HVPE equipment heater assembly protection device

Abstract

The utility model relates to the technical field of HVPE equipment, in particular to a heater assembly protection device of the HVPE equipment. According to the technical scheme, the heating device comprises a growth area located at the bottom of the HVPE equipment, a heater assembly supporting rod is installed in the growth area, a heater assembly is installed at the top of the heater assembly supporting rod, a driving motor is arranged at the bottom of the growth area, the output end of the driving motor is connected with a supporting column, a carrying disc is installed at the top of the supporting column, and the heating assembly is installed on the carrying disc. A quartz protective sleeve located on the outer ring of the supporting column is mounted in the growth area in a sleeving manner; a first pipeline is installed in the quartz protective sleeve in a penetrating mode, and a reinforcing assembly used for installing the supporting column and the carrying disc is arranged between the top of the supporting column and the carrying disc. The heater assembly is novel and compact in structure, the heater assembly is protected, so that the service life of the assembly is prolonged, meanwhile, the effect of stably installing the carrying disc is achieved, and driving of the supporting column is more stable.

Description

Technical Field

[0001] The utility model relates to the technical field of HVPE equipment, in particular to a protective device for a heater component of an HVPE equipment. Background Art

[0002] HVPE is translated into Chinese as "Hydride Vapor Phase Epitaxy"; the existing heating method for the growth zone is: the outer wall of the quartz tube in the growth zone is wrapped with a resistance wire for heating, and the heat is transmitted to the internal carrier and substrate seeds by heat radiation to provide the temperature required for growth. Disadvantages: Because the heat is radiated from the outside to the inside, unnecessary energy loss will occur; and as the area of ​​the carrier and substrate increases, the distance from the external heater will also cause a temperature difference between the center and the edge, which is not conducive to growth temperature control. However, if the heating component is placed directly on the bottom of the carrier, the reaction gas is highly corrosive and will cause damage to the heating components, so the heating component cannot be directly installed in the reaction chamber. In view of the above-mentioned problems, the present application proposes a heater component applied to the bottom of the growth zone of the HVPE equipment to improve the heating efficiency, and through special design, a protective structure to protect the heater from gas corrosion. Summary of the invention

[0003] The utility model aims to solve the problems existing in the background technology and proposes a protective structure applied to the bottom heater assembly of the growth zone of the HVPE equipment to improve the heating efficiency and protect the heater from being corroded by gas through special design.

[0004] The technical solution of the utility model is as follows: a protective device for a heater assembly of an HVPE device, comprising a growth zone located at the bottom of the HVPE device, a heater assembly support rod installed in the growth zone, a heater assembly installed on the top of the heater assembly support rod, a drive motor is provided at the bottom of the growth zone, a support column is connected to the output end of the drive motor, a carrier is installed on the top of the support column, and a quartz protective sleeve located on the outer circle of the support column is installed in the growth zone;

[0005] A first pipe is installed in the interior of the quartz protective sleeve, and a reinforcement component for mounting the top of the support column and the carrier is provided between the top of the support column and the carrier.

[0006] A sliding hole is provided on the top of the support column, and the reinforcement component includes a first clamping rod and a sliding sleeve hole slidably installed in the sliding hole. A mounting groove corresponding to the top of the support column is provided at the bottom of the carrier plate, and clamping grooves corresponding to the first clamping rod and the second clamping rod are provided on both sides of the mounting groove.

[0007] Optionally, a guide groove is provided at the top of the sliding hole, and a guide slider is fixedly connected to the outer ring of one end of the second clamping rod, and the guide slider is slidably arranged in the guide groove.

[0008] Optionally, a sliding sleeve hole is provided in the second clamping rod, a spring is fixedly connected to an inner wall of one end of the sliding sleeve hole, and the other end of the spring is fixedly connected to the first clamping rod.

[0009] Optionally, the ends of the first clamping rod and the second clamping rod that are away from each other are both arc surfaces.

[0010] Optionally, the mounting groove and the top of the support column are rectangular structures.

[0011] Optionally, a flow controller for monitoring nitrogen is installed on the first pipeline, and a second pipeline for exhaust gas discharge is also installed on one side of the growth area.

[0012] Optionally, a through hole is opened on the top of the quartz protective sleeve, and the outer ring of the support column is not in contact and sealed with the inner wall of the through hole.

[0013] Compared with the prior art, the utility model has the following beneficial technical effects:

[0014] The utility model passes nitrogen through the added first pipeline and flow controller while the growth zone is heated, with the purpose of introducing nitrogen into the semi-enclosed space in the quartz protective sleeve, that is, into the part of the heater component, and during the process, controls the nitrogen flow rate so that the pressure of the semi-enclosed space is slightly higher than the pressure of the reaction chamber, so that the nitrogen can overflow through the place that is not completely sealed, thereby preventing corrosive gases from entering the part of the heater component, thereby achieving the purpose of protecting the heater component;

[0015] The utility model uses the installation groove and the clamping groove opened at the bottom of the carrier plate, and the mutual elastic setting of the second clamping rod and the first clamping rod, so as to play a limiting role when the carrier plate is clamped with the top of the support column, so that the rotation of the carrier plate driven by the support column is more stable, and the stable operation of the equipment is achieved;

[0016] In summary, the utility model has a novel and compact structure, protects the heater assembly, thereby extending the service life of the assembly, and at the same time has the effect of stably installing the carrier plate, and the driving of the support column is more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Provide a three-dimensional schematic diagram of the utility model;

[0018] Figure 2 Given Figure 1 A front view schematic diagram of

[0019] Figure 3 Given Figure 1 A cross-sectional schematic diagram of

[0020] Figure 4 Given Figure 3A front view schematic diagram of .

[0021] Reference numerals:

[0022] 1. Growth zone; 2. Flow controller; 3. First pipeline; 4. Quartz protective sleeve; 5. Driving motor;

[0023] 6. Support column; 61. Sliding hole; 62. Guide groove;

[0024] 7. Heater assembly; 71. Heater assembly support rod;

[0025] 8. Carrying plate; 81. Mounting slot; 82. Card slot;

[0026] 9. reinforcement assembly; 91. first clamping rod; 92. second clamping rod; 93. sliding sleeve hole; 94. spring; 95. guide slider;

[0027] 10. The second pipeline. DETAILED DESCRIPTION

[0028] The technical solution of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0029] The components of the embodiments of the present disclosure generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present disclosure provided in the drawings is not intended to limit the scope of the present disclosure claimed, but merely represents selected embodiments of the present disclosure.

[0030] Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present disclosure.

[0031] In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0033] Example 1

[0034] like Figure 1-4 As shown, the HVPE equipment heater assembly protection device proposed by the utility model includes a growth zone 1 located at the bottom of the HVPE equipment, a heater assembly support rod 71 is installed in the growth zone 1, and a heater assembly 7 is installed on the top of the heater assembly support rod 71. The heater assembly 7 can be heated by a resistance wire, or an electric heating plate can be heated by RF radio frequency. In this embodiment, the electric heating plate is used for heating. The heater assembly 7 and the heater assembly support rod 71 are connected to the external control by wires and cables, and are sealed by rubber rings, etc. to ensure that the growth zone 1 is isolated from the outside air; a driving motor 5 is provided at the bottom of the growth zone 1, and a supporting column 6 is connected to the output end of the driving motor 5. A carrier plate 8 is installed on the top of the supporting column 6. A quartz protective sleeve 4 located on the outer ring of the supporting column 6 is installed in the growth zone 1, and the contact surface at the bottom of the quartz protective sleeve 4 does not need to be strictly sealed; a through hole is opened on the top of the quartz protective sleeve 4, and the outer ring of the supporting column 6 is not in contact with the inner wall of the through hole. The connection between the supporting column 6 and the driving motor 5 is sealed by a magnetic fluid.

[0035] A first pipeline 3 is installed inside the quartz protective sleeve 4 , and a flow controller 2 for monitoring nitrogen is installed on the first pipeline 3 . A second pipeline 10 for exhaust gas discharge is also installed on one side of the growth area 1 .

[0036] In this embodiment, the object placed on the carrier 8 is heated by the arrangement of the heater assembly 7 and the heater assembly support rod 71, and the carrier 8 is stably rotated by driving the support column 6 through the driving motor 5. The contact surface between the bottom of the quartz protective sleeve 4 and the bottom of the reaction chamber does not need to be strictly sealed. While heating is being performed, the amount of nitrogen entering is controlled by the flow controller 2. When the process is in progress, the nitrogen flow rate is controlled so that the pressure of the semi-enclosed space formed by the quartz protective sleeve 4 is slightly higher than the pressure of the reaction chamber. In this way, the nitrogen can overflow through the incompletely sealed area, thereby preventing corrosive gases from entering the heater assembly 7, thereby achieving the purpose of protecting the heater assembly 7.

[0037] Example 2

[0038] like Figure 1-4As shown, based on the embodiment 1, a reinforcement component 9 for mounting the support column 6 and the carrier plate 8 is provided between the top of the support column 6 and the carrier plate 8. The installation stability of the support column 6 and the carrier plate 8 is improved by the provision of the reinforcement component 9, so that a more stable restriction is obtained during the rotation and driving process of the support column 6. A sliding hole 61 is provided at the top of the support column 6, and a guide groove 62 is provided at the top of the sliding hole 61. The reinforcement component 9 includes a first clamping rod 91 and a sliding sleeve hole 93 slidably mounted in the sliding hole 61. The bottom of the carrier plate 8 is provided with a mounting groove 81 corresponding to the top of the support column 6. The mounting groove 81 and the top of the support column 6 are rectangular structures. Combined with the design of the rectangular structure, the top end of the support column 6 is clamped with the mounting groove 81.

[0039] like Figure 3 and Figure 4 As shown, both sides of the mounting groove 81 are provided with slots 82 corresponding to the first clamping rod 91 and the second clamping rod 92 respectively, and the ends of the first clamping rod 91 and the second clamping rod 92 that are away from each other are both arc surfaces; a sliding sleeve hole 93 is provided in the second clamping rod 92, and a spring 94 is fixedly connected to the inner wall of one end of the sliding sleeve hole 93, and the other end of the spring 94 is fixedly connected to the first clamping rod 91. When the carrier 8 is installed downwardly corresponding to the mounting groove 81 and the top of the support column 6, the spring 94 is compressed between the second clamping rod 92 and the first clamping rod 91 under the squeezing action of the inner walls on both sides of the mounting groove 81, shortening the total length of the first clamping rod 91 and the second clamping rod 92. When the first clamping rod 91 and the second clamping rod 92 correspond to the positions of the clamping groove 82, the spring 94 rebounds, so that the first clamping rod 91 and the second clamping rod 92 are clamped in the corresponding clamping groove 82, thereby achieving the effect of reinforcing the installation of the carrier 8 and the top of the support column 6.

[0040] At the same time, the outer ring of one end of the second clamping rod 92 is fixedly connected with a guide slider 95, and the guide slider 95 is slidably arranged in the guide groove 62. When the first clamping rod 91 and the first clamping rod 91 are compressed along the inner wall of the sliding hole 61, the guide slider 95 and the guide groove 62 play a role of limiting guidance.

[0041] The above-mentioned specific embodiments are only several optional embodiments of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.

Claims

1. A HVPE equipment heater assembly protection device, comprising a growth zone (1) located at the bottom of the HVPE equipment, a heater assembly support rod (71) installed in the growth zone (1), a heater assembly (7) installed on the top of the heater assembly support rod (71), characterized in that: A driving motor (5) is arranged at the bottom of the growth zone (1), the output end of the driving motor (5) is connected to a support column (6), a carrier plate (8) is installed on the top of the support column (6), and a quartz protective sleeve (4) is installed in the growth zone (1) and is located on the outer ring of the support column (6); A first pipe (3) is installed in the interior of the quartz protective sleeve (4), and a reinforcement component (9) for mounting the top of the support column (6) and the carrier plate (8) is provided between the top of the support column (6) and the carrier plate (8); The top of the support column (6) is provided with a sliding hole (61), the reinforcement component (9) comprises a first clamping rod (91) and a sliding sleeve hole (93) slidably mounted in the sliding hole (61), the bottom of the carrier (8) is provided with a mounting groove (81) corresponding to the top of the support column (6), and both sides of the mounting groove (81) are provided with clamping grooves (82) corresponding to the first clamping rod (91) and the second clamping rod (92) respectively.

2. The HVPE equipment heater assembly protection device according to claim 1, characterized in that: A guide groove (62) is provided at the top of the sliding hole (61); a guide slider (95) is fixedly connected to the outer ring of one end of the second clamping rod (92); and the guide slider (95) is slidably arranged in the guide groove (62).

3. The HVPE equipment heater assembly protection device according to claim 2, characterized in that: A sliding sleeve hole (93) is provided in the second clamping rod (92), a spring (94) is fixedly connected to the inner wall of one end of the sliding sleeve hole (93), and the other end of the spring (94) is fixedly connected to the first clamping rod (91).

4. The HVPE equipment heater assembly protection device according to claim 3, characterized in that: The ends of the first clamping rod (91) and the second clamping rod (92) that are away from each other are both arc surfaces.

5. The HVPE equipment heater assembly protection device according to claim 1, characterized in that: The mounting groove (81) and the top of the support column (6) are rectangular structures.

6. The HVPE equipment heater assembly protection device according to claim 1, characterized in that: A flow controller (2) for monitoring nitrogen is installed on the first pipeline (3), and a second pipeline (10) for exhaust gas discharge is also installed on one side of the growth area (1).

7. The HVPE equipment heater assembly protection device according to claim 1, characterized in that: A through hole is provided at the top of the quartz protective sleeve (4), and the outer ring of the support column (6) is not in contact with the inner wall of the through hole and is sealed.

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