Conductive metal film evaporation crucible polishing device

Abstract

The utility model discloses a conductive metal film evaporation crucible polishing device in the field of evaporation crucible cleaning, which comprises a polishing unit and a dust absorption template for absorbing dust, the polishing unit comprises a polishing assembly, and the polishing assembly comprises a first driving part, a sliding seat and a polishing shaft rotationally arranged on the sliding seat. The grinding shaft is connected with the driving end of the first driving part, a connecting disc is arranged at the bottom of the grinding shaft, and a grinding blade is arranged on the connecting disc; a dustproof cover is rotationally arranged on the grinding shaft and connected with a first dust suction opening of the dust suction module. The utility model solves the problem of how to conveniently remove the internal surface of the evaporation crucible so as to remove the oxide layer on the surface of the residual metal material in the evaporation crucible, and can remove the oxide layer on the surface of the residual metal material in the evaporation crucible, so that the metal material in the evaporation crucible can be evaporated smoothly, and the quality of the evaporation crucible is improved. The evaporation crucible is prevented from being scrapped due to the fact that the evaporation crucible cannot smoothly achieve material evaporation, and the production quality of the conductive metal film is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning evaporation crucibles, in particular to a conductive metal film evaporation crucible polishing device. Background Art

[0002] Conductive metal film is a polymer material with copper or aluminum layers plated on the top and bottom surfaces of substrates such as PET and PP. It has a sandwich structure and is also called a composite thin film current collector. It is a type of material with many good properties and is widely used in lithium-ion batteries, mainly as a battery current collector in lithium-ion batteries.

[0003] When the existing conductive metal film is produced by vacuum coating technology, the main method is to use a high temperature resistant container such as an evaporation crucible to hold the evaporated coating material, so as to implement the coating of the nano film. Usually, after the effective coating operation is completed, there is still residual evaporated material inside the evaporation crucible, especially the relevant metal material is easily oxidized in a high temperature environment. If the surface of the material is oxidized and evaporated again, the oxide will float on the surface of the liquid metal to form an adverse effect of shielding, thereby preventing the smooth evaporation of the evaporated material in large quantities. On the other hand, if this part of the oxide is not processed, the evaporation crucible may be scrapped due to the inability to smoothly evaporate the material.

[0004] The above defects need to be solved urgently. Utility Model Content

[0005] In order to solve the problem of how to conveniently clean the inner surface of an evaporation crucible, thereby removing the oxide layer on the surface of the remaining metal material in the evaporation crucible, the utility model provides a conductive metal film evaporation crucible polishing device.

[0006] The technical solution of the utility model is as follows:

[0007] A conductive metal film evaporation crucible grinding device, comprising a grinding unit and a dust suction module for absorbing dust, wherein the grinding unit comprises a grinding assembly, wherein the grinding assembly comprises a first driving component, a sliding seat, and a grinding shaft rotatably arranged on the sliding seat, wherein the grinding shaft is connected to the driving end of the first driving component, and a connecting plate is arranged at the bottom of the grinding shaft, and a grinding blade is arranged on the connecting plate;

[0008] A dust cover is rotatably provided on the grinding shaft, and the dust cover is connected to the first dust suction port of the dust suction module.

[0009] According to the utility model of the above solution, the grinding blade is evenly distributed with dust exhaust grooves extending from the center to the outer edge thereof.

[0010] According to the utility model of the above solution, the dust cover is provided with a second dust suction port for discharging dust, and the second dust suction port is connected to the first dust suction port of the dust suction module.

[0011] According to the above scheme of the utility model, the dust suction module includes an air suction pump and a dust suction pipe arranged at the bottom of the sliding seat, the first dust suction port is arranged on the air suction pump, and the first dust suction port is connected to the second dust suction port through the dust suction pipe.

[0012] The utility model according to the above scheme further includes a base, on which a column, a screw rod, and a second driving component are arranged, one end of the screw rod is connected to the driving end of the second driving component, and the column and the screw rod are both slidably connected to the sliding seat.

[0013] The utility model according to the above solution further comprises a clamping assembly for fixing the evaporation crucible, wherein the clamping assembly comprises a fixing groove arranged on the top of the base, and the fixing groove is located directly below the connecting plate.

[0014] According to the utility model of the above solution, an anti-slip layer is provided on the inner wall of the fixing groove.

[0015] According to the above-mentioned solution of the utility model, the material of the anti-slip layer is rubber.

[0016] According to the above-mentioned solution of the utility model, a plurality of strip-shaped protrusions are arranged around the circumference of the anti-slip layer.

[0017] According to the above-mentioned solution of the utility model, a plurality of dot-shaped protrusions are arranged around the circumference of the anti-slip layer.

[0018] According to the above-mentioned solution of the utility model, the grinding shaft is hollow inside.

[0019] The utility model according to the above scheme has the following beneficial effects:

[0020] In the above-mentioned conductive metal film evaporation crucible grinding device, the grinding shaft is driven to rotate by the first driving component, so that the grinding blade at the bottom of the grinding shaft grinds the inner surface of the evaporation crucible, thereby removing the oxide layer on the surface of the remaining metal material in the evaporation crucible, so that the metal material in the evaporation crucible can be evaporated smoothly, and the evaporation crucible can be prevented from being scrapped due to the failure to smoothly evaporate the material, thereby improving the production quality of the conductive metal film. In addition, a dust cover is rotatably provided on the grinding shaft, and the dust cover is connected to the dust collection module, which can timely absorb the dust generated during the grinding process to avoid dust, and at the same time can prevent dust from being deposited in the evaporation crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of the utility model;

[0022] Figure 2 One of the partial structural diagrams of the grinding assembly;

[0023] Figure 3 The second schematic diagram of the partial structure of the polishing component;

[0024] Figure 4 This is the third schematic diagram of the partial structure of the polishing component.

[0025] In the figure, 1. base; 2. grinding unit; 21. clamping assembly; 211. fixing groove; 212. anti-skid layer; 221. first driving component; 222. sliding seat; 223. grinding shaft; 224. connecting plate; 225. grinding blade; 2251. grinding arc surface; 226. dust cover; 2261. second suction port; 227. bearing; 228. dust exhaust slot; 3. dust suction module; 31. vacuum pump; 32. dust suction pipe; 4. column; 5. screw; 6. second driving component; 7. evaporation crucible. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0027] After the vacuum evaporation of the conductive metal film is completed, the remaining evaporated metal material in the evaporation crucible needs a long time to cool down to prevent the molten metal material from being oxidized and deteriorated. However, based on the control of energy consumption and effective production time, the vacuum chamber opening temperature is usually relatively high, so the surface of the remaining metal material is easily oxidized. If the surface of the material is oxidized and evaporates again, the oxide will cover the molten metal material at the bottom and prevent the metal material from continuing to evaporate and coat.

[0028] like Figure 1 As shown, in order to solve the above technical problems, the utility model provides a conductive metal film evaporation crucible grinding device, including a base 1, on which a grinding unit 2 and a dust collection module 3 are arranged, and the grinding unit 2 is used to clamp the evaporation crucible 7 and grind the oxide layer on the surface of the remaining metal material in the evaporation crucible 7. The dust collection module 3 is used to timely absorb the dust generated during the grinding process to avoid dust.

[0029] like Figure 1As shown, in this embodiment, the grinding unit 2 includes a clamping assembly 21 and a grinding assembly. The clamping assembly 21 includes a fixing groove 211 arranged on the top of the base 1, and the evaporation crucible 7 is placed in the fixing groove 211, so that the evaporation crucible 7 is clamped on the base 1. In addition, an anti-skid layer 212 is provided on the inner wall of the fixing groove 211, which is convenient for clamping the evaporation crucible 7 and preventing the evaporation crucible 7 from rotating relative to each other during the grinding or cleaning process. In addition, a plurality of strip-shaped protrusions (not shown in the figure) are provided on the anti-skid layer 212, that is, the anti-skid layer 212 is provided with anti-skid lines, and the strip-shaped protrusions are arranged in the circumferential direction of the anti-skid layer 212, so as to enhance the friction between the anti-skid layer 212 and the evaporation crucible 7, and prevent the evaporation crucible 7 from rotating relative to the fixing groove 211, so as to facilitate the taking and placing between the evaporation crucible 7 and the fixing groove 211. Meanwhile, the material of the anti-slip layer 212 is rubber, which further enhances the friction between the anti-slip layer 212 and the evaporation crucible 7 . Of course, in actual design, the material of the anti-slip layer 212 can be designed according to actual needs.

[0030] In an optional embodiment, the grinding unit 2 includes a clamping assembly 21 and a grinding assembly, wherein the clamping assembly 21 includes a fixing groove 211 disposed on the top of the base 1, and the evaporation crucible 7 is placed in the fixing groove 211, thereby clamping the evaporation crucible 7 on the base 1. In addition, an anti-skid layer 212 is provided on the inner wall of the fixing groove 211, so as to facilitate clamping the evaporation crucible 7 and prevent the evaporation crucible 7 from rotating relative to each other during the grinding or cleaning process. In addition, a plurality of dot-shaped protrusions are provided on the anti-skid layer 212, that is, the anti-skid layer 212 is provided with uneven clamping protrusions, and the dot-shaped protrusions are arranged in the circumferential direction of the anti-skid layer 212, thereby enhancing the friction between the anti-skid layer 212 and the evaporation crucible 7, preventing the evaporation crucible 7 from rotating relative to the fixing groove 211, and facilitating the taking and placing of the evaporation crucible 7 and the fixing groove 211. Meanwhile, the material of the anti-slip layer 212 is rubber, which further enhances the friction between the anti-slip layer 212 and the evaporation crucible 7 . Of course, in actual design, the material of the anti-slip layer 212 can be designed according to actual needs.

[0031] like Figure 1As shown, in this embodiment, the grinding assembly includes a first driving component 221, a sliding seat 222, and a grinding shaft 223 rotatably set on the sliding seat 222, the grinding shaft 223 is connected to the driving end of the first driving component 221, and a connecting plate 224 is set at the bottom of the grinding shaft 223, and a grinding blade 225 is set on the connecting plate 224. The first driving component 221 drives the grinding shaft 223 to rotate on the sliding seat 222, so that the grinding blade 225 at the bottom of the grinding shaft 223 grinds the inner surface of the evaporation crucible 7, thereby removing the oxide layer on the surface of the remaining metal material in the evaporation crucible 7, so that the metal material in the evaporation crucible 7 is evaporated smoothly, preventing the evaporation crucible 7 from being scrapped due to the failure to smoothly evaporate the material, and improving the production quality of the conductive metal film.

[0032] It should be noted that the grinding blade 225 can form contact friction grinding on the oxide layer on the surface of the remaining metal material in the evaporation crucible 7 during the rotation process, which does not limit the lower surface of the grinding blade 225 to be completely in seamless contact with the inner surface of the evaporation crucible 7.

[0033] like Figure 1 As shown, in this embodiment, the first driving component 221 can be designed as a first motor, and the first motor is connected to the grinding shaft 223 through a first bevel gear combination, so as to realize the rotation of the grinding shaft 223. Of course, in actual design, the structure of the first driving component can be designed according to actual needs. In addition, the grinding shaft 223 is hollow inside, which can reduce the dead weight of the grinding shaft 223, facilitate the rotation of the grinding shaft 223, and improve the grinding and cleaning effect of the evaporation crucible 7. In addition, the fixing groove 211 is located directly below the connecting plate 224, so that the grinding shaft 223 drives the grinding blade 225 on the connecting plate 224 to vertically grind the oxide layer on the surface of the remaining metal material in the evaporation crucible 7.

[0034] In an optional embodiment, a height detection component is provided on the grinding shaft 223, that is, when the grinding shaft 223 extends vertically toward the inner surface of the vapor-deposited crucible 7, when the grinding blade 225 first contacts the remaining metal material in the vapor-deposited crucible 7, a certain pressure will be generated. When the pressure reaches a certain value, it is considered to be a good contact record and the zero point position is calibrated. In addition, when the grinding shaft 223 continues to move downward, the displacement of the movement is controlled to be less than 0.2 mm, so as to ultimately achieve grinding of only a few microns of the surface oxide layer on the inner surface of the vapor-deposited crucible 7. It should be noted that the height detection component is a prior art, and the present utility model does not make structural and remote improvements to this part, so it will not be described in detail.

[0035] like Figure 1As shown, in this embodiment, the base 1 is also provided with a column 4, a screw 5, and a second driving component 6, one end of the screw 5 is connected to the driving end of the second driving component 6, and the column 4 and the screw 5 are both slidably connected to the sliding seat 222, and a screw pair is formed between the sliding seat 222 and the screw, so that the screw is driven by the second driving component 6, and then the lifting and lowering of the sliding seat 222 is controlled, so that the grinding shaft 223 can be both rotatably connected with the sliding seat 222 and can move up and down with the sliding seat 222, so as to adjust the displacement of the grinding shaft 223 extending into the evaporation crucible 7, and only a few microns of the surface oxide layer of the inner surface of the evaporation crucible 7 is ground. In addition, the second driving component 6 can be designed as a second motor, and the second motor is connected to the grinding shaft 223 through a second bevel gear combination, so as to drive the screw 5, thereby controlling the lifting and lowering of the sliding seat 222, and then controlling the lifting and lowering of the grinding shaft 223. Of course, in actual design, the structure of the second driving component can be designed according to actual needs.

[0036] like Figure 1 As shown, in this embodiment, a dust cover 226 is rotatably provided on the grinding shaft 223, and the dust cover 226 can be sealed and installed at the opening on the top of the evaporation crucible. The setting of the dust cover 226 allows the evaporation crucible 7 to form a space of its own, preventing the powder from escaping, and at the same time, it also has a certain fixing effect on the evaporation crucible 7. In addition, a bearing 227 is provided between the dust cover 226 and the grinding shaft 223, and the bearing 227 can be designed as a thrust bearing 227 arranged in pairs, which can ensure that the wear between the grinding shaft 223 and the dust cover 226 is reduced, and further enables the dust cover 226 to stably move with the grinding shaft 223, and at the same time, it can also enhance the negative pressure effect generated by the dust collection module 3 at the grinding position. Of course, in actual design, the structure of the bearing 227 between the dust cover 226 and the grinding shaft 223 can be designed according to actual needs.

[0037] like Figure 1 As shown, in this embodiment, the dust cover 226 is provided with a second dust suction port 2261 for dust discharge, and the second dust suction port 2261 is connected to the first dust suction port of the dust suction module 3. The dust suction module 3 includes an air suction pump 31 and a dust suction pipe 32. The air suction pump 31 is arranged at the bottom of the sliding seat 222. The first dust suction port is arranged on the air suction pump 31. The first dust suction port is connected to the second dust suction port 2261 through the dust suction pipe 32. The air suction pump 31 timely absorbs the dust generated during the grinding process of the evaporation crucible 7 through the dust suction pipe 32 and the dust suction hole to avoid dust, and at the same time, it can prevent dust from being deposited in the evaporation crucible 7.

[0038] like Figures 2 to 4As shown, in this embodiment, the grinding blade 225 is provided in one piece, which is conducive to the complete grinding and cleaning of the surface to be ground in the evaporation crucible 7. At the same time, the outer side of the bottom surface of the grinding blade 225 is provided with a grinding arc surface 2251, which can adapt to the special structure with a grinding surface to ensure close grinding. In addition, the outer wall of the entire grinding blade 225 is provided with a diamond coating to enhance the grinding ability of the grinding blade 225.

[0039] like Figures 2 to 4 As shown, in this embodiment, the grinding blade 225 is evenly distributed with dust discharge grooves 228 extending from the center to the outer edge thereof, so that the dust generated by grinding can be discharged from the dust discharge grooves 228 to the surface to be ground, and can be promptly adsorbed by the dust collection module 3 at the dust cover 226 to prevent dust from escaping. In addition, the grinding blade 225 at the dust discharge grooves 228 also forms a cutting edge, which is conducive to improving the cutting ability and grinding effect of the entire grinding blade 225.

[0040] When the utility model is used, the evaporation crucible 7 is first placed on the fixed groove 211, and then the second driving component 6 drives the screw 5 to rotate, so that the sliding seat 222 drives the grinding shaft 223 to move to the inner surface of the evaporation crucible 7 to a suitable position, and at the same time, the dust cover 226 is sealed and installed at the opening at the top of the evaporation crucible, and then the first driving component 221 drives the grinding shaft 223 to rotate, so that the grinding blade 225 grinds the oxide layer on the surface of the remaining metal material in the evaporation crucible 7, and at the same time, the vacuum pump 31 absorbs the dust generated during the grinding process of the evaporation crucible 7 through the dust suction pipe 32 and the dust suction hole. The structure of the utility model is relatively simple, and the starting grinding unit 2 and the dust suction module 3 can be integrated to form a grinding device with an exhaust function, and finally the oxide layer of several microns on the surface of the remaining metal material in the evaporation crucible 7 can be removed, and the evaporation function of the evaporation crucible 7 can be restored, which can also save energy consumption and reduce invalid evaporation time, and can achieve that the remaining material does not need to be evaporated to completion without damaging the high temperature resistant container.

[0041] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0042] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A conductive metal film evaporation crucible grinding device, characterized in that: It comprises a grinding unit and a dust collecting module for absorbing dust, wherein the grinding unit comprises a grinding assembly, and the grinding assembly comprises a first driving component, a sliding seat, and a grinding shaft rotatably arranged on the sliding seat, wherein the grinding shaft is connected to the driving end of the first driving component, and a connecting disk is arranged at the bottom of the grinding shaft, and a grinding blade is arranged on the connecting disk; A dust cover is rotatably provided on the grinding shaft, and the dust cover is connected to the first dust suction port of the dust suction module.

2. The conductive metal film evaporation crucible polishing device according to claim 1, characterized in that: The grinding blade is evenly distributed around its circumference with dust exhaust grooves extending from its center to its outer edge.

3. The conductive metal film evaporation crucible polishing device according to claim 2, characterized in that: The dust cover is provided with a second dust suction port for discharging dust, and the second dust suction port is connected to the first dust suction port of the dust suction module.

4. The conductive metal film evaporation crucible polishing device according to claim 3, characterized in that: The dust suction module includes an air suction pump and a dust suction pipe arranged at the bottom of the sliding seat, the first dust suction port is arranged on the air suction pump, and the first dust suction port is connected with the second dust suction port through the dust suction pipe.

5. The conductive metal thin film evaporation crucible polishing device according to any one of claims 1 to 4, characterized in that: It also includes a base, on which a column, a screw rod, and a second driving component are arranged, one end of the screw rod is connected to the driving end of the second driving component, and the column and the screw rod are both slidably connected to the sliding seat.

6. The conductive metal film evaporation crucible polishing device according to claim 5, characterized in that: It also includes a clamping assembly for fixing the evaporation crucible, wherein the clamping assembly includes a fixing groove arranged on the top of the base, and the fixing groove is located directly below the connecting plate.

7. The conductive metal film evaporation crucible polishing device according to claim 6, characterized in that: An anti-slip layer is provided on the inner wall of the fixing groove.

8. The conductive metal film evaporation crucible polishing device according to claim 7, characterized in that: The material of the anti-slip layer is rubber.

9. The conductive metal film evaporation crucible polishing device according to claim 7, characterized in that: A plurality of strip-shaped protrusions are arranged around the anti-slip layer.

10. The conductive metal thin film evaporation crucible grinding device according to any one of claims 7 to 9, characterized in that: A plurality of dot-shaped protrusions are arranged around the anti-slip layer.

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