Constant-pressure vacuum-pumping system

Abstract

The utility model discloses a constant-pressure vacuum-pumping system, and relates to the technical field of micro-jet laser processing. The constant-pressure vacuumizing system comprises a vacuum generating device, a vacuum box, a vacuumizing inlet pipe, a vacuumizing outlet pipe and a vacuum proportional valve. Wherein one end of the vacuumizing inlet pipe is communicated to the vacuum box, and the other end is communicated to the vacuum chuck; the vacuumizing outlet pipe is communicated between the vacuum box and the vacuum generating device, and the vacuum generating device extracts gas at the vacuum chuck through the vacuumizing outlet pipe, the vacuum box and the vacuumizing inlet pipe; the vacuum proportional valve is arranged on the vacuumizing outlet pipe and can adjust the opening degree according to the vacuum degree of the vacuumizing outlet pipe so that the vacuum suction force at the vacuum suction cup can be constant. According to the constant-pressure vacuum-pumping system provided by the utility model, the vacuum suction force of the vacuum chuck can be well kept constant, so that the processing effect of micro-jet laser on a workpiece to be processed can be improved.

Description

Technical Field

[0001] The present application relates to the field of micro-jet laser processing technology, and in particular to a constant-pressure vacuum pumping system. Background Art

[0002] With the development of manufacturing technology, the processing quality of cutting-edge materials and the processing requirements for structures such as holes or grooves are becoming increasingly higher, which in turn puts higher requirements on processing technology.

[0003] Micro-jet laser processing technology is a composite processing technology that uses a water jet to guide the laser beam to process the workpiece to be processed. Due to the different refractive indices of water and air, when the laser beam is irradiated at a certain angle on the interface between water and air, if the incident angle is less than the critical angle of total reflection, the laser will be totally reflected and will not be transmitted out, which makes the laser energy always confined in the water beam so that the laser propagates along the direction of the water beam. The laser achieves total reflection in the ultra-high pressure ultra-pure water column and reaches the material surface of the workpiece to be processed. The laser removes the material by burning to achieve the processing of the workpiece to be processed; when the ultra-high pressure ultra-pure water column reaches the material surface of the workpiece to be processed, it removes the impurities on the material surface and cools the workpiece to be processed.

[0004] Micro jet laser processing technology can be used to process semiconductor materials. Vacuum suction cups are required in the process of wafer scribing, wafer modification or sheet material processing. The vacuum suction cup mainly uses vacuum suction to firmly absorb the material on the surface of the vacuum suction cup. The surface of the vacuum suction cup is designed with many micro holes. The vacuum suction cup provides suction and discharges the water in the micro jet processing process along with the gas.

[0005] In the related art, the vacuum suction force of the vacuum chuck cannot be kept constant, which affects the processing effect of the microjet laser on the workpiece to be processed. Utility Model Content

[0006] In view of this, an embodiment of the present application provides a constant-pressure vacuum pumping system, which can better maintain the vacuum suction force of the vacuum suction cup constant, thereby improving the processing effect of the microjet laser on the workpiece to be processed.

[0007] The constant pressure vacuum system provided in the embodiment of the present application includes a vacuum generating device, a vacuum box, a vacuum inlet pipe, a vacuum outlet pipe and a vacuum proportional valve. One end of the vacuum inlet pipe is connected to the vacuum box, and the other end of the vacuum inlet pipe is connected to the vacuum suction cup; the vacuum outlet pipe is connected between the vacuum box and the vacuum generating device, and the vacuum generating device extracts gas at the vacuum suction cup through the vacuum outlet pipe, the vacuum box and the vacuum inlet pipe; the vacuum proportional valve is arranged on the vacuum outlet pipe, and the vacuum proportional valve can adjust the opening according to the vacuum degree of the vacuum outlet pipe to make the vacuum suction force at the vacuum suction cup constant.

[0008] In a possible implementation of the present application, the vacuum outlet pipe is further provided with a drying filter, and the drying filter is arranged between the vacuum proportional valve and the vacuum box.

[0009] In a possible implementation of the present application, the vacuum generating device is a vacuum generator, and the vacuum generator is provided with a gas outlet, a positive pressure gas inlet and a vacuum inlet, and the vacuum outlet pipe is connected to the vacuum inlet.

[0010] In a possible implementation of the present application, the vacuum generator further includes a positive-pressure gas inlet pipe, and the positive-pressure gas inlet pipe is provided with an air intake control valve.

[0011] In a possible implementation of the present application, the constant-pressure vacuum system also includes a cleaning component, which includes a cleaning nozzle, a cleaning water pipe and a cleaning control valve. The cleaning nozzle is located in the vacuum box, the cleaning water pipe is connected to the cleaning nozzle, and the cleaning control valve is arranged on the cleaning water pipe; when the cleaning control valve is opened, the water flow sprayed from the cleaning nozzle is used to clean the inner wall of the vacuum box.

[0012] In a possible implementation of the present application, the constant pressure vacuum system also includes a manual drainage assembly, which includes a first drain pipe and a manual drain valve; the first drain pipe is connected to the bottom of the vacuum box, and the manual drain valve is arranged on the first drain pipe.

[0013] In a possible implementation of the present application, the constant-pressure vacuum system also includes an automatic drainage component, which includes a liquid level measuring device, a second drain pipe and an automatic drain valve. The liquid level measuring device is arranged in the vacuum box to measure the liquid level in the vacuum box; the second drain pipe is connected to the bottom of the vacuum box, and the automatic drain valve is arranged in the second drain pipe. The automatic drain valve can be opened or closed based on the liquid level in the vacuum box.

[0014] In a possible implementation of the present application, the liquid level measuring device includes an upper liquid level float switch and a lower liquid level float switch, both of which are arranged in a vacuum box, and the upper liquid level float switch is located above the lower liquid level float switch; when the liquid level in the vacuum box reaches the upper liquid level float switch, the upper liquid level float switch is actuated and the automatic drain valve is opened; when the liquid level in the vacuum box reaches the lower liquid level float switch, the lower liquid level float switch is actuated and the automatic drain valve is closed.

[0015] In a possible implementation of the present application, the automatic drainage assembly further includes a water pump, the second drainage pipe is connected between the water pump and the vacuum box, and the water pump is used to pump water out of the vacuum box.

[0016] In a possible implementation of the present application, the constant-pressure vacuum system also includes a cleaning component, the cleaning component includes a cleaning nozzle, a cleaning water pipe and a cleaning control valve, the cleaning nozzle is located in the vacuum box, the cleaning water pipe is connected to the cleaning nozzle, and the cleaning control valve is arranged on the cleaning water pipe; when the cleaning control valve is opened, the water flow sprayed from the cleaning nozzle is used to clean the inner wall of the vacuum box; when the liquid level in the vacuum box is lower than the lower liquid level float switch, the cleaning control valve is opened; when the liquid level in the vacuum box reaches the lower liquid level float switch, the cleaning control valve is closed.

[0017] In the constant pressure vacuum system provided in the embodiment of the present application, by setting a vacuum proportional valve on the vacuum outlet pipe, the vacuum proportional valve can adjust the opening according to the vacuum degree of the vacuum outlet pipe, so that the vacuum degree of the vacuum outlet pipe is constant, thereby making the vacuum degree at the vacuum suction cup constant and making the vacuum suction force at the vacuum suction cup constant. Thus, the influence of the change of the vacuum suction force at the vacuum suction cup on the processing of the workpiece to be processed can be avoided, and the processing effect of the microjet laser on the workpiece to be processed can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0019] The drawings herein are incorporated into the specification and constitute a part of the specification. These drawings illustrate embodiments consistent with the present application and are used together with the specification to illustrate the technical solution of the present application.

[0020] Figure 1 A schematic diagram of the structure of a constant pressure vacuum system provided in an embodiment of the present application.

[0021] Reference numerals:

[0022] 1. Vacuum generating device; 11. Vacuum generator; 111. Positive pressure gas inlet pipe; 112. Air intake control valve; 2. Vacuum box; 3. Vacuum inlet pipe; 4. Vacuum outlet pipe; 5. Vacuum proportional valve; 6. Cleaning assembly; 61. Cleaning nozzle; 62. Cleaning water pipe; 63. Cleaning control valve; 7. Manual drain assembly; 71. First drain pipe; 72. Manual drain valve; 8. Automatic drain assembly; 81. Liquid level measuring device; 811. Upper liquid level float switch; 812. Lower liquid level float switch; 82. Second drain pipe; 83. Automatic drain valve; 84. Water pump; 9. Dry filter. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the application embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of this application; it is obvious that the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this application.

[0024] When using micro jet laser processing technology to process the workpiece, due to the particularity of some workpieces to be processed, it is necessary to try to keep the processing parameters unchanged during the entire processing process. At the same time, it is also necessary to try to avoid the processing effect being affected by changes in external factors. Therefore, during the processing of the workpiece, it is necessary to try to keep the vacuum suction of the vacuum chuck constant.

[0025] In the related art, the vacuum suction force of the vacuum suction cup is adjusted by manual adjustment. However, the manual adjustment method is difficult to meet the requirement of constant vacuum suction force of the vacuum suction cup.

[0026] In view of this, an embodiment of the present application provides a constant-pressure vacuum pumping system, which can better maintain the vacuum suction force of the vacuum suction cup constant, thereby improving the processing effect of the microjet laser on the workpiece to be processed.

[0027] Specifically, refer to Figure 1 The constant pressure vacuum system provided in the embodiment of the present application includes a vacuum generating device 1, a vacuum box 2, a vacuum inlet pipe 3, a vacuum outlet pipe 4 and a vacuum proportional valve 5. Among them, one end of the vacuum inlet pipe 3 is connected to the vacuum box 2, and the other end of the vacuum inlet pipe 3 is connected to the vacuum suction cup. The vacuum outlet pipe 4 is connected between the vacuum box 2 and the vacuum generating device 1, and the vacuum generating device 1 extracts the gas at the vacuum suction cup through the vacuum outlet pipe 4, the vacuum box 2 and the vacuum inlet pipe 3. The vacuum proportional valve 5 is arranged on the vacuum outlet pipe 4, and the vacuum proportional valve 5 can adjust the opening according to the vacuum degree at the vacuum suction cup to make the vacuum suction force at the vacuum suction cup constant.

[0028] It should be noted that in the embodiment of the present application, the vacuum generating device 1 can extract the gas at the vacuum suction cup, thereby forming a vacuum at the vacuum suction cup, so that the vacuum suction cup forms a vacuum suction force to achieve the effect of adsorbing the workpiece to be processed. In the embodiment of the present application, a vacuum pump can be used as the vacuum generating device 1; in addition, a vacuum generator 11 can also be used as the vacuum generating device 1.

[0029] In the embodiment of the present application, a cavity is formed in the vacuum box 2, and the cavity of the vacuum box 2 can be used to form a buffer between the vacuum generating device 1 and the vacuum suction cup. For example, refer to Figure 1, the vacuum box 2 can be set as a cylindrical shell structure.

[0030] On this basis, a pipe can be provided to connect the vacuum box 2 to the vacuum suction cup. For the convenience of description, the pipe can be referred to as the vacuum inlet pipe 3. Figure 1 In the embodiment of the present application, one end of the vacuum inlet pipe 3 can be directly connected to the vacuum box 2, and the other end of the vacuum inlet pipe 3 can be directly connected to the vacuum suction cup, so that the vacuum inlet pipe 3 is connected between the vacuum suction cup and the vacuum box 2.

[0031] Furthermore, a pipe may be provided to connect the vacuum box 2 to the vacuum generating device 1. For the convenience of description, the pipe may be referred to as a vacuum outlet pipe 4. Figure 1 In an embodiment of the present application, one end of the vacuum outlet pipe 4 can be directly connected to the vacuum box 2, and the other end of the vacuum outlet pipe 4 can be directly connected to the vacuum generating device 1, so that the vacuum outlet pipe 4 is connected between the vacuum box 2 and the vacuum generating device 1.

[0032] On this basis, the constant pressure vacuum system provided in the embodiment of the present application also includes a vacuum proportional valve 5, which can adjust the opening according to the vacuum degree of the vacuum outlet pipe 4 to make the vacuum suction force at the vacuum tube suction cup constant.

[0033] For example, in the embodiment of the present application, the vacuum proportional valve 5 can be set as an electronic vacuum proportional valve 5. In addition, the electronic vacuum proportional valve 5 can also be provided with a pressure digital display device. The vacuum proportional valve 5 can adjust the opening through a proportional-integral-differential controller to achieve a constant vacuum degree of the vacuum outlet pipe 4, thereby making the vacuum suction force at the vacuum suction cup constant.

[0034] Through the above arrangement, in the constant pressure vacuum system provided in the embodiment of the present application, by arranging the vacuum proportional valve 5 on the vacuum outlet pipe 4, the vacuum proportional valve 5 can adjust the opening according to the vacuum degree of the vacuum outlet pipe 4, so as to make the vacuum degree of the vacuum outlet pipe 4 constant, thereby making the vacuum degree at the vacuum suction cup constant, and making the vacuum suction force at the vacuum suction cup constant. Thus, the influence of the change of the vacuum suction force at the vacuum suction cup on the processing of the workpiece to be processed can be avoided, and the processing effect of the microjet laser on the workpiece to be processed can be improved.

[0035] Further, see Figure 1 In some embodiments of the present application, the vacuum outlet pipe 4 is further provided with a drying filter 9, and the drying filter 9 is arranged between the vacuum proportional valve 5 and the vacuum box 2.

[0036] It should be noted that the gap at the vacuum suction cup will mix with the water in the water beam of the microjet laser. The vacuum box 2 can separate the water vapor. The drying filter 9 can make the negative pressure gas entering the vacuum box 2 enter the vacuum proportional valve 5 after drying and filtering, thereby preventing moisture from entering the vacuum proportional valve 5 and causing damage to the vacuum proportional valve 5.

[0037] In addition, refer to Figure 1 In some embodiments of the present application, the vacuum generating device 1 is a vacuum generator 11, and the vacuum generator 11 is provided with a gas outlet, a positive pressure gas inlet and a vacuum inlet, and the vacuum outlet pipe 4 is connected to the vacuum inlet.

[0038] It should be noted that in the embodiment of the present application, the vacuum generator 11 can use the positive pressure gas source commonly used in the positive pressure air inlet to generate negative pressure at the vacuum inlet, thereby extracting the gas in the vacuum outlet pipe 4 to generate vacuum, and finally generating vacuum at the vacuum suction cup.

[0039] In the embodiment of the present application, the vacuum generator 11 can be set as a high-flow vacuum generator 11, for example, the vacuum generator 11 can be selected as an AirTac high-flow vacuum generator 11 of model X-KCV20HS. The vacuum flow rate of the high-flow vacuum generator 11 can reach 110L / minute. Even if there is air leakage in the vacuum suction cup, the vacuum inlet pipe 3 or the vacuum outlet pipe 4 during use, the vacuum suction force of the vacuum suction cup is not affected.

[0040] By configuring the vacuum generating device 1 as the vacuum generator 11 , the cost of the constant pressure vacuum pumping system in the embodiment of the present application can be reduced.

[0041] On this basis, refer to Figure 1 The vacuum generator 11 further includes a positive-pressure gas inlet pipe 111 , and the positive-pressure gas inlet pipe 111 is provided with an air intake control valve 112 .

[0042] It should be noted that, in the embodiment of the present application, the air intake control valve 112 can be set as a pneumatic valve or an electric valve, and these valves are convenient for automatic control. For example, the air intake control valve 112 can be set as a solenoid valve. In this way, the opening or closing of the air intake control valve 112 can be conveniently controlled by the control system.

[0043] In addition, refer to Figure 1 The constant pressure vacuum system provided in the embodiment of the present application further includes a cleaning component 6, which includes a cleaning nozzle 61, a cleaning water pipe 62, and a cleaning control valve 63. The nozzle of the cleaning nozzle 61 is located in the vacuum box 2, the cleaning water pipe 62 is connected to the cleaning nozzle 61, and the cleaning control valve 63 is arranged on the cleaning water pipe 62. When the cleaning control valve 63 is opened, the water flow sprayed from the cleaning nozzle 61 is used to clean the inner wall of the vacuum box 2.

[0044] For example, refer to Figure 1 In the embodiment of the present application, the position where the vacuum inlet pipe 3 is connected to the vacuum box 2 can be set at the top of the vacuum box 2, and the position where the vacuum outlet pipe 4 is connected to the vacuum box 2 can also be set at the top of the vacuum box 2. At the same time, the cleaning nozzle 61 can also be installed on the top of the vacuum box 2. It should be noted that the cleaning nozzle 61 is located in the vacuum box 2, and the cleaning nozzle 61 is provided with an interface outside the vacuum box 2. The cleaning water pipe 62 is connected to the interface outside the vacuum box 2, and water can be introduced into the cleaning nozzle 61.

[0045] Illustratively, in the embodiment of the present application, the cleaning nozzle 61 may be configured as a 360° automatic rotating nozzle.

[0046] It should be noted that in the embodiment of the present application, the cleaning control valve 63 can be set to a pneumatic valve or an electric valve, which are all convenient for automatic control. For example, the cleaning control valve 63 can be set to a solenoid valve. In this way, the opening or closing of the cleaning control valve 63 can be conveniently controlled by the control system.

[0047] In this way, when the cleaning control valve 63 is opened, the water flow introduced into the cleaning nozzle 61 by the cleaning water pipe 62 can flush the inner wall of the vacuum box 2 to clean the inner wall of the vacuum box 2 .

[0048] In addition, refer to Figure 1 The constant pressure vacuum system provided in the embodiment of the present application also includes a manual drainage component 7, which includes a first drainage pipe 71 and a manual drainage valve 72. The first drainage pipe 71 is connected to the bottom of the vacuum box 2, and the manual drainage valve 72 is arranged on the first drainage pipe 71.

[0049] For example, refer to Figure 1 A section of pipe can be provided at the bottom of the vacuum box 2 to form a first drain pipe 71, and a manual valve can be provided on the first drain pipe 71 to form a manual drain valve 72. In this way, when the vacuum box 2 needs to be manually drained, the manual drain valve 72 can be opened to drain the water in the vacuum box 2.

[0050] In addition, refer to Figure 1 The constant pressure vacuum system provided in the embodiment of the present application further includes an automatic drainage component 8, which includes a liquid level measuring device 81, a second drainage pipe 82 and an automatic drainage valve 83. The liquid level measuring device 81 is provided in the vacuum box 2 and is used to measure the liquid level in the vacuum box 2. The second drainage pipe 82 is connected to the bottom of the vacuum box 2, and the automatic drainage valve 83 is provided in the second drainage pipe 82. The automatic drainage valve 83 can be opened or closed based on the liquid level in the vacuum box 2.

[0051] Exemplarily, in an embodiment of the present application, the liquid level measuring device 81 can be set as a radar level gauge, which can convert the liquid level in the vacuum box 2 into a corresponding electrical signal, and the control system can control the opening or closing of the automatic drain valve 83 according to the electrical signal.

[0052] Specifically, a high liquid level threshold and a low liquid level threshold may be set, and when the liquid level in the vacuum box 2 reaches the high liquid level threshold, the control system can control the automatic drain valve 83 to open, and the liquid in the vacuum box 2 is discharged through the second drain pipe 82. When the liquid level in the vacuum box 2 gradually decreases to the low liquid level threshold, the control system can control the automatic drain valve 83 to close.

[0053] Through the above arrangement, the liquid in the vacuum box 2 can be automatically discharged according to the liquid level in the vacuum box 2, thereby improving the automation of the constant-pressure vacuum pumping system in the embodiment of the present application.

[0054] On this basis, refer to Figure 1 In some embodiments of the present application, the liquid level measuring device 81 includes an upper liquid level float switch 811 and a lower liquid level float switch 812, both of which are arranged in the vacuum box 2, and the upper liquid level float switch 811 is located above the lower liquid level float switch 812. When the liquid level in the vacuum box 2 reaches the upper liquid level float switch 811, the upper liquid level float switch 811 is actuated, and the automatic drain valve 83 is opened; when the liquid level in the vacuum box 2 reaches the lower liquid level float switch 812, the lower liquid level float switch 812 is actuated, and the automatic drain valve 83 is closed.

[0055] Specifically, when the liquid level in the vacuum box 2 gradually reaches the position of the upper liquid level float switch 811, the float of the upper liquid level float switch 811 floats up, thereby turning on the upper liquid level float switch 811, and the control system controls the automatic drain valve 83 to open, at which time the liquid in the vacuum box 2 begins to be drained. When the liquid level in the vacuum box 2 drops to the position of the lower liquid level float switch 812, the upper liquid level float switch 811 and the lower liquid level float switch 812 are both disconnected, and the control system controls the automatic drain valve 83 to close, at which time the liquid in the vacuum box 2 stops being drained.

[0056] On this basis, refer to Figure 1 In some embodiments of the present application, the automatic drainage assembly 8 also includes a water pump 84 , and the second drainage pipe 82 is connected between the water pump 84 and the vacuum box 2 , and the water pump 84 is used to pump out the water in the vacuum box 2 .

[0057] It should be noted that when the constant pressure vacuum system provided in the embodiment of the present application is in normal operation, the vacuum box 2 is in a vacuum state, and it may be difficult to drain the liquid in the vacuum box 2 from the second drain pipe 82 only by gravity. Therefore, a water pump 84 is provided in the second drain pipe 82, and even when the vacuum box 2 is in a vacuum state, the water pump 84 can be used to pump out the liquid in the vacuum box 2.

[0058] For example, in the embodiment of the present application, the water pump 84 can be set as an electric diaphragm pump. The electric diaphragm pump has a large suction range and can pump out the liquid in the vacuum box 2 even when the vacuum box 2 is in a vacuum state.

[0059] On this basis, in the embodiment of the present application, the cleaning control valve 63, the upper liquid level float switch 811 and the lower liquid level float switch 812 can also be interlocked. Specifically, when the liquid level in the vacuum box 2 is lower than the lower liquid level switch, the cleaning control valve 63 is opened; when the liquid level in the vacuum box 2 reaches the lower liquid level float switch 812, the cleaning control valve 63 is closed.

[0060] Thus, through the above arrangement, it is equivalent to sending a flushing signal at the moment when the lower liquid level float switch 812 is disconnected. At this time, the cleaning control valve 63 is opened, and the water in the cleaning water pipe 62 flows into the cleaning nozzle 61 to clean the inner wall of the vacuum box 2. When the liquid level in the vacuum box 2 reaches the lower liquid level float switch 812, the lower liquid level float switch 812 is closed. At this time, the cleaning control valve 63 is closed, and the cleaning of the inner wall of the vacuum box 2 is stopped.

[0061] It should be noted that, refer to Figure 1 The constant pressure vacuum system provided in the embodiment of the present application also includes a hanging plate, and the above-mentioned vacuum generating device 1, vacuum box 2, vacuum proportional valve 5, water pump 84 and drying filter 9 can be fixed on the hanging plate.

[0062] It should be understood that "one embodiment" or "an embodiment" mentioned throughout the specification means that specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present application. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. It should be understood that in various embodiments of the present application, the size of the serial number of each step / process mentioned above does not mean the order of execution, and the execution order of each step / process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application. The serial numbers of the embodiments of the present application mentioned above are for description only and do not represent the advantages and disadvantages of the embodiments.

[0063] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0064] The above are only implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered by the protection scope of the present application.

Claims

1. A constant pressure vacuum system, characterized in that: Used to provide vacuum to the vacuum chuck of the micro jet laser processing equipment, the constant pressure vacuum pumping system comprises: Vacuum generating device; Vacuum box; A vacuum inlet pipe, one end of which is connected to the vacuum box, and the other end of which is connected to the vacuum suction cup; A vacuum outlet pipe is connected between the vacuum box and the vacuum generating device, and the vacuum generating device extracts gas from the vacuum suction cup through the vacuum outlet pipe, the vacuum box and the vacuum inlet pipe; A vacuum proportional valve is arranged on the vacuum outlet pipe, and the vacuum proportional valve can adjust the opening according to the vacuum degree of the vacuum outlet pipe to make the vacuum suction force at the vacuum suction cup constant.

2. The constant pressure vacuum system according to claim 1, characterized in that: The vacuum outlet pipe is further provided with a drying filter, and the drying filter is arranged between the vacuum proportional valve and the vacuum box.

3. The constant pressure vacuum system according to claim 1, characterized in that: The vacuum generating device is a vacuum generator, and the vacuum generator is provided with a gas outlet, a positive pressure gas inlet and a vacuum inlet, and the vacuum outlet pipe is connected to the vacuum inlet.

4. The constant pressure vacuum system according to claim 3, characterized in that: The vacuum generator further comprises a positive-pressure gas inlet pipe, and the positive-pressure gas inlet pipe is provided with an air intake control valve.

5. The constant pressure vacuum system according to claim 1, characterized in that: The constant pressure vacuum system also includes a cleaning component, which includes a cleaning nozzle, a cleaning water pipe and a cleaning control valve. The nozzle of the cleaning nozzle is located in the vacuum box, the cleaning water pipe is connected to the cleaning nozzle, and the cleaning control valve is arranged on the cleaning water pipe.

6. The constant pressure vacuum system according to claim 1, characterized in that: The constant pressure vacuum system further comprises a manual drainage assembly, wherein the manual drainage assembly comprises a first drainage pipe and a manual drainage valve; The first drain pipe is connected to the bottom of the vacuum box, and the manual drain valve is arranged on the first drain pipe.

7. The constant pressure vacuum system according to claim 1, characterized in that: The constant pressure vacuum system further comprises an automatic drainage assembly, the automatic drainage assembly comprising a liquid level measuring device, a second drainage pipe and an automatic drainage valve, the liquid level measuring device being arranged in the vacuum box and used to measure the liquid level in the vacuum box; The second drain pipe is connected to the bottom of the vacuum box, and the automatic drain valve is arranged on the second drain pipe. The automatic drain valve can be opened or closed based on the liquid level in the vacuum box.

8. The constant pressure vacuum system according to claim 7, characterized in that: The liquid level measuring device comprises an upper liquid level float switch and a lower liquid level float switch, both of which are arranged in the vacuum box, and the upper liquid level float switch is located above the lower liquid level float switch.

9. The constant pressure vacuum system according to claim 8, characterized in that: The automatic drainage assembly also includes a water pump, the second drainage pipe is connected between the water pump and the vacuum box, and the water pump is used to pump water out of the vacuum box.

10. The constant pressure vacuum system according to claim 8, characterized in that: The constant-pressure vacuum system also includes a cleaning component, which includes a cleaning nozzle, a cleaning water pipe and a cleaning control valve. The cleaning nozzle is located in the vacuum box, the cleaning water pipe is connected to the cleaning nozzle, and the cleaning control valve is arranged on the cleaning water pipe; when the cleaning control valve is opened, the water flow sprayed from the cleaning nozzle is used to clean the inner wall of the vacuum box.

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