle probe, a nozzle seat, a nozzle mounting seat, and a pressure sensor. The nozzle mounting seat is arranged on the second slide, the pressure sensor is arranged on the nozzle mounting seat, the nozzle probe is arranged on the nozzle seat, and the nozzle seat is connected to the pressure sensor. The utility model realizes closed-loop force control during the product picking process, and can realize precise control of the grasping force by real-time detection of the pressure on the nozzle probe.

[0027] As an implementation method, the Z-axis motor is a voice coil linear motor.

[0028] As an embodiment, the first guide rail and the second guide rail are cross roller guide rails.

[0029] As an implementation mode, a first sensing sheet is provided on the second slide, and a first photoelectric sensor for detecting the position of the first sensing sheet is provided on the first slide to prevent overvoltage. A second sensing sheet is provided on the first slide, and a second photoelectric sensor for detecting the position of the second sensing sheet is provided on the base to prevent displacement overload.

[0030] As an implementation mode, a grating ruler is provided on the side of the first slide, and a reader is correspondingly provided on the base. For example, the reader can adopt a Renishaw encoder to achieve accurate detection of the position of the first slide.

[0031] As an implementation method, the tension spring consists of two groups, which are respectively arranged on the left and right sides of the first slide, so as to improve stability and make the force more balanced.

[0032] As an implementation method, there are multiple sets of first guide rails and second guide rails to improve stability.

[0033] As an implementation method, a magnetic spring for counterweight is provided on the base, and the magnetic spring is connected to the first slide. The magnetic spring applies an upward pulling force to the first slide to balance the gravity of the first slide, the second slide, and the nozzle assembly, so as to facilitate precise force control and prevent the nozzle assembly from falling when the power is off.

[0034] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An overload-proof Z-axis platform, comprising a base, a Z-axis motor, a first guide rail, a first slide, and a nozzle assembly, wherein the Z-axis motor and the first guide rail are correspondingly arranged on the base, and the first slide is connected to the first guide rail and the mover of the Z-axis motor, characterized in that: The Z-axis platform also includes a tension spring. A second guide rail is vertically arranged on the first slide. A second slide is arranged on the second guide rail. The nozzle assembly is mounted on the second slide. Both ends of the tension spring act on the first slide and the second slide respectively. The tension spring applies a downward pulling force to the second slide.

2. The anti-overload Z-axis platform according to claim 1, characterized in that: The nozzle assembly includes a nozzle probe, a nozzle seat, a nozzle mounting seat, and a pressure sensor. The nozzle mounting seat is arranged on the second slide, the pressure sensor is arranged on the nozzle mounting seat, the nozzle probe is arranged on the nozzle seat, and the nozzle seat is connected to the pressure sensor.

3. The overload-proof Z-axis platform according to claim 1, characterized in that: The Z-axis motor is a voice coil linear motor.

4. The overload-proof Z-axis platform according to claim 1, characterized in that: The first guide rail and the second guide rail are cross roller guide rails.

5. The overload-proof Z-axis platform according to claim 1, characterized in that: The second slide is provided with a first sensing sheet, and the first slide is correspondingly provided with a first photoelectric sensor for detecting the position of the first sensing sheet.

6. The overload-proof Z-axis platform according to claim 1, characterized in that: A grating ruler is arranged on the side of the first slide, and a reading head is arranged correspondingly on the base.

7. The overload-proof Z-axis platform according to claim 1, characterized in that: There are two groups of tension springs, which are respectively arranged on the left and right sides of the first slide.

8. The overload-proof Z-axis platform according to claim 1, characterized in that: There are multiple groups of the first guide rail and the second guide rail.

9. The overload-proof Z-axis platform according to claim 1, characterized in that: A magnetic spring for counterweight is arranged on the base, and the magnetic spring is connected to the first slide.

10. The overload-proof Z-axis platform according to claim 1, characterized in that: The first slide is provided with a second sensing sheet, and the base is correspondingly provided with a second photoelectric sensor for detecting the position of the second sensing sheet.

Images