Semi-automatic tool applied to levelness measurement of PECVD (Plasma Enhanced Chemical Vapor Deposition) upper cover gas box

Abstract

The utility model discloses a semi-automatic tool applied to the levelness measurement of a PECVD upper cover gas box, which comprises a main bearing seat, the center of the main bearing seat is provided with a through hole, a disc part, a cylinder part and a square block part are sequentially arranged from top to bottom by utilizing the through hole, the disc part is convexly arranged on the upper surface of the main bearing seat, the cylinder part penetrates through the through hole, and the square block part is arranged on the upper surface of the main bearing seat. The square block part is located on the lower portion of the lower surface of the main bearing part, four vertically-arranged supporting bodies are connected to the lower portion of the main bearing seat, a pair of cross beams are arranged between every two opposite supporting bodies in parallel, the cross beams are horizontally arranged, guide rails are embedded in the cross beams, a moving mechanism is arranged between the pair of cross beams, and the moving mechanism is located on the lower portion of the square block part. A transverse shaft is horizontally arranged on the moving mechanism, a sliding ring is arranged on the transverse shaft in a wrapping mode, and the sliding ring is connected with a laser range finder through a connecting body. The levelness measuring device has the advantages of being simple in structure, accurate in positioning and high in levelness measuring efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a semi-automatic tool used for measuring the levelness of a PECVD upper cover gas box. Background Art

[0002] In the photovoltaic industry's heterojunction technology, PECVD is the core equipment, which requires the use of electrodes and gas boxes, which are placed in the chamber body and the chamber cover. It is crucial to ensure the levelness of the gas box in the upper cover. Among the existing tooling for measuring the levelness of the upper cover gas box, the fully manual type is more commonly used. In the actual operation process, because the working space is a confined space, it is easy for the operator's head to accidentally hit the upper cover gas box during the operation. And the significant disadvantages are: the positioning accuracy is not high, the data reading is not user-friendly, and it does not meet the basic requirements of ergonomics. Summary of the invention

[0003] The utility model proposes a semi-automatic tooling for measuring the horizontality of a PECVD upper cover gas box, which solves the technical problems existing in the above-mentioned prior art.

[0004] According to one aspect of the utility model, a semi-automatic tooling for measuring the horizontality of a PECVD upper cover gas box is provided, comprising: a main support seat, a through hole is arranged in the center of the main support seat, a disc portion, a cylindrical portion and a block portion are arranged in sequence from top to bottom by using the through hole, the disc portion is convexly arranged on the upper surface of the main support seat, the cylindrical portion passes through the through hole, the block portion is located at the lower part of the lower surface of the main support portion, four vertically placed support bodies are connected to the lower part of the main support seat, a pair of beams are arranged in parallel between the support bodies opposite to each other, the beams are placed horizontally, a guide rail is embedded in the beams, a moving mechanism is arranged between the pair of beams, the moving mechanism slides forward and backward relative to the guide rail, a horizontal axis is horizontally arranged on the moving mechanism, a sliding ring is arranged on the horizontal axis, the sliding ring slides left and right along the horizontal axis, and the sliding ring is connected to a laser rangefinder through a connector.

[0005] Furthermore, a horizontal pad is provided at the lower part of the support body.

[0006] Furthermore, the support body is in the shape of a rectangular main body, and a correction block in the shape of a right triangle is connected between the four side surfaces of the support body and the upper surface of the horizontal pad.

[0007] It can be seen from the technical solution provided by the above-mentioned utility model that the utility model has a simple structure, and the laser rangefinder can move forward and backward and left and right. The distance is measured by emitting laser to the upper cover to check whether the measured values ​​are consistent, thereby improving the work efficiency of measuring the levelness of the upper cover air box, freeing the operators from the confined space, and achieving accurate positioning and high levelness measurement efficiency.

[0008] The above description is only an overview of the technology of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] By reading the detailed description of the preferred embodiment below, various other advantages and benefits will become clear to those of ordinary skill in the art. The accompanying drawings are only used for the purpose of illustrating the preferred embodiment and are not considered to be limitations of the present invention. In addition, the same reference symbols are used to represent the same components throughout the accompanying drawings.

[0010] Figure 1 The utility model is a schematic structural diagram of a semi-automatic tooling for measuring the horizontality of a PECVD upper cover gas box. DETAILED DESCRIPTION

[0011] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0012] The following is a detailed description of a semi-automatic tooling for measuring the levelness of the PECVD upper cover gas box provided by the utility model. The contents not described in detail in the embodiments of the utility model belong to the prior art known to professional and technical personnel in the field. If no specific conditions are specified in the embodiments of the utility model, the conventional conditions in the field or the conditions recommended by the manufacturer shall be followed.

[0013] See also Figure 1The utility model is a semi-automatic tooling for measuring the horizontality of a PECVD upper cover gas box, comprising: a main support seat 11, a through hole is arranged in the center of the main support seat 11, a disc portion 13, a cylindrical portion 14 and a block portion 15 are arranged in sequence from top to bottom by using the through hole, the disc portion 13 is convexly arranged on the upper surface of the main support seat 11, the cylindrical portion 14 passes through the through hole, the block portion 15 is located at the lower part of the lower surface of the main support seat 11, and four vertically placed support bodies 12 are connected to the lower part of the main support seat 11 A pair of beams 17 are arranged in parallel between the supporting bodies 12 facing each other. The beams 17 are placed horizontally. A guide rail is embedded in the beams 17. A moving mechanism 18 is arranged between the pair of beams 17. The moving mechanism 18 slides forward and backward relative to the guide rail. A horizontal axis 22 is horizontally arranged on the moving mechanism 18. A sliding ring 23 is covered on the horizontal axis 22. The sliding ring 23 slides left and right along the horizontal axis. The sliding ring 13 is connected to the laser rangefinder 16 through a connector 24.

[0014] As a specific embodiment, a horizontal pad is provided at the lower part of the support body to enhance the horizontal effect.

[0015] As a specific embodiment, the support body is in the shape of a rectangular main body, and right-angled triangle-shaped correction blocks are connected between the four side surfaces of the support body and the upper surface of the horizontal pad to enhance the leveling effect.

[0016] As a specific embodiment, the reading of the laser rangefinder is collected by an electrical device and fed back to the reading display area of ​​the operating remote controller.

[0017] As a specific embodiment, a motor is provided, and the moving mechanism is controlled by forward and reverse rotation of the motor to achieve forward / backward movement.

[0018] As a specific embodiment, the sliding ring is manually moved left and right by an operator.

[0019] As a specific embodiment, a remote controller is provided, and the interface of the remote controller is provided with: ① laser rangefinder reading display ② power display ③ motor speed display and button ④ start ⑤ stop ⑥ motor forward rotation ⑦ motor reverse rotation ⑧ low speed ⑨ medium speed ⑩ high speed, and the remote controller communicates with the tooling through the electrical control module and is controlled by the remote controller. Thus, the laser rangefinder can be accurately positioned at the position where the gas box needs to be measured.

[0020] The utility model has a simple structure, and the laser rangefinder can move forward and backward and left and right. The laser is emitted to the upper cover to measure the distance to check whether the measured values ​​are consistent, thereby improving the work efficiency of the upper cover air box level measurement, freeing the operating personnel from the confined space, and achieving accurate positioning and high level measurement efficiency.

[0021] It should be clear that the present invention is not limited to the specific configurations and processes described above and shown in the figures. For the sake of simplicity, a detailed description of the known methods is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

Claims

1. A semi-automatic tool for measuring the levelness of a PECVD upper cover gas box, characterized in that: include: A main bearing seat, a through hole is arranged in the center of the main bearing seat, and a disc portion, a cylindrical portion and a block portion are arranged in sequence from top to bottom by using the through hole, the disc portion is convexly arranged on the upper surface of the main bearing seat, the cylindrical portion passes through the through hole, and the block portion is located at the lower part of the lower surface of the main bearing seat, and four vertically placed support bodies are connected to the lower part of the main bearing seat, and a pair of beams are arranged in parallel between the support bodies opposite to each other, and the beams are placed horizontally, and guide rails are embedded in the beams, and a moving mechanism is arranged between the pair of beams, and the moving mechanism slides forward and backward relative to the guide rails, a horizontal axis is horizontally arranged on the moving mechanism, and a sliding ring is covered on the horizontal axis, and the sliding ring slides left and right along the horizontal axis, and the sliding ring is connected to the laser rangefinder through a connector.

2. The semi-automatic tooling for measuring the levelness of the PECVD upper cover gas box according to claim 1 is characterized in that: A horizontal pad is arranged at the lower part of the support body.

3. The semi-automatic tooling for measuring the levelness of the PECVD upper cover gas box according to claim 2 is characterized in that: The support body is in the shape of a rectangular main body, and a correction block in the shape of a right triangle is connected between the four side surfaces of the support body and the upper surface of the horizontal pad block.

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