Clean room

Abstract

The utility model discloses a clean room, which relates to the technical field of workshops, and comprises a chamber, which is provided with a sealing cavity, and the sealing cavity is provided with a top surface and two opposite vertical surfaces adjacent to the top surface; the air supply device is arranged on the top surface and communicates with the sealing cavity, and the air supply device is used for conveying airflow towards the bottom of the sealing cavity; the exhaust devices are arranged on the two opposite vertical faces, the exhaust devices communicate with the bottom of the sealing cavity, and the exhaust devices are used for conveying airflow in the sealing cavity to the outside; according to the technical scheme provided by the utility model, the cleanliness in the dust-free workshop is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of workshops, in particular to a clean room. Background Art

[0002] During the laser stripping process, dust will be generated inside the equipment. If these dust particles cannot be discharged in time, they will affect the propagation path of the laser in the air and affect the stripping quality. Therefore, the laser stripping process is generally carried out in a dust-free workshop.

[0003] In the traditional dust-free workshop structure, the top FFU plus exhaust fan is generally used to ensure the cleanliness of the chamber. However, this form of airflow has poor uniformity in the three directions of XYZ, and cannot ensure that the cleanliness of all areas in the chamber meets the standard, which is easy to affect the stripping quality. Utility Model Content

[0004] The main purpose of the utility model is to provide a clean room, aiming to improve the cleanliness in a dust-free workshop.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a clean room, comprising:

[0006] A chamber having a sealed cavity, wherein the chamber has a top surface and two opposite vertical surfaces adjacent to the top surface;

[0007] an air supply device, disposed on the top surface and connected to the sealed cavity, the air supply device being used to deliver clean air to the bottom of the sealed cavity;

[0008] An exhaust device is arranged on the two opposite vertical surfaces, the exhaust device is connected to the bottom of the sealed cavity, and the exhaust device is used to transport the airflow in the sealed cavity to the outside.

[0009] In one embodiment, the exhaust device comprises:

[0010] A conveying pipe, arranged on the ground and extending parallel to the vertical surface;

[0011] An exhaust pipe is arranged on a side of the delivery pipe close to the vertical surface and is communicated with the sealed cavity. A plurality of the exhaust pipes are provided, and the plurality of the exhaust pipes are arranged at intervals along the extension direction of the delivery pipe.

[0012] In one embodiment, the conveying pipe is provided with an exhaust port, and the exhaust device also includes a baffle plate, each exhaust pipe is provided with a baffle plate, and the baffle plate is provided with a flow channel, wherein the flow channel area of ​​the baffle plate away from the exhaust port is larger than the flow channel area of ​​the baffle plate close to the exhaust port.

[0013] In one embodiment, each of the wind blocking plates has a plurality of flow holes, and the plurality of flow holes form the flow channel.

[0014] In one embodiment, the clean room further comprises a refrigeration device, and the refrigeration device is arranged in the sealed cavity to adjust the ambient temperature in the sealed cavity.

[0015] In one embodiment, at least one refrigeration device is disposed at each corner end of the sealed cavity, and each refrigeration device delivers airflow toward the middle of the sealed cavity.

[0016] In one embodiment, the clean room further comprises a flow guide component, which is disposed below the air supply device, and the flow guide component separates the airflow generated by the air supply device into a first airflow and a second airflow, wherein the first airflow is close to the two opposite vertical surfaces, and the second airflow is transported toward the middle area of ​​the bottom of the sealed cavity.

[0017] In one embodiment, the guide assembly includes two parallel and spaced-apart guide plates, the two guide plates are disposed below the air supply device and extend parallel to the facade, the second airflow is formed between the two guide plates, and the first airflow and the second airflow are separated by the guide plates.

[0018] In one embodiment, at least one of the guide plates is provided with a through hole, and the through hole connects the first airflow and the second airflow.

[0019] In one embodiment, the clean room further comprises a support platform, the support platform is arranged at the bottom of the sealed cavity, the support platform has a vertically extending guide hole, and the airflow generated by the air supply device is transported to the bottom of the support platform through the guide hole; and / or

[0020] There are multiple air supply devices, and the multiple air supply devices are arranged in a rectangular array on the top surface; and / or

[0021] The air supply device comprises:

[0022] An FFU is disposed on the top surface of the chamber, the FFU has an air inlet and an air outlet, and the air outlet is communicated with the sealed chamber;

[0023] The filter dehumidifier is arranged at the air inlet of the FFU, and is used for filtering and dehumidifying the airflow passing through the air inlet.

[0024] In the technical solution of the utility model, the clean room includes a chamber, the interior of the chamber has a sealed cavity, the chamber also has a top surface and two oppositely arranged vertical surfaces adjacent to the top surface, the top surface is provided with an air supply device, the air supply device is connected with the sealed cavity, and generates a clean airflow transported toward the bottom of the sealed cavity, the two oppositely arranged vertical surfaces are provided with an exhaust device, the exhaust device is connected with the bottom of the sealed cavity, so that inside the sealed cavity, the clean airflow is transported downward from the top of the sealed cavity, changes direction after reaching the bottom, is transported horizontally, and is finally discharged from the exhaust devices arranged on the two vertical surfaces, in this process, the dust in the sealed cavity will be carried to the outside of the sealed cavity by the airflow, thereby ensuring the cleanliness of the chamber, in addition, the cooperation between the exhaust devices at the bottom of the two vertical surfaces and the air supply device on the top surface can ensure the consistency of wind speed in the space inside the sealed cavity, which is beneficial to improving the cleanliness of all areas in the sealed cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0026] Figure 1 A schematic structural diagram of an embodiment of a clean room provided by the utility model;

[0027] Figure 2 A cross-sectional schematic diagram of a clean room embodiment provided by the utility model from a top view;

[0028] Figure 3 Another cross-sectional schematic diagram of a top view of an embodiment of a clean room provided by the utility model;

[0029] Figure 4 A cross-sectional schematic diagram of a side view of an embodiment of a clean room provided by the utility model;

[0030] Figure 5 A cross-sectional schematic diagram of an embodiment of a clean room provided by the utility model from a front view perspective;

[0031] Figure 6 for Figure 5 A partial enlarged view of point A in the middle.

[0032] Description of Figure Numbers:

[0033] 100, chamber; 110, sealed chamber; 120, top surface; 130, facade; 200, air supply device; 210, FFU; 220, filter dehumidifier; 300, exhaust device; 310, delivery pipe; 320, exhaust pipe; 330, wind baffle; 331, flow hole; 400, refrigeration device; 500, guide assembly; 600, support platform; 610, guide hole.

[0034] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0037] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0038] In order to improve the cleanliness of the dust-free workshop, this technical solution proposes a clean room, including:

[0039] The chamber 100 has a sealed cavity 110 , and the chamber 100 has a top surface 120 and two opposite vertical surfaces 130 adjacent to the top surface 120 ;

[0040] The air supply device 200 is disposed on the top surface 120 and communicated with the sealed cavity 110. The air supply device 200 is used to deliver clean air flow toward the bottom of the sealed cavity 110.

[0041] The exhaust device 300 is disposed on two opposite vertical surfaces 130 . The exhaust device 300 is connected to the bottom of the sealed cavity 110 . The exhaust device 300 is used to transport the airflow in the sealed cavity 110 to the outside.

[0042] In the technical solution of the utility model, the clean room includes a chamber 100, the chamber 100 has a sealed cavity 110 inside, the chamber 100 also has a top surface 120 and two oppositely arranged vertical surfaces 130 adjacent to the top surface 120, the top surface 120 is provided with an air supply device 200, the air supply device 200 is communicated with the sealed cavity 110, and generates a clean air flow transported toward the bottom of the sealed cavity 110, and the two oppositely arranged vertical surfaces 130 are provided with an exhaust device 300, the exhaust device 300 is communicated with the bottom of the sealed cavity 110, so that in the sealed cavity 110, the air supply device 200 is connected to the sealed cavity 110. 0, the clean airflow is transported downward from the top of the sealed cavity 110, changes direction after reaching the bottom and is transported horizontally, and is finally discharged from the exhaust device 300 arranged on the two vertical surfaces 130. In this process, the dust in the sealed cavity 110 will be carried to the outside of the sealed cavity 110 by the airflow, thereby ensuring the cleanliness of the chamber 100. In addition, the cooperation between the exhaust device 300 at the bottom of the two vertical surfaces 130 and the air supply device 200 on the top surface 120 can ensure the consistency of the wind speed in the space inside the sealed cavity 110, which is beneficial to improving the cleanliness of all areas in the sealed cavity 110.

[0043] like Figures 1 to 6In one embodiment of the utility model, the clean room includes a chamber 100, which is square in shape as a whole. A sealed cavity 110 is arranged in the chamber 100, and the sealed cavity 110 is isolated from the external environment. The chamber 100 has a top surface 120 and two oppositely arranged vertical surfaces 130 adjacent to the top surface 120. An air supply device 200 is arranged on the top surface 120. The air supply device 200 can be a fan with a filtering function such as FFU210. The air outlet of the air supply device 200 is connected to the sealed cavity 110, so that an airflow flowing from the top of the sealed cavity 110 to the bottom of the sealed cavity 110 can be generated in the sealed cavity 110. In addition, an exhaust device 300 is arranged on the two opposite vertical surfaces 130. The two vertical surfaces 130 are connected to the sealed cavity 110. An exhaust device 300 is connected to a position near the bottom of the sealed cavity 110, so that when the airflow is delivered to the bottom of the sealed cavity 110, the airflow can be diverted to two opposite vertical surfaces 130 and then discharged from the two exhaust devices 300. In this process, the airflow can carry away the dust in the sealed cavity 110. In this solution, the exhaust device 300 and the air supply device 200 cooperate to generate the airflow in the sealed cavity 110, so that all areas in the sealed cavity 110 can be covered by the airflow, which is beneficial to ensure the consistency of wind speed in the space. In addition, the provision of the two exhaust devices 300 also ensures that the airflow can be discharged from the sealed cavity 110 in a timely manner, preventing the airflow from generating turbulence inside and affecting the cleanliness of the sealed cavity 110.

[0044] like Figure 2 In one embodiment of the present utility model, the exhaust device 300 includes:

[0045] The conveying pipe 310 is disposed on the ground and extends parallel to the vertical surface 130;

[0046] The exhaust pipe 320 is disposed on a side of the delivery pipe 310 close to the vertical surface 130 and communicates with the sealed cavity 110 . A plurality of exhaust pipes 320 are provided, and the plurality of exhaust pipes 320 are spaced apart along the extending direction of the delivery pipe 310 .

[0047] The delivery pipe 310 is in contact with the ground, and the delivery pipe 310 extends parallel to the facade 130. An exhaust pipe 320 is arranged in the gap between the delivery pipe 310 and the facade 130. The exhaust pipe 320 can also be in contact with the ground, and the exhaust pipe 320 and the delivery pipe 310 are arranged vertically. One end of the exhaust pipe 320 is connected to the sealed cavity 110, and the other end is connected to the delivery pipe 310. In this way, the airflow at the bottom of the sealed cavity 110 can be transported out through the exhaust pipe 320 and the delivery pipe 310. In addition, the exhaust pipe 320 is also provided with a plurality of exhaust pipes 320, and the plurality of exhaust pipes 320 are arranged along the delivery pipe 310. The exhaust ducts 320 are arranged at intervals in the extension direction, and each exhaust duct 320 is connected to a different position of the delivery duct 310. The arrangement of multiple exhaust ducts 320 can increase the flow capacity of the exhaust device 300, which is beneficial to increasing the flow rate of the sealed cavity 110 discharged by the air flow, reducing wind resistance and facilitating the discharge of the air flow. In addition, the multiple exhaust ducts 320 are connected to different positions of the sealed cavity 110, so that the air flow can be diverted to the multiple exhaust ducts 320 at the bottom of the sealed cavity 110. This process can make the air flow in the sealed cavity 110 flow more evenly, which is beneficial to further improve the consistency of the cleanliness in the sealed cavity 110.

[0048] like Figure 5 In one embodiment of the utility model, the delivery pipe 310 is provided with an exhaust port, and the exhaust device 300 further includes a baffle plate 330. Each exhaust pipe 320 is provided with a baffle plate 330, and the baffle plate 330 is provided with a flow passage, wherein the flow passage area of ​​the baffle plate 330 far from the exhaust port is larger than the flow passage area of ​​the baffle plate 330 near the exhaust port. In this solution, the delivery pipe 310 is provided with an exhaust port, and the airflow in all the exhaust pipes 320 is collected in the delivery pipe 310 and discharged from the exhaust port. Each exhaust pipe 320 is provided with a baffle plate 330, and a flow passage is provided on the baffle plate 330 for the airflow to enter the exhaust pipe 320, wherein the flow passage area of ​​the baffle plate 330 far from the exhaust port is larger than the flow passage area near the exhaust port. In this way, since the flow rate at the exhaust port is large, the flow rate near the exhaust port is large and the pressure is small, and the exhaust pipe near the exhaust port is The air flow velocity of 320 is greater, and the air flow velocity of the exhaust duct 320 far away from the exhaust port is small. Therefore, a smaller flow channel area is set at the exhaust duct 320 close to the exhaust port, and a larger flow channel area is set at the exhaust duct 320 far away from the exhaust port. The flow rates of different exhaust ducts 320 can be balanced, so that the flow rates of different exhaust ducts 320 remain consistent. In this way, the air flow can be diverted more evenly when it is diverted to multiple exhaust ducts 320, which is beneficial to further improve the consistency of cleanliness in the sealed cavity 110.

[0049] like Figure 6In one embodiment of the utility model, each wind blocking plate 330 has a plurality of flow holes 331, and the plurality of flow holes 331 form a flow channel. The plurality of flow holes 331 can be arranged in a rectangular array, so that the flow rate at each flow hole 331 can be increased, so that the dust in the sealed cavity 110 can be more easily drawn out of the sealed cavity 110, and the arrangement of the plurality of flow holes 331 can better control the air flow in the exhaust pipe 320 and the sealed cavity 110.

[0050] like Figure 2 In one embodiment of the utility model, the clean room further comprises a refrigeration device 400, which is arranged in the sealed cavity 110 to adjust the ambient temperature in the sealed cavity 110. The refrigeration device 400 can be an air conditioner or other equipment, and the supporting device can be arranged at the bottom of the sealed cavity 110 to adjust the temperature of the air in the sealed cavity 110, so as to control the temperature in the sealed cavity 110, ensure that the display screen laser stripping process can be carried out in a suitable environment, and improve the effect of laser stripping.

[0051] like Figure 2 In one embodiment of the utility model, at least one refrigeration device 400 is provided at each corner end of the sealed cavity 110, and each refrigeration device 400 delivers airflow toward the middle of the sealed cavity 110. In this solution, the sealed cavity 110 has four corner ends, and a refrigeration device 400 is provided at each corner end, and each refrigeration device 400 delivers airflow toward the middle of the sealed cavity 110, so that the airflow circulation in the sealed cavity 110 can be faster and more complete, which can not only improve the speed of temperature adjustment, but also improve the consistency of cleanliness in the sealed cavity 110.

[0052] like Figure 3 and Figure 4 In one embodiment of the utility model, the clean room further comprises a flow guide assembly 500, which is arranged below the air supply device 200. The flow guide assembly 500 separates the airflow generated by the air supply device 200 into a first airflow and a second airflow, wherein the first airflow is close to the two opposite vertical surfaces 130, and the second airflow is transported toward the middle area of ​​the bottom of the sealed cavity 110. The flow guide assembly 500 may be a flow guide fan or the like, and the flow guide assembly 500 is arranged below the air supply device 200, and can separate the airflow generated by the air supply device 200 into a first airflow and a second airflow, wherein the first airflow can be transported downwardly in accordance with the vertical surface 130 until it is discharged from the exhaust device 300 at the bottom, and the second airflow can be transported toward the central area of ​​the bottom of the sealed cavity 110, so that the airflow generated by the air supply device 200 can be uniformly transported toward the bottom of the sealed cavity 110, so that all areas in the sealed cavity 110 can be covered by the airflow, which is conducive to further improving the cleanliness in the sealed cavity 110 and the consistency of the cleanliness of each area.

[0053] like Figure 3 and Figure 4 In one embodiment of the utility model, the guide assembly 500 includes two parallel and spaced guide plates, the two guide plates are arranged below the air supply device 200 and extend parallel to the vertical surface 130, the second airflow is formed between the two guide plates, and the first airflow and the second airflow are separated by the guide plates. The present embodiment provides an implementation of the guide component 500, which is configured as two parallel and spaced guide plates. In this way, when the air supply device 200 transports airflow to the bottom of the sealed cavity 110, the guide plate can divert the airflow, wherein the airflow diverted between the guide plate and the facade 130 forms the above-mentioned first airflow, and the first airflow is transported downward in contact with the facade 130 under the joint guiding action of the guide plate and the facade 130, while the airflow diverted between the two guide plates forms the above-mentioned second airflow, and the second airflow is transported downward to the central area of ​​the bottom of the sealed cavity 110 under the guiding action of the two guide plates. The present technical solution can realize the diversion of airflow by setting two guide plates, has a simple structure and low manufacturing cost, and simplifies the structural complexity of the clean room.

[0054] In one embodiment of the utility model, at least one guide plate is provided with a through hole, and the through hole connects the first airflow and the second airflow. In this solution, multiple through holes can be provided on each guide plate, so that the first airflow and the second airflow can be connected through the through hole, so that the flow rate of the first airflow and the second airflow can be consistent, which is conducive to further improving the consistency of the cleanliness of each area. In addition, when the first airflow and the second airflow pass through the through hole, they can generate lateral flow under the guiding effect of the through hole, so that the side wall of the sealed cavity 110 can be blown more fully by the first airflow and the second airflow, so that the dust on the side wall is more easily taken away by the airflow, which is conducive to further improving the cleanliness in the sealed cavity 110.

[0055] like Figure 2 In one embodiment of the utility model, the clean room further comprises a support platform 600, which is arranged at the bottom of the sealed cavity 110, and the support platform 600 has a vertically extending guide hole 610, and the airflow generated by the air supply device 200 is transported to the bottom of the support platform 600 through the guide hole 610; the support platform 600 may be a marble platform for carrying a display screen, and a plurality of vertically extending guide holes 610 are provided on the support platform 600, and the aperture of the guide hole 610 may be opened to the maximum size without affecting the required supporting capacity of the support platform 600, so that the airflow generated by the air supply device 200 can be transported downward through the guide hole 610, thereby ensuring the circulation of the airflow at the bottom of the support platform 600, which is conducive to ensuring the cleanliness in the sealed cavity 110;

[0056] In addition, if Figure 1 and Figure 3In another embodiment of the utility model, a plurality of air supply devices 200 are provided, and the plurality of air supply devices 200 are arranged in a rectangular array on the top surface 120; a plurality of air supply devices 200 are provided and arranged in a rectangular array, so that the air flow generated by the air supply device 200 can be evenly transported toward the bottom of the sealed cavity 110, thereby improving the consistency of the air flow in the sealed cavity 110, which is beneficial to further improving the cleanliness in the sealed cavity 110.

[0057] In addition, if Figure 3 In another embodiment of the present utility model, the air supply device 200 includes:

[0058] The FFU 210 is disposed on the top surface 120 of the chamber 100 . The FFU 210 has an air inlet and an air outlet, and the air outlet is communicated with the sealed chamber 110 .

[0059] The filter dehumidifier 220 is disposed at the air inlet of the FFU 210 , and is used to filter and dehumidify the airflow passing through the air inlet.

[0060] Among them, FFU210 is a fan filter unit. FFU210 can adopt a conventional model on the market. The FFU210 can filter large particles in the air entering the sealed chamber 110. The filter dehumidifier 220 arranged at the air inlet can also adopt a conventional model on the market. The setting of the filter dehumidifier 220 can make the airflow entering the sealed chamber 110 drier, and can also filter tiny particles in the airflow. The external air passes through the filter dehumidifier 220 and FFU210 in turn and enters the sealed chamber 110. In this process, large particles and tiny particles in the external air are filtered, and the external air is dehumidified, which is beneficial to improve the cleanliness of the airflow in the sealed chamber 110.

[0061] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A clean room, characterized in that: include: A chamber having a sealed cavity, wherein the chamber has a top surface and two opposite vertical surfaces adjacent to the top surface; an air supply device, disposed on the top surface and connected to the sealed cavity, the air supply device being used to deliver clean air to the bottom of the sealed cavity; An exhaust device is arranged on the two opposite vertical surfaces, the exhaust device is connected to the bottom of the sealed cavity, and the exhaust device is used to transport the airflow in the sealed cavity to the outside.

2. The clean room according to claim 1, characterized in that The exhaust device comprises: A conveying pipe, arranged on the ground and extending parallel to the vertical surface; An exhaust pipe is arranged on a side of the delivery pipe close to the vertical surface and is communicated with the sealed cavity. A plurality of the exhaust pipes are provided, and the plurality of the exhaust pipes are arranged at intervals along the extension direction of the delivery pipe.

3. The clean room according to claim 2, characterized in that: The conveying pipe is provided with an exhaust port, and the exhaust device also includes a baffle plate. Each exhaust pipe is provided with a baffle plate, and the baffle plate is provided with a flow channel, wherein the flow channel area of ​​the baffle plate away from the exhaust port is larger than the flow channel area of ​​the baffle plate close to the exhaust port.

4. The clean room according to claim 3, characterized in that Each of the wind blocking plates is provided with a plurality of flow holes, and the plurality of flow holes form the flow channel.

5. The clean room according to claim 1, characterized in that The clean room further comprises a refrigeration device, which is arranged in the sealed cavity to adjust the ambient temperature in the sealed cavity.

6. The clean room according to claim 5, characterized in that At least one refrigeration device is disposed at each corner end of the sealed cavity, and each refrigeration device delivers airflow toward the middle of the sealed cavity.

7. The clean room according to claim 1, characterized in that The clean room also includes a flow guide component, which is arranged below the air supply device. The flow guide component separates the airflow generated by the air supply device into a first airflow and a second airflow. The first airflow is close to the two opposite vertical surfaces, and the second airflow is transported toward the middle area of ​​the bottom of the sealed cavity.

8. The clean room according to claim 7, characterized in that The guide assembly includes two parallel and spaced guide plates, the two guide plates are arranged below the air supply device and extend parallel to the vertical surface, the second airflow is formed between the two guide plates, and the first airflow and the second airflow are separated by the guide plates.

9. The clean room according to claim 8, characterized in that At least one of the guide plates is provided with a through hole, and the through hole connects the first airflow and the second airflow.

10. The clean room according to claim 1, characterized in that The clean room further comprises a support platform, which is arranged at the bottom of the sealed cavity, and has a vertically extending guide hole, through which the airflow generated by the air supply device is transported to the bottom of the support platform; and / or There are multiple air supply devices, and the multiple air supply devices are arranged in a rectangular array on the top surface; and / or The air supply device comprises: An FFU is disposed on the top surface of the chamber, the FFU has an air inlet and an air outlet, and the air outlet is communicated with the sealed chamber; The filter dehumidifier is arranged at the air inlet of the FFU, and is used for filtering and dehumidifying the airflow passing through the air inlet.

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