Bearing boat for atomic layer deposition and atomic layer deposition equipment

Abstract

The utility model provides a bearing boat for atomic layer deposition, atomic layer deposition equipment and a bearing boat for sublayer deposition, and the bearing boat comprises a boat body which comprises two side plates, the upper ends of the inner side surfaces of the side plates are provided with first clamping grooves, the lower ends of the inner side surfaces of the side plates are provided with second clamping grooves, one side plate is provided with a first opening, and the other side plate is provided with a second opening; the first groove rack is located between the two side plates, and the end of the first groove rack is inserted into the first clamping groove and detachably connected with the side plates; the second groove rack is located between the two side plates, and the end of the second groove rack is inserted into the second clamping groove and detachably connected with the side plates; one end of the third groove rack penetrates through the first opening and is detachably inserted into the second opening, and the other end of the third groove rack is located in the first opening; the shifting piece assembly is detachably arranged on the first opening and detachably connected and fixed to the third groove rack. According to the bearing boat for atomic layer deposition, the groove teeth can be conveniently replaced, positioning deviation of the bearing boat cannot be caused, and the maintenance cost is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of atomic layer deposition, and more specifically, relates to a carrier boat for atomic layer deposition and an atomic layer deposition device. Background Art

[0002] In photovoltaic equipment, the current atomic layer deposition equipment for coating the surface of solar cell silicon wafers is to place the silicon wafers in a carrier boat, which is generally made of aluminum composite material. The carrier boat has a single-insert double-sided coating design and a double-insert single-sided coating design. At the same time, the double-layer carrier boat stacking design is used to increase production capacity. The carrier boat will deform and damage the slot teeth during long-term insertion, transportation, and positioning. Especially when the slot teeth are deformed and damaged, repairing them will easily cause the positioning of the carrier boat to shift, so the carrier boat needs to be positioned after repair, which makes the maintenance of the carrier boat complicated and the repair cost is too high. Utility Model Content

[0003] The embodiment of the present application provides a carrier boat for atomic layer deposition, which can easily replace the slot teeth without causing positioning deviation of the carrier boat, thereby reducing maintenance costs.

[0004] The technical solution adopted in the embodiment of the present application is: to provide a carrier boat for atomic layer deposition, comprising:

[0005] The boat body comprises two side panels which are opposite to each other and spaced apart, wherein the upper ends of the inner sides of the side panels are provided with a first slot, the upper ends of the first slots extend to the upper edges of the side panels, the lower ends of the inner sides of the side panels are provided with a second slot, the lower ends of the second slots extend to the lower edges of the side panels, one of the side panels is provided with a first opening, and the other of the side panels is provided with a second opening;

[0006] A first slotted rack is located between the two side plates, and an end of the first slotted rack is inserted into the first slot and is detachably connected to the side plate;

[0007] A second slotted rack is located between the two side plates, and an end of the second slotted rack is inserted into the second slot and is detachably connected to the side plate;

[0008] a third slotted rack, one end of which passes through the first opening and is detachably inserted into the second opening, and the other end of which is located in the first opening; and

[0009] The paddle assembly is detachably arranged on the first opening and detachably connected and fixed to the third groove rack.

[0010] Furthermore, the first slot includes two opposite first side walls and a bottom wall located at the lower ends of the two first side walls, and the end of the first slot rack is provided with a first side end surface abutting against the first side wall and a bottom end surface abutting against the bottom wall.

[0011] Further, the first card slot is U-shaped or C-shaped.

[0012] Further, the second card slot includes two opposite second side walls and a top wall located at the upper ends of the two second side walls. The end of the second groove rack is provided with a second side end face that fits against the second side wall and a top end face that fits against the top wall.

[0013] Further, the second card slot is U-shaped or C-shaped.

[0014] Further, the third groove rack includes a groove rack body and insertion portions located at both ends of the groove rack body. Both the groove rack body and the insertion portions can pass through the first opening. The shape of the second opening matches the shape of the insertion portion, and the groove rack body cannot pass through the second opening. The insertion portion away from the second opening is provided with an insertion slot;

[0015] The dial component includes a base, a chute member, and a dial. The base detachably seals the first opening. The base is provided with a through groove. The chute member is disposed above the groove to enclose the groove into a third opening for the insertion portion to insert. The chute member is provided with a chute and a window communicating with the chute. The lower end of the chute is connected to the third opening. The chute member is slidably disposed in the chute and can be inserted into the insertion slot. The chute member is provided with a dial protrusion protruding from the window.

[0016] Further, the chute member includes a chute cover plate and a chute gasket. One side of the chute cover plate is provided with the chute, and the other side of the chute cover plate is provided with the window. The chute gasket is fixed to the side of the chute cover plate where the chute is located.

[0017] Further, a positioning component is further included. The positioning component includes:

[0018] A positioning concave block is embedded at the lower end of the outer side surface of the side plate. The positioning concave block is provided with a positioning groove with a downward slot opening. The outer end of the positioning concave block is flush with the outer side surface of the side plate;

[0019] A positioning convex block is fixed at the upper end of the outer side surface of the side plate. The positioning convex block is provided with positioning convex teeth that can be inserted into the positioning groove. Part of the positioning convex teeth is located directly above the side plate.

[0020] Further, a hardened layer is provided on the surface of the positioning convex block and / or the positioning concave block.

[0021] The embodiment of the present application further provides an atomic layer deposition device, including the atomic layer deposition carrier boat as described above.

[0022] The beneficial effect of the atomic layer deposition carrying boat provided by the embodiment of the present application is that the atomic layer deposition carrying boat of the embodiment of the present application is specifically designed for the disassembly of each slot rack. The first slot rack is installed in the first slot, and the upper end of the first slot extends to the upper edge of the side plate. When disassembly is required, after the connection between the first slot rack and the side wall is removed, the first slot rack can be directly taken out upward along the first slot without moving the side plate; the second slot rack is installed in the second slot, and the lower end of the second slot extends to the lower edge of the side plate. When disassembly is required, after the connection between the second slot rack and the side wall is removed, the second slot rack can be directly taken out downward along the second slot without moving the side plate; one end of the third slot rack passes through the first opening and is inserted and fixed in the second opening, and then one end located at the first opening is detachably connected through the paddle assembly. Therefore, when disassembly is required, the paddle assembly is first removed, and then the third slot rack can be pulled out from the first opening without moving the side plate. That is, in the embodiment of the present application, the disassembly of each groove rack will not affect the position of the two side plates, will not cause the positioning deviation of the load-bearing boat, and there is no need to position the load-bearing boat after maintenance, thereby reducing the difficulty of maintaining the load-bearing boat and reducing maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0024] Figure 1 A schematic diagram of the three-dimensional structure of a carrier boat for atomic layer deposition provided in an embodiment of the present application;

[0025] Figure 2 A schematic diagram of disassembling the third slotted rack provided in an embodiment of the present application;

[0026] Figure 3 A top view of a carrier boat for atomic layer deposition provided in an embodiment of the present application;

[0027] Figure 4 For along Figure 3 Sectional view along line AA;

[0028] Figure 5 for Figure 4 Magnified view at B in the middle;

[0029] Figure 6 for Figure 4 Enlarged view at center C;

[0030] Figure 7 A front view of a carrying boat for atomic layer deposition provided in an embodiment of the present application;

[0031] Figure 8 For along Figure 7 Sectional view along the mid-DD line;

[0032] Fig. 9 for Figure 8 Enlarged view at E in the middle;

[0033] Fig.10 A schematic diagram of a third slotted rack provided in an embodiment of the present application;

[0034] Fig.11 A schematic diagram of the three-dimensional structure of a paddle assembly provided in an embodiment of the present application;

[0035] Fig.12 An exploded view of a paddle assembly provided in an embodiment of the present application;

[0036] Fig.13 Schematic diagram of the disassembly direction of three types of slotted racks provided in an embodiment of the present application.

[0037] Among them, the reference numerals in the figure are:

[0038] 10. boat body; 11. side plate; 111. first slot; 1111. first side wall; 1112. bottom wall; 112. second slot; 1121. second side wall; 1122. top wall; 113. first opening; 114. second opening; 12. connecting rod; 13. opening piece;

[0039] 20. first grooved rack; 21. first side end surface; 22. bottom end surface;

[0040] 30. second slotted rack; 31. second side end surface; 32. top end surface;

[0041] 40. third slotted rack; 41. slotted rack body; 42. plug-in portion; 421. plug-in slot;

[0042] 50, plectrum assembly; 51, base; 511, groove; 52, slide member; 521, slide cover; 5211, slide; 5212, window; 522, slide gasket; 53, plectrum; 531, plectrum projection; 54, third opening;

[0043] 60. Positioning assembly; 61. Positioning concave block; 611. Positioning groove; 62. Positioning convex block; 621. Positioning convex tooth. DETAILED DESCRIPTION

[0044] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0045] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0046] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0047] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0048] See also Figure 1 The atomic layer deposition carrying boat provided in the embodiment of the present application is now described. The atomic layer deposition carrying boat provided in the embodiment of the present application comprises a boat body 10, a first slotted rack 20, a second slotted rack 30, a third slotted rack 40 and a paddle assembly 50.

[0049] Reference Figure 1 The boat body 10 includes two side panels 11 that are opposite to each other and spaced apart. A first card groove 111 is provided at the upper end of the inner side surface of the side panel 11. The upper end of the first card groove 111 extends to the upper edge of the side panel 11. A second card groove 112 is provided at the lower end of the inner side surface of the side panel 11. The lower end of the second card groove 112 extends to the lower edge of the side panel 11. One side panel 11 is provided with a first opening 113, and the other side panel 11 is provided with a second opening 114.

[0050] Among them, refer to Figure 1 The two side panels 11 are arranged at a relative interval and can be connected by a connecting rod 12. The two side panels 11 are respectively connected to one end of the connecting rod 12 to connect and fix the two side panels 11.

[0051] Reference Figure 1 and Figure 4 The first card slot 111 provided on the inner side surface of the side plate 11 is used to install the first slot rack 20. The upper end of the first card slot 111 extends to the upper edge of the side plate 11, that is, the upper end of the first card slot 111 forms an exit for entering and exiting the first card slot 111, so the first slot rack 20 can be installed and removed along the first card slot 111.

[0052] Reference Figure 1 and Figure 4 The second slot 112 provided on the inner side surface of the side panel 11 is used to install the second slot rack 30. The lower end of the second slot 112 extends to the lower edge of the side panel 11, that is, the lower end of the second slot 112 forms an exit for entering and exiting the second slot 112. The second slot rack 30 can be installed and removed along the second slot 112.

[0053] Reference Figure 1 , the first slotted rack 20 is located between the two side panels 11, and the end of the first slotted rack 20 is inserted into the first slot 111 and is detachably connected to the side panel 11. It can be understood that the length of the first slotted rack 20 is greater than the length between the two side panels 11, and the length of the first slotted rack 20 should be equal to the distance between the inner walls of the two first slots 111. During installation, the first slotted rack 20 can be extended from the upper edge of the side panel 11 along the first slot 111 to between the two side panels 11, and then the first slotted rack 20 is connected and fixed to the side panel 11. When disassembly is required, the connection between the first slotted rack 20 and the side panel 11 is first released, and then the second slotted rack 30 is lifted upward from between the two side panels 11 along the first slot 111 until it is pulled out of the first slot 111 upward. Specifically, the first slotted rack 20 and the side panel 11 can be detachably connected by screws or bolts.

[0054] Reference Figure 1 , the second slotted rack 30 is located between the two side panels 11, and the end of the second slotted rack 30 is inserted into the second clamping groove 112 and is detachably connected to the side panel 11. It can be understood that the length of the second slotted rack 30 is greater than the length between the two side panels 11, and the length of the second slotted rack 30 should be equal to the spacing between the inner walls of the two second clamping grooves 112. During installation, the second slotted rack 30 can be extended from the lower edge of the side panel 11 along the second clamping groove 112 to between the two side panels 11, and then the second slotted rack 30 is connected and fixed to the side panel 11. When disassembly is required, the connection between the second slotted rack 30 and the side panel 11 is first released, and then the second slotted rack 30 is pressed downward from between the two side panels 11 along the second clamping groove 112 until it is disengaged from the second clamping groove 112 downward. Specifically, the second slotted rack 30 and the side panel 11 can be detachably connected by screws or bolts.

[0055] Reference Figure 1 and Figure 2 , one end of the third groove rack 40 passes through the first opening 113 and is detachably inserted into the second opening 114, and the other end is located in the first opening 113. That is, the first opening 113 allows the third groove rack 40 to pass through, while the second opening 114 does not allow the third groove rack 40 to pass through. The third groove rack 40 can only insert one end into the second opening 114, and the other end remains in the first opening 113. It can be understood that at this time, since the first opening 113 is relatively large, the third groove rack 40 is loose in the first opening 113, and it needs to be further fixed with the paddle assembly 50.

[0056] Referring to Figure 1 and Figure 2 , the paddle assembly 50 is detachably arranged on the first opening 113 and is detachably connected and fixed to the third groove rack 40. The paddle assembly 50 is fixed on the first opening 113 and is connected and fixed to the third groove rack 40 to prevent the third groove rack 40 from shifting during operation. When disassembly is required, the paddle assembly 50 can be disassembled from the first opening 113 and the third groove rack 40, and then the third groove rack 40 can be withdrawn from the first opening 113.

[0057] Based on the above structure, in the embodiment of the present application, for the disassembly of each groove rack, the positions of the two side plates 11 will not be affected, and the positioning deviation of the carrier boat will not be caused. There is no need to perform positioning processing on the carrier boat after maintenance, which reduces the maintenance difficulty of the carrier boat and the maintenance cost.

[0058] Referring to Figure 4 and Figure 5 , the first card slot 111 includes two opposite first side walls 1111 and a bottom wall 1112 located at the lower ends of the two first side walls 1111. The end of the first groove rack 20 is provided with a first side end face 21 that fits with the first side wall 1111 and a bottom end face 22 that fits with the bottom wall 1112. That is, the first side wall 1111 and the bottom wall 1112 of the first card slot 111 can cooperate with the first side end face 21 and the bottom end face 22 of the first groove rack 20 to form a limit on the first groove rack 20, preventing the first groove rack 20 from rotating in the first card slot 111 and affecting the direction of the groove teeth. Specifically, the first card slot 111 is U-shaped or ∪-shaped.

[0059] Referring to Figure 4 and Figure 6, the second card slot 112 includes two opposite second side walls 1121 and a top wall 1122 located at the upper ends of the two second side walls 1121. The end of the second groove rack 30 is provided with a second side end face 31 that fits against the second side wall 1121 and a top end face 32 that fits against the top wall 1122. That is, the second side wall 1121 and the top wall 1122 of the second card slot 112 can cooperate with the second side end face 31 and the top end face 32 of the second groove rack 30 to form a limit for the second groove rack 30, preventing the second groove rack 30 from rotating in the second card slot 112 and affecting the direction of the groove teeth. Specifically, the second card slot 112 is U-shaped or ∪-shaped.

[0060] Referring to Figure 8 , Fig. 9 and Fig.10 , the third groove rack 40 includes a groove rack main body 41 and insertion portions 42 located at both ends of the groove rack main body 41. Both the groove rack main body 41 and the insertion portions 42 can pass through the first opening 113. The shape of the second opening 114 matches the shape of the insertion portion 42, and the groove rack main body 41 cannot pass through the second opening 114. The insertion portion 42 away from the second opening 114 is provided with a slit 421. That is, the groove rack main body 41 is larger than the insertion portion 42. Therefore, the insertion portion 42 can be inserted into the second opening 114 while the groove rack main body 41 cannot be inserted into the second opening 114. And the first opening 113 is larger, and both the groove rack main body 41 and the insertion portions 42 can pass through. Therefore, during installation, the third groove rack 40 can be inserted from the outside of the side plate 11 through the first opening 113, so that one insertion portion 42 (without the slit 421) of the third groove rack 40 is inserted into the second opening 114 to fix this end, and the other end (with the slit 421) is in the first opening 113, and then the third groove rack 40 can be fixed with the拨片组件50.

[0061] Referring to Figure 2 , in order to prevent the second opening 114 from being worn after long-term plugging and unplugging, an opening piece 13 can be installed on the side plate 11. The second opening 114 is opened on the opening piece 13, and the opening piece 13 is fixed on the side plate 11. The insertion portion 42 is directly inserted into the second opening 114 of the opening piece 13. If the second opening 114 of the opening piece 13 is worn, the opening piece 13 can be directly replaced.

[0062] Referring to Fig. 9 , Fig.11 and Fig.12 It should be noted that there is an unclear term "拨片组件50" in the original text which is directly retained in the translation. You may need to check and clarify this term according to the actual situation.The paddle assembly 50 includes a base 51, a slide member 52 and a paddle 53. The base 51 is detachably blocked from the first opening 113. The base 51 is provided with a through groove 511. The slide member 52 is arranged above the groove 511 to surround the groove 511 into a third opening 54 for inserting the plug-in portion 42. A slide groove 5211 and a window 5212 communicating with the slide groove 5211 are provided in the slide member 52. The lower end of the slide groove 5211 is connected to the third opening 54. The slide member 52 is slidably arranged in the slide groove 5211 and can be inserted into the insertion slit 421. The slide member 52 is provided with a paddle protrusion 531 protruding from the window 5212.

[0063] Reference Figure 2 and Fig. 9 The base 51 can detachably block the first opening 113, and use its groove 511 to accommodate the plug-in part 42 provided with one end of the insertion slot 421. The slide member 52 is fixed on the top of the base 51, and the groove 511 is surrounded by the third opening 54. At this time, the shape of the third opening 54 matches the shape of the plug-in part 42, so that the plug-in part 42 is stable in the third opening 54 and will not shake. In order to allow the plug-in part 42 to slide along the length direction of the third opening 54, the paddle assembly 50 is provided with a paddle 53. The paddle 53 is located in the slide member 52, and the lower end of the slide 5211 of the slide member 52 is connected to the third opening 54. At this time, the plug-in part 42 is inserted into the third opening 54, and the insertion slot 421 is located below the slide 5211. The paddle 53 can be slid down by hand by pushing the paddle protrusion 531 downward, so that the paddle 53 is inserted into the insertion slot 421, and the plug-in part 42 is fixed in the third opening 54.

[0064] Reference Figure 2 When disassembly is required, first remove the base 51 from the first opening 113 to expose the entire first opening 113 , then push up the protrusion 531 by hand, lift the paddle 53 to make the paddle 53 come out of the insertion slot 421 , and then pull the third slot rack 40 out of the first opening 113 .

[0065] The base 51 detachably blocks the first opening 113. Specifically, the base 51 is mounted on the side panel 11. The base 51 blocks the first opening 113. A groove 511 is provided on the base 51. The plug-in portion 42 is inserted into the groove 511. Specifically, the base 51 and the side panel 11 can be connected by screws or bolts. Similarly, the slide member 52 and the side panel 11 can also be connected by screws or bolts. Preferably, the slide member 52 is embedded in the side panel 11, and a contoured groove matching the slide member 52 is provided on the side panel 11.

[0066] Reference Fig.11 and Fig.12The slide member 52 includes a slide cover plate 521 and a slide gasket 522. A slide groove 5211 is provided on one side of the slide cover plate 521, and a window 5212 is provided on the other side of the slide cover plate 521. The slide gasket 522 is fixed to the side of the slide cover plate 521 provided with the slide groove 5211. That is, the slide groove 5211 is arranged between the slide groove 5211 and the slide gasket 522. When the paddle 53 slides in the slide groove 5211, it contacts and rubs with the slide cover plate 521 and the slide gasket 522, and will not cause wear to the side plate 11. When the slide cover plate 521 and the slide gasket 522 are worn out, they can be directly replaced without replacing the side plate 11, which greatly prolongs the service life of the side plate 11.

[0067] In actual use, the carrier boat is stacked in two layers for efficient use of space, that is, one carrier boat is stacked on another carrier boat. Therefore, the carrier boat for atomic layer deposition of the embodiment of the present application further includes a positioning assembly 60, which includes a positioning concave block 61 and a positioning convex block 62.

[0068] Reference Figure 1 and Figure 2 The positioning concave block 61 is embedded in the lower end of the outer side surface of the side plate 11. The positioning concave block 61 is provided with a positioning groove 611 with a notch downward, and the outer end of the positioning concave block 61 is flush with the outer side surface of the side plate 11. The positioning groove 611 with a notch downward at the lower end is for cooperating with the positioning protrusion 62 of another carrier boat below for positioning. The outer end of the positioning concave block 61 is flush with the outer side surface of the side plate 11, which can reduce the protruding area of ​​the side edge of the carrier boat and further reduce the volume of the reaction chamber.

[0069] Reference Figure 2 The positioning protrusion 62 is fixed on the upper end of the outer side surface of the side plate 11. The positioning protrusion 62 is provided with a positioning convex tooth 621 that can be inserted into the positioning groove 611. The positioning convex tooth 621 is partially located directly above the side plate 11. The positioning convex tooth 621 provided on the positioning protrusion 62 at the upper end is to cooperate with the positioning groove 611 of another carrying boat above. When the two carrying boats are stacked, the positioning convex tooth 621 at the upper end of the carrying boat below is inserted into the positioning groove 611 at the lower end of the carrying boat at the upper end, thereby achieving matching positioning. Since the positioning concave block 61 is embedded in the side plate 11, and the positioning protrusion 62 is fixed on the outer side surface of the side plate 11, the positioning convex tooth 621 is set to be partially located directly above the side plate 11, so that the positioning convex tooth 621 can be aligned with the positioning groove 611 up and down, that is, the part of the positioning convex tooth 621 located directly above the side plate 11 can be inserted directly into the positioning groove 611 to achieve the positioning function.

[0070] Preferably, the surface of the positioning protrusion 62 and / or the positioning concave block 61 is provided with a hardened layer to enhance the wear resistance of the positioning protrusion 62 and the positioning concave block 61 and extend its service life. Alternatively, the positioning protrusion 62 and the positioning concave block 61 are made of wear-resistant materials.

[0071] An embodiment of the present application also provides an atomic layer deposition device, including the atomic layer deposition carrying boat in any of the above embodiments.

[0072] The atomic layer deposition device of the embodiment of the present application includes the atomic layer deposition carrier boat in any of the above embodiments, and thus has the beneficial effects brought by the atomic layer deposition carrier boat in any of the above embodiments, which will not be described in detail here.

[0073] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A carrier boat for atomic layer deposition, characterized in that: Including: A boat body, including two opposite and spaced side plates. At the upper end of the inner side surface of the side plate, there is a first card slot, and the upper end of the first card slot extends to the upper edge of the side plate. At the lower end of the inner side surface of the side plate, there is a second card slot, and the lower end of the second card slot extends to the lower edge of the side plate. One of the side plates is provided with a first opening, and the other side plate is provided with a second opening; A first groove rack, located between the two side plates, and the end of the first groove rack is inserted into the first card slot and is detachably connected to the side plate; A second groove rack, located between the two side plates, and the end of the second groove rack is inserted into the second card slot and is detachably connected to the side plate; A third groove rack, one end passes through the first opening and is detachably inserted into the second opening, and the other end is located in the first opening; And A paddle component, detachably arranged on the first opening and detachably connected and fixed to the third groove rack.

2. The atomic layer deposition carrier boat according to claim 1, characterized in that: The first card slot includes two opposite first side walls and a bottom wall located at the lower ends of the two first side walls. The end of the first groove rack is provided with a first side end face that fits the first side wall and a bottom end face that fits the bottom wall.

3. The atomic layer deposition carrier boat according to claim 2, characterized in that: The first card slot is U-shaped or C-shaped.

4. The atomic layer deposition carrier boat according to claim 1, characterized in that: The second card slot includes two opposite second side walls and a top wall located at the upper ends of the two second side walls. The end of the second groove rack is provided with a second side end face that fits the second side wall and a top end face that fits the top wall.

5. The atomic layer deposition carrier boat according to claim 4, characterized in that: The second card slot is U-shaped or C-shaped.

6. The atomic layer deposition carrier boat according to claim 1, characterized in that: The third groove rack includes a groove rack main body and insertion parts located at both ends of the groove rack main body. Both the groove rack main body and the insertion parts can pass through the first opening. The shape of the second opening matches the shape of the insertion part. The groove rack main body cannot pass through the second opening. The insertion part away from the second opening is provided with a slot; The paddle component includes a base, a chute part and a paddle. The base detachably blocks the first opening. The base is provided with a through groove. The chute part is arranged above the groove to enclose a third opening for the insertion part to insert. The chute part is provided with a chute and a window communicating with the chute. The lower end of the chute is connected to the third opening. The chute part slides in the chute and can be inserted into the slot. The chute part is provided with a protruding paddle convex out of the window.

7. The atomic layer deposition carrier boat according to claim 6, characterized in that: The chute part includes a chute cover plate and a chute gasket. One side of the chute cover plate is provided with the chute, and the other side of the chute cover plate is provided with the window. The chute gasket is fixed on the side of the chute cover plate provided with the chute.

8. The atomic layer deposition carrier boat according to claim 1, characterized in that: It further includes a positioning component, and the positioning component includes: A positioning concave block, embedded at the lower end of the outer side surface of the side plate. The positioning concave block is provided with a positioning groove with the notch facing downwards. The outer end of the positioning concave block is flush with the outer side surface of the side plate; A positioning convex block, fixed at the upper end of the outer side surface of the side plate. The positioning convex block is provided with positioning convex teeth that can be inserted into the positioning groove. Part of the positioning convex teeth is located directly above the side plate.

9. The atomic layer deposition carrier boat according to claim 8, characterized in that: The surface of the positioning convex block and / or the positioning concave block is provided with a hardened layer.

10. An atomic layer deposition device, characterized in that: The invention comprises the carrying boat for atomic layer deposition as claimed in any one of claims 1 to 9.

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