Silicon wafer surface dirt detection device
By designing a multi-point integrated detection structure and a sealed detection design, the silicon wafer surface contamination detection device solves the problems of low efficiency and dust accumulation of traditional detection methods, and achieves efficient and accurate surface contamination detection.
Patent Information
- Application Number
- CN202420922623.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2034-04-30
AI Technical Summary
Traditional silicon wafer surface detection methods are inefficient, and the exposed detection structure is prone to accumulation of dust, affecting detection accuracy.
A silicon wafer surface contamination detection device is designed, which adopts a multi-point integrated detection structure and a sealed detection design. It places the silicon wafer horizontally and uses an adjusting cylinder and a moving top block to achieve sealing detection. It is combined with a scanner to detect surface contamination. detection.
It achieves efficient, accurate and rapid detection of dirt on the silicon wafer surface, avoids dust accumulation, and improves detection efficiency and accuracy.
Smart Images
Figure CN222379606U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon chips, in particular to a device for detecting dirt on the surface of a silicon chip. Background Art
[0002] 160,000 transistors can be integrated on a silicon wafer as small as a grain of rice, which is another milestone in the progress of science and technology. The silicon element, which accounts for 25.8% of the earth's crust, provides an inexhaustible source for the production of single-crystal silicon. Since silicon is one of the most abundant elements in the earth's crust, for products such as solar cells that are destined to enter the large-scale market, the advantage of reserves is also one of the reasons why silicon has become the main material for photovoltaics.
[0003] When performing surface inspection on current silicon wafers, the traditional method is to place a single silicon wafer on the equipment, and then use a scanning body to scan the silicon wafer below. This makes it impossible to improve the efficiency of the inspection process due to the loading and unloading operations of a single wafer, which is not conducive to the current use of silicon wafer inspection. In addition, the exposed inspection structure will cause dust to form on the surface of the silicon wafer. Utility Model Content
[0004] The purpose of the utility model is to provide a silicon wafer surface dirt detection device to solve the problem raised in the above background technology that when performing surface detection processing on current silicon wafers, a single silicon wafer is traditionally placed on the equipment, and then a scanning body is used to scan the silicon wafer below, so that the loading and unloading operation of a single piece makes it impossible to improve the detection efficiency, which is not conducive to the current silicon wafer detection and use, and the exposed detection structure causes dust to form on the surface of the silicon wafer.
[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0006] A silicon wafer surface dirt detection device comprises a supporting bottom box, the bottom surface of the supporting bottom box is evenly connected to a bottom pad, one side of the supporting bottom box is horizontally provided with a side through groove, the inner side of the side through groove is horizontally plugged with a storage drawer, one side of the supporting bottom box is evenly fixedly connected with a control panel, the top surface of the supporting bottom box is horizontally fixedly connected with a receiving bottom plate, one side of the supporting bottom box is vertically fixedly provided with a vertical pole, one side of the vertical pole is horizontally fixedly provided with a side fixing block, the side fixing block is horizontally welded with a movable top block at one end away from the vertical pole, the bottom surface of the movable top block is provided with a sealing strip, and one side of the movable top block is evenly connected with The matching panel is that the bottom surface of the supporting bottom box is evenly provided with bottom screw holes, the top surface of the bottom pad is fixedly inserted with a connecting screw, the inner side edge of the supporting bottom box is evenly fixed with a receiver, the two side edges of the storage drawer are symmetrically fixed with limit side blocks, the inner side wall of the control panel is fixedly clamped with a control mainboard, the inner side edge of the vertical upright is vertically fixed with an adjusting cylinder, the bottom surface of the movable top block is provided with a bottom clamping groove, the top surface of the sealing strip is fixedly provided with a clamping strip, the inner side edge of the movable top block is horizontally and evenly clamped with a scanning bottom plate, the top surface of the scanning bottom plate is fixedly provided with a scanner, and the inner side wall of the matching panel is fixedly clamped with a matching mainboard.
[0007] As a preferred embodiment of the present utility model: there are four bottom pads, and the top surfaces of the four bottom pads are all correspondingly connected to the bottom opening end of the bottom screw hole, the side through groove is horizontally opened on the side center line of the supporting bottom box near the bottom end, and the top surface of the storage drawer is opened.
[0008] As a preferred embodiment of the present utility model: there are multiple control panels, and the multiple control panels are horizontally arranged in a straight line at equal distances from each other and are arranged on one side of the supporting bottom box near the top surface, the interior of the control panel is electrically connected to the control main board, and the receiving bottom plate is arranged in a straight line at equal distances from each other and is arranged on the center line of the top surface of the supporting bottom box.
[0009] As a preferred embodiment of the present invention: the side edge of the bottom end of the vertical upright is vertically fixed at the top position of the side center line of the supporting bottom box, one end of the side fixed block is fixed at the top position of the side of the vertical upright, and the other end is horizontally fixed at the center position of one side of the movable top block, and the movable top block and the top surface of the supporting bottom box are arranged in parallel with each other in a superimposed manner.
[0010] As a preferred embodiment of the present utility model: the top surface of the sealing strip is arranged at the bottom opening end of the bottom clamping groove, the mating panel and the mating main board maintain electrical connection with each other, the bottom screw holes are all correspondingly opened on the bottom surface of the supporting bottom box near the four corners, the top end of the connecting screw is fixedly connected to the inner side of the bottom screw hole corresponding to the thread, the top end of the receiver is all electrically connected to the center position of the bottom surface of the receiving bottom plate, and the limiting side block is clamped at the inner groove position of the side through groove.
[0011] As a preferred embodiment of the utility model: the bottom clamping groove is opened on the bottom surface of the movable top block near the edge, the clamping strip is clamped on the inner side of the bottom clamping groove, and the output ends of the scanner are electrically connected to the top surface of the scanning bottom plate.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] The utility model places silicon wafers horizontally on the top surface positions of multiple receiving bottom plates, and after the control panel is set, the control main board controls the contraction movement of the output end of the regulating cylinder, so that the vertical upright rod is pulled to perform vertical contraction movement on the side of the supporting bottom box, and the movable top block at the top is buckled downwardly and arranged on the top surface position of the supporting bottom box, and the sealing strip on the bottom is buckled and arranged on the edge position of the top surface of the supporting bottom box to seal, and after the matching panel is controlled, the matching main board controls the internal scanner to start processing, so that the scanning bottom plate emits light to the silicon wafer below, the receiving bottom plate at the bottom receives the light, and the receiver at the bottom receives the light, and finally the corresponding control main board processes the internal receiving data of the receiver, so that the placed silicon wafer can be scanned to detect the dirt on the surface, and the auxiliary tools can be placed in the storage drawer for collection operation. The multi-point integrated detection structure is adopted, so that a large number of fast and efficient detection can be used, and the buckled sealed detection structure makes the detection more accurate and efficient. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:
[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of a silicon wafer surface dirt detection device;
[0016] Figure 2 It is a structural schematic diagram of the front view cross-section connection details of a support bottom box of a silicon wafer surface dirt detection device;
[0017] Figure 3 It is a structural schematic diagram of the side view cross-section connection details of a support bottom box of a silicon wafer surface dirt detection device;
[0018] Figure 4 It is a structural schematic diagram of the side view cross-section connection details of the vertical pole of a silicon wafer surface dirt detection device;
[0019] Figure 5 The present invention is a structural schematic diagram showing the side view and cross-sectional connection details of a movable top block of a silicon wafer surface dirt detection device.
[0020] In the figure: 1. Support bottom box; 2. Bottom pad; 3. Side through groove; 4. Storage drawer; 5. Control panel; 6. Receiving bottom plate; 7. Vertical pole; 8. Side fixing block; 9. Moving top block; 10. Sealing strip; 11. Matching panel; 12. Bottom screw hole; 13. Connecting screw; 14. Receiver; 15. Limiting side block; 16. Control main board; 17. Adjustment cylinder; 18. Bottom snap-in groove; 19. Clip-in strip; 20. Scanning bottom plate; 21. Scanner; 22. Matching main board. DETAILED DESCRIPTION
[0021] See also Figure 1 In an embodiment of the utility model, a silicon wafer surface dirt detection device comprises a supporting bottom box 1, the bottom surface of the supporting bottom box 1 is evenly connected with a bottom pad 2, a side edge of the supporting bottom box 1 is horizontally provided with a side through groove 3, and a storage drawer 4 is horizontally inserted into the inner side edge of the side through groove 3. There are four bottom pads 2, and the top surfaces of the four bottom pads 2 are all correspondingly connected and connected to the bottom opening end of the bottom screw hole 12, the side through groove 3 is horizontally opened at the side center line of the supporting bottom box 1 near the bottom end, the top surface of the storage drawer 4 is open, one side edge of the supporting bottom box 1 is evenly fixed with a control panel 5, and the top surface of the supporting bottom box 1 is horizontally fixed with a receiving bottom plate 6, there are multiple control panels 5, and the multiple control panels 5 are equidistant from each other and are horizontally arranged in a straight line at a position near the top surface of one side edge of the supporting bottom box 1, and the control panel 5 The interior of the control main board 16 is electrically connected to each other, the receiving bottom plate 6 is arranged in a straight line and equidistantly at a position on the top center line of the supporting bottom box 1, a vertical upright rod 7 is vertically fixed on one side of the supporting bottom box 1, a side fixed block 8 is horizontally fixed on one side of the vertical upright rod 7, a movable top block 9 is horizontally welded to the end of the side fixed block 8 away from the vertical upright rod 7, the bottom side of the vertical upright rod 7 is vertically fixed at the top position of the side center line of the supporting bottom box 1, one end of the side fixed block 8 is fixed at the top position of the side of the vertical upright rod 7, and the other end is horizontally fixed at the center position of one side of the movable top block 9, the movable top block 9 and the top surface of the supporting bottom box 1 are arranged in parallel with each other in a superimposed manner, the bottom surface of the movable top block 9 is provided with a sealing strip 10, and a matching panel 11 is evenly clamped on one side of the movable top block 9;
[0022] See also Figure 2-5In the embodiment of the utility model, a silicon wafer surface dirt detection device is provided, wherein the bottom surface of the supporting bottom box 1 is evenly provided with bottom screw holes 12, the top surface of the bottom pad 2 is fixedly plugged with a connecting screw 13, the inner side edge of the supporting bottom box 1 is evenly fixedly provided with a receiver 14, and the two sides of the storage drawer 4 are symmetrically fixedly provided with a limited side block 15, the top surface of the sealing strip 10 is butt-connected to the bottom opening end of the bottom clamping groove 18, the matching panel 11 and the matching main board 22 are electrically connected to each other, the bottom screw holes 12 are evenly and one-to-one correspondingly opened at the bottom surface of the supporting bottom box 1 near the four corners, the top end of the connecting screw 13 is fixedly connected with the inner side edge of the bottom screw hole 12, and the top end of the receiver 14 is evenly and one-to-one correspondingly electrically connected to the center position of the bottom surface of the receiving bottom plate 6. The limiting side block 15 is clamped and set at the inner groove position of the side through groove 3, the inner wall of the control panel 5 is fixedly clamped with a control main board 16, the inner side edge of the vertical upright 7 is vertically fixedly set with an adjusting cylinder 17, the bottom surface of the movable top block 9 is provided with a bottom clamping groove 18, the top surface of the sealing strip 10 is fixedly provided with a clamping strip 19, the inner side edge of the movable top block 9 is horizontally and evenly clamped with a scanning base plate 20, the top surface of the scanning base plate 20 is fixedly provided with a scanner 21, the bottom clamping groove 18 is opened at the bottom surface of the movable top block 9 near the edge position, the clamping strip 19 is clamped and set at the inner side edge of the bottom clamping groove 18, the output ends of the scanner 21 are all correspondingly electrically connected and set at the top surface position of the scanning base plate 20, and the inner wall of the matching panel 11 is fixedly clamped with a matching main board 22.
[0023] The working principle of the utility model is:
[0024] After placing the silicon wafer horizontally on the top surface position of multiple receiving base plates 6, after setting the control panel 5, the control main board 16 controls the contraction movement of the output end of the regulating cylinder 17, so that the vertical rod 7 is pulled to perform vertical contraction movement on the side of the supporting base box 1, so that the movable top block 9 at the top is buckled downwardly and set on the top surface position of the supporting base box 1, and the sealing strip 10 on the bottom is buckled and set on the edge position of the top surface of the supporting base box 1 to seal, and after controlling the matching panel 11, the matching main board 22 controls the internal scanner 21 to start processing, so that the scanning base plate 20 emits light to the silicon wafer below, the receiving base plate 6 at the bottom receives and processes the light, and the receiver 14 at the bottom receives and processes the light, and finally the corresponding control main board 16 processes the internal receiving data of the receiver 14, and then the placed silicon wafer can be scanned to detect the dirt on the surface, and at the same time, auxiliary tools can be placed in the storage drawer 4 for collection operations.
[0025] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A silicon wafer surface dirt detection device, comprising a supporting bottom box (1), characterized in that: The bottom surface of the supporting bottom box (1) is evenly connected with a bottom pad (2); a side through groove (3) is horizontally opened on one side of the supporting bottom box (1); a storage drawer (4) is horizontally inserted into the inner side of the side through groove (3); a control panel (5) is evenly fixedly connected to one side of the supporting bottom box (1); a receiving bottom plate (6) is horizontally fixedly connected to the top surface of the supporting bottom box (1); a vertical upright rod (7) is vertically fixedly arranged on one side of the supporting bottom box (1); a side fixed block (8) is horizontally fixedly arranged on one side of the vertical upright rod (7); a movable top block (9) is horizontally welded to one end of the side fixed block (8) away from the vertical upright rod (7); a sealing strip (10) is arranged on the bottom surface of the movable top block (9); a matching panel (11) is evenly connected to one side of the movable top block (9); the bottom surface of the supporting bottom box (1) is The bottom screw holes (12) are evenly provided, the top surface of the bottom pad (2) is fixedly plugged with a connecting screw (13), the inner side edge of the supporting bottom box (1) is evenly fixedly provided with a receiver (14), the two side edges of the storage drawer (4) are symmetrically fixedly provided with limit side blocks (15), the inner side wall of the control panel (5) is fixedly connected with a control mainboard (16), the inner side edge of the vertical upright rod (7) is vertically fixedly provided with an adjusting cylinder (17), the bottom surface of the movable top block (9) is provided with a bottom clamping groove (18), the top surface of the sealing strip (10) is fixedly provided with a clamping strip (19), the inner side edge of the movable top block (9) is horizontally and evenly clamped with a scanning bottom plate (20), the top surface of the scanning bottom plate (20) is fixedly provided with a scanner (21), and the inner side wall of the matching panel (11) is fixedly connected with a matching mainboard (22).
2. A silicon wafer surface contamination detection device according to claim 1, characterized in that: The number of the bottom pads (2) is four, and the top surfaces of the four bottom pads (2) are all correspondingly arranged at the bottom open end of the bottom screw hole (12), the side through groove (3) is horizontally opened at the side center line of the supporting bottom box (1) close to the bottom end, and the top surface of the storage drawer (4) is arranged in an open shape.
3. The silicon wafer surface contamination detection device according to claim 1, characterized in that: The control panels (5) are multiple in number, and the multiple control panels (5) are arranged horizontally in a straight line at equal distances from each other and are arranged on one side of the supporting bottom box (1) near the top surface; the interior of the control panel (5) and the control main board (16) are electrically connected to each other, and the receiving bottom plate (6) is arranged in a straight line at equal distances from each other and is arranged at the center line of the top surface of the supporting bottom box (1).
4. The silicon wafer surface contamination detection device according to claim 1, characterized in that: The bottom side of the vertical upright rod (7) is vertically fixedly arranged at the top position of the center line of the side of the supporting bottom box (1); one end of the side fixed block (8) is fixedly arranged at the top position of the side of the vertical upright rod (7), and the other end is horizontally fixedly arranged at the center position of one side of the movable top block (9); the movable top block (9) and the top surface of the supporting bottom box (1) are arranged in a superimposed parallel manner.
5. The silicon wafer surface contamination detection device according to claim 1, characterized in that: The top surface of the sealing strip (10) is arranged in abutment with the bottom opening end of the bottom snap-in groove (18), the mating panel (11) and the mating main board (22) are electrically connected to each other, the bottom screw holes (12) are all correspondingly opened on the bottom surface of the supporting bottom box (1) near the four corners, the top end of the connecting screw (13) is correspondingly threadedly fixedly connected to the inner side edge of the bottom screw hole (12), the top end of the receiver (14) is all correspondingly electrically connected to the center position of the bottom surface of the receiving bottom plate (6), and the limiting side block (15) is snap-fitted to the inner groove position of the side through groove (3).
6. The silicon wafer surface contamination detection device according to claim 1, characterized in that: The bottom clamping groove (18) is provided on the bottom surface of the movable top block (9) near the edge, the clamping strip (19) is clamped and arranged on the inner side of the bottom clamping groove (18), and the output ends of the scanner (21) are all electrically connected and arranged on the top surface of the scanning bottom plate (20).