Sealing structure of copper cylinder, electrode assembly and coating machine

Abstract

The utility model relates to a seal structure of copper cylinder, electrode subassembly and coating machine, including seal subassembly, seal subassembly is provided between copper cylinder and vacuum baffle, the outside of copper cylinder is coaxially provided with seal shell, seal ring and seal ring, seal shell passes through vacuum baffle, seal shell extends outside vacuum baffle, seal ring and seal ring. A plurality of sealing rings and sealing lantern rings are arranged in the sealing shell, and the sealing lantern rings are used for extruding the sealing rings. According to the utility model, the extruded and deformed sealing ring is attached to the sealing shell and the copper column to realize vacuum sealing, the sealing assembly for sealing between the copper column and the vacuum partition plate is axially extended, and the sealing shell extends out of the two ends of the vacuum partition plate by a certain length; the distance between the copper column on the outer side of the end of the sealing assembly and the vacuum partition plate is increased, and arcing caused by the fact that the distance between the copper column and the metal vacuum partition plate of the coating machine is too short is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of sealing, and in particular relates to a sealing structure of a copper column, an electrode assembly and a coating machine. Background Art

[0002] The vacuum coating machine is based on the deposition of materials in the form of atoms or molecules on the substrate or workpiece surface by heating or sputtering in a vacuum environment to form a thin film. The electrode system also plays a very critical role in the vacuum coating machine. It consists of a power supply, electrodes and electrode holders. The electrode mainly plays the role of ionizing metal materials under vacuum conditions and depositing them on the workpiece surface.

[0003] The electrode assembly undergoes electroplating process in a vacuum chamber. The vacuum chamber needs to have a through hole at the bottom for installation of the electrode system. As the main location of the coating machine, the vacuum chamber needs to maintain a good vacuum degree. The electrode bracket of the electrode assembly often uses a copper tube as the electrode bracket extending into the vacuum chamber. A sealing assembly needs to be provided for sealing between the copper tube and the bottom of the vacuum chamber to prevent external air from entering the vacuum chamber and affecting the operation of the coating machine during vacuuming.

[0004] The sealing assembly of the prior art seals the copper column at the opening of the vacuum chamber. However, the copper column is easily interfered with by the metal shell when energized, which may cause arcing of the copper column. The electrode assembly may affect the operation of the coating machine due to short circuit or abnormal current. Utility Model Content

[0005] The first aspect of the utility model aims to solve the technical problem that the sealing assembly of the prior art only seals the opening on the bottom plate of the vacuum chamber, which is easy to interfere with the metal shell when the copper column is powered on, which may cause arcing of the copper column. A sealing structure of the copper column is provided, which can extend the length of the sealing assembly at both ends of the copper column, so that the copper column will not be too close to the metal shell at the bottom of the coating machine when powered on, thereby avoiding arcing. The main concept is:

[0006] A sealing structure for a copper column includes a sealing component, which is arranged between the copper column and a vacuum diaphragm. A sealing shell, a sealing ring and a sealing ring are coaxially arranged outside the copper column. The sealing shell passes through the vacuum diaphragm and extends out of the vacuum diaphragm. A plurality of sealing rings and sealing sleeves are arranged in the sealing shell, and the sealing sleeves are used to squeeze the sealing rings. In this scheme, the sealing rings and sealing sleeves arranged in the sealing shell make the sealing shell and the copper column vacuum sealed. The sealing sleeves are respectively arranged at both ends of the sealing shell, and a plurality of sealing rings are arranged between the sealing sleeves. By squeezing the sealing rings through the sealing sleeves, the sealing rings can be compressed along the axial direction of the copper column. The sealing rings after extrusion and deformation fit the sealing shell and the copper column to achieve sealing. The sealing component used for sealing between the copper column and the vacuum diaphragm is axially extended, and the sealing shell in the sealing component passes through the vacuum diaphragm so that the sealing shell extends a certain length at both ends of the vacuum diaphragm to avoid arcing caused by the copper column being too close to the metal vacuum diaphragm of the coating machine.

[0007] Preferably, a plurality of sealing rings are arranged inside the sealing shell, and the plurality of sealing rings are arranged between the sealing rings, and positioning gaskets are arranged between the plurality of sealing rings, and the sealing rings are fluororubber sealing rings, the sealing shell is a ceramic shell, the positioning gaskets are ceramic gaskets, and the sealing rings are ceramic rings. The length of the sealing shell is increased, so that a plurality of sealing rings can be arranged inside the sealing shell. The sealing rings made of fluororubber sealing rings have excellent tensile strength and heat resistance, and also have corona discharge resistance and arc resistance. The sealing rings are flexible materials. In this scheme, positioning gaskets are arranged between the plurality of sealing rings, and the positioning gaskets are used to position the sealing rings. The positioning gaskets can enhance the sealing effect, and when the sealing ring applies an extrusion force to the sealing ring, the positioning gaskets can make the sealing rings evenly stressed; in addition, the sealing shell, the sealing ring and the positioning gasket are all made of ceramic materials. When the coating machine for metal coating is working, the ceramic as a non-metallic insulating material will not affect the electroplating process.

[0008] Preferably, the two ends of the vacuum diaphragm are respectively the atmosphere side and the vacuum side, a mounting through hole is provided on the vacuum diaphragm, a sealing shell is arranged in the mounting through hole, and the two ends of the sealing shell extend toward the atmosphere side and the vacuum side respectively. The two ends of the sealing shell are extended toward the atmosphere side and the vacuum side, so that the distance between the copper column arranged in the sealing shell and the metal vacuum diaphragm is increased on both the atmosphere side and the vacuum side.

[0009] The second aspect of the utility model is to solve the technical problem that it is difficult to achieve vacuum sealing between the vacuum coating machine and the sealing component. Furthermore, the sealing shell is a stepped cylindrical structure, and a mounting plate is arranged on the outside of one end of the sealing shell on the atmospheric side, the outer diameter of the mounting plate is larger than the inner diameter of the mounting through hole, and an internal thread is arranged on the inside of one end of the sealing shell on the atmospheric side, and a limiting protrusion is arranged on the inside of one end of the sealing shell on the atmospheric side. A plurality of connecting holes are evenly distributed on the end surface of the mounting plate, and the connecting holes are connected to the vacuum diaphragm through fastening screws, and an external sealing ring is arranged on the mounting plate. In this scheme, a mounting plate larger than the inner diameter of the mounting through hole of the vacuum diaphragm is arranged on the atmospheric side of the sealing shell, so that the mounting plate can be connected on the atmospheric side by a plane abutment, the contact area between the mounting plate and the vacuum diaphragm is increased, and the sealing ability is improved. An external sealing ring is arranged on the end face where the mounting plate is connected to the vacuum partition. In order to achieve a better sealing effect, the external sealing ring is located in the middle position of the connecting holes evenly distributed around the circumference of the mounting plate. When the mounting plate is connected to the vacuum partition by fastening screws, the external sealing ring is squeezed and deformed to realize the vacuum sealing function between the vacuum partition and the sealing shell.

[0010] The third aspect of the utility model is to solve the problem of poor sealing effect between the sealing ring and the copper column in the sealing shell. Furthermore, the sealing ring is a stepped cylindrical structure, and the sealing ring is divided into a first sealing ring and a second sealing ring. The first sealing ring is arranged at one end of the vacuum side of the sealing shell, and the second sealing ring is arranged at one end of the atmosphere side of the sealing shell. The sealing ring includes a limiting surface and a pressing surface. The sealing ring is arranged on the vacuum side and the atmosphere side respectively, which can not only fill the gap between the two ends of the sealing shell and the copper column, but also the sealing ring slides at the two ends of the sealing shell to squeeze the internal sealing ring.

[0011] Preferably, the outer wall of the copper column is provided with a limit opening, a limit ring is installed outside the limit opening, the limit ring and the copper column move synchronously, and the limit ring is arranged in the sealed housing. Since the copper column is provided with a limit opening, the cooperation between the limit ring and the limit opening can make the limit ring and the copper column move synchronously, and when the limit ring is forced to move in the sealed housing, the copper column can also move synchronously.

[0012] Preferably, the limiting surface of the first sealing ring abuts against the limiting protrusion of the sealing shell, the pressing surface of the first sealing ring abuts against the sealing ring, the outer sleeve of the second sealing ring is provided with a metal clamping ring, the limiting surface of the second sealing ring abuts against the metal clamping ring, the pressing surface of the second sealing ring abuts against the limiting ring, the metal clamping ring is provided with an external thread, and the metal clamping ring is movably connected to the sealing shell through threads. The first sealing ring is matched with the limiting protrusion through a limiting surface set at one end of the large diameter, so that the first sealing ring can be limited at one end of the vacuum side of the sealing shell, so that multiple sealing rings and sealing gaskets arranged inside the sealing shell are limited. The second sealing ring is connected to the sealing shell through a metal clamping ring arranged on the outside, and the external thread on the outside of the metal clamping ring is threadedly matched with the internal thread arranged on the inner wall of the sealing shell, so that the metal clamping ring rotates to achieve its axial movement in the sealing shell. The second sealing ring moves axially in the sealing shell under the action of the metal clamping ring sleeved on its outside, and is screwed into the sealing shell through the metal clamping ring. The distance between the second sealing ring and the first sealing ring in the sealing shell is close, so that the clamping surface between the sealing rings exerts pressure on the sealing ring, and the sealing ring is compressed along the axial direction of the copper column. After deformation, it fits the sealing shell and the copper column to complete the vacuum seal between the sealing shell and the copper column.

[0013] The fourth aspect of the utility model aims to solve the technical problem that the conductivity of the high-frequency current process during the operation of the electrode assembly will generate a large amount of heat energy in the repeated process and gather together, causing the equipment parts to be easily damaged. Furthermore, an electrode assembly includes a sealing structure of a copper column, and also includes an electrode clamp and a cooling assembly. The electrode clamp is arranged at both ends of the copper column, and the electrode clamp is respectively distributed in the atmosphere side and the vacuum side on both sides of the vacuum partition. The cooling assembly is arranged at the end of the copper column in the vacuum side. The position of the electrode clamp on the copper column is adjustable, and installation at different heights and angles can be achieved through the adjustable electrode clamp. The clamp structure allows sufficient contact area with the copper column, ensuring the conductive performance of the electrode assembly; the cooling assembly is arranged in the copper column to realize the cooling function of the electrode.

[0014] Preferably, the water cooling assembly includes a cooling water pipe and a water cooling head. The cooling water pipe is arranged inside the copper column. A cooling channel is arranged between the outer wall of the cooling water pipe and the inner wall of the copper column. The water inlet of the cooling water pipe is connected to the water cooling head. The water outlet of the cooling water pipe is arranged at the upper end of the inner wall of the copper column. The water cooling assembly takes in water from the water inlet on the side of the bottom of the copper column, and is introduced into the top through the cooling water pipe arranged in the center. After the cooling water flows out from the end of the cooling water pipe, it flows to the water outlet from around the cooling channel formed between the cooling water pipe and the copper column, forming a cooling channel with flow circulation, so as to realize direct water cooling of the copper column.

[0015] The beneficial effects of the utility model are:

[0016] The utility model discloses a sealing ring which is extruded and deformed and fits the sealing shell and the copper column to realize vacuum sealing. The sealing component used for sealing between the copper column and the vacuum partition is axially extended, and the sealing shell in the sealing component passes through the vacuum partition, so that the sealing shell extends a certain length at both ends of the vacuum partition, thereby increasing the distance between the copper column on the outer side of the end of the sealing component and the vacuum partition, and avoiding arcing caused by the copper column and the metal vacuum partition of the coating machine being too close. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The structure of the utility model is shown in FIG. Figure 1 .

[0018] Figure 2 The structure of the utility model is shown in FIG. Figure 2 .

[0019] Figure 3 It is a schematic diagram of the coordination of the limit ring of the present utility model.

[0020] Figure 4 It is a structural schematic diagram of the electrode assembly of the present utility model.

[0021] The reference numerals in the drawings include: 1. sealing shell; 11. mounting plate; 12. internal thread; 13. limiting protrusion; 2. sealing ring; 3. sealing ring; 31. limiting surface; 32. pressing surface; 4. limiting ring; 5. external sealing ring; 6. metal pressing ring; 7. positioning gasket; 100. copper column; 101. limiting port; 200 vacuum partition; 300; electrode clamp; 400. cooling assembly; 401. cooling water pipe; 402. water cooling head; 403. cooling channel. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the embodiments more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are only examples of devices and methods consistent with some aspects of the present disclosure as detailed in the attached claims.

[0023] It should be noted that all actions to obtain signals, information or data in this application are carried out in compliance with the relevant data protection laws and policies of the country where they are located, and with the authorization given by the owner of the corresponding device.

[0024] In the present disclosure, unless otherwise stated, the directional words used, such as "inside" and "outside", are defined according to the corresponding parts' own contours. The terms used in the present disclosure, such as "first" and "second", etc., are used to distinguish one element from another element and do not have order and importance.

[0025] Embodiment 1:

[0026] Basically as attached Figure 1 To Attachment Figure 2 As shown, a sealing structure of a copper column includes a sealing component, which is arranged between a copper column 100 and a vacuum diaphragm 200. A sealing shell 1, a sealing ring 2 and a sealing ring 3 are coaxially arranged outside the copper column 100. The sealing shell 1 passes through the vacuum diaphragm 200 and extends out of the vacuum diaphragm 200. A plurality of sealing rings 2 and sealing sleeve rings 3 are arranged in the sealing shell 1, and the sealing sleeve rings 3 are used to extrude the sealing rings 2.

[0027] In this embodiment, the sealing ring 2 and the sealing sleeve 3 arranged in the sealing shell 1 enable vacuum sealing between the sealing shell 1 and the copper column 100. The sealing sleeve 3 is respectively arranged at both ends of the sealing shell 1, and multiple sealing rings 2 are arranged between the sealing sleeves 3. By squeezing the sealing ring 2 through the sealing sleeve 3, the sealing ring 2 can be compressed axially along the copper column 100. The squeezed and deformed sealing ring 2 fits the sealing shell 1 and the copper column 100 to achieve sealing. The sealing component used for sealing between the copper column 100 and the vacuum diaphragm 200 is axially extended, and the sealing shell 1 in the sealing component is passed through the vacuum diaphragm 200, so that the sealing shell 1 extends a certain length at both ends of the vacuum diaphragm 200 to avoid arcing caused by the copper column 100 and the metal vacuum diaphragm 200 of the coating machine being too close.

[0028] The two ends of the vacuum partition 200 are respectively the atmosphere side and the vacuum side. A mounting through hole is provided on the vacuum partition 200. A sealing housing 1 is provided in the mounting through hole. The two ends of the sealing housing 1 extend toward the atmosphere side and the vacuum side, respectively. When the two ends of the sealing housing 1 are extended toward the atmosphere side and the vacuum side, the length of the sealing housing 1 is greater than the height of the mounting through hole on the vacuum partition 200, so that the ends of the copper column 100 provided in the sealing housing 1 extending toward the atmosphere side and the vacuum side are both at a distance from the metal vacuum partition 200.

[0029] A plurality of sealing rings 2 are arranged inside the sealing housing 1, and the plurality of sealing rings 2 are arranged between the sealing collars 3, and positioning gaskets 7 are arranged between the plurality of sealing rings 2. The sealing rings 2 are fluororubber sealing rings, the sealing housing 1 is a ceramic housing, the positioning gaskets 7 are ceramic gaskets, and the sealing collars 3 are ceramic collars. The length of the sealing housing 1 is increased, so that a plurality of sealing rings 2 can be arranged inside the sealing housing 1. The sealing rings 2 are made of fluororubber sealing rings, which have excellent tensile strength and heat resistance, and also have corona discharge resistance and arc resistance. The sealing rings 2 are made of flexible materials. In this scheme, positioning gaskets 7 are arranged between the plurality of sealing rings 2, and the positioning gaskets 7 are used to position the sealing rings. The positioning gaskets 7 can enhance the sealing effect, and when the sealing collar 3 applies an extrusion force to the sealing ring 2, the positioning gaskets 7 can make the sealing ring 2 evenly stressed; in addition, the sealing housing 1, the sealing collar 3 and the positioning gasket 7 are all made of ceramic materials. When the coating machine for metal coating is working, the ceramic as a non-metallic insulating material will not affect the electroplating process.

[0030] The copper column 100 is inserted into the installation through hole of the vacuum partition 200, which is divided into a vacuum end and an atmosphere end according to the position of the copper column 100 in the vacuum partition 200. The copper column 100 seals the installation through hole through a sealing component, so that when the vacuum side of the vacuum partition 200 is evacuated, the atmosphere on the atmosphere side will not enter the vacuum due to the setting of the installation through hole. The sealing component needs to perform vacuum sealing between the vacuum partition 200 and the sealing housing 1, and also needs to perform vacuum sealing between the sealing housing 1 and the copper column 100.

[0031] Embodiment 2:

[0032] like Figure 1-Figure 2 As described, the sealing shell 1 of this embodiment is a stepped cylindrical structure, and a mounting plate 11 is arranged outside the end of the sealing shell 1 located on the atmosphere side, and the outer diameter of the mounting plate 11 is larger than the inner diameter of the mounting through hole, and an internal thread 12 is provided inside the end of the sealing shell 1 located on the atmosphere side, and a limiting protrusion 13 is arranged inside the end of the sealing shell 1 located on the atmosphere side. In this solution, a mounting plate 11 larger than the inner diameter of the mounting through hole of the vacuum diaphragm 200 is arranged at the end of the sealing shell 1 located on the atmosphere side, so that the mounting plate 11 can be connected on the atmosphere side by a plane abutment, and the contact area between the mounting plate 11 and the vacuum diaphragm 200 is increased, and the sealing ability is improved.

[0033] On the basis of Example 1, this embodiment solves the technical problem that it is difficult to achieve vacuum sealing in a vacuum coating machine by providing a horizontal mounting plate 11 that abuts against the bottom surface of the vacuum partition 200, so that the atmospheric side end of the mounting through hole is sealed to prevent the gas on the atmospheric side from entering the vacuum side through the space between the vacuum partition 200 and the sealed shell 1.

[0034] A plurality of connection holes are evenly distributed on the end surface of the mounting plate 11 , and the connection holes are connected to the vacuum diaphragm 200 by fastening screws. An external sealing ring 5 is arranged on the mounting plate 11 .

[0035] An external sealing ring 5 is arranged on the end face where the mounting plate 11 is connected to the vacuum partition 200. In order to achieve a better sealing effect, the external sealing ring 5 is located in the middle position of the connecting holes evenly distributed around the circumference of the mounting plate 11. When the mounting plate 11 is connected to the vacuum partition 200 by fastening screws, the external sealing ring 5 is squeezed and deformed to realize the vacuum sealing function between the vacuum partition 200 and the sealing shell 1.

[0036] Embodiment 3:

[0037] like Figure 2 As shown, the sealing ring 3 of this embodiment is a stepped cylindrical structure, and the sealing ring 3 is divided into a first sealing ring and a second sealing ring, the first sealing ring is arranged at one end of the vacuum side of the sealing housing 1, and the second sealing ring is arranged at one end of the atmosphere side of the sealing housing 1, and the sealing ring 3 includes a limiting surface 31 and a pressing surface 32. The sealing ring 3 is arranged on the vacuum side and the atmosphere side respectively, which can not only fill the gap between the two ends of the sealing housing 1 and the copper column 100, but also the sealing ring 3 slides at the two ends of the sealing housing 1 to squeeze the internal sealing ring 2.

[0038] Based on the technology of Example 1, this embodiment can solve the problem of poor sealing effect between the sealing ring 2 and the copper column 100 in the sealing housing 1. In this embodiment, the sealing ring 3 is provided to squeeze the sealing ring 2, so that the sealing ring 2 is compressed along the axial direction of the copper column 100, and after deformation, it fits the inner wall of the sealing housing 1 and the outer wall of the copper column 100 to complete the vacuum seal.

[0039] like Figure 3 As shown, the outer wall of the copper column 100 is provided with a limit opening 101, and a limit ring 4 is installed outside the limit opening 101. The limit ring 4 moves synchronously with the copper column 100, and the limit ring 4 is arranged in the sealed housing 1. Since the copper column 100 is provided with the limit opening 101, the cooperation between the limit ring 4 and the limit opening 101 can make the limit ring 4 and the copper column 100 move synchronously. When the limit ring 4 is forced to move in the sealed housing 1, the copper column 100 can also move synchronously.

[0040] The limit ring 4 of this embodiment is a bakelite limit ring, which has high hardness, good mechanical strength and toughness, can withstand large external loads, and is not easy to break and deform; the bakelite material also has good insulation properties and can effectively isolate electrical components and conductors.

[0041] The limiting surface 31 of the first sealing ring abuts against the limiting protrusion 13 of the sealing housing 1, the pressing surface 32 of the first sealing ring abuts against the sealing ring 2, the outer portion of the second sealing ring is sleeved with a metal clamping ring 6, the limiting surface 31 of the second sealing ring abuts against the metal clamping ring 6, the pressing surface 32 of the second sealing ring abuts against the limiting ring 4, the metal clamping ring 6 is provided with an external thread, and the metal clamping ring 6 is movably connected to the sealing housing 1 through threads.

[0042] The first sealing ring is matched with the limiting protrusion 13 through a limiting surface 31 set at the large diameter end, so that the first sealing ring can be limited at one end of the vacuum side of the sealing shell 1, so that multiple sealing rings 2 and sealing gaskets 7 set inside the sealing shell 1 are limited, and the second sealing ring is connected to the sealing shell 1 through an externally arranged metal clamping ring 6, and the external thread on the outside of the metal clamping ring 6 is threadedly matched with the internal thread set on the inner wall of the sealing shell 1, so that the metal clamping ring 6 is rotated to achieve its axial movement in the sealing shell 1, and the second sealing ring moves axially in the sealing shell 1 under the action of the metal clamping ring 6 sleeved on its outside, and is screwed into the sealing shell 1 through the metal clamping ring 6. The distance between the second sealing ring and the first sealing ring in the sealing shell 1 is close, so that the clamping surface 32 between the sealing rings 3 applies pressure to the sealing ring 2, and the sealing ring 2 is axially compressed along the copper column 100. After deformation, it fits the sealing shell 1 and the copper column 100 to complete the vacuum seal between the sealing shell 1 and the copper column 100.

[0043] Embodiment 4:

[0044] The present embodiment provides an electrode assembly, including a sealing structure of a copper column, and also including an electrode clamp 300 and a cooling assembly 400. The electrode clamp 300 is arranged at both ends of the copper column 100. The electrode clamp 300 is respectively distributed in the atmosphere side and the vacuum side of the vacuum diaphragm 200. The cooling assembly 400 is arranged at the end of the copper column 100 in the vacuum side. Figure 4 The position of the electrode clamp 300 on the copper column 100 is adjustable, and installation at different heights and angles is achieved through the adjustable electrode clamp 300. The clamp structure provides sufficient contact area with the copper column 100, ensuring the conductive performance of the electrode assembly; a cooling assembly 400 is provided in the copper column 100 to achieve the cooling function of the electrode.

[0045] This embodiment can solve the technical problem that the conductivity of the high-frequency current process during the operation of the electrode assembly will generate a large amount of heat energy in the repeated process and gather together, causing the equipment components to be easily damaged. In this embodiment, a cooling assembly 400 is arranged in the copper column 100 to realize the cooling function of the electrode and prevent the electrode assembly from overheating during operation.

[0046] The water cooling assembly 400 includes a cooling water pipe 401 and a water cooling head 402. The cooling water pipe 401 is arranged inside the copper column 100. A cooling channel 403 is arranged between the outer wall of the cooling water pipe 401 and the inner wall of the copper column 100. The water inlet of the cooling water pipe 401 is connected to the water cooling head 402. The water outlet of the cooling water pipe 401 is arranged at the upper end of the inner wall of the copper column 100. Figure 2 The water cooling assembly 400 takes in water from the water inlet at the bottom side of the copper column 100, and is introduced to the top through the cooling water pipe 401 arranged in the center. After the cooling water flows out from the end of the cooling water pipe 401, it flows to the water outlet from around the cooling channel 403 formed between the cooling water pipe 401 and the copper column 100, forming a flow circulation cooling channel 403, thereby realizing direct water cooling of the copper column 100.

[0047] The above is only an embodiment of the utility model, and the common knowledge such as the known specific structure and characteristics in the scheme is not described in detail here. It should be pointed out that for those skilled in the art, several deformations and improvements can be made without departing from the structure of the utility model, which should also be regarded as the protection scope of the utility model, and these will not affect the effect of the implementation of the utility model and the practicality of the patent. The scope of protection required by this application shall be based on the content of its claims, and the specific implementation methods and other records in the specification can be used to interpret the content of the claims.

Claims

1. A sealing structure of a copper column, comprising a sealing assembly, characterized in that: A sealing component is arranged between a copper column (100) and a vacuum diaphragm (200); a sealing housing (1), a sealing ring (2) and a sealing sleeve ring (3) are coaxially arranged outside the copper column (100); the sealing housing (1) penetrates the vacuum diaphragm (200); the sealing housing (1) extends out of the vacuum diaphragm (200); a plurality of sealing rings (2) and sealing sleeve rings (3) are arranged inside the sealing housing (1); and the sealing sleeve rings (3) are used to squeeze the sealing rings (2).

2. A copper column sealing structure according to claim 1, characterized in that: A plurality of sealing rings (2) are arranged inside the sealing housing (1); the plurality of sealing rings (2) are arranged between sealing collars (3); positioning gaskets (7) are arranged between the plurality of sealing rings (2); the sealing rings (2) are fluororubber sealing rings; the sealing housing (1) is a ceramic housing; the positioning gaskets (7) are ceramic gaskets; and the sealing collars (3) are ceramic collars.

3. A copper column sealing structure according to claim 2, characterized in that: The two ends of the vacuum partition (200) are respectively an atmosphere side and a vacuum side. A mounting through hole is provided on the vacuum partition (200). A sealing shell (1) is arranged in the mounting through hole. The two ends of the sealing shell (1) extend respectively towards the atmosphere side and the vacuum side.

4. A copper column sealing structure according to claim 3, characterized in that: The sealing shell (1) is a stepped cylindrical structure. A mounting plate (11) is arranged outside the end of the sealing shell (1) located on the atmosphere side. The outer diameter of the mounting plate (11) is larger than the inner diameter of the mounting through hole. An internal thread (12) is arranged inside the end of the sealing shell (1) located on the atmosphere side. A limiting protrusion (13) is arranged inside the end of the sealing shell (1) located on the atmosphere side. A plurality of connecting holes are evenly distributed on the end surface of the mounting plate (11). The connecting holes are connected to the vacuum diaphragm (200) by means of fastening screws. An external sealing ring (5) is arranged on the mounting plate (11).

5. A copper column sealing structure according to claim 4, characterized in that: The sealing ring (3) is a stepped cylindrical structure. The sealing ring (3) is divided into a first sealing ring and a second sealing ring. The first sealing ring is arranged at one end of the vacuum side of the sealing housing (1), and the second sealing ring is arranged at one end of the atmosphere side of the sealing housing (1). The sealing ring (3) comprises a limiting surface (31) and a pressing surface (32).

6. A copper column sealing structure according to claim 5, characterized in that: The outer wall of the copper column (100) is provided with a limiting opening (101), the outside of the limiting opening (101) is provided with a limiting ring (4), the limiting ring (4) and the copper column (100) move synchronously, and the limiting ring (4) is arranged in the sealed housing (1).

7. A copper column sealing structure according to claim 5, characterized in that: The limiting surface (31) of the first sealing ring abuts against the limiting protrusion (13) of the sealing housing (1), the pressing surface (32) of the first sealing ring abuts against the sealing ring (2), a metal pressing ring (6) is sleeved on the outside of the second sealing ring, the limiting surface (31) of the second sealing ring abuts against the metal pressing ring (6), the pressing surface (32) of the second sealing ring abuts against the limiting ring (4), the metal pressing ring (6) is provided with an external thread, and the metal pressing ring (6) and the sealing housing (1) are movably connected via the thread.

8. An electrode assembly, comprising a sealing structure of a copper column according to any one of claims 1 to 7, characterized in that: It also includes an electrode clamp (300) and a cooling assembly (400), wherein the electrode clamp (300) is arranged at both ends of the copper column (100), the electrode clamp (300) is respectively distributed in the atmosphere side and the vacuum side of both sides of the vacuum diaphragm (200), and the cooling assembly (400) is arranged at the end of the copper column (100) in the vacuum side.

9. An electrode assembly according to claim 8, characterized in that: The cooling assembly (400) comprises a cooling water pipe (401) and a water cooling head (402); the cooling water pipe (401) is arranged inside the copper column (100); a cooling channel (403) is arranged between the outer wall of the cooling water pipe (401) and the inner wall of the copper column (100); the water inlet of the cooling water pipe (401) is connected to the water cooling head (402); and the water outlet of the cooling water pipe (401) is arranged at the upper end of the inner wall of the copper column (100).

10. A coating machine, characterized in that: An electrode assembly comprising any one of claims 8-9.

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