Bubbling device of solar cell wet chemical tank type texturing equipment

Abstract

The utility model relates to a bubbling device of wet chemical tank type texturing equipment for solar cells, belongs to the technical field of manufacturing of silicon solar cells, and solves the problem of poor texturing effect caused by poor overflow circulation effect of a tank body due to the fact that old liquid is gathered at the middle position of the tank body in the prior art. The bubbling device comprises a gas main pipeline and a plurality of bubbling pipes, wherein the plurality of bubbling pipes are respectively communicated with fluid of the gas main pipeline; the plurality of bubbling pipes are arranged at the bottom of a texturing groove of the solar cell wet chemical groove type texturing equipment in parallel at intervals; and the hole diameter of the bubbling hole in the first bubbling pipe in the middle of the bottom of the texturing groove is greater than that of the bubbling holes in the other bubbling pipes on the two sides of the first bubbling pipe. According to the utility model, the bubbling pipes with the bubbling holes with different sizes are adopted, so that the bubbling in the middle of the texturing groove is larger than the bubbling on the two sides of the texturing groove, and the circulation of liquid medicine in the middle of the groove body is improved, thereby improving the texturing effect of the battery piece.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon solar cell chips, in particular to a bubbling device of wet chemical tank type texturing equipment for solar cell chips. Background Art

[0002] In the silicon solar cell industry, wet chemical tank texturing equipment is an indispensable device for battery production. The chemicals in the tank machine react chemically with the surface of the silicon wafer, thereby forming a specific structural shape on the surface to meet production needs. The texturing tank of the solar cell wet chemical tank texturing equipment mainly relies on the bubbling device and the liquid circulation device. The working principle is: the liquid in the main tank reaches the auxiliary tank through bubbling and overflow, and the auxiliary tank then pumps the liquid to the main tank through the circulation pump for circulation. During the entire chemical reaction process, the uniformity of the liquid has a significant impact on the surface texturing effect. In order to meet the uniformity requirements of the liquid, the tank texturing machines on the market are usually designed and installed with a device at the bottom of the tank that passes nitrogen to the bubbling tube for bubbling. Under the action of bubbling, the chemical liquid overflows from the edge of the texturing tank to the sub-tank. Since the bubbles at the bottom of the tank are of similar size, the chemical liquid at the edge of the texturing tank will be more easily circulated, while the chemical liquid in the middle of the texturing tank will be easily retained, resulting in poor circulation in the middle of the tank. The additive components in the chemical liquid have high viscosity and will not be fully circulated and will be adsorbed on the surface of the silicon wafer, which will not only affect the chemical reaction between the chemical liquid and the silicon wafer, thus affecting the texturing effect, but will also lead to poor cleaning effect in the subsequent cleaning tank. Both results will cause the continuous production of defective wafers of the mottled type. Utility Model Content

[0003] In view of the above analysis, an embodiment of the utility model aims to provide a bubbling device for wet chemical trough-type texturing equipment for solar cell panels, so as to solve the problem in the prior art that old liquid accumulates in the middle of the trough body, resulting in poor overflow circulation effect of the trough body and thus poor texturing effect.

[0004] The utility model provides a bubbling device of a solar cell wet chemical tank-type texturing equipment, comprising a gas main pipeline and a plurality of bubbling tubes, wherein the plurality of bubbling tubes are all in fluid communication with the gas main pipeline; the plurality of bubbling tubes are arranged in parallel and at intervals at the bottom of a texturing tank of the solar cell wet chemical tank-type texturing equipment; the orifice diameter of the bubbling hole on the first bubbling tube located in the middle of the bottom of the texturing tank is larger than the orifice diameters of the bubbling holes on the other bubbling tubes located on both sides of the first bubbling tube;

[0005] Wherein, the number of the multiple bubbling tubes is greater than or equal to 3.

[0006] Furthermore, the diameter of the first bubbling tube is greater than the diameters of other bubbling tubes located on both sides of the first bubbling tube.

[0007] Furthermore, it also includes a gas main valve, multiple throttle valves and multiple gas branch pipes. One of the bubbling tubes is fluidically connected to the gas main pipe through one of the gas branch pipes. The gas main valve is arranged on the gas main pipe, and the multiple throttle valves are arranged one by one on the multiple gas branch pipes.

[0008] Furthermore, the throttle opening diameter of the throttle valve arranged on the gas branch pipe connected to the first bubbling tube is larger than the throttle opening diameter of the throttle valve arranged on the gas branch pipes connected to other bubbling tubes on both sides of the first bubbling tube.

[0009] Furthermore, each of the bubbling tubes is a U-shaped structure composed of two sub-bubbling tubes with the same structure connected in parallel.

[0010] Furthermore, if the number of battery cell frames that can be accommodated on one side of the texturing tank is an even number, the number of other bubbling tubes located on both sides of the first bubbling tube is equal to the number of battery cell frames that can be accommodated on one side of the texturing tank;

[0011] If the number of battery cell frames that can be accommodated on one side of the texturing tank is an odd number, the number of other bubbling tubes located on both sides of the first bubbling tube is the number of battery cell frames that can be accommodated on one side of the texturing tank minus 1.

[0012] Furthermore, the other bubbling tubes located on both sides of the first bubbling tube correspond to one battery cell frame one by one, and are located directly below the middle of the battery cell frame; if the number of battery cell frames that can be accommodated on a single side of the texturing groove is an odd number, then the first bubbling tube is located directly below the middle of the battery cell frame in the middle.

[0013] Further, the orifice diameters of the bubbling holes on the other bubbling tubes located on both sides of the first bubbling tube decrease gradually along the direction away from the first bubbling tube.

[0014] Further, the density of the bubbling holes on the first bubbling tube is greater than the density of the bubbling holes on other bubbling tubes located on both sides of the first bubbling tube.

[0015] Further, the orifice diameter of the bubbling holes on the first bubbling tube is 1.5 to 3 times the orifice diameter of the bubbling holes on other bubbling tubes, or / and, the diameter of the first bubbling tube is 1.5 to 3 times the diameter of the other bubbling tubes.

[0016] The utility model can achieve at least one of the following beneficial effects:

[0017] The utility model makes the aperture of the middle bubbling hole larger than the aperture of the bubbling holes on both sides, so that the bubbles in the middle position of the texturing tank are large and the bubbles on both sides are small during the texturing process, which avoids the accumulation of old liquid in the middle position of the tank body and unable to participate in the overflow circulation, thereby improving the uniformity of the mixing of the medicine liquid, enhancing the overflow circulation of the medicine liquid in the tank body, and achieving a better texturing effect.

[0018] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by implementing the present invention. The purpose and other advantages of the present invention can be achieved and obtained through the contents specifically pointed out in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present invention. In the entire drawings, the same reference symbols represent the same components.

[0020] Figure 1 It is a structural schematic diagram of a bubbling device of a wet chemical tank-type texturing equipment for solar cell sheets according to an embodiment of the utility model;

[0021] Figure 2 This is a partial enlarged view of the bubbling tube in the bubbling device of the wet chemical trough type texturing equipment for solar cell sheets according to an embodiment of the utility model.

[0022] Reference numerals:

[0023] 1-first bubbling tube; 2-second bubbling tube; 3-gas branch pipeline; 4-first throttle valve; 5-second throttle valve; 6-gas main pipeline; 7-gas main valve. DETAILED DESCRIPTION

[0024] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0025] Example 1

[0026] This embodiment 1 discloses a bubbling device of a wet chemical tank-type texturing equipment for solar cells, wherein the wet chemical tank-type texturing equipment for solar cells includes a texturing tank, a bubbling device and a liquid medicine circulation device. During the texturing process, the texturing tank is filled with liquid medicine, the solar cells are mounted in a cell frame (also called a flower basket), and the cell frame is immersed in the liquid medicine in the texturing tank. The tank-type texturing equipment uses nitrogen for continuous bubbling, and the size of the bubbles can be adjusted by the nitrogen flow rate; at the same time, new liquid medicine is continuously added to the circulation pipeline, and the excess old liquid overflows along the edge of the tank body and is discharged by the drainage system. Through such a coordination method, the liquid medicine is evenly mixed.

[0027] One texturing groove can accommodate four, six or more battery cell frames. Usually, the battery cell frames are evenly arranged on both sides of the texturing groove. In this embodiment, a texturing groove that can accommodate four battery cell frames is taken as an example to further illustrate the utility model.

[0028] like Figure 1-Figure 2 As shown, the bubbling device of the wet chemical tank type texturing equipment for solar cells of the present embodiment 1 includes a gas main pipeline 6 and three bubbling tubes (a first bubbling tube 1 and two second bubbling tubes 2), and the gas main pipeline 6 is connected to the gas source. Nitrogen is preferably used as the gas source. The three bubbling tubes are respectively connected to the gas main pipeline 6 fluid. The three bubbling tubes are arranged in parallel and spaced apart at the bottom of the texturing tank of the wet chemical tank type texturing equipment for solar cells. The three bubbling tubes are uniformly distributed throughout the entire pipeline, and the orifice diameter of the bubbling holes on the first bubbling tube 1 located in the middle of the bottom of the texturing tank is larger than the orifice diameter of the bubbling holes on the second bubbling tubes 2 located on both sides of the bottom of the texturing tank.

[0029] Preferably, see Figure 2 The orifice diameter of the bubbling hole on the first bubbling tube 1 is 1.5 times to 3 times the orifice diameter of the bubbling hole on the second bubbling tube 2, and more preferably twice.

[0030] Furthermore, the orifice diameter of the bubbling hole of the second bubbling tube 2 is 1 mm, and the orifice diameter of the bubbling hole of the bubbling tube 2 is 2 mm.

[0031] The utility model makes the aperture of the middle bubbling hole larger than the aperture of the bubbling holes on both sides, so that the bubbles in the middle of the texturing tank are large and the bubbles on both sides are small, which avoids the old liquid from gathering in the middle position of the tank body and being unable to participate in the overflow circulation, thereby improving the uniformity of the mixing of the liquid medicine, enhancing the overflow circulation of the liquid medicine in the tank body, and achieving a better texturing effect.

[0032] In some preferred embodiments, the diameter of the first bubbling tube 1 is greater than the diameter of the second bubbling tube 2 .

[0033] Preferably, the diameter of the first bubbling tube 1 is between 1.5 and 3 times the diameter of the second bubbling tube 2 .

[0034] Furthermore, the diameter of the second bubbling tube 2 is 20 mm, and the diameter of the first bubbling tube 1 is 30 mm.

[0035] By making the diameter of the middle first bubbling tube 1 larger than the diameters of the second bubbling tubes 2 on both sides, the middle bubbling tube can accommodate more nitrogen flow, thereby further enhancing the circulation of the chemical solution in the middle of the texturing tank.

[0036] For different sizes of texturing tanks, if the number of battery cell frames that can be accommodated on one side of the texturing tank is an even number, the number of second bubbling tubes 2 is equal to the number of battery cell frames that can be accommodated on one side of the texturing tank. If the number of battery cell frames that can be accommodated on one side of the texturing tank is an odd number, the number of second bubbling tubes 2 is the number of battery cell frames that can be accommodated on one side of the texturing tank minus 1. Each second bubbling tube 2 is located directly below the middle of a battery cell frame, extending from one side of the texturing tank that accommodates the battery cell frame to the other opposite side.

[0037] That is to say, if the texturing tank can accommodate four battery cell frames, then one side can accommodate two battery cell frames, and at this time, the number of second bubbling tubes 2 is two, which are respectively located directly below the middle of the two battery cell frames on one side. If the texturing tank can accommodate six battery cell frames, then one side can accommodate three battery cell frames, and at this time, the number of second bubbling tubes 2 is two, which are respectively located directly below the middle of the two battery cell frames on the side on one side, and at this time, the first bubbling tube 1 in the middle is located directly below the middle of the battery cell frame in the middle.

[0038] By making the position of the second bubbling tube 2 just correspond to the bottom center of the battery cell frame, when the battery cell frame is placed in the texturing tank, the bubbling of the second bubbling tube 2 acts on the middle position of the battery cell, and the bubbling of the first bubbling tube 1 cooperates with the circulation pipeline to ensure uniform mixing of the liquid medicine. This arrangement can avoid the protrusion of silicon chips caused by the inappropriate position of the bubbling tube, which in turn causes fragments or sticky chips.

[0039] In this embodiment 1, see Figure 1 The bubbling device also includes three gas branch pipes 3, one end of each gas branch pipe 3 is fluidly connected to the gas main pipe 6, and the other end is fluidly connected to one of the three bubbling tubes.

[0040] It also includes a gas main valve 7 and three throttle valves (including a first throttle valve 4 and two second throttle valves 5). The gas main valve 7 is arranged on the gas main pipeline 6. The first throttle valve 4 of the three throttle valves is arranged on the gas branch pipeline 3 connected to the first bubbling tube 1, and the two second throttle valves 5 are respectively arranged on the gas branch pipelines 3 connected to the second bubbling tube 2.

[0041] The gas main valve 7 controls the total nitrogen flow entering the gas branch pipe 3, and the three throttle valves can adjust the opening to control the nitrogen flow of the gas branch pipe 3. This can achieve precise control of the size and number of bubbles, further improving the texturing effect.

[0042] Furthermore, the throttle diameter of the first throttle valve 4 is larger than the throttle diameter of the second throttle valve 5 .

[0043] Furthermore, the valve opening of the first throttle valve 4 is greater than the valve opening of the second throttle valve 5 .

[0044] Through the above arrangement, the nitrogen flow rates of the three gas branch pipes 3 can be adjusted individually, thereby controlling the bubble sizes at both ends and in the middle of the texturing tank, so that the bubble tank is larger in the middle and smaller on both sides.

[0045] See also Figure 1 Each bubbling tube is a U-shaped structure composed of two sub-bubbling tubes of the same structure connected in parallel. The gas branch pipes 3 are respectively connected to the bottom of the U-shaped structure.

[0046] If the number of the bubbling tubes is more than 3, the orifice diameters of the bubbling holes on the other bubbling tubes located on both sides of the first bubbling tube 1 may be gradually reduced in a direction away from the first bubbling tube 1 .

[0047] In some embodiments, the density of the bubbling holes on the first bubbling tube 1 is greater than the density of the bubbling holes on the other bubbling tubes located on both sides of the first bubbling tube 1 .

[0048] Through the above-mentioned setting, the bubble distribution in the texturing tank can be adjusted more accurately, so as to achieve the purpose of improving the circulation of the chemical solution in the middle part.

[0049] The actual working process of the bubbling device of this embodiment is as follows: three bubbling tubes are installed at the bottom of the tank body, and three throttle valves are respectively installed on the three gas branch pipes 3, the main gas valve 7 is opened, the three throttle valves are opened, and the opening of the second throttle valves 5 on both sides is adjusted to be lower than the opening of the first throttle valve 4 in the middle, so that the bubbling effect shows that the bubbling in the middle is greater than the bubbling on both sides, and the medicinal liquid can fully participate in the overflow circulation process.

[0050] Compared with the prior art, the bubbling device of the solar cell wet chemical trough-type texturing equipment of the utility model can accommodate more nitrogen flow to enter and form larger bubbles through the large-aperture bubbling holes by increasing the diameter and aperture of the middle bubbling tube; throttle valves are added to the three gas branch pipes 3, and the nitrogen flow of the three gas branch pipes 3 can be adjusted separately, and the nitrogen flow of the middle bubbling tube is increased, so that the bubbles in the middle of the trough body can be large and the bubbles on both sides of the trough body can be small. When the bubbles in the trough are large in the middle and small on both sides, it can effectively avoid the situation where the old liquid accumulates in the middle of the trough body and cannot participate in the overflow circulation of the liquid to the maximum extent, thereby reducing the proportion of mottled defective wafers caused by the long-term accumulation of old liquid and the adsorption of certain components in the liquid on the surface of the silicon wafer from 1% to below 0.03%.

[0051] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.

Claims

1. A bubbling device for wet chemical tank-type texturing equipment for solar cell sheets, characterized in that: It comprises a gas main pipeline and a plurality of bubbling tubes, wherein the plurality of bubbling tubes are all in fluid communication with the gas main pipeline; the plurality of bubbling tubes are arranged in parallel and at intervals at the bottom of a texturing tank of a wet chemical tank-type texturing device for solar cell sheets; the orifice diameter of the bubbling holes on the first bubbling tube located in the middle of the bottom of the texturing tank is larger than the orifice diameters of the bubbling holes on the other bubbling tubes located on both sides of the first bubbling tube; Wherein, the number of the multiple bubbling tubes is greater than or equal to 3.

2. The bubbling device of a solar cell wet chemical tank texturing equipment according to claim 1 is characterized in that: The diameter of the first bubbling tube is greater than the diameters of other bubbling tubes located on both sides of the first bubbling tube.

3. The bubbling device of the wet chemical tank type texturing equipment for solar cell sheets according to claim 1 is characterized in that: It also includes a gas main valve, multiple throttle valves and multiple gas branch pipes. One of the bubbling tubes is fluidically connected to the gas main pipe through one of the gas branch pipes. The gas main valve is arranged on the gas main pipe, and the multiple throttle valves are arranged one by one on the multiple gas branch pipes.

4. The bubbling device of the wet chemical tank type texturing equipment for solar cell sheets according to claim 3 is characterized in that: The throttle opening diameter of the throttle valve arranged on the gas branch pipe connected to the first bubbling tube is larger than the throttle opening diameter of the throttle valve arranged on the gas branch pipes connected to other bubbling tubes on both sides of the first bubbling tube.

5. The bubbling device of the wet chemical tank type texturing equipment for solar cell according to claim 1 is characterized in that: Each of the bubbling tubes is a U-shaped structure formed by connecting two sub-bubbling tubes with the same structure in parallel.

6. The bubbling device of the wet chemical tank type texturing equipment for solar cell sheets according to claim 1 is characterized in that: If the number of battery cell frames that can be accommodated on one side of the texturing tank is an even number, the number of other bubbling tubes located on both sides of the first bubbling tube is equal to the number of battery cell frames that can be accommodated on one side of the texturing tank; If the number of battery cell frames that can be accommodated on one side of the texturing tank is an odd number, the number of other bubbling tubes located on both sides of the first bubbling tube is the number of battery cell frames that can be accommodated on one side of the texturing tank minus 1.

7. The bubbling device of a wet chemical tank texturing equipment for solar cell sheets according to any one of claims 1 to 6, characterized in that: The other bubbling tubes located on both sides of the first bubbling tube correspond to one battery cell frame one by one and are located directly below the middle of the battery cell frame; if the number of battery cell frames that can be accommodated on one side of the texturing tank is an odd number, the first bubbling tube is located directly below the middle of the battery cell frame in the middle.

8. The bubbling device of a wet chemical tank texturing equipment for solar cell sheets according to any one of claims 1 to 6, characterized in that: The orifice diameters of the bubbling holes on the other bubbling tubes located on both sides of the first bubbling tube decrease gradually along a direction away from the first bubbling tube.

9. The bubbling device of a wet chemical tank texturing equipment for solar cell sheets according to any one of claims 1 to 6, characterized in that: The density of the bubbling holes on the first bubbling tube is greater than the density of the bubbling holes on other bubbling tubes located on both sides of the first bubbling tube.

10. The bubbling device of a wet chemical tank texturing equipment for solar cell sheets according to any one of claims 1 to 6, characterized in that: The orifice diameter of the bubbling holes on the first bubbling tube is 1.5 to 3 times the orifice diameter of the bubbling holes on other bubbling tubes, or / and the tube diameter of the first bubbling tube is 1.5 to 3 times the tube diameter of other bubbling tubes.

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