Multifunctional wafer boat for wafer

Abstract

The utility model relates to the technical field of wafer processing, in particular to a multifunctional wafer boat for wafers, which comprises a wafer boat box body, an expansion disc is arranged at the front end of the wafer boat box body, an opening and closing door body is arranged at the rear end of the wafer boat box body, holding handles are arranged at two ends of the wafer boat box body, and a wafer separation frame is further arranged on the inner wall of the wafer boat box body. According to the utility model, the whole structure is simple, the multi-range application adaptation of the wafer boat box body is ensured by the abundant expansion structure, the holding handle is arranged to realize manual rapid carrying, and the wafer boat box body can be matched with external equipment to carry out mechanical carrying and operation through the expansion disc, so that the automatic adaptation is realized; dust-proof and shock-proof protection is integrally provided for the processing process of the semiconductor wafer, and the practical application function of the wafer boat is further expanded by expanding the air holes.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a multifunctional wafer boat for wafers. Background Art

[0002] In semiconductor manufacturing technology, the furnace tube process is indispensable. It is to place the wafer in the wafer boat, then heat the wafer placed in the wafer boat in the furnace tube, and then grow a high-quality film through chemical reaction. In this process of heating and even film growth, it is very important to control the problem of particulate pollution. In the existing process of the wafer boat rising to the high temperature zone, due to the rapid change in temperature, the wafer will shake inside the wafer, and it is precisely because of this violent shaking that the friction between the wafer and the wafer boat occurs, coupled with the existence of thermal effects, it is very easy to generate particulate matter, that is, pollutants, and the generated particles will fall on the wafer below, causing contamination to the wafer. Utility Model Content

[0003] The utility model aims to provide a multifunctional wafer boat for wafers to solve the above technical problems.

[0004] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions:

[0005] A multifunctional wafer boat for wafers comprises a wafer boat box body, the front end of the wafer boat box body is provided with an expansion plate, the rear end is provided with an opening and closing door body, both ends are provided with holding handles, and the inner wall of the wafer boat box body is also provided with a wafer partition;

[0006] Furthermore, the expansion tray is a rectangular expansion rack, and an expansion screw hole is provided in the middle;

[0007] Furthermore, an expansion air hole is provided on one side of the opening and closing door of the crystal boat box;

[0008] Furthermore, the arc-shaped ceiling on the top of the crystal boat box body is provided with a visible window;

[0009] Furthermore, a soft rubber pad is provided at the bottom of the inner warehouse of the wafer boat box.

[0010] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0011] The utility model has a simple overall structure, and the rich expansion structure ensures that the crystal boat box can be used in a wide range of applications. It is not only equipped with a gripping handle to realize quick manual transportation, but can also be matched with external equipment for mechanical transportation and operation through the expansion disk to achieve automated adaptation. The overall structure provides dust and shock resistance protection for the processing of semiconductor wafers, and the actual application function of the crystal boat is further expanded by expanding the air holes. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is an oblique side view schematic diagram of the utility model;

[0013] Figure 2 It is a schematic side view from another angle of the utility model;

[0014] Figure 3 It is a schematic diagram of the internal structure of the utility model. DETAILED DESCRIPTION

[0015] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0016] refer to Figure 1-2 As shown, a multifunctional wafer boat for wafers comprises a wafer boat box 1, a front end of the wafer boat box 1 is provided with an expansion tray 2, a rear end is provided with an opening and closing door 5, both ends are provided with holding handles 4, and the inner wall of the wafer boat box 1 is also provided with a wafer partition 3;

[0017] Furthermore, the expansion tray 2 is a rectangular expansion frame, and an expansion screw hole 21 is provided in the middle;

[0018] In this embodiment, the rectangular expansion frame can adapt to a variety of clamping tools, enabling external mechanical handling components or devices to carry and operate the wafer boat box 1, thereby improving work efficiency, and the expansion screw holes 21 can be further adapted to various expansion parts through the screw holes.

[0019] Furthermore, an expansion air hole 6 is also provided on one side of the opening and closing door 5 of the wafer boat box 1;

[0020] In this embodiment, the expanded air holes 6 can be connected to an external air source to perform operations such as vacuum, heat preservation or cooling on the internal wafers, thereby enhancing the overall functional expandability of the wafer boat.

[0021] Furthermore, the arc-shaped ceiling on the top of the wafer boat box 1 is provided with a visible window 11;

[0022] In this embodiment, the visible window 11 can ensure that the staff and operators can achieve real-time observation, ensure the safety of the internal wafers, avoid repeated opening of the door, and reduce pollution sources.

[0023] Furthermore, a soft rubber pad 7 is provided at the bottom of the inner compartment of the wafer boat box 1;

[0024] In this embodiment, the wafer boat box 1 is provided with a soft rubber pad 7 to ensure that the internal wafers are protected from large vibrations caused by impacts and collisions at the bottom during transportation and processing, thereby effectively protecting the internal wafers.

[0025] The utility model has a simple overall structure, and the rich expansion structure ensures that the crystal boat box can be used in a wide range of applications. It is not only equipped with a gripping handle to realize quick manual transportation, but can also be matched with external equipment for mechanical transportation and operation through the expansion disk to achieve automated adaptation. The overall structure provides dust and shock resistance protection for the processing of semiconductor wafers, and the actual application function of the crystal boat is further expanded by expanding the air holes.

[0026] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the scope defined by the spirit of the present invention.

Claims

1. A multifunctional wafer boat for wafers, characterized in that: The invention comprises a wafer boat box (1), wherein the front end of the wafer boat box (1) is provided with an expansion plate (2), the rear end is provided with an opening and closing door (5), both ends are provided with holding handles (4), and the inner wall of the wafer boat box (1) is also provided with a wafer partition (3).

2. The multifunctional wafer boat for wafers according to claim 1, characterized in that: The expansion plate (2) is a rectangular expansion frame, and an expansion screw hole (21) is provided in the middle.

3. The multifunctional wafer boat for wafers according to claim 1, characterized in that: An expansion air hole (6) is also provided on one side of the opening and closing door (5) of the wafer boat box (1).

4. The multifunctional wafer boat for wafers according to claim 1, characterized in that: The top of the crystal boat box (1) is an arc-shaped ceiling, and a visible window (11) is provided on the arc-shaped ceiling.

5. The multifunctional wafer boat for wafers according to claim 1, characterized in that: A soft rubber pad (7) is provided at the bottom of the inner compartment of the wafer boat box (1).

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