Novel exhaust pipeline system for single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, and discloses a novel exhaust pipeline system for a single crystal furnace, which comprises a single crystal furnace bottom, a leak hunting mechanism arranged at the bottom of the single crystal furnace bottom, a connecting mechanism arranged in the leak hunting mechanism, and the leak hunting mechanism comprises a liquid outlet assembly, a support assembly, a liquid discharge assembly and a flow measurement assembly, the liquid outlet assembly is arranged at the bottom of the single crystal furnace, the supporting assembly is arranged on the outer ring of the liquid outlet assembly, the liquid discharging assembly is arranged below the liquid outlet assembly, the flow measuring assembly is arranged on the outer sides of the liquid outlet assembly and the liquid discharging assembly, and the connecting mechanism comprises a connecting assembly and a fixing assembly. According to the novel exhaust pipeline system for the single crystal furnace, a worker can directly observe whether the readings of the upper and lower worm wheel flow meters I and the worm wheel flow meter II are consistent or not to judge whether the pipeline of the middle section is leaked or blocked or not through the arranged leak detection mechanism, so that the worker can conveniently judge; and the working efficiency of workers during pipeline maintenance is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a novel exhaust pipe system for single crystal furnaces. Background Art

[0002] As an important raw material in the photovoltaic and semiconductor fields, single crystal silicon has very high requirements for quality and purity. At present, single crystal silicon is mostly produced by single crystal furnaces using methods such as Czochralski and zone melting to produce single crystal silicon rods for further preparation. When the single crystal furnace is working, the purity and vacuum of the protective gas in the furnace chamber must be guaranteed.

[0003] According to the "A new type of exhaust pipe system for single crystal furnaces (publication number: CN 218779074U; application number: 202223021679.1)" published on the patent website, the above application is aimed at: "At present, the vacuum pump of the single crystal furnace adopts a combination of "oil pump + regulating valve" to adjust the pressure in the furnace chamber, but the oil pump is troublesome to install and replace, and the medium leaks during use, which is easy to pollute the working environment and the atmosphere in the furnace; the regulating valve has a large adjustment error, and the vacuum degree and pressure accuracy in the furnace chamber cannot be guaranteed, and boiling is easy to occur. In addition, there is a possibility that the silicon liquid overflows from the crucible during crystal induction. In order to prevent the silicon liquid from overflowing, the single crystal furnace will install a positioner on the furnace cover to measure the liquid level, but it cannot detect whether the silicon liquid in the crucible splashes out in small amounts and leaks to the exhaust pipe. "The problem has been optimized, but the pipeline system in the above application can only detect leakage when in use, and cannot detect blockage in the pipeline, which is inconvenient to use. Utility Model Content

[0004] The purpose of the utility model is to provide a novel exhaust pipe system for a single crystal furnace to solve the problems raised in the above background technology.

[0005] To achieve the above objectives, the utility model provides the following technical solutions: a novel exhaust duct system for a single crystal furnace, comprising a single crystal furnace bottom, wherein a leak detection mechanism is provided at the bottom of the single crystal furnace, and a connecting mechanism is provided inside the leak detection mechanism.

[0006] The leakage detection mechanism includes a liquid outlet component, a support component, a drain component and a flow measuring component. The liquid outlet component is arranged at the bottom of the single crystal furnace, the support component is arranged on the outer circle of the liquid outlet component, the drain component is arranged below the liquid outlet component, and the flow measuring component is arranged on the outside of the liquid outlet component and the drain component.

[0007] The connecting mechanism comprises a connecting component and a fixing component. The connecting component is arranged between the liquid outlet component and the liquid discharge component, and the fixing component is arranged on the upper and lower sides of the connecting component.

[0008] Preferably, the liquid outlet component includes a liquid outlet pipe, the liquid outlet pipe is fixedly connected to the bottom of the single crystal furnace, and a connecting spiral tube 1 is fixedly connected to the bottom of the liquid outlet pipe.

[0009] Preferably, the support assembly comprises a support collar, the support collar is sleeved on the outer ring of the liquid outlet pipe, the top of the support collar is fixedly connected to a fixing frame, and the fixing frame is fixedly connected to the bottom of the single crystal furnace.

[0010] Preferably, the drainage assembly comprises a drainage pipe, the drainage pipe is arranged below the first connecting spiral pipe, and the top of the drainage pipe is fixedly connected with the second connecting spiral pipe.

[0011] Preferably, the flow measuring component includes a worm gear flowmeter 1, which is fixedly connected to the left side of the liquid outlet pipe. A turbine flowmeter 2 is arranged below the worm gear flowmeter 1, and the turbine flowmeter 2 is fixedly connected to the right side of the liquid outlet pipe.

[0012] Preferably, the connecting assembly includes a connecting hose, which is arranged between connecting coil one and connecting coil two, and the upper and lower sides of the connecting hose are fixedly connected with sealing sleeves, which are respectively sleeved on the outer circles of connecting coil one and connecting coil two.

[0013] Preferably, the fixing assembly includes a swivel, which is rotatably connected to the outer ring of the sealing sleeve, the outer ring of the swivel is fixedly connected to a connecting arm, a threaded twist ring is fixedly connected to the top of the connecting arm, and the threaded twist rings on the upper and lower sides are respectively threadedly connected to the outer rings of connecting screw pipe one and connecting screw pipe two.

[0014] Compared with the prior art, the utility model provides a novel exhaust duct system for a single crystal furnace, which has the following beneficial effects:

[0015] 1. The new single crystal furnace exhaust pipe system has a leak detection mechanism. The staff can directly observe whether the readings of the upper and lower worm flowmeters 1 and turbine flowmeter 2 are consistent to determine whether there is a leak or blockage in the middle section of the pipe, which is convenient for the staff to make judgments and increases the work efficiency of the staff when inspecting the pipe.

[0016] 2. The new exhaust duct system for single crystal furnace has a connecting mechanism, and the staff can choose connecting hoses of different lengths according to the specific distance between the liquid outlet pipe and the drain pipe, which increases the convenience of the overall setting of the single crystal furnace, so that the upper and lower parts of the single crystal furnace can be independently designed according to the specific space, so that the fixed pipeline will not cause obstruction to it. At the same time, the staff only needs to rotate the threaded torsion ring to drive the sealing sleeves on the upper and lower sides to be sealed on the outer circle of the connecting spiral tube 1 or the connecting spiral tube 2 to complete the connection of the liquid outlet pipe and the drain pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative labor:

[0018] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0019] Figure 2 It is a front schematic diagram of the utility model;

[0020] Figure 3 It is a partial structural diagram of the leak detection mechanism;

[0021] Figure 4 It is a schematic diagram of the partial structure of the drainage component;

[0022] Figure 5 It is a schematic diagram of the structure of the connection mechanism;

[0023] Figure 6 This is an exploded view of the connecting mechanism part.

[0024] In the figure: 1. Leak detection mechanism; 11. Liquid outlet assembly; 1101. Liquid outlet pipe; 1102. Connecting screw pipe 1; 12. Support assembly; 1201. Support collar; 1202. Fixed frame; 13. Drain assembly; 1301. Drain pipe; 1302. Connecting screw pipe 2; 14. Flow measuring assembly; 1401. Worm flowmeter 1; 1402. Turbine flowmeter 2; 2. Connecting mechanism; 21. Connecting assembly; 2101. Connecting hose; 2102. Sealing sleeve; 22. Fixed assembly; 2201. Swivel; 2202. Connecting arm; 2203. Threaded twist ring; 3. Bottom of single crystal furnace. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The utility model provides a technical solution:

[0028] Embodiment 1

[0029] Combination Figures 1 to 4 A novel exhaust duct system for a single crystal furnace comprises a single crystal furnace bottom 3, a leak detection mechanism 1 is arranged at the bottom of the single crystal furnace bottom 3, and a connecting mechanism 2 is arranged inside the leak detection mechanism 1.

[0030] The leakage detection mechanism 1 includes a liquid outlet component 11, a support component 12, a drain component 13 and a flow measuring component 14. The liquid outlet component 11 is arranged at the bottom of the single crystal furnace bottom 3, the support component 12 is arranged on the outer circle of the liquid outlet component 11, the drain component 13 is arranged below the liquid outlet component 11, and the flow measuring component 14 is arranged on the outside of the liquid outlet component 11 and the drain component 13.

[0031] The liquid outlet assembly 11 includes a liquid outlet pipe 1101, the liquid outlet pipe 1101 is fixedly connected to the bottom of the single crystal furnace bottom 3, the bottom of the liquid outlet pipe 1101 is fixedly connected to a connecting spiral tube 1102, the support assembly 12 includes a support collar 1201, the support collar 1201 is sleeved on the outer ring of the liquid outlet pipe 1101, the top of the support collar 1201 is fixedly connected to a fixing frame 1202, the fixing frame 1202 is fixedly connected to the bottom of the single crystal furnace bottom 3, and the drain assembly 13 includes a support collar 1201, the support collar 1201 is sleeved on the outer ring of the liquid outlet pipe 1101, the top of the support collar 1201 is fixedly connected to a fixing frame 1202, and the fixing frame 1202 is fixedly connected to the bottom of the single crystal furnace bottom 3. The drain pipe 1301 is arranged below the connecting spiral tube 1102, and the top of the drain pipe 1301 is fixedly connected with the connecting spiral tube 2 1302, the flow measuring component 14 includes a worm gear flowmeter 1401, the worm gear flowmeter 1401 is fixedly connected to the left side of the liquid outlet pipe 1101, and a turbine flowmeter 2 1402 is arranged below the worm gear flowmeter 1401, and the turbine flowmeter 2 1402 is fixedly connected to the right side of the drain pipe 1301.

[0032] Furthermore, the staff can directly observe whether the readings of the upper and lower worm flowmeters 1401 and turbine flowmeter 2 1402 are consistent to determine whether there is a leakage or blockage in the middle section of the pipeline, which facilitates the staff to make judgments and increases the work efficiency of the staff when inspecting the pipeline.

[0033] Embodiment 2

[0034] See also Figure 1 , Figure 2 , Figure 5 and Figure 6 On the basis of the first embodiment, it is further obtained that the connecting mechanism 2 includes a connecting component 21 and a fixing component 22, the connecting component 21 is arranged between the liquid outlet component 11 and the liquid discharge component 13, and the fixing component 22 is arranged on the upper and lower sides of the connecting component 21.

[0035] The connecting component 21 includes a connecting hose 2101, which is arranged between the connecting screw tube 1 1102 and the connecting screw tube 2 1302. The connecting hose 2101 is fixedly connected with sealing sleeves 2102 on the upper and lower sides. The sealing sleeves 2102 on the upper and lower sides are respectively sleeved on the outer circles of the connecting screw tube 1 1102 and the connecting screw tube 2 1302. The fixing component 22 includes a swivel 2201, which is rotatably connected to the outer circle of the sealing sleeve 2102. The outer circle of the swivel 2201 is fixedly connected with a connecting arm 2202. A threaded twist ring 2203 is fixedly connected to the top of the connecting arm 2202. The threaded twist ring 2203 on the upper and lower sides are respectively threadedly connected to the outer circles of the connecting screw tube 1 1102 and the connecting screw tube 2 1302.

[0036] Furthermore: the staff can choose connecting hoses 2101 of different lengths according to the specific distance between the liquid outlet pipe 1101 and the drain pipe 1301, which increases the convenience of the overall setting of the single crystal furnace and allows the upper and lower parts of the single crystal furnace to be independently designed according to the specific space so that the fixed pipeline will not cause obstruction. At the same time, the staff only needs to rotate the threaded torsion ring 2203 to drive the sealing sleeves 2102 on the upper and lower sides to be sealed on the outer circle of the connecting spiral tube 1102 or the connecting spiral tube 2 1302 to complete the connection between the liquid outlet pipe 1101 and the drain pipe 1301.

[0037] In actual operation, when the device is used, the liquid in the single crystal furnace flows downward through the liquid outlet pipe 1101 and enters the liquid discharge pipe 1301 through the connecting hose 2101 to be discharged. While the liquid passes through, the worm flow meter 1 1401 and the turbine flow meter 2 1402 are respectively arranged in the liquid outlet pipe 1101 and the liquid discharge pipe 1301 to measure and display the flow rate and pressure of the flowing liquid. After that, the staff only needs to observe the indication ratio of the worm flow meter 1 1401 and the turbine flow meter 2 1402 to simply complete the understanding of the internal situation of the pipeline;

[0038] When the reading of worm flow meter 1 1401 is the same as the reading of turbine flow meter 2 1402, it can be preliminarily judged that there is no problem with the pipeline;

[0039] When the reading of the worm flowmeter 1401 is greater than the reading of the turbine flowmeter 2 1402, it can be preliminarily determined that a leak occurs in the pipeline between the worm flowmeter 1401 and the turbine flowmeter 2 1402, causing the reading of the turbine flowmeter 2 1402 to decrease.

[0040] When the reading of the worm flowmeter 1401 is smaller than that of the turbine flowmeter 2 1402, it can be preliminarily determined that a blockage has occurred in the pipeline between the worm flowmeter 1401 and the turbine flowmeter 2 1402, causing the flow velocity pressure of the liquid passing through the turbine flowmeter 2 1402 to be greater while the flow rate remains unchanged.

[0041] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

Claims

1. A novel exhaust duct system for a single crystal furnace, comprising a single crystal furnace bottom (3), characterized in that: A leak detection mechanism (1) is provided at the bottom of the single crystal furnace bottom (3), and a connection mechanism (2) is provided inside the leak detection mechanism (1); The leak detection mechanism (1) comprises a liquid outlet component (11), a support component (12), a liquid discharge component (13) and a flow measurement component (14); the liquid outlet component (11) is arranged at the bottom of the single crystal furnace bottom (3); the support component (12) is arranged at the outer ring of the liquid outlet component (11); the liquid discharge component (13) is arranged below the liquid outlet component (11); and the flow measurement component (14) is arranged outside the liquid outlet component (11) and the liquid discharge component (13); The connection mechanism (2) comprises a connection component (21) and a fixing component (22); the connection component (21) is arranged between the liquid outlet component (11) and the liquid discharge component (13); and the fixing component (22) is arranged on both upper and lower sides of the connection component (21).

2. According to claim 1, a novel exhaust duct system for a single crystal furnace is characterized in that: The liquid outlet assembly (11) comprises a liquid outlet pipe (1101), wherein the liquid outlet pipe (1101) is fixedly connected to the bottom of the single crystal furnace bottom (3), and a connecting spiral tube 1 (1102) is fixedly connected to the bottom of the liquid outlet pipe (1101).

3. The novel exhaust duct system for a single crystal furnace according to claim 1 is characterized in that: The support assembly (12) comprises a support collar (1201), the support collar (1201) being sleeved on the outer ring of the liquid outlet pipe (1101), the top of the support collar (1201) being fixedly connected to a fixing frame (1202), and the fixing frame (1202) being fixedly connected to the bottom of the single crystal furnace bottom (3).

4. The novel exhaust duct system for a single crystal furnace according to claim 1 is characterized in that: The drainage assembly (13) comprises a drainage pipe (1301), wherein the drainage pipe (1301) is arranged below the first connecting spiral pipe (1102), and the top of the drainage pipe (1301) is fixedly connected to the second connecting spiral pipe (1302).

5. The novel exhaust duct system for a single crystal furnace according to claim 1 is characterized in that: The flow measuring component (14) comprises a worm gear flowmeter 1 (1401), wherein the worm gear flowmeter 1 (1401) is fixedly connected to the left side of the liquid outlet pipe (1101), and a turbine flowmeter 2 (1402) is arranged below the worm gear flowmeter 1 (1401), and the turbine flowmeter 2 (1402) is fixedly connected to the right side of the liquid discharge pipe (1301).

6. The novel exhaust duct system for a single crystal furnace according to claim 1 is characterized in that: The connection assembly (21) comprises a connection hose (2101), wherein the connection hose (2101) is arranged between the first connection coil (1102) and the second connection coil (1302), and the upper and lower sides of the connection hose (2101) are fixedly connected with sealing sleeves (2102), and the upper and lower sealing sleeves (2102) are respectively sleeved on the outer rings of the first connection coil (1102) and the second connection coil (1302).

7. The novel exhaust duct system for a single crystal furnace according to claim 1 is characterized in that: The fixing assembly (22) comprises a rotating ring (2201), wherein the rotating ring (2201) is rotatably connected to the outer ring of the sealing sleeve (2102), the outer ring of the rotating ring (2201) is fixedly connected to a connecting arm (2202), a threaded twist ring (2203) is fixedly connected inside the top of the connecting arm (2202), and the threaded twist ring (2203) on the upper and lower sides is threadedly connected to the outer rings of the connecting screw tube 1 (1102) and the connecting screw tube 2 (1302), respectively.

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