Boat body
By attaching a film on the boat body to seal the through hole of the boat plug, the problems of process gas leakage and uneven oxide layer in ALD technology are solved, and the performance and production efficiency of photovoltaic cells are improved.
Patent Information
- Application Number
- CN202421175540.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-27
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2034-05-27
AI Technical Summary
When using ALD technology to plate the surface of the photovoltaic cell, the boat plug structure on the boat body leads to leakage of process gas, waste of process gas, and leads to uneven formation of the oxide layer, affecting the EL index of the cell.
Design a boat body, including a shell, a boat plug and a rubber membrane. The adhesive film covers the through hole of the boat plug and seals the through hole through the adhesive film to prevent process gas from leaking out.
It effectively reduces the leakage of process gas, prevents uneven formation of oxide layers, improves the EL index of the cell, improves the use efficiency of the process gas, and reduces the production cost of the cell.
Smart Images

Figure CN222380559U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the technical field of photovoltaic cell production equipment, and in particular, relates to a boat body. Background Art
[0002] With the development of technology and the increasing demand for renewable energy, photovoltaic cells are becoming more and more widely used. Photovoltaic cells include solar cells. During the process of making solar cells, ALD technology is used to coat the surface of the solar cells with an oxide layer to improve the performance of the solar cells.
[0003] When using ALD technology to plate an oxide layer on the surface of the battery cell, the battery cell is placed in a boat, and then the boat containing the battery cell is placed in a reactor and process gas is introduced. After the process gas enters the reactor, it reacts on the surface of the battery cell and forms an oxide layer.
[0004] However, the structure of the boat plug on the boat body may cause the process gas to leak out, thereby wasting the process gas. The leakage of the process gas may also cause the oxide layer to form unevenly, thereby affecting the EL index of the battery cell. Utility Model Content
[0005] The embodiments of the present application provide a boat body to solve or alleviate one or more technical problems in the prior art.
[0006] As one aspect of an embodiment of the present application, an embodiment of the present application provides a boat for use in an ALD reactor, the boat comprising:
[0007] A housing having a housing for housing a battery cell;
[0008] A boat plug, wherein the boat plug is provided with a through hole and a fixing hole, the through hole is communicated with the accommodating cavity of the shell, and the fixing hole is used for a fixing member to pass through so as to fix the boat plug to the shell;
[0009] The adhesive film is adhered to the shell and covers the boat plug.
[0010] Optionally, the thickness of the adhesive film ranges from 0.08 to 0.25 mm.
[0011] Optionally, the tensile strength of the adhesive film ranges from 300N to 950N / 100mm.
[0012] Optionally, the temperature resistance range of the adhesive film is 250-300°C.
[0013] Optionally, the adhesive film has an adhesive strength ranging from 20N to 58N / 100mm.
[0014] Optionally, the housing comprises a first side wall and a second side wall that are opposite to each other;
[0015] Wherein, a plurality of the boat plugs are respectively arranged on the first side wall and the second side wall and are spaced apart from each other.
[0016] Optionally, the adhesive film includes a plurality of block adhesive films, the number of the block adhesive films is set corresponding to the number of the boat plugs, and one block adhesive film covers one boat plug.
[0017] Optionally, the adhesive film includes a strip adhesive film, and the strip adhesive film covers a plurality of boat plugs.
[0018] Optionally, the material of the adhesive film includes Teflon.
[0019] Optionally, the material of the adhesive film includes polyetheretherketone.
[0020] In the embodiment of the present application, a film is attached to the outer wall of the boat body, and the through hole of the boat plug is closed by the film, which alleviates the leakage of process gas in the boat body, thereby alleviating the problem of uneven oxide layer formation and avoiding the problem of affecting the EL index of the battery cell. In addition, reducing the leakage of process gas in the boat body can also correspondingly improve the use efficiency of process gas and reduce the production cost of the battery cell.
[0021] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.
[0023] Figure 1 Intended release of process gas;
[0024] Figure 2 A schematic diagram of the structure of a boat body according to an embodiment of the present application;
[0025] Figure 3 for Figure 2 A schematic diagram of the partially enlarged structure at center A;
[0026] Figure 4 A schematic diagram of a structure of gluing an adhesive film to a boat body according to an embodiment of the present application;
[0027] Figure 5 Another schematic diagram of the structure of the boat body with adhesive film according to the embodiment of the present application;
[0028] Figure 6 It is another structural schematic diagram of the adhesive film adhered to the boat body of the embodiment of the present application;
[0029] Description of reference numerals:
[0030] Shell 10; boat plug 20; through hole 21; fixing hole 23; block film 31; strip film 33. DETAILED DESCRIPTION
[0031] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings. In the accompanying drawings, for clarity, the sizes of layers, regions, elements and their relative sizes may be exaggerated. The same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0032] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present disclosure, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not mean that the present disclosure necessarily has the first element, component, region, layer or part.
[0033] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0034] The following provides an explanation of the terms used in this application.
[0035] ALD (Atomic Layer Deposition) is used to improve the performance and stability of solar cells. ALD can be used to deposit a very thin atomic layer on the surface of photovoltaic cell materials to change their surface properties, thereby improving the material's light absorption, light scattering and charge transfer properties, and improving the efficiency of photovoltaic cells.
[0036] EL (Electroluminescence), EL testing is a non-destructive test method for photovoltaic cell research and development and quality control, which can provide important information about cell performance and structure. EL indicators can be used to evaluate whether the photoluminescence on the surface of photovoltaic cells is uniform, detect defects in cells, etc.
[0037] To facilitate those skilled in the art to understand the technical solutions provided in the embodiments of the present application, the relevant technologies are described below:
[0038] The inventors have learned that in the process of manufacturing photovoltaic cells, the ALD technology can be used to plate an oxide layer on the surface of the cell to improve the performance of the cell. When the ALD technology is used to plate an oxide layer on the surface of the cell, the cell is placed in a boat, and then the boat containing the cell is placed in a reactor and a process gas is introduced. After the process gas enters the reactor, it reacts on the surface of the cell and forms an oxide layer.
[0039] like Figure 1 As shown, however, the structure of the boat plug on the boat body may cause the process gas to leak out, thereby wasting the process gas. The process gas leakage may also cause the oxide layer to form unevenly, thereby affecting the EL index of the battery cell.
[0040] Based on the above questions, please refer to Figures 2 to 6 The present application embodiment provides a boat body for use in an ALD reactor, the boat body comprising: a shell 10, a boat plug 20, and a film. Among them:
[0041] The housing 10 has a receiving cavity for receiving the battery cell.
[0042] The boat plug 20 is provided with a through hole 21 and a fixing hole 23 . The through hole 21 is communicated with the accommodating cavity of the shell 10 . The fixing hole 23 is used for a fixing member to pass through so as to fix the boat plug 20 to the shell 10 .
[0043] The adhesive film is adhered to the housing 10 and covers the boat plug 20 .
[0044] In the embodiment of the present application, a film is attached to the outer wall of the boat body, and the through hole 21 of the boat plug 20 is closed by the film, which alleviates the leakage of process gas in the boat body, thereby alleviating the problem of uneven oxide layer formation and avoiding the problem of affecting the EL index of the battery cell. In addition, reducing the leakage of process gas in the boat body can also correspondingly improve the use efficiency of process gas and reduce the production cost of the battery cell.
[0045] In some embodiments, a plurality of through holes 21 are provided on the boat plug 20 , and the adhesive film can fully cover the boat plug 20 to block all the through holes 21 , or cover part of the boat plug 20 and only block part of the through holes 21 according to specific needs.
[0046] In some embodiments, the boat plug 21 is T-shaped.
[0047] In some embodiments, the boat body further comprises a connecting portion, which uses nuts to fix the boat plug to the outer wall of the aluminum boat. Specifically, the hexagonal nuts are evenly distributed on the upper and lower sides of the T-shaped boat plug.
[0048] For ease of understanding, the process of coating alumina on a cell is described below by way of example.
[0049] The boat body is provided with a slot for inserting the battery cell. After the battery cell is inserted into the boat body, the boat body is pushed into the tubular ALD reactor equipment to deposit an aluminum oxide film on the surface of the battery cell. The boat body can be made of aluminum.
[0050] During the deposition of aluminum oxide film, the first process gas is introduced, which reacts with the active sites on the surface of the cell to form a single atomic layer. This process is self-limiting, that is, once all active sites on the surface of the cell are occupied, the reaction stops.
[0051] The cell is purged once, and may be flushed with an inert gas (such as nitrogen or argon) to remove unreacted precursors and other byproducts in the reaction chamber. It is understood that this step is optional.
[0052] A second process gas is introduced to react with the previous monoatomic layer to produce an oxide layer that is adsorbed on the cell.
[0053] The first process gas may be trimethylaluminum (TMA), which is adsorbed on the cell to form a monomolecular layer of aluminum. The second process gas may be pure water / water vapor, which reacts with the monoatomic layer formed by the first process gas to form aluminum oxide on the cell and release methane (CH4) as a byproduct.
[0054] In some embodiments, the first process gas may also be other components, such as triethylaluminum (TEA) and dimethylaluminum chloride (DMAC).
[0055] When the boat in this embodiment is used to accommodate the cell and the oxide layer is plated by ALD technology, the outer wall of the boat is affixed with a film that closes the through hole 21 of the boat plug 20, which reduces the leakage of the first process gas and the second process gas, alleviates the problem of uneven oxide layer formation, and avoids the problem of affecting the EL index of the cell. At the same time, the overall use efficiency of the process gas is also improved.
[0056] In an optional embodiment, the thickness of the adhesive film ranges from 0.08 to 0.25 mm.
[0057] The adhesive film has a thickness within this range, which can ensure that the adhesive film has sufficient physical strength to seal the through hole 21 of the boat plug 20.
[0058] From the perspective of cost, the thickness of the adhesive film is preferably 0.1 mm. It should be noted that the thickness of the adhesive film can also be adjusted according to actual conditions.
[0059] In an optional embodiment, the tensile strength of the adhesive film ranges from 300N to 950N / 100mm.
[0060] The film can be processed by increasing thickness, modifying materials, compounding materials, etc. to achieve a tensile strength of 300N to 950N / 100mm. The tensile strength of the film can also be adjusted according to actual conditions.
[0061] For example, glass fiber, carbon fiber or other reinforcing materials can be added to the film to increase the tensile strength of the material. The surface of the film can also be treated, such as chemical etching or plasma treatment, to change the surface properties of the film, increase its bonding strength with other materials, and indirectly improve its overall tensile strength.
[0062] In some embodiments, the material of the adhesive film may include Teflon. The tensile strength of the Teflon adhesive film can be adjusted by changing the length and cross-linking density of the polymer chain. The longer the molecular chain, the higher the tensile strength of the material.
[0063] In an optional embodiment, the temperature resistance range of the adhesive film is 250-300°C.
[0064] In order to avoid damage to the adhesive film due to excessively high temperature during the process of plating the oxide layer of the battery cell, the temperature resistance range of the adhesive film in this embodiment is 250-300° C. The adhesive film with a temperature resistance range of 250-300° C. can withstand the temperature when plating the oxide layer on the surface of the battery cell, reducing the possibility of the adhesive film falling off or cracking.
[0065] The adhesive film may be treated by adding heat-resistant additives or the like so as to allow the adhesive film to reach the above-mentioned temperature resistance range.
[0066] For example, high temperature resistant materials such as silicone, graphite, ceramic particles, etc. can be added to the film to improve the thermal stability of the film. Chemical or radiation cross-linking treatment can also be used to improve the bonding between polymer chains and improve the thermal stability of the film.
[0067] In an optional embodiment, the adhesive film has an adhesive strength ranging from 20N to 58N / 100mm.
[0068] During the production of the battery cell, the boat body will experience temperature changes or mechanical operations. The adhesion strength of the above-mentioned adhesive film can ensure that it will not fall off or slip during the production of the battery cell, thereby ensuring continuous and stable operation. It should be noted that the adhesion strength range of the adhesive film can also be adjusted according to actual conditions.
[0069] The adhesive film can achieve the above-mentioned adhesion strength by adjusting the ratio of additives or surface treatment.
[0070] For example, chemical etching, plasma treatment or flame treatment can be performed on the film. Such treatments can create a fine rough structure on the surface of the film and introduce functional groups to improve the adhesion ability of the film.
[0071] In other embodiments, when the adhesive film needs to be removed or replaced, the adhesive film can be directly torn off. The adhesive strength of the adhesive film within the above range makes it difficult to generate residue when the adhesive film is removed, thereby simplifying the maintenance and cleaning process.
[0072] In an optional embodiment, the housing 10 includes a first side wall and a second side wall that are opposite to each other;
[0073] Wherein, a plurality of the boat plugs 20 are disposed on the first side wall and the second side wall respectively and are spaced apart from each other.
[0074] Based on this, see Figure 5 The adhesive film includes a plurality of block adhesive films 31 , the number of the block adhesive films 31 is set corresponding to the number of the boat plugs 20 , and one block adhesive film 31 covers one boat plug 20 .
[0075] Each block of adhesive film 31 blocks a boat plug 20 separately, which can be more flexible when maintaining or replacing the block of adhesive film 31. If one area needs to be repaired or replaced, only the block of adhesive film 31 needs to be processed without affecting other parts. In addition, the block design of the adhesive film can reduce the stress area of the block of adhesive film 31, thereby improving the durability of the adhesive film. This helps to slow down the degradation process of the adhesive film caused by wear or chemical effects.
[0076] In other alternative embodiments, see Figure 6 The adhesive film includes an adhesive film strip 33 , and the adhesive film strip 33 covers a plurality of boat plugs 20 .
[0077] The strip adhesive film 33 helps to ensure uniformity and consistency of the coverage area, and the integrated design of the strip adhesive film 33 can make the operation more convenient, so that the entire strip adhesive film can be pasted or removed at one time.
[0078] In an optional embodiment, the material of the adhesive film includes Teflon.
[0079] The surface of Teflon material is not easy to adhere to impurities, particles or other substances, which can keep the film clean. In addition, Teflon has strong chemical inertness and shows good resistance to most chemical substances. This allows the Teflon film to maintain stability in the face of chemical corrosion or reaction environments. Teflon film also has good high temperature resistance, can maintain stability in high temperature environments, and can be easily adjusted to withstand temperatures above 250°C.
[0080] In an optional embodiment, the material of the adhesive film includes polyetheretherketone (PEEK).
[0081] In other embodiments, the adhesive film may also include other materials, which can achieve: a tensile strength range of 300N to 950N / 100mm; a temperature resistance range of 250 to 300°C; and an adhesion strength range of 20N to 58N / 100mm.
[0082] The other components of the boat body of the above embodiment may adopt various technical solutions known to ordinary technicians in the field now and in the future, and will not be described in detail here.
[0083] The disclosure above provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numerals and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed.
[0084] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.
Claims
1. A boat, characterized in that: Used in an ALD reactor, the boat comprises: A housing having a housing for housing a battery cell; A boat plug, wherein the boat plug is provided with a through hole and a fixing hole, the through hole is communicated with the accommodating cavity of the shell, and the fixing hole is used for a fixing member to pass through so as to fix the boat plug to the shell; The adhesive film is adhered to the shell and covers the boat plug.
2. The boat body according to claim 1, characterized in that: The thickness of the adhesive film ranges from 0.08 to 0.25 mm.
3. The boat body according to claim 1, characterized in that: The tensile strength of the adhesive film ranges from 300N to 950N / 100mm.
4. The boat body according to claim 1, characterized in that: The temperature resistance range of the adhesive film is 250-300°C.
5. The boat body according to claim 1, characterized in that: The adhesive strength of the adhesive film ranges from 20N to 58N / 100mm.
6. The boat body according to claim 1, characterized in that: The housing includes a first side wall and a second side wall that are opposite to each other; Wherein, a plurality of the boat plugs are respectively arranged on the first side wall and the second side wall and are spaced apart from each other.
7. The boat body according to claim 6, characterized in that: The adhesive film includes a plurality of adhesive films, the number of the adhesive films is set corresponding to the number of the boat plugs, and one adhesive film covers one boat plug.
8. The boat body according to claim 6, characterized in that: The adhesive film includes an adhesive film strip, and the adhesive film strip covers a plurality of boat plugs.
9. The boat according to any one of claims 1 to 8, characterized in that: The material of the adhesive film includes Teflon.
10. The boat according to any one of claims 1 to 8, characterized in that: The material of the adhesive film includes polyetheretherketone.