Temperature control system of glass substrate exposure equipment

Abstract

The utility model discloses a glass substrate exposure equipment temperature control system which comprises an exposure machine main body, a temperature controller is fixedly installed at the upper end of the front surface of the exposure machine main body, a temperature sensor is fixedly installed at the middle end of the bottom of an inner cavity of the exposure machine main body, and a second heat exchange tube is fixedly connected to the right side of the exposure machine main body. And the right end of the second heat exchange pipe is fixedly connected with a cooling liquid tank. Through the arrangement of the temperature sensor, the temperature of the bottom of the glass substrate in the exposure machine main body can be monitored, and when the temperature monitored by the temperature sensor is higher than a preset value of the temperature controller, the temperature controller can respectively control the refrigerator, the air blower and the water pump to work; the cooling liquid in the cooling liquid box can be effectively cooled under the working action of the refrigerator, and the effect of cooling and temperature control on the glass substrate is achieved under the cooperation action of an air blower, a second heat exchange pipe and an air blowing pipe.

Description

Technical Field

[0001] The utility model relates to the technical field of exposure machines, in particular to a temperature control system for glass substrate exposure equipment. Background Art

[0002] An exposure machine is a device that transfers images on films and other objects to the surface of other materials by emitting long-wave rays. Its interior mainly includes a wafer stage, UV lamp, paper feeder, contact sensor, reading unit, etc. Among them, the glass plate is the basic plate material. During the overall operation, its surface often generates a higher temperature and needs to be cooled.

[0003] However, the existing glass substrate exposure equipment usually uses blowing to cool the surface of the glass substrate during use, and the overall cooling effect is poor. The glass substrate is easily seriously affected by the temperature increase and the normal operation of the whole is unable to meet the use needs of personnel. Utility Model Content

[0004] The utility model aims to provide a temperature control system for glass substrate exposure equipment, which has the advantage of good heat dissipation and cooling effect, and solves the problem that the existing glass substrate exposure equipment usually adopts a blowing method to cool the surface of the glass substrate during use, and the overall cooling effect is poor. The glass substrate is easily seriously affected by the temperature increase and the normal operation of the whole is seriously affected.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a temperature control system for glass substrate exposure equipment, comprising an exposure machine main body, a temperature controller is fixedly installed on the upper end of the front surface of the exposure machine main body, a temperature sensor is fixedly installed on the middle end of the bottom of the inner cavity of the exposure machine main body, a second heat exchange tube is fixedly connected to the right side of the exposure machine main body, a coolant tank is fixedly connected to the right end of the second heat exchange tube, a blower is fixedly installed between the top of the second heat exchange tube and the left end of the top of the outer surface of the coolant tank, a blowing pipe is fixedly installed on the output end of the blower through a pipeline, a refrigerator is fixedly installed on the lower end of the right side of the coolant tank, a water pump is fixedly installed on the lower end of the front surface of the coolant tank through a pipeline, a first heat exchange tube is fixedly installed between the output end of the water pump and the lower end of the exposure machine main body, and the right end of the first heat exchange tube is fixedly connected to the upper end of the coolant tank through a pipeline.

[0006] As a preferred solution, both ends of the right side of the refrigerator are fixedly connected with fixing rods, and a heat dissipation fan is fixedly installed between the right ends of the two fixing rods.

[0007] As a preferred solution, a filling pipe is fixedly connected to the middle end of the top of the coolant tank, and a sealing cap is threadedly connected to the top of the filling pipe.

[0008] As a preferred solution, the top of the blowing pipe is fixedly connected to a support rod, and the top of the support rod is fixedly installed on the left end of the top of the inner cavity of the exposure machine body.

[0009] As a preferred solution, the front surface of the exposure machine body is movably connected to a protective door via a hinge, support seats are fixedly connected on all four sides of the bottom of the outer surface of the exposure machine body, and a base plate is fixedly connected between the bottom of the four support seats and the bottom of the outer surface of the coolant tank.

[0010] As a preferred solution, a guide baffle is fixedly connected to the right end of the top of the inner cavity of the coolant tank, and the guide baffle is in a rectangular shape.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0012] 1. The utility model can monitor the temperature of the bottom of the glass substrate inside the exposure machine body by setting a temperature sensor, and when the temperature monitored by the temperature sensor is higher than the preset value of the temperature controller, the temperature controller will control the refrigerator, the blower and the water pump to work respectively. Under the action of the refrigerator, the coolant inside the coolant tank can be effectively cooled down, and under the cooperation between the blower, the second heat exchange tube and the blowing tube, the effect of cooling and controlling the temperature of the glass substrate is achieved, and the glass substrate is prevented from being affected by the high temperature and affecting the normal operation of the whole. At the same time, under the cooperation between the water pump, the coolant tank and the first heat exchange tube, the effect of cooling and controlling the temperature of the glass substrate is further achieved, and the overall work can be effectively guaranteed to be carried out stably. Under the overall cooperation, the temperature control system of the glass substrate exposure equipment has a good cooling and temperature control effect during use, which effectively avoids excessive temperature during operation and ensures that the overall work can be carried out stably for a long time.

[0013] 2. The utility model facilitates effective heat dissipation of the refrigerator through the provision of a heat dissipation fan, facilitates personnel to add coolant to the interior of the coolant tank through the provision of a filling pipe and a sealing cover, achieves the purpose of supporting and fixing the blow pipe through the provision of a support rod, achieves the purpose of supporting the whole through the provision of a support seat and a bottom plate, and achieves the purpose of guiding the coolant refluxed from the interior of the coolant tank through the provision of a guide baffle, so that the refluxed coolant can fully pass through the refrigerator for cooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of the utility model;

[0015] Figure 2 This is a schematic diagram of the cross-sectional structure of the main body of the exposure machine of the utility model;

[0016] Figure 3This is a schematic diagram of the cross-sectional structure of the coolant tank of the utility model.

[0017] In the figure: 1. Exposure machine body; 2. Temperature controller; 3. Protection door; 4. Support seat; 5. Bottom plate; 6. First heat exchange tube; 7. Water pump; 8. Coolant tank; 9. Refrigerator; 10. Blower; 11. Second heat exchange tube; 12. Support rod; 13. Blowing pipe; 14. Temperature sensor; 15. Filling pipe; 16. Fixing rod; 17. Cooling fan; 18. Guide baffle. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] See also Figure 1-3 A temperature control system for glass substrate exposure equipment includes an exposure machine body 1, a temperature controller 2 is fixedly installed on the upper end of the front surface of the exposure machine body 1, a temperature sensor 14 is fixedly installed on the middle end of the bottom of the inner cavity of the exposure machine body 1, a second heat exchange tube 11 is fixedly connected to the right side of the exposure machine body 1, a coolant tank 8 is fixedly connected to the right end of the second heat exchange tube 11, a blower 10 is fixedly installed between the top of the second heat exchange tube 11 and the left end of the top of the outer surface of the coolant tank 8, a blowing pipe 13 is fixedly installed at the output end of the blower 10 through a pipeline, a refrigerator 9 is fixedly installed at the lower end of the right side of the coolant tank 8, a water pump 7 is fixedly installed at the lower end of the front surface of the coolant tank 8 through a pipeline, a first heat exchange tube 6 is fixedly installed between the output end of the water pump 7 and the lower end of the exposure machine body 1, and the right end of the first heat exchange tube 6 is fixedly connected to the upper end of the coolant tank 8 through a pipeline.

[0020] Through the above technical solution, by setting the temperature sensor 14, the temperature of the bottom of the glass substrate inside the exposure machine body 1 can be monitored, and when the temperature monitored by the temperature sensor 14 is higher than the preset value of the temperature controller 2, the temperature controller 2 will control the refrigerator 9, the blower 10 and the water pump 7 to work respectively. Under the action of the refrigerator 9, the coolant inside the coolant tank 8 can be effectively cooled down, and under the cooperation between the blower 10, the second heat exchange tube 11 and the blowing tube 13, the effect of cooling and controlling the temperature of the glass substrate is achieved, and the glass substrate is prevented from being affected by the high temperature and affecting the normal operation of the whole. At the same time, under the cooperation between the water pump 7, the coolant tank 8 and the first heat exchange tube 6, the effect of cooling and controlling the temperature of the glass substrate is further achieved, which effectively ensures that the whole work can be carried out stably. Under the overall cooperation, the temperature control system of the glass substrate exposure equipment has a good cooling and temperature control effect during use, which effectively avoids excessive temperature during operation and ensures that the whole work can be carried out stably for a long time.

[0021] Both ends of the right side of the refrigerator 9 are fixedly connected with fixing rods 16 , and a heat dissipation fan 17 is fixedly installed between the right ends of the two fixing rods 16 .

[0022] Through the above technical solution, by providing the heat dissipation fan 17, it is convenient to effectively dissipate heat for the refrigerator 9.

[0023] A filling pipe 15 is fixedly connected to the middle end of the top of the coolant tank 8 , and a sealing cap is threadedly connected to the top of the filling pipe 15 .

[0024] Through the above technical solution, by providing the filling pipe 15 and the sealing cover, it is convenient for personnel to fill the coolant tank 8 with coolant.

[0025] The top of the blowing pipe 13 is fixedly connected to the support rod 12 , and the top of the support rod 12 is fixedly installed at the left end of the top of the inner cavity of the exposure machine body 1 .

[0026] Through the above technical solution and the provision of the support rod 12, the purpose of supporting and fixing the blowing pipe 13 is achieved.

[0027] The front surface of the exposure machine body 1 is movably connected to a protective door 3 via a hinge, and support seats 4 are fixedly connected to the four sides of the bottom of the outer surface of the exposure machine body 1. A base plate 5 is fixedly connected between the bottom of the four support seats 4 and the bottom of the outer surface of the coolant tank 8.

[0028] Through the above technical solution, by arranging the support seat 4 and the bottom plate 5, the purpose of supporting the whole is achieved.

[0029] A flow guide baffle 18 is fixedly connected to the right end of the top of the inner cavity of the coolant tank 8, and the flow guide baffle 18 is in a rectangular shape.

[0030] Through the above technical solution, by setting the guide baffle 18, the purpose of guiding the coolant returning from the coolant tank 8 is achieved, so that the returning coolant can fully pass through the refrigerator 9 for cooling.

[0031] The working principle of the utility model is as follows: through the setting of the temperature sensor 14, the temperature of the bottom of the glass substrate inside the exposure machine body 1 can be monitored, and when the temperature monitored by the temperature sensor 14 is higher than the preset value of the temperature controller 2, the temperature controller 2 will control the refrigerator 9, the blower 10 and the water pump 7 to work respectively, and the coolant inside the coolant tank 8 can be effectively cooled down under the action of the refrigerator 9, and the air inside the exposure machine body 1 can be extracted through the second heat exchange tube 11 under the action of the blower 10, so that the coolant can be quickly cooled down while the air flows through the second heat exchange tube 11, and then the coolant is blown to the exposure machine body 1 through the blowing tube 13. The internal environment of the exposure machine body 1 is blown by the rapidly blown air, and the rapidly blown air can effectively cool down the internal environment of the exposure machine body 1, thereby achieving the effect of cooling and controlling the temperature of the glass substrate, and preventing the glass substrate from affecting the overall normal operation due to high temperature. At the same time, under the action of the water pump 7, the coolant in the coolant tank 8 can be extracted, and transported to the inside of the first heat exchange tube 6 through a pipeline, and then returned to the inside of the coolant tank 8. Under the action of the circulating flow of the coolant, the bottom of the glass substrate can be quickly cooled, and the effect of cooling and controlling the temperature of the glass substrate is further achieved, effectively ensuring that the overall work can be carried out stably.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the utility model.

Claims

1. A temperature control system for glass substrate exposure equipment, comprising an exposure machine body (1), characterized in that: A temperature controller (2) is fixedly installed at the upper end of the front surface of the exposure machine body (1), a temperature sensor (14) is fixedly installed at the middle end of the bottom of the inner cavity of the exposure machine body (1), a second heat exchange tube (11) is fixedly connected to the right side of the exposure machine body (1), the right end of the second heat exchange tube (11) is fixedly connected to a coolant tank (8), a blower (10) is fixedly installed between the top of the second heat exchange tube (11) and the left end of the top of the outer surface of the coolant tank (8), an air blowing tube (13) is fixedly installed at the output end of the blower (10) through a pipeline, a refrigerator (9) is fixedly installed at the lower end of the right side of the coolant tank (8), a water pump (7) is fixedly installed at the lower end of the front surface of the coolant tank (8) through a pipeline, a first heat exchange tube (6) is fixedly installed between the output end of the water pump (7) and the lower end of the exposure machine body (1), and the right end of the first heat exchange tube (6) is fixedly connected to the upper end of the coolant tank (8) through a pipeline.

2. A temperature control system for glass substrate exposure equipment according to claim 1, characterized in that: Both ends of the right side of the refrigerator (9) are fixedly connected with fixing rods (16), and a heat dissipation fan (17) is fixedly installed between the right ends of the two fixing rods (16).

3. The temperature control system for glass substrate exposure equipment according to claim 1, characterized in that: A filling pipe (15) is fixedly connected to the middle end of the top of the coolant tank (8), and a sealing cover is threadedly connected to the top of the filling pipe (15).

4. The temperature control system for glass substrate exposure equipment according to claim 1, characterized in that: The top of the blowing pipe (13) is fixedly connected to a support rod (12), and the top of the support rod (12) is fixedly installed on the left end of the top of the inner cavity of the exposure machine body (1).

5. The temperature control system for glass substrate exposure equipment according to claim 1, characterized in that: The front surface of the exposure machine body (1) is movably connected to a protective door (3) via a hinge, and the bottom of the outer surface of the exposure machine body (1) is fixedly connected to support seats (4) on all four sides, and a base plate (5) is fixedly connected between the bottom of the four support seats (4) and the bottom of the outer surface of the coolant tank (8).

6. The temperature control system for glass substrate exposure equipment according to claim 1, characterized in that: A flow guide baffle (18) is fixedly connected to the right end of the top of the inner cavity of the coolant tank (8), and the flow guide baffle (18) is in the shape of a rectangle.

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