Double-polishing machine tool cleaning equipment

Abstract

The utility model relates to the technical field of double-polishing machine tool cleaning equipment, and provides double-polishing machine tool cleaning equipment which comprises an equipment body, a cleaning bin is formed in the top of the equipment body, a supporting frame is arranged on the back face of the equipment body, a transverse plate is arranged on the portion, close to the top, of the front face of the supporting frame, and a first driving motor is arranged at the bottom of the transverse plate. An electric push rod is rotatably connected to the bottom of the first driving motor, a cleaning upper seat is connected to one end of the bottom of the electric push rod, a cleaning lower seat is arranged at the bottom in the cleaning bin, a rotating shaft is arranged at the bottom of the cleaning lower seat, a driven gear is arranged at the bottom of the rotating shaft, and a driving gear is arranged on one side of the driven gear; and a second driving motor is arranged in the equipment body and located at the bottom of the driving gear.

Description

Technical Field

[0001] The utility model relates to the technical field of double-polishing machine carrier cleaning equipment, in particular to double-polishing machine carrier cleaning equipment. Background Art

[0002] With the development of semiconductor technology, semiconductor silicon wafers are gradually developing towards larger sizes and thinner slices. The size of semiconductors reaches 280-320mm. Silicon wafer polishing requires the use of special placement carriers to enable double-sided polishing of silicon wafers in the polishing machine. In the polishing process of semiconductor silicon wafers, the double polishing carrier that carries silicon wafers is one of the important auxiliary devices for silicon wafer polishing. It is mainly responsible for carrying and fixing silicon wafers, which is directly related to the quality of silicon wafer polishing. The main component of the polishing liquid used in the double polishing machine is the colloid formed by SiO2 and NH4OH. It is easy to form SiO2 crystals inside the double polishing machine and on the surface of the double polishing machine carrier. These SiO2 crystal particles need to be removed in time; if SiO2 crystals are formed on the surface of the double polishing machine carrier, the surface of the silicon wafer will be seriously scratched during the rotation polishing process; at the same time, these SiO2 crystal particles will greatly shorten the service life of the double polishing machine carrier and increase the production cost. Therefore, we propose a double polishing machine carrier cleaning equipment. Utility Model Content

[0003] The purpose of the present utility model is to provide a utility model subject to solve the problems raised in the above background technology.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A double-polishing machine carrier cleaning device comprises an equipment body, a cleaning chamber is provided on the top of the equipment body, a support frame is provided on the back of the equipment body, a horizontal plate is provided on the front of the support frame near the top, a first driving motor is provided at the bottom of the horizontal plate, an electric push rod is rotatably connected to the bottom of the first driving motor, one end of the bottom of the electric push rod is connected to a cleaning upper seat, a cleaning lower seat is provided at the bottom of the cleaning chamber, a rotating shaft is provided at the bottom of the cleaning lower seat, a driven gear is provided at the bottom of the rotating shaft, a driving gear is provided on one side of the driven gear, and a second driving motor is provided inside the equipment body and at the bottom of the driving gear.

[0006] As a preferred solution of the utility model, cleaning brushes are provided on the bottom of the upper cleaning seat and on the top of the lower cleaning seat.

[0007] The technical effect of adopting the above further solution is: the surface of the disassembled double-polishing machine carrier is cleaned by a cleaning brush.

[0008] As a preferred solution of the utility model, the driven gear is meshedly connected with the driving gear, and the output end of the second driving motor is connected to the driving gear.

[0009] The technical effect of adopting the above further scheme is: the second driving motor drives the driving gear to rotate, thereby causing the driven gear meshing with the driving gear to rotate, thereby driving the rotating shaft connected to the driven gear and the cleaning lower seat connected to the top of the rotating shaft to rotate, thereby cleaning the carrier placed in the cleaning bin.

[0010] As a preferred solution of the utility model, an outlet pipe is provided on one side of the cleaning chamber, and an inlet pipe is provided on the other side of the cleaning chamber.

[0011] As a preferred solution of the utility model, a water storage chamber and a recovery chamber are respectively opened on both sides of the interior of the equipment body, a water pump is arranged inside the water storage chamber, and the outlet pipe is connected to the recovery chamber.

[0012] As a preferred solution of the utility model, the water pump is connected to the inlet pipe.

[0013] The technical effect of adopting the above further scheme is: the cleaning liquid in the water storage chamber is introduced into the cleaning bin through the inlet pipe by the work of the water pump to clean the vehicle, and the cleaning liquid after cleaning is introduced into the recovery chamber through the outlet pipe so that workers can handle it uniformly.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] In the utility model, when the double-polishing machine carrier is cleaned, the disassembled carrier is placed in the cleaning bin, and then the electric push rod is operated to lower the cleaning upper seat to cover the carrier, and the first drive motor and the second drive motor are operated to rotate the cleaning upper seat and the cleaning lower seat at the bottom of the cleaning bin, and the cleaning brushes at the bottom of the cleaning upper seat and the top of the cleaning lower seat clean the surface of the carrier. At the same time, the cleaning liquid in the water storage chamber is introduced into the cleaning bin through the introduction pipe by the operation of the water pump, and the surface of the carrier can be cleaned more thoroughly with the operation of the cleaning brush. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the overall structure of a double-polishing machine carrier cleaning device provided by the utility model;

[0017] Figure 2 A schematic diagram of a partial plan internal structure of a double-polishing machine carrier cleaning device provided by the utility model;

[0018] Figure 3 This is an enlarged schematic diagram of the A-zone structure of a double-polishing machine carrier cleaning device provided by the utility model.

[0019] Legend: 1. Equipment body; 101. Cleaning chamber; 2. Support frame; 201. Horizontal plate; 3. First drive motor; 301. Electric push rod; 4. Cleaning upper seat; 401. Cleaning lower seat; 402. Cleaning brush; 5. Rotating shaft; 501. Driven gear; 502. Driving gear; 503. Second drive motor; 6. Export pipe; 601. Import pipe; 7. Water storage chamber; 701. Recovery chamber; 702. Water pump. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0021] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant literature, and several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0022] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0024] Example 1

[0025] like Figure 1-3As shown, the utility model provides a technical solution: a double-polishing machine carrier cleaning device, comprising an equipment body 1, a cleaning chamber 101 is opened on the top of the equipment body 1, a support frame 2 is arranged on the back of the equipment body 1, a horizontal plate 201 is arranged on the front of the support frame 2 near the top, a first drive motor 3 is arranged at the bottom of the horizontal plate 201, an electric push rod 301 is rotatably connected to the bottom of the first drive motor 3, and a cleaning upper seat 4 is connected to one end of the bottom of the electric push rod 301. When the double-polishing machine carrier is cleaned, the disassembled carrier is placed in the cleaning chamber 101, and then the electric push rod 301 is operated to make the cleaning upper seat 4 descend to cover the carrier, and the first drive motor 3 is operated to drive the electric push rod 301 and the cleaning upper seat 4 to rotate, thereby cleaning one side of the carrier.

[0026] Example 2

[0027] like Figure 1-3 As shown, a double-polishing machine carrier cleaning equipment, a cleaning lower seat 401 is arranged at the bottom of the cleaning chamber 101, a rotating shaft 5 is arranged at the bottom of the cleaning lower seat 401, a driven gear 501 is arranged at the bottom of the rotating shaft 5, a driving gear 502 is arranged on one side of the driven gear 501, a second driving motor 503 is arranged inside the equipment body 1 and at the bottom of the driving gear 502, a cleaning brush 402 is arranged at the bottom of the cleaning upper seat 4 and the top of the cleaning lower seat 401, the driven gear 501 is meshed and connected with the driving gear 502, the output end of the second driving motor 503 is connected with the driving gear 502, the second driving motor 503 is driven to rotate the driving gear 502 by the operation of the second driving motor 503, so that the driven gear 501 meshed with the driving gear 502 is rotated, thereby driving The rotating shaft 5 connected to the driven gear 501 and the cleaning lower seat 401 connected to the top of the rotating shaft 5 rotate to clean the carrier placed in the cleaning bin 101. An outlet pipe 6 is provided on one side of the cleaning bin 101, and an inlet pipe 601 is provided on the other side of the cleaning bin 101. A water storage chamber 7 and a recovery chamber 701 are respectively provided on both sides of the equipment body 1. A water pump 702 is provided inside the water storage chamber 7, and the water pump 702 is connected to the inlet pipe 601. The outlet pipe 6 is connected to the recovery chamber 701. The cleaning liquid in the water storage chamber 7 is introduced into the cleaning bin 101 through the inlet pipe 601 through the operation of the water pump 702 to clean the carrier. The cleaning liquid after cleaning is introduced into the recovery chamber 701 through the outlet pipe 6 so that the workers can handle it uniformly.

[0028] The working process of the utility model is as follows: when using a double-polishing machine carrier cleaning device, the disassembled carrier is placed in the cleaning bin 101, and then the electric push rod 301 is operated to make the cleaning upper seat 4 descend to cover the carrier, and the first drive motor 3 is operated to drive the electric push rod 301 and the cleaning upper seat 4 to rotate, so as to clean one side of the carrier, and the second drive motor 503 is operated to drive the active gear 502 to rotate, so as to rotate the driven gear 501 meshing with the active gear 502, thereby driving the rotating shaft 5 connected to the driven gear 501 and the cleaning lower seat 401 connected to the top of the rotating shaft 5 to rotate, so as to clean the other side of the carrier placed in the cleaning bin 101, and at the same time, the cleaning liquid in the water storage chamber 7 is introduced into the cleaning bin 101 through the introduction pipe 601 through the operation of the water pump 702, and the cleaning brush 402 is cooperated to clean the surface of the carrier more cleanly, and the cleaning liquid after cleaning is introduced into the recovery chamber 701 through the outlet pipe 6 so that the workers can handle it uniformly.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A double polishing machine carrier cleaning device, comprising a device body (1), characterized in that: A cleaning chamber (101) is provided at the top of the device body (1); a support frame (2) is provided at the back of the device body (1); a horizontal plate (201) is provided at the front of the support frame (2) near the top; a first driving motor (3) is provided at the bottom of the horizontal plate (201); an electric push rod (301) is rotatably connected to the bottom of the first driving motor (3); one end of the bottom of the electric push rod (301) is connected to a cleaning upper seat (4); a cleaning lower seat (401) is provided at the bottom of the cleaning chamber (101); a rotating shaft (5) is provided at the bottom of the cleaning lower seat (401); a driven gear (501) is provided at the bottom of the rotating shaft (5); a driving gear (502) is provided on one side of the driven gear (501); and a second driving motor (503) is provided inside the device body (1) and at the bottom of the driving gear (502).

2. A double polishing machine carrier cleaning device according to claim 1, characterized in that: A cleaning brush (402) is provided at the bottom of the cleaning upper seat (4) and at the top of the cleaning lower seat (401).

3. The double polishing machine carrier cleaning equipment according to claim 1, characterized in that: The driven gear (501) is meshedly connected with the driving gear (502), and the output end of the second driving motor (503) is connected with the driving gear (502).

4. The double polishing machine carrier cleaning device according to claim 1, characterized in that: An outlet pipe (6) is provided on one side of the cleaning chamber (101), and an inlet pipe (601) is provided on the other side of the cleaning chamber (101).

5. The double polishing machine carrier cleaning device according to claim 4, characterized in that: A water storage chamber (7) and a recovery chamber (701) are respectively provided on both sides of the interior of the equipment body (1); a water pump (702) is provided inside the water storage chamber (7); and the outlet pipe (6) is connected to the recovery chamber (701).

6. The double polishing machine carrier cleaning device according to claim 5, characterized in that: The water pump (702) is connected to the introduction pipe (601).

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