Dust blowing suction nozzle and semiconductor processing equipment

Abstract

The utility model provides a dust blowing suction nozzle and semiconductor processing equipment, and relates to the technical field of chip processing. The dust blowing suction nozzle comprises a first suction nozzle body and a second suction nozzle body arranged in the first suction nozzle body, the first suction nozzle body comprises an adsorption part and a first connecting part connected with the adsorption part, the second suction nozzle body comprises a dust blowing part and a second connecting part connected with the dust blowing part, the second connecting part is located in the first connecting part, and the dust blowing part is located in the adsorption part. An air passage is arranged in the second connecting part and used for communicating with an air pump, an adsorption cavity is formed in the surface, away from the first connecting part, of the adsorption part, a plurality of blowing holes are formed in the surface, away from the second connecting part, of the dust blowing part, and the two ends of each blowing hole communicate with the air passage and the adsorption cavity correspondingly. According to the dust blowing suction nozzle, the plurality of blowing holes connected with the air channel are formed, air is blown to the sheet-shaped object before the first suction nozzle makes contact with the sheet-shaped object, and impurities on the surface of the sheet-shaped object are removed. The air blowing holes have a good air gathering effect, and the impurity removing effect and removing efficiency can be effectively improved through the arrangement of the multiple air blowing holes.

Description

Technical Field

[0001] The present application relates to the field of chip processing technology, and in particular to a dust blowing nozzle and semiconductor processing equipment. Background Art

[0002] Chip is a general term for semiconductor component products. In electronics, it is a way to miniaturize circuits and is often manufactured on the surface of semiconductor wafers. During the processing or packaging of chips, it is usually necessary to use a suction nozzle to transfer or fix them. If impurities are adsorbed on the surface of the chip, the pressure exerted by the suction nozzle on the chip may press the impurities into the surface of the chip, causing damage to the chip.

[0003] In the prior art, in order to remove impurities on the chip surface before the chip is adsorbed, a blowing port is provided on the suction nozzle, and the blowing port blows air toward the chip surface to blow the impurities away from the chip surface. However, the existing suction nozzle with a blowing port has a poor air gathering effect, which leads to a poor impurity removal effect. Utility Model Content

[0004] The purpose of the present application is to provide a dust blowing nozzle and semiconductor processing equipment to address the deficiencies in the above-mentioned prior art, which have a good wind gathering effect and can effectively improve the removal effect of impurities.

[0005] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0006] According to one aspect of an embodiment of the present application, a dust-blowing nozzle is provided, comprising: a first nozzle and a second nozzle arranged in the first nozzle, the first nozzle comprising a suction portion and a first connecting portion connected to the suction portion, the second nozzle comprising a dust-blowing portion and a second connecting portion connected to the dust-blowing portion, the second connecting portion being located in the first connecting portion, the dust-blowing portion being located in the suction portion, an air duct being provided in the second connecting portion, the air duct being used to communicate with an air pump, an suction cavity being provided on a surface of the suction portion away from the first connecting portion, a plurality of blowing holes being provided on a surface of the dust-blowing portion away from the second connecting portion, and two ends of the blowing holes are respectively connected to the air duct and the suction cavity.

[0007] Optionally, the axis of the airway coincides with the axis of the second connecting portion, and the plurality of blowing holes are evenly distributed around the axis of the airway.

[0008] Optionally, an end of the air channel away from the blowing hole passes through the surface of the second connecting part, and an end of the air channel close to the blowing hole is located in the adsorption part.

[0009] Optionally, the blowing hole is arranged obliquely relative to the axis of the airway, and the end of the blowing hole is connected to the side wall of the airway.

[0010] Optionally, a surface of the dust blowing portion away from the second connecting portion is located in the adsorption chamber.

[0011] Optionally, a first accommodating groove is provided in the first connecting part, a second accommodating groove is provided in the adsorption part, an outer wall of the second connecting part is fitted with an inner wall of the first accommodating groove, and an outer wall of the dust blowing part is fitted with an inner wall of the second accommodating groove.

[0012] Optionally, the side wall of the first connection part is provided with a top screw hole connected to the first accommodating groove, and the first connection part is fixedly connected to the second connection part by a top screw, and the top screw passes through the top screw hole and abuts against the side wall of the second connection part.

[0013] Optionally, the adsorption portion is rectangular, and the cross section of the adsorption cavity is also rectangular, and the cross section is parallel to a surface of the adsorption portion away from the first connecting portion.

[0014] Optionally, the surface of the dust blowing part away from the second connecting part is circular, the center of the surface of the dust blowing part away from the second connecting part is located on the center line of the adsorption chamber, and the plurality of blowing holes are evenly distributed around the center line of the adsorption chamber.

[0015] Another aspect of an embodiment of the present application provides a semiconductor processing equipment, comprising a dust blowing nozzle as described above.

[0016] The beneficial effects of this application include:

[0017] The present application provides a dust blowing nozzle, comprising: a first nozzle and a second nozzle arranged in the first nozzle, the first nozzle comprising an adsorption part and a first connection part connected to the adsorption part, the second nozzle comprising a dust blowing part and a second connection part connected to the dust blowing part, the second connection part being located in the first connection part, the dust blowing part being located in the adsorption part, an airway being arranged in the second connection part, the airway being used to communicate with an air pump, an adsorption cavity being arranged on the surface of the adsorption part away from the first connection part, a plurality of blowing holes being arranged on the surface of the dust blowing part away from the second connection part, and both ends of the blowing holes being respectively connected with the airway and the adsorption cavity. The dust blowing nozzle is provided with a plurality of blowing holes connected with the airway, and blows air toward the sheet before the first nozzle contacts the sheet, thereby removing impurities on the surface of the sheet. The blowing holes have a good wind gathering effect, and the provision of a plurality of blowing holes can effectively improve the removal effect and removal efficiency of impurities. In addition, the adsorption cavity is arranged on the first nozzle, and the airway and the blowing holes are arranged on the second nozzle, so that the dust blowing nozzle is easier to process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1A schematic diagram of the structure of the dust blowing nozzle provided in an embodiment of the present application;

[0020] Figure 2 This is an exploded view of the dust blowing nozzle provided in an embodiment of the present application.

[0021] Icons: 100 - dust blowing nozzle; 110 - first suction nozzle; 111 - adsorption part; 112 - first connecting part; 113 - adsorption chamber; 114 - positioning groove; 115 - adsorption surface; 116 - first accommodating groove; 117 - second accommodating groove; 118 - top screw hole; 120 - second suction nozzle; 121 - dust blowing part; 122 - second connecting part; 123 - air duct; 124 - blowing hole. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. It should be noted that, in the absence of conflict, the various features in the embodiments of the present application can be combined with each other, and the combined embodiments are still within the scope of protection of the present application.

[0024] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0025] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0026] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In one aspect of the embodiment of the present application, please refer to Figure 1 and Figure 2 , a dust blowing nozzle 100 is provided, comprising: a first nozzle 110 and a second nozzle 120 arranged in the first nozzle 110, the first nozzle 110 comprises a suction portion 111 and a first connecting portion 112 connected to the suction portion 111, the second nozzle 120 comprises a dust blowing portion 121 and a second connecting portion 122 connected to the dust blowing portion 121, the second connecting portion 122 is located in the first connecting portion 112, the dust blowing portion 121 is located in the suction portion 111, an air passage 123 is provided in the second connecting portion 122, the air passage 123 is used to communicate with an air pump, an suction chamber 113 is provided on a surface of the suction portion 111 away from the first connecting portion 112, a plurality of blowing holes 124 are provided on a surface of the dust blowing portion 121 away from the second connecting portion 122, and both ends of the blowing holes 124 are respectively connected to the air passage 123 and the suction chamber 113.

[0028] The dust blowing nozzle 100 includes a first nozzle 110 and a second nozzle 120, and the second nozzle 120 is fixed inside the first nozzle 110. The first nozzle 110 is mainly used to adsorb or press a sheet, such as a chip, and the second nozzle 120 is mainly used to blow air to the surface of the sheet to remove impurities on the surface of the sheet. Specifically, the first nozzle 110 includes an adsorption portion 111 and a first connecting portion 112, wherein the adsorption portion 111 is used to adsorb or press a sheet, the first connecting portion 112 is connected to the adsorption portion 111, and the first nozzle 110 is fixed to an external device through the first connecting portion 112. For example, the first connecting portion 112 is connected to the middle position of the surface of the adsorption portion 111 to make the structure of the first nozzle 110 more symmetrical. A positioning groove 114 is provided on the first connecting portion 112, and the positioning groove 114 is used to position the first connecting portion 112 when the first connecting portion 112 is connected to an external device. The second suction nozzle 120 includes a dust blowing part 121 and a second connecting part 122, wherein the dust blowing part 121 is used to blow air to the surface of the sheet to remove impurities on the surface of the sheet, and the second connecting part 122 is used to connect with the first connecting part 112 of the first suction nozzle 110 to achieve relative fixation between the second suction nozzle 120 and the first suction nozzle 110. An air channel 123 is provided in the second connecting part 122, and the air channel 123 is connected to an air pump. The air pump inflates the air channel 123 to form a positive pressure in the air channel 123, and the air pump draws air from the air channel 123 to form a positive pressure in the air channel 123. An adsorption chamber 113 is provided on the surface of the adsorption part 111 away from the first connecting part 112, and a plurality of air blowing holes 124 are also provided on the surface of the dust blowing part 121 away from the second connecting part 122, and the adsorption chamber 113 is connected to the air channel 123 through the plurality of air blowing holes 124.

[0029] When the air pump inflates the air channel 123, the gas enters the multiple blowing holes 124 through the air channel 123, and then blows toward the surface of the sheet by the multiple blowing holes 124, thereby removing impurities on the surface of the sheet. The blowing holes 124 can gather the gas in the air channel 123. When the pressure of the gas entering the air channel 123 remains unchanged, the blowing holes 124 with a smaller cross-sectional area can have a good wind gathering effect, thereby effectively improving the removal effect of impurities. Moreover, blowing air from multiple blowing holes 124 at the same time can also improve the removal efficiency of impurities. When the air pump draws air from the air channel 123 to the outside, negative pressure is formed in the air channel 123, the blowing holes 124 and the adsorption chamber 113, and the surface of the adsorption chamber 113 provided on the adsorption part 111 fits with the surface of the sheet, thereby adsorbing and fixing the sheet.

[0030] The dust blowing nozzle 100 is provided with a plurality of blowing holes 124 connected to the air passage 123, and blows air toward the sheet before the first nozzle 110 contacts the sheet, thereby removing impurities on the surface of the sheet. The blowing holes 124 have a good wind gathering effect, and the provision of a plurality of blowing holes 124 can effectively improve the removal effect and efficiency of impurities. In addition, the adsorption chamber 113 is provided on the first nozzle 110, and the air passage 123 and the blowing holes 124 are provided on the second nozzle 120, so that the dust blowing nozzle 100 is easier to process.

[0031] Optionally, the axis of the air duct 123 coincides with the axis of the second connecting portion 122, and a plurality of blowing holes 124 are evenly distributed around the axis of the air duct 123, so that the blowing is more uniform and covers a larger area, resulting in a better dust removal effect.

[0032] Furthermore, the axis of the second connection portion 122 coincides with the axis of the first connection portion 112 to facilitate processing and installation.

[0033] For example, the air passage 123 , the second connection part 122 and the first connection part 112 are all cylindrical, the end surface of the second connection part 122 is connected to the surface of the dust blowing part 121 , and the end surface of the first connection part 112 is connected to the surface of the adsorption part 111 .

[0034] Optionally, the end of the air channel 123 away from the blowing hole 124 penetrates the surface of the second connecting portion 122, so that the air channel 123 is connected to an external air pump. The end of the air channel 123 close to the blowing hole 124 is located in the adsorption portion 111, so as to facilitate the processing of the blowing hole 124 and enable the blowing hole 124 to communicate with the air channel 123.

[0035] Optionally, the blowing holes 124 are arranged obliquely relative to the axis of the air passage 123, that is, the angle between the axis of the blowing holes 124 and the axis of the air passage 123 is an acute angle. The ends of the blowing holes 124 are connected to the side walls of the air passage 123, so that the distribution of the plurality of blowing holes 124 is more dispersed and the blowing range is larger.

[0036] Optionally, a surface of the dust blowing portion 121 away from the second connecting portion 122 is located in the adsorption chamber 113 .

[0037] That is to say, the end of the air blowing port away from the air passage 123 is located in the adsorption chamber 113. This arrangement can, on the one hand, prevent the dust blowing portion 121 from protruding from the adsorption portion 111, so that the adsorption portion 111 cannot achieve its function of adsorbing the sheet-like object. On the other hand, it can also make the end of the air blowing port as close to the sheet-like object as possible, thereby achieving a better dust removal effect.

[0038] Optionally, the adsorption portion 111 is rectangular, and the cross section of the adsorption cavity 113 is also rectangular, and the cross section is parallel to the surface of the adsorption portion 111 away from the first connecting portion 112 .

[0039] The shape of the sheet (such as a chip) is mostly rectangular, and the rectangular adsorption portion 111 and the adsorption cavity 113 form a rectangular ring-shaped adsorption surface 115, which can better adapt to the sheet, thereby achieving a better adsorption effect.

[0040] Optionally, the surface of the dust blowing portion 121 away from the second connecting portion 122 is circular, the center of the surface of the dust blowing portion 121 away from the second connecting portion 122 is located on the center line of the adsorption chamber 113, and the plurality of blowing holes 124 are evenly distributed around the center line of the adsorption chamber 113.

[0041] The center of the surface of the blowing hole 124 on the dust blowing part 121 coincides with the center of the adsorption chamber 113. At the same time, the blowing holes 124 are evenly distributed around the center line of the adsorption chamber 113, so that the gas blown to the surface of the sheet object can be more uniform, avoiding the local area of ​​the sheet object from failing to achieve a good dust removal effect.

[0042] Optionally, a first receiving groove 116 is provided in the first connecting portion 112, the second connecting portion 122 is fixed in the first receiving groove 116, a second receiving groove 117 is provided in the adsorption portion 111, and the dust blowing portion 121 is fixed in the second receiving groove 117. The outer wall of the second connecting portion 122 fits with the inner wall of the first receiving groove 116, and the outer wall of the dust blowing portion 121 fits with the inner wall of the second receiving groove 117, thereby preventing dust from entering and gas from leaking.

[0043] Optionally, the side wall of the first connecting part 112 is provided with a top screw hole 118 connected to the first accommodating groove 116, and the first connecting part 112 and the second connecting part 122 are fixedly connected by a top screw. After the top screw passes through the top screw hole 118, it abuts against the side wall of the second connecting part 122, thereby fixing the second suction nozzle 120 in the first suction nozzle 110.

[0044] Furthermore, the second connection portion 122 is interference fit with the first receiving groove 116 , and / or the dust blowing portion 121 is interference fit with the second receiving groove 117 , so as to further improve the reliability of the connection between the second suction nozzle 120 and the first suction nozzle 110 .

[0045] This embodiment further provides a semiconductor processing device, comprising any one of the above dust blowing nozzles 100 .

[0046] The semiconductor processing equipment includes the same structure and beneficial effects as the dust blowing nozzle 100 in the above-mentioned embodiment. The structure and beneficial effects of the dust blowing nozzle 100 have been described in detail in the above-mentioned embodiment, and will not be repeated here.

[0047] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dust blowing nozzle, characterized in that: include: A first suction nozzle and a second suction nozzle arranged in the first suction nozzle, the first suction nozzle includes a suction part and a first connecting part connected to the suction part, the second suction nozzle includes a dust blowing part and a second connecting part connected to the dust blowing part, the second connecting part is located in the first connecting part, the dust blowing part is located in the suction part, an air channel is provided in the second connecting part, the air channel is used to communicate with an air pump, an suction cavity is provided on a surface of the suction part away from the first connecting part, a plurality of blowing holes are provided on a surface of the dust blowing part away from the second connecting part, and both ends of the blowing holes are respectively connected with the air channel and the suction cavity.

2. The dust blowing nozzle according to claim 1, characterized in that: The axis of the airway coincides with the axis of the second connecting portion, and the plurality of blowing holes are evenly distributed around the axis of the airway.

3. The dust blowing nozzle according to claim 2, characterized in that: The end of the air channel away from the blowing hole passes through the surface of the second connecting part, and the end of the air channel close to the blowing hole is located in the adsorption part.

4. The dust blowing nozzle according to claim 1, characterized in that: The blowing hole is arranged obliquely relative to the axis of the air channel, and the end of the blowing hole is connected to the side wall of the air channel.

5. The dust blowing nozzle according to claim 1, characterized in that: A surface of the dust blowing portion away from the second connecting portion is located in the adsorption chamber.

6. The dust blowing nozzle according to claim 1, characterized in that: A first accommodating groove is provided in the first connecting portion, a second accommodating groove is provided in the adsorption portion, an outer wall of the second connecting portion is fitted with an inner wall of the first accommodating groove, and an outer wall of the dust blowing portion is fitted with an inner wall of the second accommodating groove.

7. The dust blowing nozzle according to claim 6, characterized in that: The side wall of the first connection part is provided with a top screw hole connected with the first accommodating groove, and the first connection part is fixedly connected with the second connection part by a top screw, and the top screw passes through the top screw hole and abuts against the side wall of the second connection part.

8. The dust blowing nozzle according to claim 1, characterized in that: The adsorption portion is rectangular, and the cross section of the adsorption cavity is also rectangular, and the cross section is parallel to a surface of the adsorption portion away from the first connecting portion.

9. The dust blowing nozzle according to claim 8, characterized in that: The surface of the dust blowing part away from the second connecting part is circular, the center of the surface of the dust blowing part away from the second connecting part is located on the center line of the adsorption chamber, and a plurality of blowing holes are evenly distributed around the center line of the adsorption chamber.

10. A semiconductor processing equipment, characterized in that: The invention comprises a dust blowing nozzle as claimed in any one of claims 1 to 9.

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