Furnace door device and diffusion furnace equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a furnace door device and diffusion furnace equipment, the furnace door device comprises a furnace door assembly capable of sealing a furnace mouth, a driving assembly and a protection assembly, the furnace door assembly is connected to the output end of the driving assembly, and the driving assembly comprises a first driving mechanism and a second driving mechanism; the first driving mechanism is used for driving the furnace door assembly to reciprocate in the first direction, and the second driving mechanism is used for driving the furnace door assembly to reciprocate in the second direction, so that the furnace door assembly has a closed state for closing the furnace opening and an open state far away from the furnace opening; the protection assembly moves along with the furnace door assembly, when the furnace door assembly is in an open state, the protection assembly shields the first driving mechanism and / or the second driving mechanism, and when the furnace door assembly is in a closed state, the protection assembly is far away from the first driving mechanism and / or the second driving mechanism. The furnace door device can effectively protect the driving assembly, regular inspection and maintenance are facilitated, and the reliability of diffusion furnace equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a furnace door device and diffusion furnace equipment. Background Art

[0002] Tube furnace is an important equipment for semiconductor heat treatment processes such as low pressure chemical vapor deposition (LPCVD) and diffusion. Before the process starts, the furnace door needs to be opened to put the boat into the furnace and then closed; after the process is completed, the furnace door needs to be opened again to take out the boat that has completed the processing process.

[0003] Existing drive structures for furnace door switches mostly use a swing-type door opening, which drives the furnace door to rotate relative to the furnace body through a connecting rod mechanism to open or close the furnace door. The drive structure of the above-mentioned swing-type door opening is relatively complex and large in size, and the furnace door rotation process requires a large space, so that sufficient space needs to be reserved in the height direction of the reactor. In addition, the process temperature in the furnace can exceed one thousand degrees Celsius. After the furnace door is opened, both the furnace and the furnace door will generate heat radiation to the drive structure, which can easily cause damage to the drive structure and reduce its service life. And as a high-precision structure, the drive structure needs to be maintained regularly. Utility Model Content

[0004] The purpose of the utility model is to provide a furnace door device and a diffusion furnace equipment. The furnace door device can solve the problems that the existing driving structure for the furnace door switch is large in size, the rotation of the furnace door requires a large space to be reserved in the height direction of the reaction furnace, and the heat radiation in the furnace and the furnace door will cause damage to the driving structure and reduce the service life. The diffusion furnace equipment with the above-mentioned furnace door device has a driving component that occupies a small space and can isolate the heat radiation of the furnace door component, which is easy to perform regular maintenance and improves the reliability of the diffusion furnace equipment.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] In a first aspect, a furnace door device is provided, comprising a furnace door assembly, wherein the furnace door assembly can close a furnace opening of a furnace body assembly, the furnace door device also comprising a driving assembly and a protective assembly, the furnace door assembly is connected to an output end of the driving assembly, the driving assembly comprises a first driving mechanism and a second driving mechanism, the first driving mechanism is used to drive the furnace door assembly to reciprocate along a first direction, and the second driving mechanism is used to drive the furnace door assembly to reciprocate along a second direction, so that the furnace door assembly has a closed state closing the furnace opening and an open state away from the furnace opening; the protective assembly moves with the furnace door assembly, when the furnace door assembly is in an open state, the protective assembly blocks the first driving mechanism and / or the second driving mechanism, and when the furnace door assembly is in a closed state, the protective assembly is away from the first driving mechanism and / or the second driving mechanism.

[0007] In one embodiment, the first direction extends along the axial direction of the furnace body assembly, the second direction is perpendicular to the first direction, the second drive mechanism is connected to the output end of the first drive mechanism, the furnace door assembly is connected to the output end of the second drive mechanism, and the protective assembly is used to shield or stay away from the second drive mechanism.

[0008] In one embodiment, the protective assembly includes a shielding plate extending along the second direction, one end of the shielding plate is connected to the output end of the second driving mechanism, and the furnace door assembly is detachably connected to the other end of the shielding plate.

[0009] In one embodiment, the shielding plate comprises a first shielding plate and a second shielding plate arranged in parallel along the first direction, and the furnace door assembly is detachably connected to the second shielding plate; and / or,

[0010] The protection assembly further comprises a mounting frame, the furnace door assembly is detachably connected to the mounting frame, the shielding plate is provided with a liquid receiving tray, the liquid receiving tray is provided with a liquid receiving groove, and along the axial direction of the furnace body assembly, the liquid receiving groove faces the furnace door assembly; and / or,

[0011] The protection component also includes reinforcing ribs, and the reinforcing ribs are arranged on the shielding plate.

[0012] In one embodiment, the mounting frame is provided with a hanging groove and a first mounting hole, the furnace door assembly comprises a furnace door and a hanging bolt connected to each other, the furnace door is provided with a second mounting hole, and the hanging bolt is movably connected to the hanging groove so that the second mounting hole corresponds to the first mounting hole; and / or,

[0013] The mounting frame has a first adjusting mechanism and / or a second adjusting mechanism and / or a third adjusting mechanism, the first adjusting mechanism is used to adjust the verticality of the furnace door assembly relative to the axial direction of the furnace body assembly, the second adjusting mechanism is used to adjust the position of the furnace door assembly relative to the baffle plate along the second direction, and the third adjusting mechanism is used to adjust the position of the furnace door assembly relative to the baffle plate along the third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0014] In one embodiment, the second driving mechanism is a rodless cylinder, and the protective component also includes a mounting frame with an opening. The rodless cylinder is embedded in the mounting frame, and the baffle plate is detachably connected to the piston part of the rodless cylinder. The piston part drives the baffle plate to reciprocate and block the opening to shield the second driving mechanism.

[0015] In one embodiment, at least one of the mounting frame and the shielding plate is provided with a first buffer member, and when the shielding plate reciprocates along the second direction, the first buffer member is used to abut against and buffer the shielding plate; and / or,

[0016] The driving assembly also includes a support frame, the first driving mechanism is arranged on the support frame, the first driving mechanism drives the installation frame to reciprocate along the first direction, at least one of the installation frame and the support frame is provided with a second buffer member, when the installation frame reciprocates along the first direction, the second buffer member is used to abut and buffer the installation frame.

[0017] In one embodiment, the first driving mechanism and the second driving mechanism are both driving cylinders, and the driving assembly further includes a first micro-switch mechanism and a second micro-switch mechanism, the first micro-switch mechanism is communicatively connected to the first driving mechanism, and the second micro-switch mechanism is communicatively connected to the second driving mechanism.

[0018] In one embodiment, the protection component further includes a protection cover, and the protection cover is arranged outside the first micro switch mechanism or the second micro switch mechanism.

[0019] In a second aspect, a diffusion furnace device is provided, comprising the furnace door device as described above, wherein the diffusion furnace device further comprises a furnace body assembly with a furnace opening at one end, and the furnace door device is used to block the furnace opening.

[0020] Beneficial effects of the utility model:

[0021] The furnace door device and diffusion furnace equipment provided by the utility model include a driving component and a protective component. The furnace door component is connected to the output end of the driving component. The driving component includes a first driving mechanism and a second driving mechanism. The first driving mechanism is used to drive the furnace door component to move back and forth along the first direction, and the second driving mechanism is used to drive the furnace door component to move back and forth along the second direction, so that the furnace door component has a closed state of closing the furnace opening and an open state away from the furnace opening; the first driving mechanism and the second driving mechanism act independently of each other to simplify the structure, and the furnace door component moves linearly relative to the furnace body component. Compared with the rotational action, the linear movement of the furnace door component in two directions reduces the occupied space, and there is no need to reserve a large working space for the furnace door device. The protective component moves with the furnace door component. When the furnace door component is in the open state, the protective component blocks the first driving mechanism and / or the second driving mechanism, isolates the heat radiation generated in the furnace or the furnace door component, avoids the damage of the first driving mechanism and the second driving mechanism caused by high temperature, and ensures the service life of the first driving mechanism and the second driving mechanism. When the furnace door assembly is in a closed state, the protection assembly is away from the first drive mechanism and / or the second drive mechanism, and does not block the first drive mechanism and the second drive mechanism, which is convenient for regular inspection and maintenance of the first drive mechanism and the second drive mechanism. The diffusion furnace equipment has the above-mentioned furnace door device, which simplifies the structure, does not need to reserve a large working space, can effectively protect the drive assembly and is convenient for regular inspection and maintenance, thereby improving the reliability of the diffusion furnace equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the furnace door device provided by an embodiment of the utility model in an open state;

[0023] Figure 2 It is a structural schematic diagram of the furnace door device provided by the embodiment of the utility model in a closed state (without the furnace door assembly);

[0024] Figure 3 It is a partial structural top view of the furnace door device provided by the embodiment of the utility model in a closed state;

[0025] Figure 4 It is a partial structural top view of the furnace door device provided by an embodiment of the utility model in an open state.

[0026] In the figure:

[0027] 1. driving assembly; 11. first driving mechanism; 111. first guide member; 12. second driving mechanism; 121. second guide member; 13. supporting frame; 14. first micro switch mechanism; 15. second micro switch mechanism;

[0028] 2. Protective assembly; 21. Shielding plate; 211. First shielding plate; 212. Second shielding plate; 213. Liquid receiving tray; 214. Reinforcement rib; 22. Mounting frame; 221. Hanging slot; 222. First mounting hole; 223. First adjustment mechanism; 2231. First adjustment bolt; 224. Second adjustment mechanism; 2241. Second adjustment bolt; 2242. First adjustment waist-shaped hole; 225. Third adjustment mechanism; 2251. Third adjustment bolt; 2252. Second adjustment waist-shaped hole; 23. Mounting frame; 24. First buffer; 25. Second buffer; 26. Protective cover;

[0029] 100. Furnace door assembly; 101. Hanging bolt. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0031] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0034] like Figure 1 and Figure 2 As shown, this embodiment first provides a furnace door device, which includes a furnace door assembly 100. The furnace door assembly 100 can close the furnace opening of a furnace body assembly (not shown in the figure). The furnace body assembly has a reaction chamber that can accommodate a boat, and the reaction chamber is connected to the furnace opening. The boat enters the reaction chamber through the furnace opening.

[0035] The furnace door device also includes a driving component 1 and a protection component 2. The furnace door component 100 is connected to the output end of the driving component 1. The driving component 1 includes a first driving mechanism 11 and a second driving mechanism 12. The first driving mechanism 11 is used to drive the furnace door component 100 to reciprocate along the first direction, and the second driving mechanism 12 is used to drive the furnace door component 100 to reciprocate along the second direction, so that the furnace door component 100 has a closed state of closing the furnace opening and an open state away from the furnace opening. The first driving mechanism 11 and the second driving mechanism 12 act independently of each other to simplify the structure. In addition, the furnace door component 100 moves linearly relative to the furnace body component. Compared with the rotational movement, the linear movement of the furnace door component 100 in two directions reduces the occupied space, and there is no need to reserve a large working space for the furnace door device. The first driving mechanism 11 and the second driving mechanism 12 can use cylinders, linear modules or motors as power sources, and this embodiment does not make specific restrictions.

[0036] The protection component 2 moves with the oven door component 100. When the oven door component 100 is in the open state, the protection component 2 blocks the first driving mechanism 11 and / or the second driving mechanism 12 (refer to Figure 4 ), isolating the heat radiation generated in the furnace or the furnace door assembly 100, avoiding damage to the first drive mechanism 11 and the second drive mechanism 12 caused by high temperature, and ensuring the service life of the first drive mechanism 11 and the second drive mechanism 12. When the furnace door assembly 100 is in the closed state, the protection assembly 2 is away from the first drive mechanism 11 and / or the second drive mechanism 12 (refer to Figure 3 ), the first driving mechanism 11 and the second driving mechanism 12 will not be blocked, and regular inspection and maintenance of the first driving mechanism 11 and the second driving mechanism 12 are convenient.

[0037] It should be noted that the protection component 2 can only block a driving mechanism that is closer to the furnace door component 100, which can be the first driving mechanism 11 or the second driving mechanism 12, or the protection component 2 can block both the first driving mechanism 11 and the second driving mechanism 12 at the same time.

[0038] In one embodiment, the first direction extends along the axial direction of the furnace assembly, and the second direction is perpendicular to the first direction. Figure 1 and Figure 2 The second drive mechanism 12 is connected to the output end of the first drive mechanism 11, and the furnace door assembly 100 is connected to the output end of the second drive mechanism 12. The second drive mechanism 12 serves as an intermediate transmission mechanism. The first drive mechanism 11 drives the second drive mechanism 12 to drive the furnace door assembly 100 to reciprocate along the first direction. The second drive mechanism 12 directly drives the furnace door assembly 100 to reciprocate along the second direction. Therefore, the second drive mechanism 12 is closer to the furnace door assembly 100, and the protection assembly 2 is used to shield or stay away from the second drive mechanism 12, thereby simplifying the structure of the protection assembly 2.

[0039] Specifically, the protection assembly 2 includes a shielding plate 21, which extends along the second direction, one end of which is connected to the output end of the second driving mechanism 12, and the furnace door assembly 100 is detachably connected to the other end of the shielding plate 21. Since the radial dimension of the furnace door assembly 100 is relatively large, the shielding plate 21 serves as a protection structure on the one hand, and as a supporting structure of the furnace door assembly 100 on the other hand, so as to meet the large travel requirement of the furnace door assembly 100 in the second direction.

[0040] Since the shielding plate 21 is longer in the second direction, in order to increase the structural strength, the shielding plate 21 includes a first shielding plate 211 and a second shielding plate 212 arranged in parallel along the first direction, and the furnace door assembly 100 is detachably connected to the second shielding plate 212 to reduce the deformation risk of the shielding plate 21. The first shielding plate 211 and the second shielding plate 212 are connected by fasteners such as bolts.

[0041] Furthermore, a reinforcing rib 214 may be added to the protective assembly 2, and the reinforcing rib 214 is arranged on the shielding plate 21 to increase the structural strength of the shielding plate 21. This embodiment does not limit the location and specific shape of the reinforcing rib 214. Since the weight of the furnace door assembly 100 is relatively large, a reinforcing rib 214 may be arranged on the side of the second shielding plate 212 away from the furnace door assembly 100 to increase the load-bearing capacity of the second shielding plate 212.

[0042] In one embodiment, in order to facilitate the connection between the protective component 2 and the furnace door component 100, the protective component 2 also includes a mounting frame 22, and the mounting frame 22 is arranged on the shielding plate 21. The furnace door component 100 is detachably connected to the mounting frame 22, and the mounting frame 22 supports the furnace door component 100.

[0043] After the furnace door assembly 100 is opened, there may be acid liquid above the furnace door assembly 100, and there is a risk of acid liquid dripping, so the shielding plate 21 is provided with a liquid receiving pan 213, and the liquid receiving pan 213 is provided with a liquid receiving groove. Along the axial direction of the furnace body assembly, the liquid receiving groove faces the furnace door assembly 100, and can receive the acid liquid dripping from the furnace door assembly 100, so as to avoid corrosion to the driving assembly 1 and surrounding equipment.

[0044] Since the weight of the oven door assembly 100 is relatively large, the mounting frame 22 is provided with a hanging groove 221 and a first mounting hole 222. The oven door assembly 100 includes an oven door and a hanging bolt 101 connected to each other. The oven door is provided with a second mounting hole. The hanging bolt 101 can be movably connected to the hanging groove 221 so that the second mounting hole corresponds to the first mounting hole 222. In this way, the hanging bolt 101 and the oven door can be connected first, and the oven door assembly 100 can be hung in the hanging groove 221 by the hanging bolt 101, so that the oven door assembly 100 can be slightly moved so that the second mounting hole on the oven door is aligned with the first mounting hole 222 on the mounting frame 22, and the oven door assembly 100 and the mounting frame 22 are detachably connected.

[0045] In one embodiment, the mounting frame 22 has a first adjustment mechanism 223 and / or a second adjustment mechanism 224 and / or a third adjustment mechanism 225. The first adjustment mechanism 223 is used to adjust the verticality of the furnace door assembly 100 relative to the axial direction of the furnace body assembly. The adjustment of this verticality enables the furnace door assembly 100 to be closely attached to the furnace opening in the entire circumference, thereby increasing the sealing performance of the furnace door assembly 100. Specifically, the first adjustment mechanism 223 includes at least three first adjustment bolts 2231 that are not arranged in a colinear manner. The first adjustment bolts 2231 pass through the mounting frame 22 and are threadedly connected to the furnace door assembly 100. Since at least three first adjustment bolts 2231 that are not arranged in a colinear manner can confirm a plane, the verticality of the furnace door assembly 100 relative to the axial direction of the furnace body assembly can be adjusted by adjusting the threaded lengths of different first adjustment bolts 2231 on the furnace door assembly 100.

[0046] The second adjustment mechanism 224 is used to adjust the position of the furnace door assembly 100 relative to the baffle plate 21 along the second direction. Specifically, the second adjustment mechanism 224 includes a first adjustment waist-shaped hole 2242 provided on the mounting frame 22. The length of the first adjustment waist-shaped hole 2242 extends along the second direction. The second adjustment bolt 2241 passes through the first adjustment waist-shaped hole 2242 and is threadedly connected to the baffle plate 21. By adjusting the position of the second adjustment bolt 2241 in the first adjustment waist-shaped hole 2242, the position of the mounting frame 22 relative to the baffle plate 21 can be adjusted along the second direction, thereby adjusting the position of the furnace door assembly 100 relative to the baffle plate 21 in the second direction, so that when the baffle plate 21 drives the furnace door assembly 100 to move along the second direction, the furnace door assembly 100 can be accurately aligned with the furnace opening in the second direction. This adjustment structure is suitable for fine-tuning the position of the furnace door assembly 100 in the second direction when the stroke of the second driving mechanism 12 is fixed; it is also suitable for furnace body assemblies of different sizes, thereby improving the versatility of the furnace door device.

[0047] The third adjustment mechanism 225 is used to adjust the position of the furnace door assembly 100 relative to the baffle plate 21 along the third direction. The first direction, the second direction and the third direction are perpendicular to each other, that is, the third adjustment bolt 2251 is the height direction of the furnace body assembly. Specifically, the third adjustment mechanism 225 includes a second adjustment waist-shaped hole 2252 provided on the mounting frame 22, the length of the second adjustment waist-shaped hole 2252 extends along the third direction, and the third adjustment bolt 2251 passes through the second adjustment waist-shaped hole 2252 and is threadedly connected to the furnace door assembly 100. The position of the third adjustment bolt 2251 in the second adjustment waist-shaped hole 2252 can be adjusted along the third direction, thereby adjusting the position of the furnace door assembly 100 relative to the baffle plate 21 in the third direction, so that when the baffle plate 21 drives the furnace door assembly 100 to move, the furnace door assembly 100 can be accurately aligned with the furnace opening in the third direction.

[0048] In one embodiment, the second drive mechanism 12 is a rodless cylinder, and the protective assembly 2 also includes a mounting frame 23 with an opening, and the rodless cylinder is embedded in the mounting frame 23. The rodless cylinder has a compact structure, saves installation space, and is suitable for the working environment of the furnace door device. The baffle plate 21 is detachably connected to the piston part of the rodless cylinder, and the piston part drives the baffle plate 21 to reciprocate and block the opening to block the second drive mechanism 12, thereby forming an entire circumferential isolation protection for the second drive mechanism 12, and the protective effect is better. When the baffle plate 21 moves and moves away from the fixed structure of the second drive mechanism 12, the second drive mechanism 12 can be inspected and repaired through the opening, and the operation is convenient.

[0049] Since the stroke of the second driving mechanism 12 is relatively long, second guide members 121 are arranged in parallel on the side of the rodless cylinder, and a slider is arranged on the back of the shielding plate 21, and the slider can slide along the second guide member 121. The second guide member 121 can guide and support the shielding plate 21 to improve the movement reliability of the shielding plate 21.

[0050] In one embodiment, at least one of the mounting frame 23 and the shielding plate 21 is provided with a first buffer 24, and when the shielding plate 21 reciprocates along the second direction, the first buffer 24 is used to abut against and buffer the shielding plate 21. The first buffer 24 is a flexible block and can be installed on the mounting frame 23 or the shielding plate 21; when the second driving mechanism 12 fails, the shielding plate 21 contacts the mounting frame 23 through the first buffer 24, avoiding direct impact force between the shielding plate 21 and the mounting frame 23, and reducing damage to the shielding plate 21.

[0051] In order to realize the installation of the first driving mechanism 11, the driving assembly 1 also includes a support frame 13, the first driving mechanism 11 is arranged on the support frame 13, the first driving mechanism 11 drives the installation frame 23 to reciprocate along the first direction, and the installation frame 23 drives the second driving mechanism 12 to reciprocate along the first direction.

[0052] Similarly, in order to improve the safety of the installation frame 23 moving in the first direction, at least one of the installation frame 23 and the support frame 13 is provided with a second buffer 25, and when the installation frame 23 reciprocates along the first direction, the second buffer 25 is used to abut against and buffer the installation frame 23. When the first driving mechanism 11 fails, the installation frame 23 contacts the support frame 13 through the second buffer 25, avoiding direct impact force between the installation frame 23 and the support frame 13, thereby reducing damage to the installation frame 23.

[0053] In one embodiment, the first driving mechanism 11 uses a driving cylinder, and the mounting frame 23 is connected to the piston rod of the driving cylinder. A first guide member 111 is also provided on the support frame 13. The first guide member 111 and the driving cylinder used by the first driving mechanism 11 are arranged parallel to each other, and a sliding block slidably connected to the first guide member 111 is also provided on the mounting frame 23. Since the mounting frame 23 is heavy, the first guide member 111 provides movement guidance and support for the mounting frame 23.

[0054] The driving assembly 1 also includes a first micro-switch mechanism 14 and a second micro-switch mechanism 15. The first micro-switch mechanism 14 is communicatively connected to the first driving mechanism 11, and the second micro-switch mechanism 15 is communicatively connected to the second driving mechanism 12. Compared with the magnetic switch, the first micro-switch mechanism 14 and the second micro-switch mechanism 15 have better reliability in a high temperature environment, and the switch control of the cylinder is achieved through the contact between the micro-switch and the micro-touch plate, without the risk of magnetic failure. The specific structure of the first micro-switch mechanism 14 and the second micro-switch mechanism 15 and the control principle of the cylinder are prior arts in the field, and are not described in detail in this embodiment.

[0055] In order to improve the protection performance of the first micro-switch mechanism 14 and the second micro-switch mechanism 15, the protection assembly 2 further includes a protection cover 26, which is arranged outside the first micro-switch mechanism 14 or the second micro-switch mechanism 15. Two second micro-switch mechanisms 15 are arranged within the travel of the shielding plate 21, one of which is closer to the furnace door assembly 100 and has a greater risk, so the protection cover 26 is arranged outside the second micro-switch mechanism 15.

[0056] This embodiment also provides a diffusion furnace device, the diffusion furnace device has the above-mentioned furnace door device, the diffusion furnace device also includes a furnace body assembly with a furnace opening, and the driving component 1 of the furnace door device drives the furnace door assembly 100 to close or open the furnace opening. The first driving mechanism 11 and the second driving mechanism 12 of the furnace door device act independently of each other, simplifying the structure, and the furnace door assembly 100 is a linear motion relative to the furnace body assembly. Compared with the rotational motion, the linear motion of the furnace door assembly 100 in two directions reduces the occupied space, and the diffusion furnace device does not need to reserve a large working space. The protective component 2 moves with the furnace door assembly 100. When the furnace door assembly 100 is in an open state, the protective component 2 blocks the first driving mechanism 11 and / or the second driving mechanism 12, isolates the heat radiation generated in the furnace or the furnace door assembly 100, avoids the damage of the first driving mechanism 11 and the second driving mechanism 12 caused by high temperature, and ensures the service life of the first driving mechanism 11 and the second driving mechanism 12. When the furnace door assembly 100 is in a closed state, the protective assembly 2 is away from the first drive mechanism 11 and / or the second drive mechanism 12, and does not block the first drive mechanism 11 and the second drive mechanism 12, which facilitates regular inspection and maintenance of the first drive mechanism 11 and the second drive mechanism 12, thereby improving the reliability of the diffusion furnace equipment.

[0057] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A furnace door device, comprising a furnace door assembly (100), wherein the furnace door assembly (100) is capable of closing a furnace opening of a furnace body assembly, and is characterized in that: The furnace door device further comprises a driving component (1) and a protection component (2); the furnace door component (100) is connected to the output end of the driving component (1); the driving component (1) comprises a first driving mechanism (11) and a second driving mechanism (12); the first driving mechanism (11) is used to drive the furnace door component (100) to move back and forth along a first direction; the second driving mechanism (12) is used to drive the furnace door component (100) to move back and forth along a second direction, so that the furnace door component (100) has a closed state for closing the furnace opening and an open state for being away from the furnace opening; the protection component (2) moves with the furnace door component (100); when the furnace door component (100) is in an open state, the protection component (2) blocks the first driving mechanism (11) and / or the second driving mechanism (12); when the furnace door component (100) is in a closed state, the protection component (2) is away from the first driving mechanism (11) and / or the second driving mechanism (12); 2. The furnace door device according to claim 1, characterized in that: The first direction extends along the axial direction of the furnace body assembly, the second direction is perpendicular to the first direction, the second drive mechanism (12) is connected to the output end of the first drive mechanism (11), the furnace door assembly (100) is connected to the output end of the second drive mechanism (12), and the protection assembly (2) is used to shield or stay away from the second drive mechanism (12).

3. The furnace door device according to claim 2, characterized in that: The protection component (2) comprises a shielding plate (21), the shielding plate (21) extending along the second direction, one end of the shielding plate (21) connected to the output end of the second driving mechanism (12), and the furnace door component (100) is detachably connected to the other end of the shielding plate (21).

4. The furnace door device according to claim 3, characterized in that: The shielding plate (21) comprises a first shielding plate (211) and a second shielding plate (212) arranged in parallel along the first direction, and the furnace door assembly (100) is detachably connected to the second shielding plate (212); and / or, The protection assembly (2) further comprises a mounting frame (22), the furnace door assembly (100) is detachably connected to the mounting frame (22), the shielding plate (21) is provided with a liquid receiving pan (213), the liquid receiving pan (213) is provided with a liquid receiving groove, and along the axial direction of the furnace body assembly, the liquid receiving groove faces the furnace door assembly (100); and / or, The protection component (2) further comprises a reinforcing rib (214), wherein the reinforcing rib (214) is arranged on the shielding plate (21).

5. The furnace door device according to claim 4, characterized in that: The mounting frame (22) is provided with a hanging groove (221) and a first mounting hole (222); the furnace door assembly (100) comprises a furnace door and a hanging bolt (101) connected to each other; the furnace door is provided with a second mounting hole; the hanging bolt (101) is movably connected to the hanging groove (221) so that the second mounting hole corresponds to the first mounting hole (222); and / or, The mounting frame (22) has a first adjusting mechanism (223) and / or a second adjusting mechanism (224) and / or a third adjusting mechanism (225); the first adjusting mechanism (223) is used to adjust the verticality of the furnace door assembly (100) relative to the axial direction of the furnace body assembly; the second adjusting mechanism (224) is used to adjust the position of the furnace door assembly (100) relative to the baffle plate (21) along the second direction; the third adjusting mechanism (225) is used to adjust the position of the furnace door assembly (100) relative to the baffle plate (21) along the third direction; the first direction, the second direction and the third direction are perpendicular to each other.

6. The furnace door device according to claim 3, characterized in that: The second driving mechanism (12) is a rodless cylinder, and the protective component (2) also includes a mounting frame (23) with an opening. The rodless cylinder is embedded in the mounting frame (23), and the shielding plate (21) is detachably connected to the piston part of the rodless cylinder. The piston part drives the shielding plate (21) to move back and forth and block the opening to shield the second driving mechanism (12).

7. The furnace door device according to claim 6, characterized in that: At least one of the mounting frame (23) and the shielding plate (21) is provided with a first buffer (24), and when the shielding plate (21) reciprocates along the second direction, the first buffer (24) is used to abut against and buffer the shielding plate (21); and / or, The driving assembly (1) further comprises a support frame (13), the first driving mechanism (11) being arranged on the support frame (13), the first driving mechanism (11) driving the mounting frame (23) to move back and forth along the first direction, at least one of the mounting frame (23) and the support frame (13) being provided with a second buffer (25), when the mounting frame (23) moves back and forth along the first direction, the second buffer (25) being used to abut against and buffer the mounting frame (23).

8. The furnace door device according to any one of claims 1 to 7, characterized in that: The first drive mechanism (11) and the second drive mechanism (12) are both drive cylinders, and the drive assembly (1) further comprises a first micro-switch mechanism (14) and a second micro-switch mechanism (15), wherein the first micro-switch mechanism (14) is communicatively connected to the first drive mechanism (11), and the second micro-switch mechanism (15) is communicatively connected to the second drive mechanism (12).

9. The furnace door device according to claim 8, characterized in that: The protection component (2) further comprises a protection cover (26), wherein the protection cover (26) is arranged outside the first micro-switch mechanism (14) or the second micro-switch mechanism (15).

10. Diffusion furnace equipment, characterized in that, The furnace door device comprises the furnace door device as claimed in any one of claims 1 to 9, wherein the diffusion furnace equipment further comprises a furnace body assembly having a furnace opening, and the driving assembly (1) of the furnace door device drives the furnace door assembly (100) to close or open the furnace opening.

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