Stable device for vacuum laminating system of silicon-based OLED (Organic Light Emitting Diode) micro display device

Abstract

The utility model discloses a stabilizing device for a vacuum laminating system of a silicon-based OLED (Organic Light Emitting Diode) micro display device, which comprises a detection mechanism for sensing the position of a fixed disc and a reset device connected with the detection mechanism, and the reset device is arranged to adjust the position of the fixed disc in the horizontal direction and / or the vertical direction after receiving an output signal of the detection mechanism. According to the stabilizing device for the vacuum laminating system of the silicon-based OLED micro display device, the vertical and horizontal positioning of the fixed disc is controlled, so that the laminating deviation of the fixed disc caused by external force micro-vibration impact in the laminating process is avoided, the laminating precision of a laminated product reaches a process target, the yield of the product can be improved, and the reliability of the product is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of micro-displays, and specifically relates to a vacuum laminating system stabilizing device for a silicon-based OLED micro-display device. Background Art

[0002] Currently in the semiconductor micro-display industry, silicon-based OLED devices are manufactured using a silicon wafer with a thickness of about 775um as the substrate and a glass with a thickness of about 500um as the cover. The wafer substrate and the glass cover are aligned and bonded in a vacuum environment.

[0003] like Figure 2 As shown, during the bonding process, the fixed plate of the vacuum bonding system is easily affected by various micro-vibration shocks and causes position displacement, which leads to relative position displacement between the wafer substrate and the glass cover after bonding, seriously affecting the product yield and the seismic stability of the equipment itself.

[0004] For example, the patent document with the publication number CN106763464A discloses an active air vibration isolation unit for micro-vibration technology, which includes a base arranged on the ground, on which a vibration isolation table for placing precision instruments is arranged, and the vibration isolation table includes a top plate and a side plate; a vertical air spring is arranged between the top plate and the base; a horizontal air spring is arranged between the side plate and the base; a vertical acceleration sensor, a horizontal acceleration sensor, a vertical displacement sensor and a horizontal displacement sensor are arranged inside the space formed by the vibration isolation table and the base. The internal acceleration sensor and displacement sensor measure the vibration signal of the precision equipment on the top of the vibration isolation unit, the ground acceleration sensor measures the input signal of the ground to the precision equipment, and the external controller inflates and deflates the air valve according to the measured real-time signal, thereby changing the pressure inside the vertical air spring and the horizontal air spring, generating real-time active control force to eliminate the vibration of the precision instrument on the top of the active air vibration isolation unit, and can achieve a better vibration isolation effect. The technical solution disclosed in the patent document also cannot solve the technical problems recorded above. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vacuum lamination system stabilizing device for a silicon-based OLED micro-display device, the purpose of which is to improve the product yield.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a stabilization device for a vacuum bonding system of a silicon-based OLED microdisplay device, including a detection mechanism for sensing the position of a fixed plate and a reset device connected to the detection mechanism, wherein the reset device is configured to adjust the position of the fixed plate in the horizontal direction and / or vertical direction after receiving an output signal from the detection mechanism.

[0007] The detection mechanism includes a displacement sensor for detecting the position offset of the fixed plate and a vibration acceleration sensor for detecting the vibration impact acceleration of the fixed plate.

[0008] The resetting device comprises an elastic element, a plurality of elastic elements are provided, and the elastic elements are configured to apply an elastic force to the fixed plate along a vertical direction and / or a horizontal direction.

[0009] The elastic element includes a first air spring for applying an elastic force to the fixed plate in a vertical direction and a second air spring for applying an elastic force to the fixed plate in a horizontal direction.

[0010] The first air spring and the second air spring are connected to an air storage device.

[0011] The air storage device is connected to the electro-pneumatic converter, the electro-pneumatic converter is connected to the controller, and the controller is connected to the detection mechanism.

[0012] The utility model discloses a stabilizing device for the vacuum bonding system of a silicon-based OLED micro-display device, which controls the vertical and horizontal positioning of the fixing plate, thereby ensuring that the fixing plate will not be offset from the bonding of the substrate due to micro-vibration impacts caused by external forces during the bonding process, so that the bonding accuracy of the product after bonding reaches the process target, which can improve the product yield and increase the reliability of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] This specification includes the following drawings, which show the following contents:

[0014] Figure 1 This is a schematic diagram of the structure of the vacuum lamination system stabilization device of the silicon-based OLED micro display device of the utility model;

[0015] Figure 2 It is a schematic diagram of the relative positions of the wafer substrate and the glass cover during the bonding process;

[0016] Marked in the figure are: 1. first air spring; 2. air storage device; 3. electro-pneumatic converter; 4. controller; 5. dry air supply pipeline; 6. vibration acceleration sensor; 7. displacement sensor; 8. second air spring; 9. fixed plate; 10. ground; 11. wafer substrate; 12. glass cover. DETAILED DESCRIPTION

[0017] The specific implementation methods of the utility model are further explained in detail below with reference to the accompanying drawings through the description of embodiments, with the aim of helping technicians in the field to have a more complete, accurate and in-depth understanding of the concept and technical solution of the utility model and facilitating its implementation.

[0018] It should be noted that, in the following embodiments, the “first” and “second” mentioned do not represent an absolute distinction in structure and / or function, nor do they represent a sequential order of execution, but are merely for the convenience of description.

[0019] like Figure 1 As shown, the utility model provides a stabilization device for a vacuum bonding system of a silicon-based OLED microdisplay device, including a detection mechanism for sensing the position of a fixing plate 9 and a reset device connected to the detection mechanism, wherein the reset device is configured to adjust the position of the fixing plate 9 in the horizontal and vertical directions after receiving an output signal from the detection mechanism.

[0020] Specifically, if Figure 1 As shown, the fixing plate 9 is located above the ground 10, and the top surface of the fixing plate 9 is used to place the wafer substrate. The glass cover is located above the wafer substrate. The fixing plate 9 is supported by the resetting device to maintain a set distance between the fixing plate 9 and the ground 10 below, so as to avoid direct contact between the fixing plate 9 and the ground 10 in a vacuum environment and generate impact. Therefore, through the cooperation of the detection mechanism and the resetting device, the vertical and horizontal positioning of the fixing plate 9 can be controlled, thereby ensuring that the fixing plate 9 will not cause the substrate to be offset during the bonding process due to the micro-vibration impact of external force, so that the bonding accuracy of the product after bonding reaches the process target, the product yield is improved, and the product reliability is increased.

[0021] like Figure 1 As shown, the detection mechanism includes a displacement sensor 7 for detecting the position offset of the fixed plate 9 and a vibration acceleration sensor 6 for detecting the vibration impact acceleration of the fixed plate 9. The reset device includes a controller 4, and the vibration acceleration sensor 6 and the displacement sensor 7 are electrically connected to the controller 4, and the output signals of the vibration acceleration sensor 6 and the displacement sensor 7 are transmitted to the controller 4.

[0022] like Figure 1 As shown, the resetting device further comprises an elastic element, a plurality of elastic elements are provided, and the elastic elements are configured to apply elastic forces to the fixed plate 9 along the vertical direction and the horizontal direction.

[0023] like Figure 1As shown, in this embodiment, the elastic element includes a first air spring 1 for applying an upward elastic force to the fixed plate 9 in the vertical direction and a second air spring 8 for applying an elastic force to the fixed plate 9 in the horizontal direction. The first air spring 1 is located below the fixed plate 9, and the second air spring 8 and the fixed plate 9 are on the same horizontal line. The first air spring 1 and the second air spring 8 are in contact with the fixed plate 9. The first air spring 1 and the second air spring 8 are connected to the air storage device 2, and the air storage device 2 provides air for the first air spring 1 and the second air spring 8. The air storage device 2 is connected to the electric-pneumatic converter 3, which is a device that uses compressed air as a working medium to convert electrical energy into gas energy. The electric-pneumatic converter 3 is connected to the controller 4. The air storage device 2 is connected to the air source through the dry air supply pipeline 5, and the air source provides air to the air storage device 2.

[0024] By transmitting current to the electro-pneumatic converter 3 to follow the signal of the displacement sensor 7, the air pressure in the air storage device 2 is maintained at a predetermined pressure. According to different situations, the vertical and horizontal positioning of the fixed plate 9 is controlled to ensure that during the bonding process, the fixed plate 9 will not cause the substrate bonding to shift due to micro-vibration impacts caused by external forces, so that the bonding accuracy of the product after bonding reaches the process target, the product yield is improved, and the product reliability is increased.

[0025] The working process of the above-mentioned silicon-based OLED micro-display device vacuum bonding system stabilization device is as follows:

[0026] 1. During the vacuum bonding process, the fixed plate 9 is subjected to micro-vibration shock and loses balance;

[0027] 2. The vibration acceleration sensor 6 senses the micro-vibration impact acceleration of the fixed plate 9, and the displacement sensor 7 detects the position offset of the fixed plate 9 and feeds back to the controller 4;

[0028] 3. The controller 4 sends a signal by receiving the position offset, so that the air source supplies a fixed amount of dry air to the air storage device 2 through the dry air supply pipeline 5 to adjust the balance system;

[0029] 4. The air storage device 2 supplies a fixed amount of dry air to the first air spring 1 and the second air spring 8. The first air spring 1 and the second air spring 8 are subjected to air pressure to relatively correct the position offset of the fixed plate 9 to keep the fixed plate 9 balanced, restore the position of the fixed plate 9, and ensure the working stability of the vacuum bonding system.

[0030] The above is an exemplary description of the utility model in conjunction with the accompanying drawings. Obviously, the specific implementation of the utility model is not limited to the above-mentioned method. As long as various non-substantial improvements are made using the method concept and technical solution of the utility model; or the above concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A vacuum lamination system stabilization device for silicon-based OLED micro-display devices, characterized in that: It comprises a detection mechanism for sensing the position of the fixed plate and a reset device connected to the detection mechanism. The reset device is configured to adjust the position of the fixed plate in the horizontal direction and / or vertical direction after receiving an output signal from the detection mechanism.

2. The vacuum bonding system stabilizing device for silicon-based OLED micro-display device according to claim 1, characterized in that: The detection mechanism includes a displacement sensor for detecting the position offset of the fixed plate and a vibration acceleration sensor for detecting the vibration impact acceleration of the fixed plate.

3. The vacuum bonding system stabilizing device for silicon-based OLED micro-display device according to claim 1, characterized in that: The resetting device comprises an elastic element, a plurality of elastic elements are provided, and the elastic elements are configured to apply an elastic force to the fixed plate along a vertical direction and / or a horizontal direction.

4. The vacuum lamination system stabilizing device for silicon-based OLED micro-display device according to claim 3, characterized in that: The elastic element includes a first air spring for applying an elastic force to the fixed plate in a vertical direction and a second air spring for applying an elastic force to the fixed plate in a horizontal direction.

5. The vacuum lamination system stabilization device for silicon-based OLED micro-display device according to claim 4, characterized in that: The first air spring and the second air spring are connected to an air storage device.

6. The vacuum lamination system stabilizing device for silicon-based OLED micro-display device according to claim 5, characterized in that: The air storage device is connected to the electro-pneumatic converter, the electro-pneumatic converter is connected to the controller, and the controller is connected to the detection mechanism.

Images