Vacuum delivery device and vacuum processing system

Abstract

The utility model relates to the technical field of vacuum equipment, in particular to a vacuum delivery device and a vacuum treatment system. The vacuum delivery device comprises a vacuum fixing cavity, a corrugated pipe, a rear end assembly, a guide rail, a loading assembly and a linear driving assembly. The vacuum fixing cavity comprises a front end flange opening and a rear end flange opening. The corrugated pipe comprises a front-end flange and a rear-end flange, and the front-end flange of the corrugated pipe is in vacuum sealing connection with the rear-end flange opening of the vacuum fixing cavity. And the front end part of the rear-end assembly is in vacuum sealing connection with a rear-end flange of the corrugated pipe. The guide rail penetrates through the vacuum fixing cavity and the corrugated pipe, and the rear end of the guide rail is fixedly connected with the rear end assembly. The loading assembly is connected with the front end of the guide rail. The linear driving assembly is connected with the corrugated pipe and used for driving the corrugated pipe to stretch to drive the rear end assembly and the guide rail to move.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum delivery device and a vacuum processing system. Background Art

[0002] In the field of vacuum device technology, when it is necessary to feed materials into a vacuum chamber, it is inevitable to destroy the internal vacuum environment. Take the Ebeam evaporation source as an example. The Ebeam evaporation source is a device used for electron beam evaporation. By heating a crucible or evaporation source filled with materials to generate steam, thin film deposition or surface treatment is achieved. The existing crucible loading must destroy the vacuum environment of the entire system before the crucible can be taken out. The prior art in this field lacks a delivery device that can achieve quick loading and avoid destroying the vacuum environment of the vacuum processing chamber. Utility Model Content

[0003] The present disclosure provides a vacuum delivery device, comprising:

[0004] The vacuum fixing chamber includes a front flange opening and a rear flange opening.

[0005] The bellows comprises a front end flange and a rear end flange, wherein the front end flange of the bellows is vacuum-sealedly connected to the rear end flange of the vacuum fixing chamber;

[0006] A rear end component, the front end of which is vacuum-sealedly connected to the rear end flange of the bellows;

[0007] The guide rail is passed through the vacuum fixed cavity and the bellows, and the rear end of the guide rail is fixedly connected to the rear end component;

[0008] a charging assembly connected to the front end of the guide rail; and

[0009] The linear drive assembly is connected to the bellows and is used to drive the bellows to expand and contract so as to drive the rear end assembly and the guide rail to move.

[0010] In some embodiments, the linear drive assembly includes:

[0011] The front end of the slide rail is fixedly connected to the front end flange of the bellows;

[0012] A slider fixedly connected to the rear end flange of the bellows;

[0013] Motor;

[0014] A lead screw, the rear end of which is connected to the output end of the motor; and

[0015] The nut is threadably connected to the lead screw and fixedly connected to the slide block, and is used to drive the rear end flange of the bellows to move back and forth on the slide rail.

[0016] In some embodiments, the vacuum fixture chamber comprises:

[0017] A loading port, disposed at the upper end of the vacuum fixing chamber, for loading materials; and

[0018] Blind plate, detachably connected to the charging port.

[0019] In some embodiments, the vacuum fixing chamber also includes at least one guide rail mounting plate assembly for placing the guide rail, the guide rail mounting plate assembly includes a mounting plate arranged in the vacuum fixing chamber and at least one pulley rotatably arranged on the mounting plate, and at least one pulley of at least one guide rail mounting plate assembly is used to guide and limit the track.

[0020] In some embodiments, at least one rail mounting plate assembly includes:

[0021] At least one dual-position limiting guide rail mounting plate assembly, the dual-position limiting guide rail mounting plate assembly comprising a plurality of pulleys disposed on both sides of the guide rail to guide and limit the guide rail on both sides of the guide rail; and / or

[0022] At least one single-position limiting guide rail mounting plate assembly includes at least one pulley disposed on a single side of the guide rail to guide and limit the guide rail on a single side of the guide rail.

[0023] In some embodiments, the double limit guide rail mounting plate assembly includes multiple pairs of V-shaped pulleys arranged on the upper and lower sides of the guide rail, the single limit guide rail mounting plate assembly includes at least one V-shaped pulley arranged on the lower side of the guide rail, the single limit guide rail mounting plate assembly is arranged at intervals at the front end of the double limit guide rail mounting plate assembly, and the guide rail includes side protrusions that cooperate with the V-shaped pulleys.

[0024] In some embodiments, the front flange of the vacuum fixing chamber is used to install a gate valve; and / or

[0025] The vacuum delivery device also includes a front end variable diameter straight through cavity, the front end flange opening of the front end variable diameter straight through cavity is vacuum-sealed connected to the rear end flange opening of the vacuum fixed cavity, and the rear end flange opening of the front end variable diameter straight through cavity is vacuum-sealed connected to the front end flange of the bellows.

[0026] In some embodiments, the backend components include:

[0027] A transfer tee, the front flange of which is connected to the rear flange of the bellows in a vacuum-tight manner; and

[0028] At least one fixing pin is arranged in the transfer tee, and at least one guide rail is connected to the fixing pin.

[0029] In some embodiments, the backend component further includes:

[0030] The adapter comprises at least a first port and a second port, wherein the first port is vacuum-sealedly connected to the middle flange port of the adapter tee; and

[0031] A feed-through assembly is vacuum-tightly connected to the second port of the adapter; and / or

[0032] The backend components also include:

[0033] The front end of the water pipe connection assembly is vacuum-sealedly connected to the flange opening of the rear end of the adapter tee;

[0034] The rear end is reduced in diameter and connected to the rear end of the water pipe connection assembly; and

[0035] The high voltage electrode is fixedly connected to the rear end portion of the reducer.

[0036] The present disclosure provides a vacuum processing system, comprising:

[0037] a vacuum processing chamber including a window;

[0038] A vacuum delivery device as in any embodiment of the present disclosure, wherein the front flange opening of the vacuum fixing chamber of the vacuum delivery device is vacuum-sealedly connected to the window of the vacuum processing chamber for delivering materials into the vacuum processing chamber; and

[0039] The gate valve is arranged between the vacuum processing chamber and the vacuum fixing chamber of the vacuum delivery device, and is used for vacuum isolating the vacuum processing chamber from the vacuum fixing chamber.

[0040] The vacuum delivery device and vacuum processing system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the vacuum delivery device and vacuum processing system according to some embodiments of the present disclosure adopt linear drive to make the guide rail move, and have a simple structure and high repeatability positioning accuracy. For another example, the vacuum delivery device and vacuum processing system according to some embodiments of the present disclosure realize the forward and backward movement of the loading assembly through the forward and backward movement of the guide rail, thereby realizing quick loading, thereby avoiding breaking the vacuum environment of the vacuum processing chamber. For another example, the vacuum delivery device and vacuum processing system according to some embodiments of the present disclosure also include a guide rail mounting plate assembly, so that the guide rail can withstand heavier loads and move more smoothly and accurately. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] Figure 1 An exploded schematic diagram showing a vacuum delivery device according to some embodiments of the present disclosure;

[0043] Figure 2A schematic diagram showing a side view of a vacuum delivery device according to some embodiments of the present disclosure;

[0044] Figure 3A A schematic diagram showing a structure of a vacuum fixing chamber at an angle according to some embodiments of the present disclosure;

[0045] Figure 3B A schematic diagram showing the structure of the vacuum fixing chamber from another angle according to some embodiments of the present disclosure;

[0046] Figure 3C A schematic diagram showing the internal structure of a vacuum fixing chamber according to some embodiments of the present disclosure is shown;

[0047] Figure 4 A schematic diagram showing the structure of the cooperation between the double-limit guide rail mounting plate assembly and the guide rail according to some embodiments of the present disclosure;

[0048] Figure 5 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;

[0049] In the above drawings, the reference numerals represent:

[0050] 1000-Vacuum treatment system

[0051] 100-Vacuum Delivery Device

[0052] 110-Vacuum fixed chamber

[0053] 111-Front flange

[0054] 112-Rear flange

[0055] 113-Charging port

[0056] 114-Blind plate

[0057] 115a-Single V-type pulley assembly

[0058] 115b-Multi-V pulley assembly

[0059] 116-Angle valve installation port

[0060] 117a, 117b- window installation port 120- bellows

[0061] 121-Front end flange

[0062] 122-Rear end flange

[0063] 130-Backend components

[0064] 131-Transfer three-way

[0065] 132-Fixing pin

[0066] 133-Adapter

[0067] 134-Water pipe connection assembly

[0068] 135-Rear end reducer straight through

[0069] 136-High Voltage Electrode

[0070] 137-Feedthrough Assembly

[0071] 138-Screw

[0072] 140-Guide Rail

[0073] 150-Charging assembly

[0074] 160-Linear Drive Assembly

[0075] 161-Slide Rail

[0076] 162-Slider

[0077] 163-Motor

[0078] 164-Screw

[0079] 170-Front end variable diameter straight-through cavity

[0080] 200-Vacuum treatment chamber 300-Gate valve DETAILED DESCRIPTION

[0081] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0082] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the front end, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the rear end, the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0083] Figure 1 shows an exploded schematic diagram of a vacuum delivery device 100 according to some embodiments of the present disclosure; Figure 2 A side structural schematic diagram of a vacuum delivery device 100 according to some embodiments of the present disclosure is shown.

[0084] like Figure 1 and Figure 2 As shown, the vacuum delivery device 100 may include a vacuum fixed chamber 110, a bellows 120, a rear end assembly 130, a guide rail 140, a charging assembly 150, and a linear drive assembly 160. The vacuum fixed chamber 110 may include a front end flange port 111 and a rear end flange port 112. The bellows 120 may include a front end flange 121 and a rear end flange 122, and the front end flange 121 of the bellows 120 is vacuum-sealed and connected to the rear end flange port 112 of the vacuum fixed chamber 110. The front end portion of the rear end assembly 130 may be vacuum-sealed and connected to the rear end flange 122 of the bellows 120. The guide rail 140 is disposed inside the vacuum fixed chamber 110 and the bellows 120, and the rear end portion of the guide rail 140 is fixedly connected to the rear end assembly 130. The charging assembly 150 is connected to the front end portion of the guide rail 140. The linear drive assembly 160 is connected to the bellows 120 and is used to drive the bellows 120 to expand and contract so as to drive the rear end assembly 130 and the guide rail 140 to move.

[0085] In some embodiments, Figure 1As shown, the linear drive assembly 160 may include a slide rail 161, a slider 162, a motor 163, a lead screw 164, and a nut (not shown in the figure). The front end of the slide rail 161 is fixedly connected to the front end flange 121 of the bellows 120 (for example, the bottom of the front end flange 121), for example, it can be fixedly connected to the bottom of the front end flange 121 through a mounting plate. The slider 162 is fixedly connected to the rear end flange 122 of the bellows 120, for example, it is fixedly connected to the bottom of the rear end flange 122. The rear end of the lead screw 164 is connected to the output end of the motor 163. The nut is threadedly connected to the lead screw 164, and the nut is fixedly connected to the slider 162 (for example, it can be fixedly set inside or at the bottom of the slider 162), which is used to drive the rear end flange 122 of the bellows 120 to move back and forth on the slide rail 161.

[0086] In some embodiments, the charging assembly 150 and the vacuum guide rail 140 may be detachably connected via screws.

[0087] In some embodiments, the output end of the motor 163 and the rear end of the lead screw 164 can also be connected through a coupling, and the motor 163 rotates to drive the lead screw 164 to rotate, drive the nut to move linearly, and drive the rear end flange 122 of the bellows 120 to slide forward and backward on the slide rail 161, thereby driving the rear end assembly 130 and the guide rail 140 to drive the loading assembly 150 forward or backward. In addition, those skilled in the art can understand that the loading assembly 150 can also be driven forward or backward by manually rotating the lead screw.

[0088] Figure 3A A schematic structural diagram showing an angle of the vacuum fixing chamber 110 according to some embodiments of the present disclosure; Figure 3B A schematic structural diagram showing another angle of the vacuum fixing chamber 110 according to some embodiments of the present disclosure; Figure 3C A schematic diagram of the internal structure of the vacuum fixing chamber 110 according to some embodiments of the present disclosure is shown.

[0089] like Figure 3A and Figure 1 As shown, the vacuum fixing chamber 110 may include a charging port 113, a blind plate 114 (see Figure 1 The loading port 113 can be disposed at the upper end of the vacuum fixing chamber 110 for loading materials. The blind plate 114 is detachably connected to the loading port 113. When the vacuum delivery device 100 exits the vacuum processing chamber, the blind plate 114 can be opened to load or replace materials into the loading assembly 150 through the loading port 113, thereby eliminating the need to damage the vacuum processing chamber (e.g. Figure 5 The vacuum environment of the vacuum processing chamber 200 is shown.

[0090] In some embodiments, Figure 1As shown, the blind plate 114 and the loading port 113 of the vacuum fixing chamber 110 can be detachably connected through a meniscus assembly (e.g., a plate-shaped nut), such as a CF200 meniscus assembly. Of course, other methods or other types of meniscus assemblies can also be used to connect the blind plate 114 and the loading port 113.

[0091] In some embodiments, the vacuum fixture chamber 110 may further include at least one guide rail mounting plate assembly for placing the guide rail 140, such as Figure 3C The guide rail mounting plate assembly 115a, 115b shown. The guide rail mounting plate assembly may include a mounting plate disposed in the vacuum fixing chamber and at least one pulley rotatably disposed on the mounting plate, such as Figure 3C At least one pulley of at least one guide rail mounting plate assembly is used to guide and limit the track 140.

[0092] like Figure 3C and Figure 2 As shown, in some embodiments, the guide rail mounting plate assembly may include at least one double-limit guide rail mounting plate assembly, for example, the guide rail mounting plate assembly 115b. The double-limit guide rail mounting plate assembly 115b includes a plurality of pulleys disposed on both sides of the guide rail 140 to guide and limit the guide rail 140 on both sides of the guide rail 140, such as Figure 2 and Figure 4 shown.

[0093] The guide rail mounting plate assembly may further include at least one single-position limiting guide rail mounting plate assembly, for example, guide rail mounting plate assembly 115a. The single-position limiting guide rail mounting plate assembly 115a includes at least one pulley disposed on a single side of the guide rail 140 to guide and limit the guide rail 140 on a single side of the guide rail 140, such as Figure 2 and Figure 4 shown.

[0094] In some embodiments, Figure 2 and Figure 3C As shown, the double-limit guide rail mounting plate assembly 115b includes multiple pairs of V-shaped pulleys arranged on the upper and lower sides of the guide rail 140, and the single-limit guide rail mounting plate assembly 115a includes at least one V-shaped pulley arranged on the lower side of the guide rail. The single-limit guide rail mounting plate assembly 115a is arranged at intervals at the front end of the double-limit guide rail mounting plate assembly 115b.

[0095] Figure 4 FIG. 1 is a schematic diagram showing the structure of the dual-position limiting guide rail mounting plate assembly 115b and the guide rail 140 according to some embodiments of the present disclosure. Figure 4 As shown, the guide rail 140 may include side protrusions that cooperate with the V-type pulleys. Figure 4 As shown, the double-limit guide rail mounting plate assembly 115b limits the guide rail 140 from both the upper and lower directions. For example, the guide rail 140 is Figure 4The upper and lower directions shown include protrusions, which are engaged in the V-shaped grooves of the upper and lower V-shaped pulleys of the double-limit guide rail mounting plate assembly 115b, so that the guide rail 140 can move more smoothly and accurately along the vacuum fixed chamber 110 and the bellows 120 under the drive of the linear drive assembly 160. The single-limit guide rail mounting plate assembly 115a and the double-limit guide rail mounting plate assembly 115b are spaced apart inside the vacuum fixed chamber 110, as shown in FIG. Figure 2 and Figure 3C As shown, the movement smoothness and accuracy of the linear drive assembly 160 and the guide rail 140 can be further increased.

[0096] Those skilled in the art will appreciate that although Figure 2 Only one double-limit guide rail mounting plate assembly 115b and one single-limit guide rail mounting plate assembly 115a are shown, the single-limit guide rail mounting plate assembly 115a is arranged at the distal end of the vacuum delivery device 100, and the double-limit guide rail mounting plate assembly 115b is arranged at the proximal end of the vacuum delivery device 100, but the guide rail mounting plate assembly may also include other numbers of double-limit guide rail mounting plate assemblies 115b and single-limit guide rail mounting plate assemblies 115a, and the single-limit guide rail mounting plate assembly 115a may also be arranged at the proximal end of the vacuum delivery device 100, and the double-limit guide rail mounting plate assembly 115b may also be arranged at the distal end of the vacuum delivery device 100. However, those skilled in the art may understand that by arranging the single-limit guide rail mounting plate assembly 115a at intervals at the front end of the double-limit guide rail mounting plate assembly 115b, the motion stability of the guide rail 140 may be increased, so that the guide rail 140 can bear a greater load.

[0097] like Figure 3A , 3B and Figure 3C As shown, in some embodiments, the vacuum fixing chamber 110 may further include an angle valve installation port 116 ( Figure 3B ), at least one window installation opening, such as Figure 3A The window mounting opening 117a shown and the Figure 3C The front flange opening 111 of the vacuum fixing chamber 110 can also be used to install a gate valve (for example, Figure 5The gate valve 300 shown in the figure). The gate valve can be used to vacuum isolate the vacuum fixed chamber 110 (for example, to vacuum isolate it from the vacuum processing chamber). When it is necessary to load or replace the loading assembly 150, the loading assembly 150 can be returned to the vacuum fixed chamber 110, and the gate valve can be closed to vacuum isolate the vacuum fixed chamber 110 from the vacuum processing chamber (for example, the MBE vacuum processing chamber) without destroying the vacuum environment of the vacuum processing chamber. Remove the blind plate 114, and load or replace the material into the loading assembly 150 through the loading port 113. After the loading or replacing of the material is completed, install the blind plate 114, open the gate valve, and connect the vacuum fixed chamber 110 with the vacuum processing chamber, so that the loading assembly 150 can enter the vacuum processing chamber for loading operations. The entire process does not need to destroy the vacuum environment of the vacuum processing chamber, which is convenient and quick. In some embodiments, such as Figure 1 and Figure 2 As shown, the vacuum delivery device 100 may further include a front-end variable diameter straight-through cavity 170. The front-end flange opening of the front-end variable diameter straight-through cavity 170 is vacuum-sealed connected to the rear-end flange opening 112 of the vacuum fixing cavity 110, and the rear-end flange opening of the front-end variable diameter straight-through cavity 170 is vacuum-sealed connected to the front-end flange 121 of the bellows 120.

[0098] like Figure 1 As shown, in some embodiments, the front flange opening of the front variable diameter straight-through cavity 170 and the rear flange opening 112 of the vacuum fixing cavity 110 can be detachably connected through a meniscus assembly (e.g., a CF200 meniscus assembly). The rear flange opening of the front variable diameter straight-through cavity 170 and the front flange of the bellows 120 can be detachably connected through a bolt fastening assembly (e.g., a CF63 bolt fastening assembly). Of course, other methods can also be used to connect the front variable diameter straight-through cavity 170 and the vacuum fixing cavity 110 with the bellows 120.

[0099] In some embodiments, Figure 1 As shown, the rear end assembly 130 may include a transfer tee 131 and at least one fixing pin 132. The front end flange port of the transfer tee 131 is vacuum-sealedly connected to the rear end flange 122 of the bellows 120. At least one fixing pin 132 is disposed in the transfer tee 131 assembly, and at least one guide rail 140 is connected to the fixing pin 132. The power of the linear motion of the linear drive assembly 160 can be transmitted to the guide rail 140 through the transfer tee 131, so that the guide rail 140 can move forward and backward, thereby realizing the forward and backward motion of the charging assembly 150.

[0100] like Figure 1As shown, in some embodiments, the front flange of the adapter tee 131 and the rear flange of the bellows 120 can be detachably connected by a bolt fastening assembly (for example, a CF63 bolt fastening assembly). Of course, other methods or other types of bolt fastening assemblies can also be used to connect the front flange of the adapter tee 131 and the rear flange of the bellows 120. In addition, the fixing pin 132 and the adapter tee 131 can be fixedly connected by screws 138, such as Figure 1 The vacuum guide rail 140 and the fixing pin 132 may also be fixedly connected by screws.

[0101] In some embodiments, Figure 1 The back-end component 130 may further include a transition piece 133 and a feed-through component 137. The transition piece 133 may include at least a first port and a second port. Figure 1 The feedthrough assembly 137 can be vacuum-sealed to a second port (e.g., the upper port as shown) of the adapter 133. The adapter 133 can also include other ports, such as Figure 1 The left and right ports shown are for other device connections.

[0102] In some embodiments, Figure 1 The rear end assembly 130 may also include a water pipe connection assembly 134, a rear end reducer 135 and a high voltage electrode 136. The front end of the water pipe connection assembly 134 is vacuum-sealed to the rear end flange of the adapter tee 131. The front end of the rear end reducer 135 is connected to the rear end of the water pipe connection assembly 134. The high voltage electrode 136 is fixedly connected to the rear end of the reducer 135.

[0103] In some embodiments, the adapter 133 and the adapter tee 131 can be fixedly connected through a meniscus assembly (e.g., a CF40 meniscus assembly). The water pipe connection assembly 134, the adapter tee 131 and the rear end reducer straight-through 135 can be detachably connected through a meniscus assembly (e.g., a CF63 meniscus assembly). The high-voltage electrode 136 and the rear end reducer straight-through 135 can be fixedly connected by screws. The feedthrough assembly 137 and the adapter 133 can be detachably connected through a meniscus assembly 15 (e.g., a CF40 meniscus assembly). It will be appreciated by those skilled in the art that the above components can also be detachably or fixedly connected in other ways.

[0104] In some embodiments, the rear end reducer 135 may be a CF40 reducer or other types of reducers.

[0105] Figure 5 FIG. 1 is a schematic structural diagram of a vacuum processing system 1000 according to some embodiments of the present disclosure.

[0106] like Figure 5 As shown, the vacuum processing system 1000 may include a vacuum processing chamber 200 and a vacuum delivery device 100 disclosed in any one of the embodiments. The vacuum processing chamber 200 may include a window. The vacuum processing chamber 200 may be any suitable vacuum processing chamber, such as an MBE vacuum processing chamber. The front flange port 111 of the vacuum fixing chamber 110 of the vacuum delivery device 100 may be vacuum-sealed and connected to the window of the vacuum processing chamber 200, so as to deliver materials into the vacuum processing chamber 200.

[0107] In some embodiments, the vacuum processing system 1000 may further include a gate valve 300. The gate valve 300 may be installed at a position such as Figure 3C The gate valve 300 is disposed between the vacuum processing chamber 200 and the vacuum fixing chamber 110 of the vacuum delivery device 100 to isolate the vacuum processing chamber 200 from the vacuum fixing chamber 110 by vacuum.

[0108] In some embodiments, the front end of the gate valve 300 is detachably connected to the window of the vacuum processing chamber through a CF200 bolt fastening assembly; the rear end of the gate valve 300 is detachably connected to the front end flange port 111 of the vacuum fixing chamber 110 through a CF200 bolt fastening assembly.

[0109] When it is necessary to load or replace the material in the loading assembly 150, the loading assembly 150 can be returned to the vacuum fixed chamber 110, and the gate valve 300 can be closed to vacuum-isolate the vacuum fixed chamber 110 from the vacuum processing chamber 200 without destroying the vacuum environment of area B in the vacuum processing chamber 200. Remove the blind plate 114, and load or replace the material into the loading assembly 150 through the loading port 113. After the loading or replacement is completed, install the blind plate 114, open the gate valve 300, and connect the vacuum fixed chamber 110 with the vacuum processing chamber 200, so that the loading assembly 150 can enter the vacuum processing chamber 200, enter area B from area A, and perform the loading operation. The whole process does not need to destroy the vacuum environment of the vacuum processing chamber 200, but only needs to destroy the vacuum environment of area A, and has little effect on the vacuum degree of area B, making loading or replacement convenient and quick.

[0110] like Figure 5 As shown, in some embodiments, the charging assembly 150 may be a crucible assembly, and the vacuum delivery device 100 transports the Ebeam crucible in ultra-high vacuum from area A to area B through the linear guide rail 140 .

[0111] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum delivery device, characterized in that include: The vacuum fixing chamber includes a front flange opening and a rear flange opening. A bellows, comprising a front end flange and a rear end flange, wherein the front end flange of the bellows is vacuum-sealed and connected to the rear end flange of the vacuum fixing chamber; A rear end assembly, the front end of which is vacuum-sealedly connected to the rear end flange of the bellows; A guide rail is provided inside the vacuum fixing cavity and the bellows, and the rear end of the guide rail is fixedly connected to the rear end assembly; a charging assembly connected to the front end of the guide rail; and A linear drive assembly is connected to the bellows and is used to drive the bellows to expand and contract so as to drive the rear end assembly and the guide rail to move.

2. The vacuum delivery device according to claim 1, characterized in that The linear drive assembly comprises: A slide rail, the front end of which is fixedly connected to the front end flange of the bellows; A slider fixedly connected to the rear end flange of the bellows; Motor; A lead screw, the rear end of which is connected to the output end of the motor; and A nut is threadedly connected to the lead screw and fixedly connected to the slider, and is used to drive the rear end flange of the bellows to move back and forth on the slide rail.

3. The vacuum delivery device according to claim 1, characterized in that The vacuum fixing chamber comprises: A loading port, disposed at the upper end of the vacuum fixing chamber, for loading materials; and A blind plate is detachably connected to the charging port.

4. The vacuum delivery device according to claim 1, characterized in that The vacuum fixing chamber also includes at least one guide rail mounting plate assembly for placing the guide rail. The guide rail mounting plate assembly includes a mounting plate arranged in the vacuum fixing chamber and at least one pulley rotatably arranged on the mounting plate. The at least one pulley of the at least one guide rail mounting plate assembly is used to guide and limit the guide rail.

5. The vacuum delivery device according to claim 4, characterized in that The at least one rail mounting plate assembly comprises: At least one double-limit guide rail mounting plate assembly, the double-limit guide rail mounting plate assembly comprising a plurality of pulleys disposed on both sides of the guide rail to guide and limit the guide rail on both sides of the guide rail; and / or At least one single-position limiting guide rail mounting plate assembly, wherein the single-position limiting guide rail mounting plate assembly comprises at least one pulley disposed on a single side of the guide rail to guide and limit the guide rail on the single side of the guide rail.

6. The vacuum delivery device according to claim 5, characterized in that The double-limit guide rail mounting plate assembly includes multiple pairs of V-shaped pulleys arranged on the upper and lower sides of the guide rail, the single-limit guide rail mounting plate assembly includes at least one V-shaped pulley arranged on the lower side of the guide rail, the single-limit guide rail mounting plate assembly is arranged at intervals at the front end of the double-limit guide rail mounting plate assembly, and the guide rail includes side protrusions that cooperate with the V-shaped pulleys.

7. The vacuum delivery device according to claim 1, characterized in that The front flange opening of the vacuum fixing chamber is used to install a gate valve; and / or The vacuum delivery device also includes a front-end variable diameter straight-through cavity, the front-end flange opening of the front-end variable diameter straight-through cavity is vacuum-sealedly connected to the rear-end flange opening of the vacuum fixing cavity, and the rear-end flange opening of the front-end variable diameter straight-through cavity is vacuum-sealedly connected to the front-end flange of the bellows.

8. The vacuum delivery device according to claim 1, characterized in that The backend components include: A transfer tee, the front end flange of which is vacuum-tightly connected to the rear end flange of the bellows; and At least one fixing pin is arranged in the transfer tee, and the guide rail is connected to the fixing pin.

9. The vacuum delivery device according to claim 8, characterized in that The backend components also include: The adapter comprises at least a first port and a second port, wherein the first port is vacuum-sealedly connected to the middle flange port of the adapter tee; and a feed-through assembly, vacuum-tightly connected to the second port of the adapter; and / or The backend components also include: A water pipe connection assembly, the front end of which is vacuum-sealedly connected to the flange opening at the rear end of the adapter tee; The rear end is reduced in diameter and straight, and the front end is connected to the rear end of the water pipe connecting assembly; and The high voltage electrode is fixedly connected to the rear end portion of the variable diameter straight-through portion.

10. A vacuum processing system, characterized in that: include: a vacuum processing chamber including a window; The vacuum delivery device according to any one of claims 1 to 9, wherein the front flange of the vacuum fixing chamber of the vacuum delivery device is vacuum-sealedly connected to the window of the vacuum processing chamber for delivering materials into the vacuum processing chamber; and The gate valve is arranged between the vacuum processing chamber and the vacuum fixing chamber of the vacuum delivery device, and is used for vacuum-isolating the vacuum processing chamber from the vacuum fixing chamber.

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